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WO2019117037A1 - Capteur linéaire, capteur de type courroie et capteur plan - Google Patents

Capteur linéaire, capteur de type courroie et capteur plan Download PDF

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Publication number
WO2019117037A1
WO2019117037A1 PCT/JP2018/045125 JP2018045125W WO2019117037A1 WO 2019117037 A1 WO2019117037 A1 WO 2019117037A1 JP 2018045125 W JP2018045125 W JP 2018045125W WO 2019117037 A1 WO2019117037 A1 WO 2019117037A1
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WO
WIPO (PCT)
Prior art keywords
sensor
conductor
wire
linear
wires
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2018/045125
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English (en)
Japanese (ja)
Inventor
大村　昌良
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Robosensor Technology Research Inc
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Robosensor Technology Research Inc
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Priority to JP2019559603A priority Critical patent/JP6924516B2/ja
Publication of WO2019117037A1 publication Critical patent/WO2019117037A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/60—Piezoelectric or electrostrictive devices having a coaxial cable structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

Definitions

  • the present invention relates to a linear sensor in which a piezoelectric material is disposed between an inner conductor and an outer conductor, and a strip sensor and a planar sensor using the linear sensor.
  • a piezoelectric fabric device in which a band-like piezoelectric fiber in which a piezoelectric film of a piezoelectric material is sandwiched between electrode films is used as a fabric (see Patent Document 1).
  • This piezoelectric textile device can be used as a tactile sensor or a vibration sensor.
  • a tactile sensor it may be used in the form which a person touches, and a soft touch may be calculated
  • the sensor may be wound around an object, or the sensor may be used in a bent state, and flexibility may be required.
  • the linear piezoelectric sensor which can make width and thickness comparable can be considered.
  • a linear sensor in which one core wire is used as an inner conductor, a strip-shaped piezoelectric film is spirally wound around the outer peripheral surface of the core wire, and a shield wire (outer conductor) is disposed on the outer peripheral surface of the piezoelectric film Conceivable. And in order to obtain softness and flexibility, it is sufficient to make the linear sensor thin.
  • the strip-shaped piezoelectric film when the strip-shaped piezoelectric film is spirally wound, when the linear sensor is bent, a gap may be generated between the piezoelectric films adjacent in the extending direction of the inner conductor.
  • the place where the gap is generated is the place where the sensing can not be performed, and it can not be said that it is a high quality linear sensor.
  • one core wire which is an inner conductor, is thinned to obtain softness and flexibility, the tensile strength is too low and the wire is broken. This is also a high quality linear sensor and I can not say.
  • An object of the present invention is to provide a high quality linear sensor and a strip sensor and a planar sensor using the linear sensor in view of the above-mentioned circumstances.
  • the first linear sensor that solves the above purpose is Internal conductor, A band-shaped piezoelectric film spirally wound around the outer peripheral surface of the inner conductor; And an outer conductor disposed on the outer peripheral surface of the piezoelectric film, The piezoelectric film may be wound around the outer peripheral surface of the inner conductor in a state where one end side and the other end side in the width direction adjacent to the extending direction of the inner conductor are overlapped.
  • the piezoelectric film is wound in a state in which one end side and the other end side in the width direction adjacent in the extension direction of the internal conductor overlap each other, Even when the linear sensor is bent, a gap does not easily occur between the piezo films adjacent in the extending direction of the inner conductor.
  • the piezoelectric film is wound around the outer peripheral surface of the inner conductor in a state in which the half or less of one end side and the half or less of the other end side of the width direction adjacent to the extending direction of the inner conductor are overlapped. And may be wound around the outer peripheral surface of the inner conductor in a state in which one half or more on one end side and the half or more on the other end of the width direction adjacent to each other in the extension direction of the inner conductor are overlapped. It may be.
  • the inner conductor may be one in which a single central conductor line is disposed at the center, and a plurality of outer conductor lines thinner than the central conductor line surround the central conductor line.
  • the center conductor line may be surrounded by a plurality of outer conductor lines having the same thickness as the center conductor line, or may be surrounded by a plurality of outer conductor lines thicker than the center conductor line. It is good.
  • the central conductor line may have higher mechanical strength than the outer conductor line, and may be, for example, stainless steel.
  • the outer conductor wire may have a lower electrical resistance than the central conductor wire, and / or be softer, and may be made of, for example, copper.
  • the inner conductor may be one in which one conductor wire is disposed at the center, and the periphery of the conductor wire is surrounded by a plurality of stranded wires thinner than the conductor wire.
  • the conductor wire does not have a stranded wire structure.
  • the stranded wire may have the same thickness as the conductor wire, may be thinner than the conductor wire, or may be thicker than the conductor wire.
  • the conductor wire is higher in mechanical strength than the conductor wire,
  • the conductive wire may have a lower electrical resistance than the conductive wire.
  • the central conductor wire for example, a stainless steel conductor wire
  • conductivity is ensured by the surrounding stranded wire (for example, a stranded wire obtained by twisting copper wires).
  • the surrounding stranded wire for example, a stranded wire obtained by twisting copper wires.
  • the inner conductor may be a stranded wire obtained by twisting a plurality of stainless steel wires.
  • stainless steel wire has higher mechanical strength than copper wire, but it is less flexible, but it is opposite to the direction of twisting by using multiple stainless steel wires as stranded wire. It allows for loosening of the direction, which can provide flexibility and balance mechanical strength and flexibility.
  • only one strand of the stainless steel wire may be disposed, or a plurality of strands may be disposed.
  • the inner conductor may be a stainless steel stranded wire obtained by twisting stainless steel wires and a copper stranded wire obtained by twisting copper wires.
  • the inner conductor may surround the stainless steel stranded wire with the copper stranded wire.
  • the inner conductor may itself be twisted as a whole.
  • the inner conductor has a plurality of primary stranded wires, and the inner conductor itself becomes a secondary stranded wire.
  • the flexibility is further improved by dividing and twisting in two steps such as a primary stranded wire and a secondary stranded wire.
  • the twisting direction of the secondary stranded wire is the same as the twisting direction of the primary stranded wire. However, in order to further increase the flexibility of the inner conductor, the twisting direction of the secondary stranded wire and the twisting direction of the primary stranded wire may be reversed.
  • a second linear sensor that solves the above purpose is An internal conductor in which a plurality of stranded wires in which a plurality of conductive wires are twisted are arranged; A piezo material carried on the outer peripheral surface of the inner conductor; And an external conductor disposed on the outer peripheral surface of the piezoelectric material, It is characterized in that the inner conductor is itself twisted as a whole.
  • the piezoelectric material may be applied to the outer peripheral surface of the inner conductor or may be welded.
  • the strip-shaped piezoelectric film may be wound around the outer peripheral surface of the inner conductor in a state in which one end side and the other end side in the width direction adjacent to the extending direction of the inner conductor are overlapped.
  • the inner conductor has a plurality of primary stranded wires, and the inner conductor itself becomes a secondary stranded wire.
  • the flexibility is further improved by dividing and twisting in two steps such as a primary stranded wire and a secondary stranded wire.
  • the twisting direction of the secondary stranded wire is the same as the twisting direction of the primary stranded wire. However, in order to further increase the flexibility of the inner conductor, the twisting direction of the secondary stranded wire and the twisting direction of the primary stranded wire may be reversed.
  • the strip sensor which solves the above-mentioned purpose is The first or second linear sensor; A longitudinal wire made of metal extending in the same direction as the extending direction of the linear sensor; It is characterized by extending in the width direction of the linear sensor, and having the linear sensor and a horizontal linear body for binding the vertical linear body.
  • a planar sensor that solves the above purpose is A sheet and A plurality of first linear sensors comprising the first or second linear sensors; A plurality of second linear sensors consisting of the first or second linear sensors; The plurality of first linear sensors are seam-stitched on the planar body at an interval in the width direction of the first linear sensors, The plurality of second linear sensors are characterized by being seam-stitched on the planar body at intervals in the extending direction of the first linear sensors.
  • the planar body may be a woven fabric or a non-woven fabric. More specifically, it may be mesh cloth, cotton cloth, satin cloth, or felt.
  • a front side sheet body covering from the front side the planar body in which the first linear sensor is seam-stitched and the second linear sensor is seam-stitched, and the planar body is backside It may be an aspect provided with the back side sheet body covered from the above.
  • These front side sheet members and back side sheet members may be made of the same material as that of the planar body, or may be made of different materials.
  • FIG. It is a figure for demonstrating the effect of the electric wire sensor demonstrated here. It is a figure which shows the example of the electric wire sensor which formed the piezo coat layer and then formed the 2nd conductor layer, after twisting seven conductor wires. It is a figure which shows the example of the electric wire sensor which formed 2nd conductor layer B13 ', after twisting 7 conductor wire B111 in which piezo coat layer B12 is formed, respectively. It is sectional drawing of two types of electric wire sensors. It is a figure which shows a mode that a piezo film is wound around the outer peripheral surface of the internal conductor C11. It is a disassembled perspective view of the planar sensor using the electric wire sensor C1 shown in FIG.
  • FIG. 1 is a cross-sectional view of a wire sensor corresponding to one embodiment of a linear sensor.
  • An electric wire sensor A1 shown in FIG. 1 includes an inner conductor A11, a piezoelectric body A12, an outer conductor A13, and a sheath A14.
  • the inner conductor A11 is obtained by further twisting these strands A111 in a state in which a strand A111 obtained by twisting seven stainless steel wires Asy having a diameter of 30 ⁇ m is disposed at each vertex of the regular hexagon and at the center of the regular hexagon. It is a thing. That is, seven stranded wires A111 are arranged as a primary stranded wire in a close-packed structure, and these seven primary stranded wires are further twisted to form a secondary stranded wire. By twisting a plurality of linear bodies into a sweet-twisted or medium-twisted degree, loosening in the direction opposite to the direction of twisting is permitted, and this loosening can provide flexibility.
  • flexibility is further improved by dividing into two steps such as a primary stranded wire and a secondary stranded wire and twisting.
  • a plurality of secondary stranded wires may be prepared, and may be further twisted and divided into a plurality of three or more stages such as a third stranded wire and so on and twisted.
  • the twisting direction of the secondary stranded wire is the same as the twisting direction of the primary stranded wire.
  • the twisting direction of the secondary stranded wire and the twisting direction of the primary stranded wire may be reversed.
  • the diameter of the entire internal conductor A11 shown in FIG. 1 is 0.27 mm, and the cutting load of the internal conductor A11 is 0.058 kN.
  • the number of stainless steel wires Asy constituting the primary stranded wire is not limited to seven.
  • the diameter of one stainless steel wire Asy may be 10 ⁇ m or more and 40 ⁇ m or less, and preferably 20 ⁇ m or more and 30 ⁇ m or less. The thinner the stainless steel wire, the higher the flexibility but the lower the strength, and the thicker the wire, the lower the flexibility but the higher the strength.
  • the cutting load of the inner conductor A11 is 0.025 kN
  • the cutting load of the inner conductor A11 is 0. It will be 107kN.
  • the diameter of the entire internal conductor may be 0.15 mm or more and 0.8 mm or less, and preferably 0.18 mm or more and 0.5 mm or less.
  • the diameter of the primary stranded wire may be made different.
  • the diameter of the stranded wire A111 located at the center of the inner conductor A11 may be thicker than that of the stranded wire A111 located therearound, or may be made smaller.
  • the diameter of the stainless steel wire Asy forming the stranded wire A111 may be different for each of the stranded wire A111.
  • relatively thick stainless steel wire Asy may be used to obtain thick stranded wire A111
  • relatively thin stainless steel wire Asy may be used to obtain thin stranded wire A111.
  • the number of stainless steel wires Asy that constitute the stranded wire A111 may be different for each of the stranded wire A111.
  • a relatively large number of stainless steel wires Asy may be used to obtain thick stranded wire A111, or a relatively small number of stainless steel wires Asy may be used to obtain thin stranded wire A111.
  • the stranded wire A111 may be a wire made of other conductive material and a wire made of stainless steel wire Asy in addition to the wire made of only the stainless steel wire Asy.
  • the conductive material referred to here is a material different from stainless steel or a material different in mechanical strength from stainless steel. For example, copper, titanium, magnesium or the like may be used alone, or a combination of these materials may be used.
  • the internal conductor A11 may be configured of only the stranded wire A111, or may be configured of the stranded wire A111 and another metal wire.
  • a metal wire having lower electrical resistance than stainless steel may be used, or a metal wire softer than stainless steel may be used.
  • a copper metal wire having a lower electrical resistance than stainless steel and softer may be used. More specifically, one copper wire is used as another metal wire, and the whole is obtained in a state in which the stranded wire A111 is arranged at each vertex of the regular hexagon and one copper wire is arranged at the center of the regular hexagon.
  • the twisted wire A111 may be disposed at every other vertex of the regular hexagon, and the copper wire may be disposed at the remaining vertices, and the copper wire or the stranded wire may be disposed at the center of the regular hexagon. The whole may be twisted in the state where A111 is arranged.
  • one copper wire one obtained by twisting a plurality of thin copper wires may be used, or one obtained by twisting a thin copper wire and a stainless steel wire Asy may be used.
  • titanium or magnesium may be used, or a combination of dissimilar metals such as copper and titanium, copper and magnesium, titanium and magnesium, copper and titanium and magnesium may be used. The same is true when copper is exemplified.
  • a linear body located at the center of the internal conductor A11 and a linear body (6 strands A111 in FIG. 1) located around the linear body
  • a linear body may be arranged.
  • the linear body disposed in the gap AS1 may be a single copper wire, a stranded wire of a stainless steel wire Asy, or a stranded wire obtained by twisting a plurality of thin copper wires. It may be.
  • the linear bodies may be arranged in the gap AS2 outside the linear bodies (six stranded wires A111 in FIG. 1) located in the periphery.
  • the linear body disposed in the outer gap AS2 may also be a single copper wire, a stranded wire of a stainless steel wire Asy, or a stranded wire obtained by twisting a plurality of thin copper wires. It may be As described above, linear bodies may be further added to the gaps between the linear bodies constituting the internal conductor A11.
  • the internal conductor A11 is not limited to the close-packed structure described above, and may have a configuration in which a single stranded copper wire is surrounded by a stranded wire A111 thinner than the central copper wire, or 20 ⁇ m
  • the configuration may be such that a single stainless steel wire having a diameter of 30 ⁇ m or less is surrounded by a copper wire thinner than the central stainless steel wire.
  • the thickness of the linear body constituting the internal conductor A11 is made different.
  • the single copper wire described here may be a plurality of thin copper wires twisted together.
  • the piezoelectric body A12 is formed of a strip-shaped piezoelectric film having a width of 3 mm. This piezo film is made of polyvinylidene fluoride (PVDF). Polyvinylidene fluoride is a lightweight polymer material that generates a piezoelectric effect when a high voltage is applied and is polarized. When an external force is applied to this, a voltage is generated, and a distortion is generated when a voltage is applied. .
