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WO2021172638A1 - Appareil d'alimentation en liquide de refroidissement pour traitement de semi-conducteur d'affichage - Google Patents

Appareil d'alimentation en liquide de refroidissement pour traitement de semi-conducteur d'affichage Download PDF

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Publication number
WO2021172638A1
WO2021172638A1 PCT/KR2020/002903 KR2020002903W WO2021172638A1 WO 2021172638 A1 WO2021172638 A1 WO 2021172638A1 KR 2020002903 W KR2020002903 W KR 2020002903W WO 2021172638 A1 WO2021172638 A1 WO 2021172638A1
Authority
WO
WIPO (PCT)
Prior art keywords
cooling
cooling water
water supply
coolant
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2020/002903
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English (en)
Korean (ko)
Inventor
홍준석
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lt-Tech Co Ltd
Original Assignee
Lt-Tech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lt-Tech Co Ltd filed Critical Lt-Tech Co Ltd
Publication of WO2021172638A1 publication Critical patent/WO2021172638A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/14—Methods or arrangements for maintaining a constant temperature in parts of machine tools
    • B23Q11/141—Methods or arrangements for maintaining a constant temperature in parts of machine tools using a closed fluid circuit for cooling or heating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/10—Arrangements for cooling or lubricating tools or work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/14—Methods or arrangements for maintaining a constant temperature in parts of machine tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/14—Methods or arrangements for maintaining a constant temperature in parts of machine tools
    • B23Q11/146—Methods or arrangements for maintaining a constant temperature in parts of machine tools by controlling the temperature of a cutting liquid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/0008—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits for one medium being in heat conductive contact with the conduits for the other medium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/10—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged one within the other, e.g. concentrically