  • the piezoelectric body A12 is subjected to polarization processing, and when a force is applied to the piezoelectric body A12 from the outside, a voltage is induced between the inner conductor A11 and the outer conductor A13.
  • the piezoelectric film is spirally wound around the outer peripheral surface of the internal conductor A11 without any gap. That is, when the piezoelectric film is spirally wound around the outer peripheral surface of the inner conductor A11, winding is performed in a state where one end and the other end of the width direction of the piezoelectric film adjacent in the extension direction of the inner conductor A11 overlap each other. . By so doing, the area of the piezo film can be made as large as possible, leading to an improvement in sensor sensitivity.
  • the width of the strip-shaped piezoelectric film is not limited to 3 mm, and may be 2 mm or more and 5 mm or less, preferably 3 mm or more and 4 mm or less.
  • the width of the piezoelectric film is too narrow, when spirally wound around the outer peripheral surface of the inner conductor A11, a gap is easily generated between the piezoelectric films adjacent in the extending direction of the inner conductor A11. The place where the gap is generated is the place where the sensing can not be made.
  • the width of the piezo film is too wide, slack tends to be generated when spirally wound around the outer peripheral surface of the internal conductor A11.
  • the thickness of the piezoelectric film constituting the piezoelectric body A12 shown in FIG. 1 is 28 ⁇ m, but may be 20 ⁇ m or more and 100 ⁇ m or less, and preferably 25 ⁇ m or more and 80 ⁇ m or less. If the thickness of the piezo film is too thin, the sensitivity as a sensor will be insufficient. If the thickness is too thick, on the other hand, the electric wire sensor A1 will be too hard and the flexibility will be lost.
  • the piezoelectric film employed for the piezoelectric body A12 corresponds to a plurality of directions (elongation direction and bending direction) depending on the orientation of the crystal than the piezoelectric characteristic corresponding to only the longitudinal direction (elongation direction). Is preferable.
  • the outer conductor A13 is formed by spirally winding one copper wire in one row around the outer peripheral surface of the piezoelectric body A12. That is, it is the structure of a side winding shield.
  • a copper wire a tin-plated soft copper wire with a diameter of 50 ⁇ m is used.
  • the outer conductor A13 is not limited to a copper wire, but may be a stranded wire of stainless steel wire, and may be, for example, the same as a primary stranded wire (stranded wire A111) constituting the inner conductor A11.
  • the thickness of the outer conductor A13 may be 10 ⁇ m or more and 120 ⁇ m or less, and preferably 25 ⁇ m or more and 90 ⁇ m or less.
  • the outer conductor A13 may be a braided shield in which a conducting wire is crossed and braided around the outer peripheral surface of the piezoelectric body A12, or a tape shield in which a tape-shaped conductor is spirally wound. Good. However, the side shield is the most flexible. Furthermore, the outer conductor A13 may be one in which a plurality of conducting wires are spirally wound, or may be one in which a plurality of tape-like conductors are spirally wound.
  • the internal conductor A11 is higher in mechanical strength than the external conductor A13.
  • the sheath A14 is for covering the outer conductor A13, and is for enhancing the abrasion resistance, the chemical resistance, and the rust prevention.
  • the sheath A 14 may be a polyester tape, and its thickness may be 20 ⁇ m or more and 40 ⁇ m or less. In addition, if it is not necessary to improve the abrasion resistance, the chemical resistance, and the rustproofness, the sheath A 14 may not be provided.
  • the sheath A14 shown in FIG. 1 has a single-layer structure with a thickness of 30 ⁇ m, but may have a multi-layer structure.
  • it may have a two-layer structure consisting of an inner layer and an outer layer, and the inner layer is formed of a softer material (for example, a polyamide synthetic resin or polyvinyl chloride resin) than the outer layer, and the outer layer is compared with the inner layer.
  • a material having high abrasion resistance for example, polytetrafluoroethylene
  • the outer layer may be thicker than the inner layer.
  • the inner layer may be formed of a flammable material, but the outer layer is preferably formed of a flame retardant material, a non-combustible material, and a flame resistant material.
  • the wire sensor A1 shown in FIG. 1 has an overall diameter (thickness) of 0.378 mm and is sufficiently thin, the cutting load of the inner conductor A11 is 0.058 kN.
  • a band-shaped piezo film can be wound in a stretched state, and a gap can be prevented from being generated between the outer peripheral surface of the internal conductor A11 and the piezo film, and accurate measurement or detection using the electric wire sensor A1 Becomes possible.
  • the piezo film When a piezo film is spirally wound around the outer peripheral surface of the inner conductor A11, the piezo film conforms to the outer peripheral shape of the inner conductor A11, and the piezoelectric body A12 strictly enters inside as shown by a two-dot chain line shown in FIG. It becomes a shape.
  • the piezo film since the piezo film can be strongly wound around the outer peripheral surface of the internal conductor A11, the piezo film has a shape in which it enters the outer gap AS2 as shown by a two-dot chain line shown in FIG. Prone.
  • FIG. 2 is a view schematically showing a strip-like sensor using the electric wire sensor shown in FIG.
  • the strip sensor A2 shown in FIG. 2 extends diagonally in the lateral direction, and the left side of the figure is the tip of the strip sensor A2 and extends toward the right side of the figure. Only the tip of the strip sensor A2 is shown.
  • the extending direction of the strip sensor A2 may be referred to as the vertical direction
  • the width direction of the strip sensor A2 may be referred to as the lateral direction.
  • belt-shaped sensor A2 five electric wire sensors A1 shown in FIG. 1 are arranged in the width direction at intervals. That is, the wire sensor A1 extends in the longitudinal direction.
  • a plurality of longitudinal wires A21 extending in the longitudinal direction are disposed between the wire sensors A1 adjacent to each other at intervals in the lateral direction.
  • the longitudinal wire A21 shown in FIG. 2 is the same as the internal conductor A11 shown in FIG. 1 and corresponds to an example of a longitudinal linear body.
  • the longitudinal wire A21 may have a mechanical strength higher than that of the electric wire sensor A1 shown in FIG.
  • a primary stranded wire made of a stainless steel wire thicker than the stainless steel wire Asy shown in FIG. 1 may be twisted to form a secondary stranded wire.
  • the wire A21 is disposed.
  • non-metallic linear bodies for example, chemical fibers or natural fibers
  • the longitudinal wire A21 may be formed by twisting a stainless steel wire and a non-metallic linear body (for example, chemical fiber or natural fiber).
  • a plurality of transversely-twisted yarns A22 extending in the lateral direction are arranged at intervals in the longitudinal direction.
  • the horizontal twisting yarn A22 is formed by twisting stainless steel wire yarn and polytetrafluoroethylene, and corresponds to an example of a horizontal linear body.
  • the twisted yarn of this stainless steel wire is the same as the primary stranded wire (twisted wire A111) constituting the internal conductor A11 shown in FIG. 1, and is for providing mechanical strength of the strip sensor A2.
  • polytetrafluoroethylene is for producing flexibility of the belt-like sensor A2, and is not limited to polytetrafluoroethylene, and may be other chemical fibers or natural fibers such as cotton yarn Good.
  • FIG. 2 the front surface of the belt-shaped sensor A2 is shown.
  • the front surface of the belt-shaped sensor A2 is simply referred to as the front surface
  • the back surface of the belt-shaped sensor A2 is simply referred to as the back surface. It is called.
  • the horizontal twisting yarn A22 is for binding the electric wire sensor A1 and the vertical wire A21, and the front surface side and the back surface side are alternately passed. That is, in FIG.
  • the longitudinal wire A21 which is a longitudinal wire
  • the horizontal twisted yarn A22 which is a horizontal wire
  • various directions are applied to the strip sensor A2. Because of this, tension may be applied, and the longitudinal wire A21 and the weft yarn A22 are not always in an orthogonal relationship.
  • the strip sensor A2 shown in FIG. 2 is excellent in mechanical strength in the vertical direction by using the wire sensor A1 shown in FIG. 1, and the wire sensor A1 is thin and flexible and is bent halfway in the longitudinal direction Even when the degree of curvature changes, it is possible to follow smoothly. Moreover, since the mechanical strength in the longitudinal direction is further enhanced by the plurality of longitudinal wires A21, and the flexibility in the transverse direction is ensured by the horizontal twisting yarn A22, it is used by being folded back in the longitudinal direction It is suitable for a vibration sensor etc. Moreover, since a plurality (five in FIG. 2) of the wire sensors A1 are arranged in the lateral direction, the signal strength is increased, and the reliability of the sensor is enhanced.
  • the electric wire sensor A1 shown in FIG. 1 attention is focused on the fact that mechanical strength in the longitudinal direction is enhanced by the plurality of longitudinal wires A21 and flexibility in the transverse direction is ensured by the horizontal twisted yarn A22.
  • the wire sensor may be thick, it can be coped with by replacing the inner conductor of the wire sensor with a metal wire such as one thick copper wire.
  • FIG. 3 is a view schematically showing a planar sensor using the wire sensor shown in FIG.
  • the planar sensor A3 shown in FIG. 3 has a double structure including a first sensor body A31 and a second sensor body A32.
  • the first sensor body A31 has a plurality of wire sensors A1 arranged at intervals in the radial direction (Y-axis direction) of the wire sensor A1 shown in FIG.
  • the wire sensor A1 constituting the first sensor body A31 is hereinafter referred to as a first wire sensor A1a.
  • a plurality of first fibers A311 extending in the same direction as the extending direction (X axis direction) of the first electric wire sensor A1a is provided between the adjacent first electric wire sensors A1a. It is arranged.
  • first fibers A311 Although only two first fibers A311 are shown between the adjacent first electric wire sensors A1a in FIG. 3 in practice, three or more first fibers are filled so as to fill the distance. A311 is arranged.
  • the first fiber A311 is softer than the first electric wire sensor A1a, and corresponds to an example of a first linear body.
  • the second sensor body A32 is provided below the first sensor body A31, and spaced apart in the extending direction of the first electric wire sensor A1a disposed on the first sensor body A31, separately.
  • a plurality of wire sensors A1 are arranged.
  • the wire sensor A1 constituting the second sensor body A32 is hereinafter referred to as a second wire sensor A1 b.
  • FIG. 4 is an enlarged view showing the double structure of the planar sensor A3 shown in FIG. 3 in an easily understandable manner.
  • the left and right direction of the paper surface is the extending direction of the first electric wire sensor A1a.
  • the second electric wire sensor A1b is orthogonal to the first electric wire sensor A1a, and in FIG. 4, one first electric wire sensor A1a extending in the left-right direction (X-axis direction) is shown. Three two-wire sensors A1b are shown at intervals in the extending direction (X-axis direction) of the first wire sensor A1a.
  • the planar sensor A3 is manufactured, the first wire sensor A1a and the second wire sensor A1b are in an orthogonal relationship, but when the planar sensor A3 is used, tension is applied to the planar sensor A3 from various directions. In some cases, the first wire sensor A1a and the second wire sensor A1b are not necessarily in an orthogonal relationship.
  • a plurality of second fibers A321 extending in the same direction as the extending direction (Y axis direction) of the second electric wire sensors A1b are arranged between the adjacent second electric wire sensors A1b.
  • the second fiber A 321 is softer than the second electric wire sensor A1 b, and corresponds to an example of a second linear body.
  • 5 or more 2nd fiber A321 may be arrange
  • the first fiber A311 or the second fiber A321 may be a twisted yarn of synthetic fibers such as polyamide and rayon having a diameter of 0.3 mm or more and 1.2 mm or less, or a twisted yarn of natural fibers such as cotton. It may be. Both the first fiber A311 and the second fiber A321 are softer than the electric wire sensor A1, and when a force is applied, the electric wire sensor A1 is unlikely to be crushed, but the first fiber A311 and the second fiber A321 are easily crushed. For this reason, if the first fiber A311 is crushed and only the first electric wire sensor A1a protrudes, or if the second fiber A321 is crushed and only the second electric wire sensor A1b is protruded, the touch feeling is felt.
  • the first fiber A311 has a diameter larger than that of the first wire sensor A1a (for example, a diameter of 0.5 mm), and is crushed to less than the thickness of the first wire sensor A1a even if the first fiber A311 is crushed.
  • the first electric wire sensor A1a has a structure that is difficult to protrude so as not to be damaged.
  • the second fiber A321 has a diameter larger than that of the second electric wire sensor A1b (for example, a diameter of 0.5 mm), and is crushed to less than the thickness of the second electric wire sensor A1b even if the second fiber A321 is crushed. In order to prevent the second electric wire sensor A1b from protruding, the second electric wire sensor A1b is difficult to protrude. For this reason, the planar sensor A3 of the present embodiment has a good touch.
  • the first sensor body A31 and the second sensor body A32 are inseparably overlapped, and in the present embodiment, a dedicated first bonding fiber A331 is provided separately from the first fiber A311.
  • a dedicated second bonding fiber A332 is provided separately from the two-fiber A321. Whether the first binding fiber A331 or the second binding fiber A332, the front surface (surface on the first sensor body A31 side) of the planar sensor A3 and the back surface (second sensor body) of the planar sensor A3
  • the second electric wire sensor A1b and the second fiber A321 are bound by the first bonding fiber A331 by alternately passing through the surface A32) and the first electric wire sensor A1a and the first fiber by the second bonding fiber A332.
  • A311 is spelled.
  • the first bonding fiber A331 may be thinner than the first electric wire sensor A1a, and the diameter of the first bonding fiber A331 may be 1 ⁇ 5 or more and 1 ⁇ 3 or less of the diameter of the first electric wire sensor A1a.
  • the second bonding fiber A332 may be thinner than the second electric wire sensor A1b, and the diameter of the second bonding fiber A332 may be 1 ⁇ 5 or more and 1 ⁇ 3 or less of the diameter of the second electric wire sensor A1b.
  • Synthetic fibers such as polyamide, polytetrafluoroethylene, polyester and rayon and natural fibers such as cotton are used for both the first bonding fiber A331 and the second bonding fiber A332, and they are softer than the wire sensor A1. is there.
  • the wire sensor (first wire sensor A1a) itself extending in the X-axis direction and the wire sensor (second wire sensor A1b) itself extending in the Y-axis direction are directly woven into the first wire sensor A1a and the second wire sensor A1b. And the portion where the first wire sensor A1a overlaps with the second wire sensor A1b alternately exist, and the portion where the second wire sensor A1b overlaps with the first wire sensor A1a protrudes to one side, and the second wire sensor A1b By projecting to the other side where the first electric wire sensor A1a overlaps the electric wire sensor A1b, a sense of asperity appears and the touch (feel) is deteriorated.