Definitions

  • the present invention relates to a cooling water supply device for display semiconductor processing.
  • the present invention provides a method to obtain cooling efficiency of general processing cooling water containing chemical components even when cooling water for cooling heat generated when processing semiconductor element parts of a display device is used as general water or alcohol. It relates to the cooling water supply system.
  • a cooling water for cooling the heat generated between a processing object and a processing tool is supplied to a processing apparatus such as a lathe or milling machine, in particular, a CNC lathe or CNC milling machine (hereinafter, CNC) for automated processing of specific parts.
  • a processing apparatus such as a lathe or milling machine, in particular, a CNC lathe or CNC milling machine (hereinafter, CNC) for automated processing of specific parts.
  • Such cooling water contains various chemical components in order to obtain cooling efficiency that is difficult to obtain with general water or alcohol, and these chemical components are used in specific parts processing fields, especially display semiconductor processing fields. It changes the character and causes defective parts.
  • water sewage or tap water
  • alcohol only water or alcohol can be used as a cooling water for processing, but due to the flammability of alcohol, water is used as the main component.
  • cooling water mixed with can be used, but such cooling water or alcohol-based cooling water has a problem that the cooling efficiency is considerably lower than that of general cooling water containing chemical components.
  • prior invention 1 and prior invention 2 a configuration in which cooling water is supplied as cooling water after cooling using a large cooling device prior to supplying cooling water to the processing device has been proposed, but since this requires a considerably larger structure, It is difficult to apply to CNC, and in particular, excessive cost is consumed, so that it is applied only to some CNCs, thereby impairing the processing productivity of display semiconductor parts.
  • the present invention was invented to solve the above problems.
  • the present invention implements a configuration in which the cooling process can be performed simultaneously with the progress of alcohol or water by driving a small cooler in the process of advancing the cooling water made by mixing water or alcohol or water and alcohol, and the configuration is It is miniaturized so that it can be applied to the entire CNC at a low cost.
  • it is an object to provide a cooling water supply device that can be easily applied to the entire CNC to improve the productivity of processing specific parts such as display semiconductor processing.
  • the present invention has the following configuration.
  • the present invention relates to a cooling water supply device for supplying cooling water to a processing device for processing a specific part whose characteristics are changed by chemical components, and a cooling water supply line for supplying cooling water made of water, alcohol, or a mixture thereof.
  • a cooling driving unit coupled to the cooling water supply line to supply a cooling fluid to the cooling water so that the cooling water proceeds to a desired low temperature
  • a supply pipe coupled to the cooling driving part to maintain a state in which the cooling water is cooled by the cooling fluid and to be supplied to the processing point of the part.
  • the cooling driving unit comprises: a cooler for generating and spraying a cooling fluid; It is coupled to the cooler and has a concentric double passage formed therein, and when the cooling water supply line is coupled, a combined pipe portion that allows the cooling water to proceed to the inner passage and the cooling fluid to proceed to the outer passage at the same time.
  • one end of the cooling driving part is coupled to communicate with the outside of the merge pipe part, and the other end is coupled to the outside of the cooling water supply line and then connected to communicate with the merge pipe part again.
  • a cooling fluid bypass pipe for pre-cooling the coolant before entering the combined pipe part.
  • the cooling fluid bypass pipe includes a control valve configured to adjust the flow pressure of the cooling fluid injected from the cooler by adjusting the bypass pressure of the cooling fluid on one side.
  • the supply pipe is formed as a double pipe so that the cooling water passing through the cooling driving unit proceeds to the inner pipe, and the cooling fluid passing through the cooling driving unit is configured to proceed to the outer pipe.
  • the supply pipe is formed by having an outer shape of an inner pipe in a polygonal cross-sectional shape, and twisting in the longitudinal direction to increase the running pressure of the cooling fluid.
  • cooling efficiency of cooling water for general processing containing chemical components can be obtained by using cooling water made of water, alcohol, or mixtures thereof. There is an effect of preventing defects due to transformation.
  • the configuration for supplying cooling water made of water, alcohol, or a mixture thereof is miniaturized so that it can be easily applied to general processing equipment, particularly CNC, at a lower cost, thereby improving the productivity of processing and thus the entire production line. can contribute to the improvement of productivity.
  • FIG. 1 is a block diagram of a cooling water supply device according to the present invention.
  • FIG. 2 is an internal configuration diagram of a cooling driving unit of the cooling water supply device according to the present invention.
  • FIG 3 is an internal configuration diagram of a supply pipe of a cooling water supply device according to the present invention.
  • 4A and 4B are exemplary views of a supply pipe of a cooling water supply device according to the present invention.
  • FIG. 1 is a configuration diagram of a cooling water supply device according to the present invention
  • FIG. 2 is an internal configuration diagram of a cooling driving part of a cooling water supply device according to the present invention
  • FIG. 3 is an internal configuration diagram of a supply pipe of a cooling water supply device according to the present invention
  • 4A and 4B are exemplary views of a supply pipe of a cooling water supply device according to the present invention.
  • the cooling water supply apparatus includes a cooling water supply line 10 , a cooling drive unit 20 , and a supply pipe 30 .
  • the pump and the cooling water reservoir for supplying the supply pressure of the cooling water supplied through the cooling water supply line 10 and the supply pressure of the cooling fluid supplied through the cooling driving unit are typical and the examples are omitted. .
  • the cooling water supply line 10 is applied as a hose for supplying cooling water (hereinafter, cooling water) made of water, alcohol, or a mixture thereof.
  • cooling water cooling water
  • the cooling water supply line may apply two hoses to separately supply water and alcohol, or may be configured in the form of a double pipe.
  • the cooling water supplied in this embodiment is supplied by mixing water and alcohol in advance. Only a single hose is shown.
  • the cooling driving unit 20 is coupled to the cooling water supply line 10 to supply a cooling fluid to the cooling water so that the cooling water proceeds to a desired low temperature.
  • the cooling driving unit 20 has a basic configuration consisting of a cooler 21 and a combined pipe section 22, and is further equipped with a cooling fluid bypass pipe 23 as an added configuration.
  • the cooler 21 is a high-efficiency small-sized cooler, which is a ready-made product that generates a cooling fluid by the refrigerant therein and sprays the cooling fluid by the above-described pump.
  • the combined pipe portion 22 is coupled to an end of the cooler 21 through which the cooling fluid is sprayed, and a double passage 24 having a concentricity is formed therein.
  • the combined pipe portion 22 is configured to allow the cooling water to proceed through the inner passage 25 and the cooling fluid to proceed through the outer passage 26 .
  • the cooling fluid bypass pipe 23 is coupled to communicate with the outside of the merge pipe unit 22 , and the other end is coupled to the outside of the cooling water supply line 10 to communicate with the merge pipe unit 22 again.
  • the cooling fluid bypass pipe 23 is pre-cooled before the cooling water enters the merge pipe unit 22 by bypassing some of the cooling fluid flowing toward the supply pipe 30 to obtain better cooling efficiency. It is a configuration that allows
  • a control valve 27 is installed in the cooling fluid bypass pipe 23 , and the control valve 27 adjusts the bypass pressure of the cooling fluid to control the progress pressure of the cooling fluid injected from the cooler 21 . It is designed so that the supply pressure of the cooling water and the cooling fluid can be adjusted so as to match the overall pressure.
  • Unexplained reference numeral 28 in the drawing denotes a mounting table for convenience when installing the cooling driving unit 20 in the processing apparatus.
  • the supply pipe 30 is coupled to the cooling driving unit 20 so that the cooling water is maintained in a state of being cooled by the cooling fluid and supplied to the processing point of the part.
  • the supply pipe 30 is formed as a double pipe.
  • the cooling water passing through the cooling driving unit 20 proceeds to the inner pipe 31 , and the cooling fluid passing through the cooling driving unit 20 is configured to proceed to the outer pipe 32 . .
  • the inner tube 31 is formed in a triangular, square (or more polygonal) shape as shown in FIGS. 4A and 4B , so that the cooling fluid proceeds to the inner tube 31 and the outer tube 32 .
  • the running pressure of the cooling fluid increases and the cooling water cooling efficiency of the inner side is increased when it is sprayed from the supply pipe 30 to the working point. can be further improved.
  • Reference numeral 33 in the drawings denotes a nozzle in which the cooling water and the cooling fluid are sprayed through the discharge pipe.
  • cooling water supply line 20 cooling drive part
  • cooling fluid bypass pipe 24 double passage
  • control valve 30 supply pipe