  • planar sensor A3 of this embodiment is the composition where 1st sensor object A31 and 2nd sensor object A32 were piled up in the direction of the Z-axis, Z of 1st electric wire sensor A1a and 2nd electric wire sensor A1b The positional relationship in the axial direction does not change.
  • it is much thinner and more flexible than the electric wire sensor A1 in both the first bonding fiber A331 which connects the first sensor body A31 and the second sensor body A32 or the second bonding fiber A332, the uneven feeling is felt Is hard to come out and feels good in this sense as well.
  • the second electric wire sensor A1b and the second fiber A321 can be bound by part or all of the plurality of first fibers A311 without providing the first bonding fibers A331 and the second bonding fibers A332, and there are a plurality of them.
  • the first electric wire sensor A1a and the first fiber A311 can also be spelled by part or all of the second fiber A321.
  • one or more other sensor bodies in which the wire sensor A1 shown in FIG. 1 is disposed may be further provided.
  • the control unit is provided with a detection circuit, an A / D conversion circuit, a CPU, a ROM storing a program executed by the CPU, a RAM temporarily storing data used for processing of the CPU, and the like.
  • the detection circuit includes an impedance conversion circuit, an amplification circuit, and a low pass filter. This detection circuit amplifies the level of the output signal sent from the planar sensor A3 after matching it to a predetermined level, and attenuates and cuts off components of frequencies higher than the cut-off frequency which is the limit of system response. The component of the frequency lower than the frequency is sent to the A / D conversion circuit.
  • the A / D conversion circuit converts the signal sent from the detection circuit into a digital signal and sends it to the CPU.
  • the CPU performs various arithmetic processing. For example, when pressure is applied to the planar sensor A3, the positions of the first electric wire sensor A1a and the second electric wire sensor A1b that generate a voltage from the piezoelectric generated in the first electric wire sensor A1a and the second electric wire sensor A1b By calculating the magnitude of the voltage and the voltage, it can be determined which pressure is applied to which portion of the planar sensor A3.
  • the intersection of the first electric wire sensor A1a and the second electric wire sensor A1b is handled as a detection point.
  • the value (X) of the output signal from the first electric wire sensor A1a and the value (Y) of the output signal from the second electric wire sensor A1b are not simply multiplied (X ⁇ Y), but an exponential function ( Treat as e x + y ). This makes it possible to distinguish between noise and contact with a slight pressing force.
  • the shape of the one in contact with the planar sensor A3 and the position of the pressure peak are determined can do.
  • the electric wire sensor A1 generates a signal when pressure is applied and deformation occurs, but no signal is generated when the same state of applied pressure continues.
  • the planar sensor A3 it is preferable to measure from the electric wire sensor A1 located on the outside where no pressure is applied and no signal is generated, and the critical point with respect to the pressure applied portion is determined. That is, the contour of a portion subjected to pressure is determined by scanning from the electric wire sensor A1 on the outside where no signal is generated, and next time scanning is performed, it is determined that pressure is applied to that portion.
  • the electric wire sensor A1 located in the vicinity is scanned to obtain a contour under pressure. By doing this, it is possible to cope with changes in the pressure applied range. Further, by time-differentiating the value of the outermost detection point, it is possible to obtain the shape of the portion to which pressure is applied.
  • an area where no output signal is output is specified, and the inside of the area is defined as a contact area where one comes into contact.
  • wire sensor A1 shown in FIG. 1 has higher flexibility than conventional sensors, wire sensor A1 is spirally wound around a soluble base line, and if the base line is dissolved and eliminated, the final In practice, it is possible to obtain the electric wire sensor A1 which is spirally wound.
  • the spirally wound electric wire sensor A1 is stretchable at its winding portion, and functions as a sensor for sensing by expansion and contraction. Further, the degree of expansion and contraction can be adjusted by changing the thickness of the base line to be dissolved. Also, the sensor sensitivity can be adjusted by changing the number of turns per unit length with respect to the baseline to be dissolved. That is, the sensor sensitivity increases as the number of turns increases.
  • the wire sensor A1 spirally wound can be used as the strip sensor A2, or can be used as the planar sensor A3.
  • spiral shape is easy to be maintained by weft twisting yarn A22.
  • the sheet sensor A3 is used as the first electric wire sensor A1a
  • the spirally wound electric wire sensor A1 is easily maintained by the second fiber A321 and the second bonding fiber A332.
  • the electric wire sensor A1 which has been spirally wound and used as the second electric wire sensor A1b is likely to maintain a spiral shape by the first fiber A311 and the first bonding fiber A331.
  • two types of electric wire sensor A1 which varied the thickness of the base line to be dissolved can also be used.
  • the first sensor body A31 may use a plurality of types of electric wire sensors A1 having different numbers of turns with respect to the base line to be dissolved, or may use a plurality of types of electric wire sensors A1 having different thicknesses of the base lines
  • the second sensor body A32 plural kinds of electric wire sensors A1 in which the number of turns with respect to the base line is different may be used, or plural kinds of electric wire sensors A1 in which the thickness of the base line is different may be used.
  • the electric wire sensor A1 may be folded down like a knit or may be knitted .
  • FIG. 5 is a view for explaining another application example and the like of the electric wire sensor A1 shown in FIG.
  • the wire sensor A1 of the present embodiment has higher flexibility than a conventional sensor, as shown in FIG. 5A, a plurality of loop portions Ar are continuously formed by the wire sensor A1, and the loop is formed. By intertwining the partial Ar, it becomes a knitted sensor. In this knitted sensor, stretchability can be realized by using these loop portions Ar, and the stretch sensor can function as a sensor for sensing. Furthermore, since each wire sensor A1 is tortuous so as to form a knot, it becomes easy to deform and thereby the detection sensitivity is improved. In addition, the stretchability of the loop portion Ar makes it possible to follow the surface of a hemispherical or spherical object to be detected, and the range of the object to be treated is expanded.
  • the sensor sensitivity is proportional to the area of the piezo film, and the larger the area, the better the sensor sensitivity.
  • the purpose of the wire sensor A1 of this embodiment is to make it as thin as possible. However, when it is desired to enhance the sensor impression, a thin wire sensor A1 is mixed with a wire sensor having a thick inner conductor to The belt-like sensor and the planar sensor may be manufactured while balancing the flexibility.
  • the strip-shaped piezoelectric film AF, AF may be wound in the same direction while being shifted by 180 degrees. Since tension is applied to the piezoelectric film AF so as not to cause slack when winding the belt-shaped piezoelectric film AF, it is possible that the balance may be pulled by pulling in one direction. By winding the piezoelectric films AF and AF in the same direction while shifting them by 180 degrees, tension is applied in the direction opposite to one direction, and the balance can be taken just.
  • the internal conductor A11 is a secondary stranded wire obtained by further twisting a plurality of primary stranded wires
  • the twisting direction of the secondary stranded wire and the direction in which the piezoelectric film AF is wound are the same direction.
  • the twisting direction of the secondary stranded wire and the direction in which the piezo film AF is wound may be reversed.
  • the wire sensor A1 can be divided into a sensor unit and a transmission line of an output signal.
  • the portion heated to a temperature exceeding the Curie temperature is significantly reduced in piezoelectric characteristics, and therefore, in the wire sensor A1, a portion heated to a temperature above the Curie temperature functions as a transmission line.
  • the electric wire sensor A1 is heated at a heating temperature of 70 ° C. to 150 ° C. for 10 seconds to 10 minutes, preferably at a heating temperature of 80 ° C. to 120 ° C. for 10 seconds to 60 seconds. It is good.
  • planar sensor A3 shown in FIG. 3 does not expand and contract in the X axis direction and does not expand and contract in the Y axis direction, but can expand and contract in the diagonal direction, as shown in FIG. As shown, when used in a state of being rotated by 90 degrees, it becomes a planar sensor A3 that can expand and contract in the direction of the white arrow. Furthermore, if the planar sensor shown in FIG. 5C overlaps the planar sensor shown in FIG. 5C, the planar sensor shown in FIG. 5C overlaps the planar sensor in which the first electrical wire sensor A1a extends in the X axis direction and the second electrical wire sensor A1b extends in the Y axis direction. It is possible to realize a sensor that can extend and contract both in the X axis direction, in the Y axis direction, and in the diagonal direction.
  • the strip sensor A2 shown in FIG. 2 can be wound around a welded pipe and used for defect inspection of a welded portion.
  • the strip sensor A2 can detect vibration due to the fluid leaking out of the weld or can also detect air vibration due to gas leakage.
  • planar sensor A3 shown in FIG. 3 is disposed on the surface of a floating body such as a balloon or a balloon, and the floating body is floated up to a high place (for example, the ceiling of a tunnel) to which the hand or tool can not reach
  • a high place for example, the ceiling of a tunnel
  • a belt-like sensor A2 shown in FIG. 2 or a sheet-like sensor A3 shown in FIG. 3 is disposed on a seat belt or steering wheel of a car etc.
  • the driver's heartbeat or respiration is detected as vibration.
  • People's health can be monitored.
  • the flat sensor A3 shown in FIG. 3 is placed on the underwear or hat, or if the underwear or hat itself is sewn by the flat sensor A3 shown in FIG.
  • the health condition can be monitored by detecting the heartbeat and respiration of the person who is wearing it as vibration.
  • planar sensor A3 shown in FIG. 3 can detect a person's heart beat and respiration as vibrations
  • the planar sensor A3 can be arranged on the seat or back of a seat such as a car. For example, it is possible to identify whether the person located in the seat is a person or an object.
  • the sheet-like sensor A3 shown in FIG. 3 functions as a non-invasive heart rate and / or respiration sensor. It also functions as a watching sensor for existence confirmation and operation confirmation of elderly people and sick people.
  • the planar sensor A3 since the planar sensor A3 has high flexibility, the person sleeping does not feel painful. To explain these points in more detail, since the planar sensor A3 is flexible and is a woven fabric, it has features of good breathability, being able to cut and sew, and producing a large area at low cost. Is also possible.
  • the surface condition sensor A3 By placing the surface condition sensor A3 under the bed sheet, not only the patient and the care recipient's leaving alarm but also automatic monitoring and turning of breathing (apnea), automatic monitoring of excretion, etc., turning turn auxiliary bed etc. Application to control is possible. Furthermore, the planar sensor A3 can also be used to monitor the balance of walking as a foot sole stress sensor, and if the planar sensor A3 is placed on the seat surface of a wheelchair, application to monitoring of seat pressure balance etc. becomes possible. .
  • the belt-like sensor shown in FIG. 2 or the sheet-like sensor A3 shown in FIG. 3 is wound around the pet's collar or the sheet-like sensor A3 is placed on the pet's clothes, it will be used as a pet activity monitor and sleep monitor. be able to. Furthermore, by linking the Internet service and the smartphone, it is possible to watch the state of the pet in the answering machine from the outside.
  • planar sensor A3 shown in FIG. 3 may be disposed on a glove.
  • a planar sensor in which the wire sensor A1 shown in FIG. 1 is disposed at a high density (for example, 1 mm intervals) is disposed at the fingertips, and a medium density (for example, 4 mm to 6 mm) is provided from the second joint to the third joint of the finger.
  • a planar sensor in which the wire sensor A1 is disposed may be disposed at the following intervals), and a planar sensor in which the electrical wire sensor A1 is disposed at a low density (for example, 5 mm or more and 8 mm or less) may be disposed on the palm.
  • the finger touch sensor can be realized by disposing a high-density planar sensor at the fingertip.
  • the planar sensor is sewed on the glove fiber or bonded with an adhesive.
  • the glove itself may be sewn with a planar sensor.
  • a control board such as a microcomputer may be disposed on the back of the hand of the glove.
  • the glove in which the planar sensor A3 is disposed may be worn on a robot hand imitating a human hand (robot hand).
  • robot hand if the robot hand is a rigid body, it is preferable that the glove fibers be impregnated with or coated with a soft substance, and the glove fibers be soft so as to allow deformation of the planar sensor.
  • a glove on which the planar sensor A3 is disposed may be worn by a person and used for data acquisition such as gripping force in various operations.
  • the data obtained in this way can be used to program the robot's hand movement when the robot performs the data acquisition operation.
  • a glove on which the planar sensor A3 is disposed as a glove for rehabilitation of fingers, for example, by performing a gripping operation, it is possible to measure the stiffness of muscles and joints of fingers, or for rehabilitation It is also possible to collect data to determine the effect and degree of achievement.
  • it can also be used as a reading device for the person who has difficulty in making a call. That is, it is also possible to read the coordinates of a character written on the palm and convert it into text data, or convert this text data into speech and use it as a conversation support function device.
  • This grip-like device has a sheet-like sensor A3 shown in FIG. 3 disposed on the surface of an inflatable body that is inflated by air pressure, and when the inflatable body is inflated, the degree of finger The bending angle of the joint can be measured by the planar sensor A3, which is useful for analyzing the firmness of the finger muscles and joints. Also, by recording past data, it is possible to confirm the recovery state. Furthermore, by monitoring the output signal from the planar sensor A3, excessive movement of the finger can be suppressed. In addition, by adjusting the air pressure to the inflatable body, depending on the opening and strength of the fingers without hurting the fingers and wrists naturally perform opening and closing of the fingers safely, achieving rehabilitation that can promote contracture relief can do.
  • FIG. 6 is a view showing an example in which the planar sensor shown in FIG. 3 is applied to the finger of the robot hand.
  • the finger A4 of the robot hand shown in FIG. 6A includes four components of a bone portion A41, an elastic portion A42, a planar sensor A3 shown in FIG. 3, and an outer skin portion A43.
  • the bone portion A41 is a rigid body and is the hardest of these four components.
  • the outer skin part A43 is a material (for example, polyurethane) excellent in abrasion resistance that prevents the wear of the planar sensor A3, but is a material softer than the softness of the contact object assumed. When the contact object is touched, the skin portion A43 elastically deforms, thereby pressing the planar sensor A3 located inside. In addition, when the skin portion A43 is soft, it does not hurt when it touches a person.
  • the elastic portion A42 has a softness that allows the sheet-like sensor A3 to be deformed by pressing the sheet-like sensor A3.
  • the elastic deformation of the elastic portion A42 stops in a certain range.
  • the contact object touches the outer skin portion A43 the outer skin portion A43 elastically deforms, so that the sheet-like sensor A3 located inside thereof is pushed and the elastic portion A42 is also supported from the inner side by the bone portion A41.
  • the sheet-like sensor A3 can be deformed, and it can be detected at what position and at what contact pressure the contact object contacts.
  • 6A holds the sheet-like sensor A3 with an elastically deformable material (skin part A43, elastic part A42) while being supported by the rigid bone part A41 from the inside. It is a structure. Note that by making the skin part A43 relatively thin and making the elastic part A42 relatively thick, contact with the skin part A43 is readily transmitted to the planar sensor A3, and the planar sensor A3 Is more easily deformed to the inside (bone A41 side), and the detection sensitivity is improved.
  • the outer skin portion A43 may be formed by applying a silicone rubber to the planar sensor A3.
  • the bone portion A41 is not rigid but elastically deformable, and the entire finger A4 is elastically deformable. Even in such a case, when the contact object touches the silicone rubber skin portion A43, the planar sensor A3 also bends, and it is possible to detect at which position the contact object contacts with what contact pressure.
  • a finger A4 'of the robot hand shown in FIG. 6B includes a bone A41, an elastic part A42, a first planar sensor A3a, a second planar sensor A3b, an outer skin A43, and a claw A44. That is, the point having the claw portion A44 is different from the finger A4 of the robot hand shown in FIG.
  • differences from the finger A4 of the robot hand shown in FIG. 6A will be mainly described, and the overlapping description will be omitted.
  • the claw portion A44 is rotatable with the root A441 as a rotation fulcrum, and in FIG. 6B, the solid line indicates the initial posture of the claw portion A44, and the two-dot chain line indicates the rotational posture of the claw portion A44 Is shown.
  • both the first planar sensor A3a and the second planar sensor A3b are the planar sensor A3 shown in FIG. 3, the first planar sensor A3a is disposed on the ventral side of the finger. It has the same function as the planar sensor A3 shown in a).
  • the second planar sensor A3b is disposed inside the root A441 that is the pivot point of the claw A44, and when the claw A44 pivots, it is pushed by the root A441 and outputs an output signal. Therefore, with the finger A4 'of the robot hand shown in FIG. 6 (b), the movement of the claw portion A44 can also be detected.
  • the first characteristic linear sensor described so far is An internal conductor in which a plurality of stranded wires formed by twisting a plurality of stainless steel wires are arranged; A band-shaped piezoelectric film spirally wound around the outer peripheral surface of the inner conductor; And an outer conductor disposed on the outer peripheral surface of the piezoelectric film.
  • the slack causes a gap between the outer peripheral surface of the core wire and the piezoelectric film.
  • the gap is crushed, vibration occurs at that time, and the noise is superimposed on the output signal.
  • it is necessary to wind the piezoelectric film in a state where the copper wire is pulled with a certain degree of tension.
  • copper wire tends to have low tensile strength and it is difficult to maintain sufficient tension.
  • the diameter of the copper wire is made small to obtain a thin linear sensor, the tensile strength is lowered and this tendency becomes strong, and eventually, a thin linear sensor can not be obtained.
  • the inner conductor in the first characteristic linear sensor described above, a stainless steel wire is used as the inner conductor, and since a plurality of stranded wires are disposed, sufficient tensile strength is obtained even if the diameter of the entire inner conductor is reduced. You can get As a result, it is possible to wind a strip-shaped piezoelectric film in a state in which the inner conductor is stretched, and it is possible to make the linear sensor as thin as possible.
  • the diameter of one stainless steel wire may be 10 ⁇ m or more and 40 ⁇ m or less, and preferably 20 ⁇ m or more and 30 ⁇ m or less. The thinner the stainless steel wire, the higher the flexibility but the lower the strength, and the thicker the wire, the lower the flexibility but the higher the strength.
  • the inner conductor may have a cross-sectional shape in which the stranded wire is disposed at each vertex of a regular hexagon and at the center of the regular hexagon. That is, it may be a close packed structure.
  • the inner conductor itself may have a stranded wire structure. That is, the whole may be twisted in a state in which the stranded wire is disposed at each vertex of the regular hexagon and at the center of the regular hexagon.
  • the inner conductor may be constituted only by the stranded wire, or may be constituted by the stranded wire and another metal wire.
  • the whole may be twisted in a state in which the stranded wire is disposed at each vertex of a regular hexagon and a copper wire is disposed at the center of the regular hexagon, or the stranded wire may be a vertex of a regular hexagon
  • copper wires may be disposed at every other apex, and copper wires or twisted wires may be disposed at the center of the regular hexagon, and the whole may be twisted.
  • the diameter of the internal conductor may be 0.15 mm or more and 0.8 mm or less, and preferably 0.18 mm or more and 0.5 mm or less.
  • the piezoelectric film has a width of 2 mm or more and 5 mm or less, preferably 3 mm or more and 4 mm or less.
  • the piezoelectric film is wound in a state where one end and the other end of the width direction of the piezoelectric film adjacent in the extension direction of the inner conductor overlap each other Will not occur. If the width of the piezo film is too narrow, a gap is likely to be generated between the piezo films adjacent in the extending direction of the inner conductor when spirally wound around the outer peripheral surface of the inner conductor. The place where the gap is generated is the place where the sensing can not be made.
  • the width of the piezo film is too wide, slack is easily generated when it is spirally wound around the outer peripheral surface of the inner conductor.
  • the area of the piezoelectric film can be made as large as possible by superposing one end and the other end in the width direction of the piezoelectric film, which leads to the improvement of the sensor sensitivity.
  • the thickness of the piezoelectric film is preferably 20 ⁇ m to 100 ⁇ m, and more preferably 25 ⁇ m to 80 ⁇ m. If the thickness of the piezoelectric film is too thin, the sensitivity as a sensor will be insufficient. If the thickness is too thick, on the other hand, the linear sensor will be too hard and the flexibility will be lost.
  • the piezoelectric film preferably has a piezoelectric property corresponding to a plurality of directions (elongation direction and bending direction) due to crystal orientation, compared with a case where the piezoelectric characteristic corresponds only to the longitudinal direction (elongation direction).
  • the outer conductor may be a copper wire (for example, a tin-plated copper wire), but may be a stainless steel wire.
  • the stranded wire may be used.
  • the thickness of the outer conductor is preferably 10 ⁇ m to 120 ⁇ m, and more preferably 25 ⁇ m to 90 ⁇ m. That is, it is smaller or thinner than the diameter of the inner conductor.
  • the outer conductor may be a braided shield in which a conducting wire is crossed and braided around the outer peripheral surface of the piezoelectric film, or a laterally wound shield in which the conducting wire is spirally wound in one row.
  • the outer conductor may be a tape shield in which a tape-like (strip-like) conductor is spirally wound around the outer peripheral surface of the piezoelectric film.
  • the side shield is the most flexible.
  • the outer conductor may be one in which a plurality of conducting wires are spirally wound, or one in which a plurality of tape-like (band-like) conductors are spirally wound. Good.
  • the inner conductor may have higher mechanical strength than the outer conductor.
  • a sheath covering the outer conductor may be provided. This sheath is for enhancing the abrasion resistance, the chemical resistance and the rust prevention.
  • the sheath may have a multilayer structure.
  • the diameter of the linear sensor including the sheath is less than 0.6 mm, and preferably less than 0.5 mm (e.g., 0.4 mm or more and less than 0.5 mm).
  • the thickness of the sheath is about 20 ⁇ m to 40 ⁇ m.
  • the first characteristic strip sensor described so far is The first characteristic linear sensor; A longitudinal wire made of metal extending in the same direction as the extending direction of the linear sensor; It is characterized by extending in the width direction of the linear sensor, and having the linear sensor and a horizontal linear body for binding the vertical linear body.
  • the metal longitudinal wire is for providing mechanical strength, and may include, for example, a stainless steel wire. More specifically, it may be a stranded wire of a stainless steel wire, or may be a wire in which a stainless steel wire and a non-metallic linear body are twisted. Furthermore, the metallic longitudinal wire may have a mechanical strength higher than that of the first characteristic strip sensor. In addition, a plurality of linear sensors may be disposed at intervals rather than one, and the vertical linear bodies may be disposed at the intervals. In this case, only the vertical linear body may be disposed at the interval, or the vertical linear body and the nonmetallic linear body may be disposed.
  • the horizontal linear body may be a strand of stainless steel wire and a non-metallic linear body.
  • the non-metallic linear body described here may be a resin-made linear body, or may be a natural fiber such as cotton yarn. That is, the non-metallic linear body may be a chemical fiber or a natural fiber.
  • the first characteristic planar sensor described so far is A first sensor body in which the first characteristic linear sensor is a first linear sensor, and a plurality of the first linear sensors are arranged at intervals in the radial direction of the first linear sensor; A first linear body disposed between the adjacent first linear sensors and extending in the same direction as the extension direction of the first linear sensors, wherein the first linear body is softer than the first linear sensors; A second sensor body in which the first characteristic linear sensor is a second linear sensor, and a plurality of the second linear sensors are arranged at intervals in the extending direction of the first linear sensor; And a second linear body disposed between the adjacent second linear sensors and extending in the same direction as the extension direction of the second linear sensors, wherein the second linear body is softer than the second linear sensors.
  • the first sensor body and the second sensor body are inseparably overlapped.
  • Coupling means for coupling the first sensor body and the second sensor body may be provided, and the coupling means may be part or all of the first linear body, or the second linear body. It may be part or all of the body.
  • the second linear sensor and the second linear body are attached by the first linear object, and the first linear sensor and the first linear object are attached by the second linear object. It may be done.
  • it comprises a first coupling linear body for binding the second linear sensor and the second linear body, and a second coupling linear body for binding the first linear sensor and the first linear body. It may be
  • the first coupling linear body is thinner than the first characteristic linear sensor, and the diameter of the first coupling linear body is 1 ⁇ 5 of the diameter of the first characteristic linear sensor. It may be 1/3 or less.
  • the second coupling linear body is also thinner than the first characteristic linear sensor, and the diameter of the second coupling linear body is 1/1 of the diameter of the first characteristic linear sensor. It may be 5 or more and 1/3 or less.
  • the first linear body may be larger in diameter than the first linear sensor, and the second linear body may be larger in diameter than the second linear sensor.
  • one or more sensor bodies may be provided in which the first characteristic linear sensor is disposed.
  • FIG. 7 is a perspective view of the wire sensor in the dispersion mode
  • FIG. 8 (a) is a view schematically showing a cross-sectional view of the wire sensor shown in FIG.
  • a wire sensor B1 shown in FIG. 7 has a first conductor B11 in which seven conductor wires B111 are twisted.
  • the seven conductor lines B111 are constituted by four conductor lines B111S of stainless steel wires having a diameter of 20 ⁇ m and three conductor lines B111C of copper having a diameter of 20 ⁇ m.
  • the copper conductor line B111C has lower electric resistance and is softer than the stainless steel conductor line B111S.
  • the conductor wire B111S of the stainless steel wire has a higher electrical resistance but a higher mechanical strength (for example, a tensile strength or the like) than the conductor wire B111C of copper.
  • the first conductor B ⁇ b> 11 is obtained by twisting the conductor lines B ⁇ b> 111 in the state of being disposed at each vertex of a regular hexagon and at the center of the regular hexagon. That is, the first conductor B11 is obtained by arranging seven conductor wires B111 in the close-packed structure and twisting them. By twisting the plurality of conductor wires B111 in a sweet-twisted or medium-twist manner, loosening in the direction opposite to the twisting direction is permitted, and the slack can provide flexibility.
  • the former six conductors The line B111 is referred to as an outer conductor line B1111, and the latter one conductor line B111 is referred to as a central conductor line B1112.
  • a conductor wire B111S of stainless steel wire is used for the central conductor wire B1112.
  • a conductor wire B111S of a stainless steel wire and a conductor wire B111C of copper are used for the outer conductor wire B1111.
  • conductor lines B111S of stainless steel wires and conductor lines B111C of copper are alternately arranged in the circumferential direction.
  • the conductor wire hatched downward to the left is the conductor wire B111S of a stainless steel wire
  • the conductor wire hatched downward to the right is the copper conductor wire B111C.
  • the diameter of the conductor wire B111 is not limited to 20 ⁇ m, and may be 10 ⁇ m or more and 40 ⁇ m or less, and preferably 20 ⁇ m or more and 30 ⁇ m or less.
  • the wire sensor B1 appears to be composed of only the first conductor B11.
  • all the conductor lines B111 of the seven conductor lines B111 are A piezo coat layer B12 which is a piezoelectric body is formed on the entire peripheral surface.
  • a second conductor layer B13 which is a second conductor is provided on the piezo coat layer B12 in each conductor line B111. That is, the second conductor is disposed outside the piezo coat layer B12, and the piezo coat layer B12 is provided between the conductor wire B111 and the second conductor layer B13. Therefore, the piezo coat layer B12 and the second conductor layer B13 are interposed between the adjacent conductor lines B111, and the conductor lines B111 are distributed.
  • the piezo coat layer B12 shown in FIG. 8A is a layer formed by applying a piezo material such as polyvinylidene fluoride (PVDF).
  • PVDF polyvinylidene fluoride
  • Polyvinylidene fluoride is a lightweight polymer material that generates a piezoelectric effect when a high voltage is applied and is polarized. When an external force is applied to this, a voltage is generated, and a distortion is generated when a voltage is applied. .
  • the piezoelectric coating layer B12 is subjected to polarization processing, and when a force is applied to the piezoelectric coating layer B12 from the outside, a voltage is induced between the conductor wire B111 and the second conductor layer B13.
  • Piezo materials include, in addition to polyvinylidene fluoride, trifluoroethylene (TrEF), mixed crystal materials of PVDF and TrEF, and polymer materials having a dipole moment such as polylactic acid, polyuric acid and polyamino acid. .
  • a method of applying a piezo material it may be immersion (dubbing) coating, spray coating by spray etc., it may be impregnation coating, and brush coating may be carried out. The coating may be performed by a coating device using a coater or the like.
  • the thickness of the piezo coat layer B12 is preferably equal to or greater than the diameter of the conductor wire B111.
  • the thickness of the piezo coat layer B12 shown in FIG. 8A is 20 ⁇ m, but may be 10 ⁇ m to 50 ⁇ m.
  • the thicker the thickness of the piezo coat layer B12 the better the sensor sensitivity.
  • the limit value of the thickness of the piezo coat layer B12 is determined by the viscosity of the piezo material to be applied and the coating method.
  • the wire sensor B1 becomes too hard and lacks flexibility.
  • the second conductor layer B13 shown in FIG. 8A is a layer formed by applying a polymer conductive material containing carbon such as carbon nanotubes.
  • a conductive material which forms 2nd conductor layer B13 the polymeric conductive material containing silver microparticles
  • this conductive material it may be immersion (dubbing) coating, spray coating by spray etc., may be impregnation coating, or may be brush coating.
  • the coating may be performed by a coating device using a coater or the like.
  • the thickness of the second conductor layer B13 is preferably equal to or less than the diameter of the conductor wire B111, and preferably equal to or less than the thickness of the piezo coat layer B12. Although the thickness of 2nd conductor layer B13 shown to Fig.8 (a) is 10 micrometers, it should just be 5 micrometers or more and 50 micrometers or less.
  • a piezo coat layer B12 is formed on the entire circumferential surface of each conductor wire B111, then a second conductor layer B13 is formed, and finally, seven conductor wires B111 are formed.