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Auxiliary Devices For Machine Tools (AREA)

Abstract

La présente invention concerne un appareil d'alimentation en liquide de refroidissement capable d'obtenir une efficacité de refroidissement d'un liquide de refroidissement de traitement normal, qui contient des ingrédients chimiques, même lorsque de l'eau ou de l'alcool normal est utilisé comme liquide de refroidissement pour abaisser la chaleur générée lors du traitement de composants de dispositif à semi-conducteur et similaires d'un dispositif d'affichage. À cet effet, dans la présente invention, un appareil d'alimentation en liquide de refroidissement apte à fournir un liquide de refroidissement dans un appareil de traitement pour traiter un composant spécifique dont les caractéristiques sont modifiées par une composition chimique, comprend : une conduite d'alimentation en liquide de refroidissement pour fournir le liquide de refroidissement comprenant de l'eau, de l'alcool ou un mélange de ceux-ci ; une unité d'entraînement de refroidissement couplée à la conduite d'alimentation en liquide de refroidissement de façon à fournir un fluide de liquide refroidissement vers le liquide de refroidissement de telle sorte que le liquide de refroidissement est refroidi à une température basse cible ; et un tuyau d'alimentation couplé à l'unité d'entraînement de refroidissement de façon à fournir le liquide de refroidissement à un point de traitement du composant tout en maintenant un état dans lequel le liquide de refroidissement est refroidi par le fluide de liquide de refroidissement.
PCT/KR2020/002903 2020-02-28 2020-02-28 Appareil d'alimentation en liquide de refroidissement pour traitement de semi-conducteur d'affichage Ceased WO2021172638A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2020-0024761 2020-02-28
KR1020200024761A KR20210109761A (ko) 2020-02-28 2020-02-28 디스플레이 반도체 가공용 냉각수 공급장치

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WO2021172638A1 true WO2021172638A1 (fr) 2021-09-02

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0586445U (ja) * 1991-07-31 1993-11-22 正勝 若月 冷却油供給装置
JP2001212736A (ja) * 2000-02-01 2001-08-07 Mori Seiki Co Ltd 作動流体冷却装置
JP2009136986A (ja) * 2007-12-10 2009-06-25 Mori Seiki Co Ltd 切削液供給装置
KR20180121802A (ko) * 2017-05-01 2018-11-09 세방전지(주) 에너지 절감형 절삭유 순환시스템 및 그 방법
JP2019150901A (ja) * 2018-03-01 2019-09-12 株式会社ディスコ 定温水供給装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0586445U (ja) * 1991-07-31 1993-11-22 正勝 若月 冷却油供給装置
JP2001212736A (ja) * 2000-02-01 2001-08-07 Mori Seiki Co Ltd 作動流体冷却装置
JP2009136986A (ja) * 2007-12-10 2009-06-25 Mori Seiki Co Ltd 切削液供給装置
KR20180121802A (ko) * 2017-05-01 2018-11-09 세방전지(주) 에너지 절감형 절삭유 순환시스템 및 그 방법
JP2019150901A (ja) * 2018-03-01 2019-09-12 株式会社ディスコ 定温水供給装置

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KR20210109761A (ko) 2021-09-07

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