  • the electric wire sensor B1 shown in FIG. 7 is completed.
  • the conductor wire B111 constituting the first conductor B11 a plurality of types of conductor wires having different mechanical strengths and electrical resistances are used as the conductor wire B111 constituting the first conductor B11, but in the case of further enhancing softness or flexibility, or In the case of further lowering, the central conductor line B1112 may be replaced with a copper conductor line B111C. Alternatively, all seven conductor lines B111 may be made of copper conductor lines B111C. On the other hand, in order to further increase the mechanical strength, all the seven conductor lines B111 may be made of stainless steel conductor lines B111S.
  • a conductor wire made of high tensile steel or ultrahigh tensile steel such as tungsten, tungsten and its alloy may be used, or titanium or titanium instead of copper conductor wire B111C.
  • the conductor wire B111 thus far has a single wire structure, the conductor wire B111 itself may be a stranded wire structure.
  • FIG. 8B is a view showing an example in which the conductor wire B111S of one stainless steel wire has a stranded wire structure of seven stainless steel wires Bsy.
  • the conductor wire shown on the right side of FIG. 8B is a stranded wire obtained by twisting seven stainless steel wires Bsy each having a diameter of 30 ⁇ m, and the conductor wire becomes thick.
  • a piezo-coated layer B12 is formed on the entire circumferential surface of the primary stranded wire with each of the seven conductor wires as the primary stranded wire. Then, after the second conductor layer B13 is formed, these primary stranded wires are arranged in the closest packing structure.
  • the first conductor is a secondary stranded wire obtained by further twisting seven primary stranded wires on which the piezo coat layer B12 and the second conductor layer B13 are respectively formed.
  • the twisting direction of the secondary stranded wire is the same as the twisting direction of the primary stranded wire. However, in order to further increase the flexibility of the first conductor B11, the twisting direction of the secondary stranded wire and the twisting direction of the primary stranded wire may be reversed.
  • the cutting load of the first conductor B11 using seven conductor lines B111s shown on the right side of FIG. 8B is 0.058 kN.
  • the number of stainless steel wires Bsy constituting the primary stranded wire is not limited to seven.
  • the diameter of one stainless steel wire Bsy may be 10 ⁇ m or more and 40 ⁇ m or less, and preferably 20 ⁇ m or more and 30 ⁇ m or less. The thinner the stainless steel wire, the higher the flexibility but the lower the strength, and the thicker the wire, the lower the flexibility but the higher the strength.
  • the cutting load of the first conductor B11 is 0.025 kN
  • the cutting load of the first conductor B11 is It becomes 0.107 kN.
  • the diameter of the stainless steel wire Bsy which comprises a primary strand wire may also be varied for every conductor wire B111.
  • a relatively thick stainless steel wire Bsy may be used to obtain a thick primary stranded wire, or a relatively thin stainless steel wire Bsy may be used to obtain a thin primary stranded wire.
  • the number of stainless steel wires Bsy that constitute the primary stranded wire may be different for each conductor wire B111.
  • a relatively large number of stainless steel wires Bsy may be used to obtain a thick primary stranded wire, or a relatively small number of stainless steel wires Bsy may be used to obtain a thin primary stranded wire. It is also good.
  • the primary stranded wire may be a wire made of another conductive material and a stainless wire Bsy in addition to one made of only the stainless wire Bsy.
  • the conductive material referred to here is a material different from stainless steel or a material different in mechanical strength from stainless steel. For example, copper, titanium, magnesium or the like may be used alone, or a combination of these materials may be used.
  • the first conductor B11 may be formed of only the conductor wire of the primary stranded wire, or the conductor wire of the primary stranded wire and the conductor wire B111 shown on the left side of FIG. 8 (b). Thus, it may be composed of one metal conductor wire which is not a stranded wire structure.
  • a conductor wire of primary stranded wire may be used as the outer conductor wire B1111, and a conductor wire not having a stranded wire structure may be used as the central conductor wire B1112, or vice versa.
  • a conductor wire not having a stranded wire structure may be used, and a conductor wire of a primary stranded wire may be used as the central conductor wire B1112, or a conductor wire not having a stranded wire structure and a conductor wire having a primary stranded wire as an outer conductor wire B1111. May be alternately arranged in the circumferential direction, and a conductor wire of primary stranded wire or a conductor wire not having a stranded wire structure may be used as the central conductor wire B1112.
  • the piezo coat layer B12 and the second conductor layer B13 are also formed on the center conductor line B1112, a conductor line on which the piezo coat layer B12 and the second conductor layer B13 are not formed on the center conductor line B1112 May be used.
  • the center conductor line B1112 uses the second conductor layer B13 of the outer conductor line B1111 Sensing on the conductor line B1112 is enabled.
  • the number of conductor lines B111 constituting the first conductor B11 is not limited to seven, and may not be arranged in the close-packed structure.
  • a plurality of inner conductor lines may be disposed instead of one central conductor line B1112.
  • the center conductor line B1112 may be surrounded by seven or more outer conductor lines B1111, or may be surrounded by five or less outer conductor lines B1111.
  • the diameter of the conductor wire B111 which comprises 1st conductor B11 may be varied.
  • the diameter of the central conductor line B1112 may be larger than or smaller than the diameter of the outer conductor line B1111.
  • the conducting wire may be disposed in a gap BS1 (between the adjacent outer conductor wires B1111 between the central conductor wire B1112 and the outer conductor wire B1111 shown in FIG. 8).
  • the conductor disposed in the gap BS1 may be a single copper wire, a stranded wire of a stainless steel wire Bsy, or a stranded wire obtained by twisting a plurality of thin copper wires. It is also good.
  • the conductive wire may be disposed also in the gap BS2 outside the gaps between adjacent outer conductor wires B1111.
  • the linear body disposed in the outer space BS2 may also be a single copper wire, or may be a stranded wire of a stainless steel wire Bsy, or a stranded wire obtained by twisting a plurality of thin copper wires. It may be As described here, a conducting wire may be further added to the gap between the conductor lines B111 that constitute the first conductor B11.
  • a strip-shaped piezo film may be wound in a spiral shape.
  • a piezo film made of band-like polyvinylidene fluoride (PVDF) having a width of 0.07 mm spirally on the circumferential surface of the conductor wire B111 the width direction of the piezo film adjacent in the extending direction of the conductor wire B111 You may wind in the state which overlap
  • PVDF polyvinylidene fluoride
  • the width of the strip-shaped piezoelectric film is not limited to 0.07 mm, but may be 0.03 mm or more and 2 mm or less, preferably 0.05 mm or more and 1.0 mm or less.
  • the width of the piezoelectric film is too narrow, when spirally wound around the circumferential surface of the conductor wire B111, a gap is easily generated between the piezoelectric films adjacent in the extending direction of the conductor wire B111.
  • the location where the gap is created becomes a location where sensing can not be performed, and at the same time, a short circuit occurs with the second conductor layer B13 disposed outside, which causes a problem that the sensor signal can not be obtained.
  • the thickness of the piezoelectric film is preferably 20 ⁇ m to 100 ⁇ m and more preferably 25 ⁇ m to 80 ⁇ m. If the thickness of the piezoelectric film is too thin, the sensitivity as a sensor will be insufficient. If the thickness is too thick, on the other hand, the linear sensor will be too hard and the flexibility will be lost. Furthermore, it is more preferable that the piezoelectric film corresponds to a plurality of directions (elongation direction and bending direction) due to the orientation of crystals, than the piezoelectric characteristic corresponding to only the longitudinal direction (elongation direction).
  • the wire sensor B1 can be made thinner.
  • one lead may be spirally wound in one row on the outside of the piezo coat layer B12 or the piezo film. That is, it is the structure of a side winding shield.
  • a tin-plated soft copper wire having a diameter of 50 ⁇ m may be used as the conducting wire here.
  • not only a copper wire but a stranded wire of stainless steel wire may be used.
  • it may be a braided shield in which a conducting wire is crossed and braided on the outside of the piezo coat layer B12 or the piezo film, or it may be a tape shield in which a tape-like conductor is spirally wound.
  • the side shield is the most flexible.
  • a plurality of conducting wires may be spirally wound around the piezoelectric coating layer B12 or the piezoelectric film, or a plurality of tape-shaped conductors may be spirally wound. It may be.
  • the conductor line B111 is higher in mechanical strength than the second conductor.
  • the thickness of the second conductor may be reduced by applying the conductive material than using the conducting wire. It is easy and can make electric wire sensor B1 thin.
  • the diameter of the wire sensor B1 shown in FIGS. 7 and 8A is 0.24 mm.
  • electric wire sensor B1 shown in FIG. 7 may provide a sheath in the further outer side of a 2nd conductor.
  • the sheath is for covering the second conductor, and is for enhancing the abrasion resistance, the chemical resistance, and the corrosion resistance.
  • the sheath is also a sheath layer formed by application.
  • the application referred to here may be immersion (dubbing) coating, spray coating, brush coating, or coating by a coating device using a coater or the like.
  • the sheath layer may have a single layer structure or a multilayer structure.
  • the inner layer may have a two-layer structure consisting of an inner layer and an outer layer, and the inner layer is formed by applying a soft material (for example, a polyamide synthetic resin or polyvinyl chloride resin) compared to the outer layer, and the outer layer is an inner layer
  • Materials with high abrasion resistance compared to eg, polytetrafluoroethylene (PTFE), 4-fluoro- and 6-fluoro-propylene fluorocarbon resin (FEP), tetrafluoroethylene-ethylene copolymer (EPFE), tetrafluoroethylene perco
  • PTFE polytetrafluoroethylene
  • FEPFE tetrafluoroethylene-ethylene copolymer
  • EPFE tetrafluoroethylene perco
  • PFA coating fluoro alkoxy ethylene copolymer fluorine resin
  • the outer layer may be thicker than the inner layer.
  • the inner layer may be formed of a flammable material, but the outer layer is preferably formed of a flame retardant material, a non-combustible material, and a flame resistant material.
  • the total thickness of the sheath layer is about 5 ⁇ m to 50 ⁇ m.
  • the sheath may be a polyester tape or tube type, and its thickness may be 20 ⁇ m or more and 50 ⁇ m or less. It may be a tape or tube type, may have a single layer structure, or may have a multilayer structure. However, when the sheath layer is formed by coating, it is easier to make the thickness of the sheath thinner than the tape or tube type, and the wire sensor B1 can be made thinner. In addition, if it is not necessary to improve the abrasion resistance, the chemical resistance, and the rustproofness, the sheath may not be provided.
  • the first conductor B ⁇ b> 11 is formed by twisting seven conductor wires B ⁇ b> 111, but a plurality of conductor wires may be linearly bundled. A bundle of a plurality of conductor wires in a straight line can be bundled by a sheath.
  • FIG. 9 is a figure for demonstrating the effect of the electric wire sensor demonstrated here.
  • FIG. 9A shows a thick first conductor B11f and a piezoelectric material BP covering the periphery thereof.
  • the radius of the first conductor B11f shown in FIG. 9A is five, and the thickness of the piezoelectric material BP is one.
  • the thickness of the entire first conductor B11f shown in FIG. 9A and the piezo material BP covering the periphery thereof is 12 and the cross-sectional area of the piezo material BP shown in FIG. 9A is 11 ⁇ .
  • the limit value of the thickness of the piezo material is determined by the viscosity of the piezo material and the application method.
  • the thickness of the piezoelectric material BP can be maintained at 1, and an example is shown in which the first conductor is thinned while the thickness of the piezoelectric material BP is the same.
  • the radius of the first conductor B11t illustrated in FIG. 9B is four.
  • the thickness of the whole of the first conductor B11t shown in FIG. 9B and the piezo material BP covering the periphery thereof is 10, and the cross-sectional area of the piezo material BP shown in FIG. 9B is 9 ⁇ . It can be seen that if the first conductor is thinned while keeping the thickness of the piezoelectric material BP the same, the cross-sectional area of the piezoelectric material BP decreases.
  • FIG. 9C shows a first conductor consisting of seven conductor lines.
  • the radius of each conductor line B111t is 2/3.
  • the thickness of the piezoelectric material BP covering the periphery of each conductor line B111t can be kept at 1, which is the same as the thickness of the piezoelectric material BP shown in FIG. 9A or FIG. While the total thickness shown in FIG. 9C is also 10, the total cross-sectional area of the piezoelectric material BP covering the periphery of each of the seven conductor lines B111t shown in FIG. It becomes 3 ⁇ (2.3 ⁇ ⁇ 7) and is larger than 11 ⁇ which is the cross-sectional area of FIG.
  • FIG. 9A is a cross-sectional perspective view of the electric wire sensor B1 cut in the vertical direction. The second conductor is not shown. A force is applied to the electric wire sensor B1 shown in FIG. 9A from the lower side toward the upper side, and the electric wire sensor B1 is deformed into a curved shape with the upper side convex.
  • FIG. 9 (2) is a view of the electric wire sensor B1 having a curved shape in which the upper side is convex, viewed from the side opposite to the side shown in FIG. 9 (1). That is, it is the figure seen in the direction of the arrow shown in FIG. 9 (1).
  • the piezoelectric material BP is softer than the conductor wire B111, the upper piezoelectric material BP tends to expand and the lower piezoelectric material BP tends to shrink. It is considered that the generation of charges may be offset between the upper side and the lower side due to this expansion / contraction relationship. Even when this happens, charges are generated on the side (the back of the paper in FIG. 9 (2)) and the opposite side (the front of the paper in FIG. 9 (2)) shown in FIG. It is considered that a signal is output. Therefore, the thickness of the piezoelectric material BP on the side and the opposite side becomes important.
  • the thickness of the piezoelectric material BP is made as thick as possible in any direction.
  • the ratio of the thickness of the piezoelectric material BP to the thickness of one conductor wire is higher than in the example shown in FIG. 9 (a) or FIG. 9 (b). That is, the thickness of the piezoelectric material is preferably equal to or greater than the diameter of the conductor wire.
  • FIG. 10 is a view showing an example of an electric wire sensor in a collective mode in which the piezo coat layer B12 'is formed after the seven conductor lines B111 are twisted and then the second conductor layer B13' is formed.
  • FIG. 10A is a view showing a state after seven conductor wires B111 arranged in the close-packed structure are twisted together.
  • a conductor line B111S of a stainless steel wire and a conductor line B111C of copper are used as a first conductor B11 shown in FIG. 10A. That is, the first conductor B11 shown in FIG. 10A is obtained by twisting different types of conductor wires. Adjacent conductor lines B111 shown in FIG. 10A are in contact with each other.
  • One conductor wire B111 shown in FIG. 10A has a diameter of 10 ⁇ m, and the thickness of the first conductor B11 is 30 ⁇ m.
  • the first conductor B11 shown in FIG. 10A corresponds to an example of the inner conductor.
  • FIG. 10 (b) is a view showing a state in which a piezoelectric material such as polyvinylidene fluoride (PVDF) is applied to the seven conductor wires B111 twisted together shown in FIG. 10 (a).
  • PVDF polyvinylidene fluoride
  • a piezo material is supported on the portion of the outer conductor wire B1111 shown in FIG. That is, the piezo coat layer B12 'is formed only on the portion of the outer conductor wire B1111 facing the outside.
  • the piezo coat layer B12 'shown in FIG. 10 (b) depressions BD are formed at six places. The depression BD is not formed even when the piezoelectric material is applied to the first conductor which is not a stranded wire structure but is formed of one conductor wire. The depression BD causes a change in the thickness of the piezo material.
  • the thickness td of the piezoelectric material in the portion in which the recess D is formed is larger than the thickness t2 of the piezoelectric material in the middle portion between the recess BD and the recess BD. Therefore, in the portion where the depression BD is formed, the sensor sensitivity is better than other portions because the volume of the piezoelectric material is large.
  • the depressions BD are uniformly provided in the circumferential direction, and become a factor that functions as a highly sensitive electric wire sensor regardless of the direction in which the depressions are bent.
  • the thickness (t2) of the piezo coat layer B12 'shown in FIG. 10 (b) is 10 .mu.m. Further, although adjacent conductor wires B111 shown in FIG. 10A are in contact with each other, the piezoelectric material is not in contact with each other due to capillary action, and the gap BS1 between the central conductor wire B1112 and the outer conductor wire B1111 (the adjacent outer conductor wires B1111 The gap BS1 is filled with the piezoelectric material.
  • the piezo material does not penetrate into the above-mentioned gap BS1 and the piezo material is supported only on the part of the peripheral surface of the outer conductor wire B111 facing the outside. is there.
  • FIG. 10C shows polymer conduction including carbon such as carbon nanotubes in the case where the piezo coat layer B12 ′ is formed only on the portion facing the outside of the outer conductor wire B111 shown in FIG. 10B.
  • FIG. 2 is a view showing a state in which an elastic material is applied.
  • a second conductor layer B13 ' is formed outside the piezo coat layer B12' shown in FIG. 10C, and the piezo coat layer B12 'is covered by the second conductor layer B13'. That is, the second conductor formed of the second conductor layer B13 'is supported only on the portion facing the outer side of the piezo material carried on the peripheral surface of the outer conductor wire B111.
  • the 2nd conductor which consists of 2nd conductor layer B13 'shown in FIG.10 (c) is corresponded to an example of an outer conductor. Thickness (t3) of 2nd conductor layer B13 'shown in FIG.10 (c) is 5 micrometers.
  • the gap BS1 between the central conductor line B1112 and the outer conductor line B1111 is filled with the piezo material as described above, there is no room for the polymer conductive material to enter.
  • the polymer conductive material may permeate into the gap BS1 by capillary action, and the gap BS1 may be filled with the polymer conductive material.
  • the polymer conductive material may not penetrate into the space BS1, and the space BS1 may remain as a space.
  • the electric wire sensor B1 shown in FIG. 10C is completed.
  • the electric wire sensor shown in FIG. 10 (c) is not the same as the electric wire sensor shown in FIG. 8 (a), but the reference numeral "1" is used in common.
  • the configuration of the electric wire sensor B1 shown in FIG. 10C can be made the thinnest, and the thickness to the second conductor layer B13 'is 60 ⁇ m. Even if the sheath layer is provided in a double structure, a wire sensor B1 of 0.1 mm can be realized.
  • the electric wire sensor B1 which can be easily manufactured and obtained at low cost, using the conductor wire B111 having a diameter of 20 ⁇ m, the piezo conductor layer B12 ′ having a thickness of 20 ⁇ m is applied to the first conductor B11 having a thickness of 60 ⁇ m. Then, a second conductor layer B13 'having a thickness of 10 ⁇ m is formed. In this configuration, the thickness to the second conductor layer B13 'is 0.12 mm. In this case, even if the sheath layer is provided in a double structure, the wire sensor B1 of 0.15 mm or less can be realized.
  • the first conductor B11 shown in FIG. 10A is obtained by twisting seven conductor wires B111, but a plurality of conductor wires are bundled in a straight line without twisting. May be Even in this case, by applying a piezoelectric material or applying a conductive material, a plurality of conductor wires are bonded to one another and bundled. Alternatively, it can be bundled by a sheath.
  • FIG. 11 is a view showing an example of the wire sensor in a dispersion mode in which the second conductor layer B13 'is formed after the seven conductor wires B111 on which the piezo coat layer B12 is formed are twisted.
  • a piezo coat layer B12 is formed on the circumferential surface of each of the seven conductor wires B111 shown in FIG.
  • belt-shaped piezo film may be a conductor wire wound helically.
  • These seven conductor wires B111 are twisted together in a state of being arranged in the close-packed structure, and the piezo coat layers B12 formed on the peripheral surfaces of the adjacent conductor wires B111 shown in FIG. ing.
  • the piezo coat layer B12 is interposed between the adjacent conductor lines B111 shown in FIG. 11A, and the conductor lines B111 are distributed. Further, one conductor wire B111 shown in FIG. 11A has a diameter of 10 ⁇ m, and the thickness of the piezo coat layer B12 is also 10 ⁇ m.
  • FIG. 11B is a view showing a state in which a polymer conductive material containing carbon such as a carbon nanotube is applied to the seven conductor wires B111 twisted together shown in FIG. 11A.
  • the second conductor layer B13 ' is formed only on the portion facing the outer side of the piezo coat layer B12 formed on the circumferential surface of the outer conductor wire B1111 shown in FIG. 11 (b). Thickness (t3) of 2nd conductor layer B13 'shown in FIG.11 (b) is 5 micrometers. Further, although the piezo coat layers B12 formed on the peripheral surfaces of the adjacent conductor wires B111 shown in FIG.
  • the polymer conductive material is formed by the capillary phenomenon, the central conductor wire B1112 and the outer conductor It penetrates into the space BS1 with the line B1111 (between the adjacent outer conductor lines B1111, the inner side), and the space BS1 is filled with the polymer conductive material.
  • the polymer conductive material may not penetrate into the gap BS1 depending on the viscosity of the polymer conductive material and the coating method.
  • the outer space BS2 out of the gaps between the outer conductor wires B1111 may be filled with a polymer conductive material, as strictly shown by a two-dot chain line in FIG.
  • the wire sensor B1 shown in FIG. 11B is completed.
  • the electric wire sensor shown in FIG. 11 (b) is not the same as the electric wire sensor shown in FIG. 8 (a), but the same reference numeral is used here as "1".
  • the thickness to the second conductor layer B13 ' is 0.1 mm.
  • the 20 ⁇ m thick piezo-coated layer B12 is formed using the conductor wire B111 of 20 ⁇ m in diameter, and the second 10 ⁇ m thick Conductor layer B13 'is formed. In this configuration, the thickness to the second conductor layer B13 'is 0.2 mm.
  • the seven conductor wires B111 on which the piezo coat layer B12 is formed are twisted together, but a plurality of conductor wires are bundled in a straight line without twisting. It may be. Even in this case, by applying the conductive material, the plurality of conductor wires are bonded to one another and bundled. Alternatively, if a sheath is provided, it can be bundled by the sheath.
  • the electric wire sensor B1 described with reference to FIGS. 7 to 11 is sufficiently thin, it can be passed through a blood vessel.
  • a contact can be provided at the tip of the electric wire sensor B1, inserted into the blood vessel from the contact, and the contact can be brought into contact with the wall surface of the organ to measure the hardness of the wall surface. If the hardness of the organ wall can be measured, it can lead to the discovery of cancer cells.
  • a plurality of wire sensors B1 in FIGS. 7 to 11 provided with a sheath may be prepared, and the plurality of wire sensors B1 may be further covered with a sheath to form a linear sensor.
  • seven electric wire sensors B1 provided with a sheath may be prepared, and the seven electric wire sensors B1 may be twisted in a close-packed state and further covered with a sheath.
  • one wire sensor B1 if the sheath is torn, water etc. may enter and corrode, or the current may leak, but multiple wire sensors B1 provided with a sheath may be used.
  • the wire sensor B1 described with reference to FIGS. 7 to 11 can be made sufficiently thin, even if a plurality of wire sensors B1 are further covered with a sheath in this manner, the overall thickness is greater than in the prior art Can be obtained.
  • the wire sensor B1 described using FIGS. 7 to 11 may be used instead of the wire sensor A1.
  • the vertical wire A21 corresponds to an example of a vertical linear body.
  • the electric wire sensor B1 described with reference to FIGS. 7 to 11 may be used instead of the electric wire sensor A1.
  • the wire sensor B1 When the wire sensor B1 is thin and soft (for example, when the thickness is 2 mm or less), it can be woven with other fibers in a general weave (for example, plain weave, twill weave, etc.).
  • a general weave for example, plain weave, twill weave, etc.
  • control unit here is also the same as the control unit provided when the planar sensor A3 shown in FIG. 3 is used for the tactile sensor, and is the same as the explanation on the control unit described above and the explanation of the determination. Omit.
  • the wire sensor B1 described with reference to FIGS. 7 to 11 can be used in other application examples of the wire sensor A1 described with reference to FIGS. 5 and 6 and the like. That is, the wire sensor B1 can be used as a spirally wound electric wire sensor B1, and a belt-like sensor or a sheet shape sensor can be manufactured by weaving the electric wire sensor B1 like a woven fabric. In addition, you may hold down and you may knit.
  • the electric wire sensor B1 can increase the flexibility by making the electric wire sensor B1 thinner than a conventional sensor, the electric wire sensor B1 can also be used as the knitted sensor described with reference to FIG. 5 (a).
  • the piezoelectric coating layer B12 which is a piezoelectric body
  • the piezoelectric film is wound around the conductor wire B111. Good.
  • the electric wire sensor B1 can also be divided and used for a sensor part and the transmission line of an output signal by heating partially until it exceeds Curie temperature.
  • the planar sensor using the electric wire sensor B1 does not expand and contract in the X-axis direction and does not expand and contract in the Y-axis direction, but in the diagonal direction
  • the first electric wire sensor extends in the X axis direction
  • the second electric wire sensor extends to the Y axis direction, and is applied to the planar sensor shown in FIG. 5C using the electric wire sensor B1. If the objects are stacked, it is possible to realize a sensor that expands and contracts in the X-axis direction, the Y-axis direction, and the diagonal direction.
  • belt-shaped sensor using electric wire sensor B1 can also be wound around welded piping, and can be utilized for the defect inspection of a welding part.
  • planar sensor using the electric wire sensor B1 is also used to detect vibrations at high places, to detect heartbeats and respirations of people as vibrations, and to monitor various types of care such as nursing care and pets. It can also be done.
  • a glove having a planar sensor using the electric wire sensor B1 may be attached to a robot hand, or may be attached to a person and used for data acquisition such as gripping force in various operations.
  • planar sensor using electric wire sensor B1 is also applicable to the grip for rehabilitation for the contracture patient of a finger.
  • a planar sensor using the wire sensor B1 can also be applied to the robot hand as described with reference to FIG.
  • the second characteristic linear sensor described with reference to FIGS. 7 to 11 is A first conductor having a plurality of conductor lines; And a second conductor, Among the plurality of conductor wires, an outer conductor wire constituting at least an outer peripheral surface of the first conductor carries a piezoelectric material on the peripheral surface, The second conductor may be disposed at least on the outer side of a piezo material carried on the circumferential surface of the outer conductor wire.
  • a linear sensor in which a piezoelectric material (piezoelectric material) is disposed on the outer peripheral surface of the first conductor is known (see, for example, Japanese Patent Application Laid-Open No. 2008-151638).
  • This linear sensor can be used as a tactile sensor or a vibration sensor.
  • a tactile sensor may be used in a manner in which a human touches it, and the sensor itself may be required to have a soft touch.
  • the sensor when using as a vibration sensor, the sensor may be wound around an object, or the sensor may be used in a bent state, and flexibility may be required. In order to obtain a soft touch and flexibility, it is conceivable to make the first conductor thinner. Moreover, even if it is too thick and it has not been possible to insert and inspect a linear sensor, if a linear sensor can be made thin, an inspection may become possible.
  • the sensor sensitivity is proportional to the volume of the piezoelectric material, and the smaller the volume, the lower the sensor sensitivity.
  • the first material can be made to have the same thickness. Even if the conductor is made thinner, the volume per unit length of the piezoelectric material does not decrease, or the decrease in volume is suppressed. Therefore, it is possible to realize a linear sensor in which the sensor sensitivity does not decrease even if the first conductor is thinned, or the decrease in sensor sensitivity is suppressed.
  • the first conductor may be in the form of an assembly in which the plurality of conductor wires are integrated into one, or may be in the form of dispersion in which the plurality of conductor wires are distributed.
  • the plurality of conductor wires may be linearly bundled, or the plurality of conductor wires may be twisted.
  • the plurality of conductor wires When the plurality of conductor wires are twisted, it may be a stranded wire obtained by twisting stainless steel wires.
  • the diameter of one stainless steel wire may be 10 ⁇ m to 40 ⁇ m, preferably 20 ⁇ m to 30 ⁇ m. The thinner the stainless steel wire, the higher the flexibility but the lower the strength, and the thicker the wire, the lower the flexibility but the higher the strength.
  • the cross-sectional shape of the first conductor may be entirely twisted in a state in which the stranded wire is disposed at each vertex of the regular hexagon and at the center of the regular hexagon. That is, it may be a close packed structure.
  • the first conductor may be configured of only the stranded wire, or may be configured of the stranded wire and another metal wire.
  • the whole may be twisted in a state in which the stranded wire is disposed at each vertex of a regular hexagon and a copper wire is disposed at the center of the regular hexagon, or the stranded wire may be a vertex of a regular hexagon
  • copper wires may be disposed at every other apex, and copper wires or twisted wires may be disposed at the center of the regular hexagon, and the whole may be twisted.
  • the diameter of the first conductor may be 0.03 mm or more and 0.8 mm or less, and being 0.06 mm or more can be manufactured at low cost or is easy to manufacture, and is 0.5 mm or less It is preferable in terms of fineness.
  • the first conductor may have a twisted structure in which the outer conductor wire is disposed around a central conductor wire located at the center.
  • the central conductor line may also be one carrying a piezo material on its peripheral surface, in which case the first conductor is in a dispersed state.
  • the central conductor line may not carry the piezoelectric material on the circumferential surface, and in this case, the first conductors are in a collective mode.
  • the central conductor wire is made of a high tensile steel such as stainless steel wire or tungsten, ultrahigh tensile steel, tungsten and its alloy, titanium and its alloy, Mg and It may consist of conducting wires, such as materials, such as the alloy, and mechanical strength may be higher than the said outer side conductor wire.
  • the outer conductor wire may be made of copper, and may have a lower electrical resistance than the central conductor wire and be softer.
  • two types of outer conductor wires, one with relatively low electrical resistance and softness, and one with relatively high electrical resistance and high mechanical strength, are provided, and these two types of outer conductor wires are circumferentially distributed. May be alternately arranged.
  • the outer conductor wire may carry the piezo material on the entire circumferential surface, or may carry the piezo material only on the part of the circumferential surface facing the outside.
  • the piezoelectric material may be a strip-shaped piezoelectric film. That is, before twisting together the plurality of conductor wires, a belt-like piezoelectric film may be spirally wound around the peripheral surface of each conductor wire, and the piezoelectric material may be supported on the peripheral surface of each conductor wire. In this structure, the first conductor is in a distributed manner.
  • the piezoelectric film has a width of 0.03 mm or more and 2 mm or less, preferably 0.05 mm or more and 1.0 mm or less.
  • the piezoelectric film When the piezoelectric film is spirally wound around the circumferential surface of the conductor wire, the piezoelectric film is wound in a state where one end and the other end of the width direction of the piezoelectric film adjacent in the extending direction of the conductor wire overlap each other Will not occur.
  • the width of the piezoelectric film is too narrow, when spirally wound around the outer peripheral surface of the conductor wire, a gap is likely to be generated between the piezoelectric films adjacent in the extending direction of the conductor wire.
  • a location where a gap is formed becomes a location where sensing can not be performed, and at the same time, there is a disadvantage that the sensor signal can not be obtained because it is short-circuited with the second conductor disposed outside.
  • the width of the piezoelectric film is too wide, slack is easily generated when wound around the circumferential surface of the conductor wire.
  • the area of the piezoelectric film can be made as large as possible by superposing one end and the other end in the width direction of the piezoelectric film, which leads to the improvement of the sensor sensitivity.
  • the thickness of the piezoelectric film is preferably 20 ⁇ m to 100 ⁇ m, and more preferably 25 ⁇ m to 80 ⁇ m. If the thickness of the piezoelectric film is too thin, the sensitivity as a sensor will be insufficient. If the thickness is too thick, on the other hand, the linear sensor will be too hard and the flexibility will be lost.
  • the piezoelectric film preferably has a piezoelectric property corresponding to a plurality of directions (elongation direction and bending direction) due to crystal orientation, compared with a case where the piezoelectric characteristic corresponds only to the longitudinal direction (elongation direction).
  • a piezo material may be applied to the peripheral surface of the conductor wire and the piezoelectric material may be supported on the peripheral surface of the conductor wire.
  • the application referred to here may be immersion (dubbing) coating, spray coating, brush coating, or coating by a coating device using a coater or the like.
  • the outer conductor wire itself is also a stranded wire structure, it may be impregnated with a piezo material, and the piezo material may penetrate into the outer conductor wire by capillary action. Also in this case, the first conductor is in the dispersed mode.
  • the piezoelectric material may be supported on the peripheral surface of the outer conductor wire by applying the piezoelectric material to the outer peripheral surface of the first conductor after twisting the plurality of conductor wires.
  • the application referred to here may be immersion (dubbing) coating, spray coating, brush coating, or coating by a coating device using a coater or the like.
  • the first conductor may be impregnated with a piezo material, and the piezo material may penetrate into the interior of the first conductor by capillary action. In this case, the first conductors are in a collective manner.
  • the thickness of the applied piezoelectric material is preferably equal to or greater than the diameter of the conductor wire, and is, for example, 0.01 mm or more and 0.05 mm or less.
  • a sheath covering the second conductor may be provided.
  • This sheath is for enhancing the abrasion resistance, the chemical resistance and the rust prevention.
  • the sheath may also be formed by application, and further may have a multilayer structure.
  • the application referred to here may be immersion (dubbing) coating, spray coating, brush coating, or coating by a coating device using a coater or the like. Moreover, it is preferable to apply a plurality of times in consideration of the occurrence of pinholes.
  • the thickness of the sheath is about 5 ⁇ m to 50 ⁇ m.
  • the diameter of the linear sensor including the sheath may be 0.1 mm.
  • the first conductor may be formed by twisting the plurality of conductor wires.
  • the piezoelectric material may be filled between the adjacent outer conductor wires.
  • This aspect is an aspect that can be realized by applying a piezoelectric material to the outer peripheral surface of the first conductor after twisting the plurality of conductor wires.
  • the piezoelectric material may be filled only between the outer side, the piezoelectric material may be filled only between the inner side, or between the outer side Both between the inside may be filled with piezo material.
  • the piezo material filled in between the adjacent outer conductor wires is a piezo material penetrated by capillary action.
  • the second conductor may be carried on at least a portion facing the outer side of the piezoelectric material carried on the circumferential surface of the outer conductor wire.
  • the second conductor may be carried only on the portion facing the outside of the piezo material carried on the circumferential surface of the outer conductor wire, or may be carried on the entire circumferential surface of the outer conductor wire It may be carried on the entire piezo material.
  • the second conductor may be formed by applying a conductive material.
  • the application referred to here may be immersion (dubbing) coating, spray coating, brush coating, or coating by a coating device using a coater or the like.
  • the thickness of the applied conductive material forming the second conductor is preferably equal to or less than the diameter of the conductor wire, and preferably equal to or less than the thickness of the applied piezoelectric material.
  • the thickness of the conductive material is, for example, 5 ⁇ m or more and 50 ⁇ m or less.
  • the second conductor may be a braided shield in which a conducting wire is crossed and braided on the outside of the piezoelectric material, or a laterally wound shield in which the conducting wire is spirally wound in one row.
  • the second conductor may be a tape shield in which a tape-like (strip-like) conductor is spirally wound on the outside of the piezoelectric material.
  • the side shield is the most flexible.
  • the second conductor may be one in which a plurality of conducting wires are spirally wound, or a plurality of tape-shaped (strip-like) conductors are spirally wound. It is also good.
  • the second characteristic strip sensor described so far is The second characteristic linear sensor; A longitudinal wire made of metal extending in the same direction as the extending direction of the linear sensor; It is characterized by extending in the width direction of the linear sensor, and having the linear sensor and a horizontal linear body for binding the vertical linear body.
  • the metal longitudinal wire is for providing mechanical strength, and may include, for example, a stainless steel wire. More specifically, it may be a stranded wire of a stainless steel wire, or may be a wire in which a stainless steel wire and a non-metallic linear body are twisted. Furthermore, the vertical wire-like body made of metal may have mechanical strength higher than that of the second characteristic linear sensor. In addition, a plurality of linear sensors may be disposed at intervals rather than one, and the vertical linear bodies may be disposed at the intervals. In this case, only the vertical linear body may be disposed at the interval, or the vertical linear body and the nonmetallic linear body may be disposed.
  • the horizontal linear body may be a strand of stainless steel wire and a non-metallic linear body.
  • the non-metallic linear body described here may be a resin-made linear body, or may be a natural fiber such as cotton yarn. That is, the non-metallic linear body may be a chemical fiber or a natural fiber.
  • the second characteristic planar sensor described so far is A first sensor body in which the second characteristic linear sensor is a first linear sensor, and a plurality of the first linear sensors are arranged at intervals in the radial direction of the first linear sensor; A first linear body disposed between the adjacent first linear sensors and extending in the same direction as the extension direction of the first linear sensors, wherein the first linear body is softer than the first linear sensors; A second sensor body in which the second characteristic linear sensor is a second linear sensor, and a plurality of the second linear sensors are arranged at intervals in the extending direction of the first linear sensor; And a second linear body disposed between the adjacent second linear sensors and extending in the same direction as the extension direction of the second linear sensors, wherein the second linear body is softer than the second linear sensors.
  • the first sensor body and the second sensor body are inseparably overlapped.
  • Coupling means for coupling the first sensor body and the second sensor body may be provided, and the coupling means may be part or all of the first linear body, or the second linear body. It may be part or all of the body.
  • the second linear sensor and the second linear body are attached by the first linear object, and the first linear sensor and the first linear object are attached by the second linear object. It may be done.
  • it comprises a first coupling linear body for binding the second linear sensor and the second linear body, and a second coupling linear body for binding the first linear sensor and the first linear body. It may be
  • the first coupling linear body is thinner than the second characteristic linear sensor, and the diameter of the first coupling linear body is one fifth of the diameter of the second characteristic linear sensor. It may be 1/3 or less.
  • the second coupling linear body is also thinner than the second characteristic linear sensor, and the diameter of the second coupling linear body is also 1/1 of the diameter of the second characteristic linear sensor. It may be 5 or more and 1/3 or less.
  • the first linear body may be larger in diameter than the first linear sensor, and the second linear body may be larger in diameter than the second linear sensor.
  • one or more sensor bodies may be provided in which the second characteristic linear sensor is disposed.
  • a linear sensor in which the sensor sensitivity does not decrease even if the first conductor is thinned, or a decrease in sensor sensitivity is suppressed, and a strip sensor and a surface using the linear sensor A shape sensor can be provided.
  • FIG. 12 is a cross-sectional view of two types of wire sensors.
  • the two types of electric wire sensors C1 shown in FIG. 12 are each composed of an inner conductor C11, a piezoelectric body C12, an outer conductor C13, and a sheath C14.
  • the inner conductor C11 has a central conductor line C1112 passing through the center and an outer conductor line C1111 surrounding the central conductor line C1112.
  • the wire sensor C1 shown in FIG. 12 (a) is a wire sensor not having a stranded wire structure. That is, the center conductor line C1112 and the outer conductor line C1111 are not stranded wires but one conductor line.
  • the central conductor line C1112 shown in FIG. 12 (a) is a conductor line made of stainless steel, and the outer conductor line C1111 shown in FIG. 12 (a) is a copper conductor line.
  • the center conductor line C1112 shown in FIG. 12A is thicker than the outer conductor line C1111 shown in FIG. 12A, for example, twice or more as thick as the outer conductor line C1111.
  • the thickness of the central conductor line C1112 is determined by the mechanical strength required of the wire sensor C1.
  • nineteen outer conductor lines C1111 are provided in the electric wire sensor C1 shown in FIG. 12A.
  • the number of outer conductor lines C1111 is not limited to nineteen.
  • Copper has a lower electrical resistance value than stainless steel and is excellent in conductivity, and in this example, mechanical strength is secured on the center side and conductivity is secured on the outside where current easily flows.
  • the central conductor lines C1112 are arranged in a state where adjacent central conductor lines C1112 are in contact with each other without leaving a space.
  • One central conductor line C1112 and nineteen outer conductor lines C1111 are bundled in a straight line, and the inner conductor C11 shown in FIG. 12A does not have a stranded wire structure.
  • tungsten or titanium may be used instead of stainless steel.
  • high-tensile fiber having conductivity for example, polyparaphenylene terephthalamide, aramid fiber, etc.
  • This is not limited to the central conductor line C1112, and is the same as long as it is made of stainless steel, and is the same in the description from FIG. 1 to the above, and the same in the following description.
  • the 19 outer conductor lines C1111 are bundled in the same direction as the center conductor line C1112, one outer conductor line C1111 may be spirally wound in one row around the center conductor line C1112. . That is, the outer conductor wire C1111 may be arranged in a lateral winding.
  • the outer conductor wire C1111 has a thickness of 15 ⁇ m to 40 ⁇ m (for example, 30 ⁇ m), and the center conductor wire C1112 is 2 You may use the thing of thickness twice or more and 4 times or less (for example, 3 times).
  • the outer conductor wire C1111 may be replaced by one made of copper, by one made of titanium, platinum or silver, or by a polymer material containing carbon nanofibers, or it may be made highly conductive. It may be replaced by a molecule. This is not limited to the outer conductor wire C1111, and is the same as long as it is made of copper, and is the same in the description from FIG.
  • the internal conductor C11 is not in a stranded wire structure, but the outer conductor C11 1 may be twisted around the center conductor C1 1 12.
  • the outer conductor wire C1111 may be eliminated, and a hard film of nitrogen-containing diamond like carbon (DLC) may be provided on the outer peripheral surface of the center conductor wire C1112.
  • the nitrogen-containing diamond like carbon (DLC) has good conductivity and can be provided on the outer peripheral surface of the central conductor line C1112 by plasma deposition.
  • the outer conductor line C1111 may be eliminated, and copper plating or copper deposition may be performed on the outer peripheral surface of the center conductor line C1112, or copper foil may be supported.
  • central conductor line C1112 shown in FIG. 12 (a) may be a copper wire
  • outer conductor line C1111 shown in FIG. 12 (a) may be a stainless steel conductor line.
  • the wire sensor C1 shown in FIG. 12 (b) is a wire sensor having a stranded wire structure. That is, although the central conductor line C1112 is a single conductor line made of stainless steel, the outer conductor line C1111 is formed by twisting seven copper conductor lines C1111c. One conductor line C1 111 c has a diameter of 15 ⁇ m. The seven conductor lines C1111c are twisted in a state of being arranged at the respective apexes of the regular hexagon and at the center of the regular hexagon. That is, the outer conductor line C1111 is obtained by arranging seven conductor lines C1111c in the close-packed structure and twisting them.
  • the diameter of the outer conductor wire C1111 shown in FIG. 12B is 45 ⁇ m.
  • the diameter of central conductor line C1112 shown in FIG. 12B is also 45 ⁇ m.
  • One central conductor line C1112 shown in FIG. 12 (b) and the outer conductor line C1111 shown in FIG. 12 (b) are bundled in a straight line, and do not have a stranded wire structure. However, the outer conductor wire C1111 shown in FIG. 12 (b) may be twisted around the center conductor wire C1112 shown in FIG. 12 (b).
  • the number of conductor lines C1111c constituting the outer conductor line C1111 is not limited to seven.
  • at least the six outer conductor lines are made of a material other than copper, preferably a surface of a material softer than stainless steel, such as nitrogen containing diamond like carbon (DLC) What provided the film
  • DLC diamond like carbon
  • supported copper foil may be used.
  • the at least six outer conductor wires conductor wires of a polymer material containing carbon nanofibers may be replaced, or conductor wires of a conductive polymer may be replaced.
  • central conductor line C1112 shown in FIG. 12B may be a copper wire
  • outer conductor line C1111 shown in FIG. 12B may be a stranded wire of stainless steel wire.
  • the central conductor line C1112 may not be a stranded wire but may be a single conductor line, which also applies to the electric wire sensors A1 and B1 described so far from FIG.
  • the single conductor wire may be made of stainless steel, may be made of tungsten, and is not limited to metal, and may be a high tension fiber having conductivity (for example, It may be made of poly (p-phenylene terephthalamide), aramid fibers and the like.
  • the proportion of stainless steel in the internal conductor C11 shown in FIG. 12A is higher than the proportion of copper, and the internal conductor C11 shown in FIG. Conversely, the proportion of stainless steel is lower than that of copper.
  • the ratio referred to here is the ratio of the cross-sectional area. If the mechanical strength is high or the number of bending is large, the proportion of stainless steel is increased, and if the priority is flexibility or conductivity, the proportion of copper is increased.
  • the piezoelectric body C12 is the same as the piezoelectric body A12 described with reference to FIG. 1, and is formed of a strip-shaped piezoelectric film having a width of 3 mm.
  • FIG. 13 is a view showing how a piezo film is wound around the outer peripheral surface of the internal conductor C11.
  • Piezo film CF is made of polyvinylidene fluoride (PVDF).
  • PVDF polyvinylidene fluoride
  • the overlapping width is preferably 1/4 or more and 3/4 or less of the width of the piezo film CF. If it is less than 1/4, if bending and stretching of the electric wire sensor C1 is repeated, a gap may occur. On the other hand, if it exceeds 3/4, the amount of using the piezo film CF will increase too much, leading to an increase in cost. Furthermore, when the overlapping width is set to a half of the width of the piezo film CF, double winding is performed, and a gap is less likely to occur.
  • the width of the piezoelectric film CF may be 2 mm or more and 5 mm or less, preferably 3 mm or more and 4 mm or less. If the width of the piezo film CF is too narrow, a gap is likely to be generated between the piezo films CF adjacent in the extending direction of the inner conductor C11 when spirally wound around the outer peripheral surface of the inner conductor C11. On the other hand, when the width of the piezo film CF is too wide, slack is easily generated when being spirally wound around the outer peripheral surface of the internal conductor C11.
  • the piezo film CF When the piezo film CF is spirally wound around the outer peripheral surface of the inner conductor C11, the piezo film conforms to the outer peripheral shape of the inner conductor C11, and the piezoelectric body C12 shown in FIG. It has a shape that gets inside.
  • the thickness of the piezoelectric film CF may be 20 ⁇ m or more and 100 ⁇ m or less, and preferably 25 ⁇ m or more and 80 ⁇ m or less. If the thickness of the piezo film CF is too thin, the sensitivity as a sensor will be insufficient. If the thickness is too thick, on the other hand, the electric wire sensor C1 will be too hard and the flexibility will be lost.
  • the winding angle ⁇ of the piezoelectric film CF is preferably 10 ° or more and 50 ° or less.
  • the winding angle ⁇ referred to here is the inner conductor C11, the piezo film CF And the angle with the downstream edge CF1. If it exceeds 50 °, the amount of using the piezo film CF will increase too much, leading to an increase in cost.
  • the angle is less than 10 °, the wound piezo film CF is easily displaced in the direction in which the overlap of the piezo films CF is eliminated.
  • the piezoelectric film CF employed for the piezoelectric body C12 corresponds to a plurality of directions (elongation direction and bending direction) according to the orientation of the crystal than the piezoelectric characteristic corresponding to only the longitudinal direction (elongation direction). It is preferable to be one.
  • the piezo film CF as the piezoelectric body C12, it is not necessary to apply heat, there is no possibility of heating up to the Curie temperature, and the piezo characteristics are not affected.
  • a copolymer P (VDF / TrFE) of vinylidene fluoride (VDF) and ethylene trifluoride (TrFE) is melted by heat, and the inner conductor C11 is passed there, the outer peripheral surface of the inner conductor C11 is A piezoelectric material is carried. In this case, a high electric field is applied later to perform polarization processing.
  • the piezoelectric material it is also possible to apply a piezoelectric material to the outer peripheral surface of the inner conductor C11. As described above, even when the piezo film CF is spirally wound, the piezo film CF conforms to the outer peripheral shape of the inner conductor C11, and the shape which enters inside as shown by a two-dot chain line shown in FIG. However, when the piezoelectric material is welded or applied, the piezoelectric material gets in between the outer conductor wire C1111 and the outer conductor wire C1111 adjacent in the circumferential direction, and the space is filled with the piezoelectric material, The adhesion between the piezoelectric material and the inner conductor C11 is improved. When the adhesion is improved, charges induced on the surface of the inner conductor C11, that is, the outer surface of the outer conductor C11 1 are easily generated, the signal strength is increased, and the performance improvement as a sensor can be expected.
  • the outer conductor C13 is the same as the outer conductor A13 described with reference to FIG. 1, and one copper wire is spirally wound in one row around the outer peripheral surface of the piezoelectric body C12. That is, it is the structure of a side winding shield.
  • a copper wire a tin-plated soft copper wire with a diameter of 50 ⁇ m is used.
  • the outer conductor C13 is not limited to a copper wire, but may be a stranded wire of a stainless steel wire.
  • the thickness of the outer conductor C13 may be 10 ⁇ m or more and 120 ⁇ m or less, and preferably 25 ⁇ m or more and 90 ⁇ m or less. That is, it is thinner than the diameter of the internal conductor C11.
  • the outer conductor C13 may be a braided shield in which a conducting wire is crossed and braided around the outer peripheral surface of the piezoelectric body C12, or a tape shield in which a tape-shaped conductor is spirally wound. Good. Furthermore, the outer conductor C13 may be formed by spirally winding a plurality of conducting wires, or may be formed by spirally winding a plurality of tape-shaped conductors.
  • the internal conductor C11 is higher in mechanical strength than the external conductor C13.
  • the outer conductor C13 may be replaced by a copper wire with a polymeric material containing carbon nanofibers or a conductive polymer. Further, a hard film of nitrogen-containing diamond like carbon (DLC) may be provided on the outer peripheral surface of the piezoelectric body C12 to form the external conductor C13, or copper plating or vapor deposition may be performed to form the external conductor C13, or copper foil May be carried as the outer conductor C13.
  • DLC nitrogen-containing diamond like carbon
  • the sheath C14 is the same as the sheath A14 described with reference to FIG. 1, covers the outer conductor C13, and is for enhancing the abrasion resistance, the chemical resistance, and the rust prevention.
  • the sheath C14 may be a polyester tape, and the thickness thereof may be 20 ⁇ m or more and 40 ⁇ m or less.
  • the sheath C 14 may not be provided if it is not necessary to enhance the abrasion resistance, the chemical resistance, and the rust prevention.
  • the sheath C14 shown in FIG. 12 has a single-layer structure with a thickness of 30 ⁇ m, but may have a multi-layer structure.
  • it may have a two-layer structure consisting of an inner layer and an outer layer, and the inner layer is formed of a softer material (for example, a polyamide synthetic resin or polyvinyl chloride resin) than the outer layer, and the outer layer is compared with the inner layer.
  • a material having high abrasion resistance for example, polytetrafluoroethylene.
  • the outer layer may be thicker than the inner layer.
  • the inner layer may be formed of a flammable material, but the outer layer is preferably formed of a flame retardant material, a non-combustible material, and a flame resistant material.
  • it may have a two-layer structure of a material supporting a conductive material and a material that improves the abrasion resistance, the chemical resistance, and the rust prevention.
  • a strip-like PET film subjected to copper plating or copper deposition is wound on the outer circumferential surface of the outer conductor C13 in the same manner as the above-described piezo film CF, and a strip-like polyester tape is similarly overlaid thereon. It may be wound while fitting.
  • the copper-loaded film provides a shielding effect.
  • FIG. 14 is an exploded perspective view of a planar sensor using the electric wire sensor C1 shown in FIG.
  • the planar sensor C3 has a mesh cloth C30 as a base material.
  • the mesh cloth C30 corresponds to an example of a sheet.
  • the electric wire sensor C1 shown in FIG. 12 is similarly stitched to the mesh cloth C30 at an interval in the width direction (Y-axis direction) of the electric wire sensor C1.
  • seven electric wire sensors C ⁇ b> 1 are seamed and shown in gray.
  • these seven electric wire sensors C1 shown in gray are referred to as a first electric wire sensor C31.
  • the wire sensor C1 shown in FIG. 12 is seam-stitched at intervals in the extending direction (X-axis direction) of the first wire sensors C31.
  • X-axis direction extending direction
  • nine electric wire sensors C1 are seam-stitched and shown in black.
  • these nine electric wire sensors C1 shown in black are referred to as a second electric wire sensor C32.
  • the mesh fabric has a coarse mesh, and the first electric wire sensor C31 and the second electric wire sensor C32 can be easily stitched through the mesh.
  • the relationship between the first electric wire sensor C31 and the second electric wire sensor C32 is that, in the part of the mesh cloth C30 where the first electric wire sensor C31 passes through the back side of the mesh cloth C30, the second electric wire sensor C32 is the front side of the mesh cloth C30.
  • the first electric wire sensor C31 passes through the front side of the mesh fabric C30 at a portion of the mesh fabric C30 where the second electric wire sensor C32 passes through the back side of the mesh fabric C30. Also, between a portion of the first electric wire sensor C31 passing through the front side of the mesh cloth C30 and a portion of the first electric wire sensor C31 adjacent to the first electric wire sensor C31 passing through the front side of the mesh cloth C30.
  • the second electric wire sensor C32 passes through the front side of the mesh cloth C30, and a portion of the second electric wire sensor C32 passing through the front side of the mesh cloth C30 and a second electric wire sensor adjacent to the second electric wire sensor C32
  • the first electric wire sensor C31 passes through the front side of the mesh fabric C30 between the portion of C32 that passes through the front side of the mesh fabric C30. According to this relationship, a point in which the first wire sensor C31 and the second wire sensor C32 overlap with each other with the mesh cloth C30 interposed therebetween is formed.
  • a signal is output from the deformed first electric wire sensor C31, and similarly, as the second electric wire sensor C32 is deformed, a signal is output from the deformed second electric wire sensor C32 .
  • a deformed area can be detected by the first electric wire sensor C31 to which a signal is sent and the second electric wire sensor C32 to which a signal is sent by similarly deforming. it can.
  • the planar sensor C3 shown in FIG. 14 has a front side sheet C33 that covers the mesh cloth C30 from the front side, and a back sheet C34 that covers the mesh cloth C30 from the back.
  • Both the front side sheet body C33 and the back side sheet body C34 are cotton cloths, and are materials different from the mesh cloth C30.
  • Cotton fabric is a material that feels better than mesh fabric, while mesh fabric is a coarser material than cotton fabric.
  • both the front sheet body C33 and the back sheet body C34 may be mesh fabrics.
  • the mesh cloth C30, the front side sheet C33, and the back side sheet C34 are shown separately, but in the completed planar sensor C3, the mesh cloth is between the front side sheet C33 and the back side sheet C34.
  • C30 is sandwiched, and these three (C30, C33, C34) are integrated.
  • the front sheet body C33 and the back sheet body C34 may be larger than the mesh cloth C30, and the outer peripheral portion of the front sheet body C33 and the outer peripheral portion of the back sheet body C34 may be sewn together.
  • the front side sheet C33, the mesh cloth C30, and the back side sheet C34 may be stapled at the central portion so that the mesh cloth C30 does not shift between the front side sheet C33 and the back side sheet C34.
  • the electric wire sensor C1 shown in FIG. 12 is used as an electric wire sensor, the electric wire sensor A1 shown in FIG. 1 and the electric wire sensor B1 shown in each of FIGS. You may use.
  • the planar sensor C3 using the electric wire sensor C1 does not expand and contract in the X-axis direction and does not expand and contract in the Y-axis direction. If it is used after being rotated 90 degrees as shown in FIG. 5C, it becomes a planar sensor that can expand and contract in the direction of the white arrow. Furthermore, to the planar sensor shown in FIG. 5C using the planar sensor where the first electrical wire sensor C31 extends in the X-axis direction and the second electrical wire sensor C32 extends in the Y-axis direction, and the electrical wire sensor C1. By arranging the applied ones in an overlapping manner, it is possible to realize a sensor that expands and contracts both in the X axis direction, in the Y axis direction, and in the diagonal direction.
  • planar sensor C3 using the electric wire sensor C1 is also used for detecting vibrations at high places, detecting heartbeats and respirations of people as vibrations, and monitoring various things such as nursing care and monitoring of pets. You can also
  • a glove in which a sheet-like sensor C3 using the electric wire sensor C1 is disposed may be attached to a robot hand or may be attached to a person and used for data acquisition such as gripping force in various operations.
  • planar sensor C3 using the electric wire sensor C1 can also be applied to a grip for rehabilitation for contracture patients with fingers.
  • planar sensor C3 using the wire sensor C1 can also be applied to the robot hand as described with reference to FIG.
  • the wire sensor C1 described using FIG. 12 may be used instead of the wire sensor A1.
  • a band-shaped sensor using the electric wire sensor C1 can also be wound around a welded pipe and used for defect inspection of a welded portion.
  • the wire sensor C1 described with reference to FIG. 12 can also be used in another application example of the wire sensor A1 described with reference to FIGS. 5 and 6 or the like. That is, the wire sensor C1 can be used as a spirally wound wire sensor, and a belt-like sensor or a planar sensor can be manufactured by weaving the wire sensor C1 like a fabric, but the wire sensor C1 can be knitted like In addition, you may hold down and you may knit.
  • the wire sensor C1 can be made more flexible by making it thinner than a conventional sensor. Because of this, it can be used also as a knitted fabric sensor described using FIG. 5 (a).
  • the electric wire sensor C1 demonstrated using FIG. 12 can also be divided and used for a sensor part and the transmission line of an output signal by heating partially until it exceeds Curie temperature.
  • an insulating film may be provided in place of the piezoelectric film CF, which is the piezoelectric body C12, in the portion that becomes the transmission line of the output signal. Even in the portion where the insulating film is provided, the configurations of the inner conductor C11 and the outer conductor C13 are the same as the configurations of the inner conductor C11 and the outer conductor C13 in the portion where the piezo film CF is provided.
  • the inner conductor C11 around which the piezoelectric film CF is wound extends, the insulating film is wound around, the outer conductor C13 provided on the outer peripheral surface of the piezoelectric film CF also extends, and the inner conductor C11 is provided also on the outer peripheral surface of the insulating film ing.
  • the impedance in the sensor unit and the impedance in the transmission line of the output signal become equal, which is preferable.
  • an insulating material may be applied or welded while keeping the inner conductor C11 and the outer conductor C13 the same.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

Selon la présente invention, une qualité élevée est obtenue pour un capteur linéaire, et un capteur de type courroie et un capteur plan qui utilisent celui-ci, le capteur linéaire ayant un matériau piézoélectrique disposé entre un conducteur interne et un conducteur externe. La présente invention comprend : un conducteur interne C11 ; un film piézoélectrique de type courroie CF qui est enroulé en spirale sur la surface circonférentielle externe du conducteur interne C11 ; et un conducteur externe C13 disposé sur la surface circonférentielle externe du film piézoélectrique CF, le film piézoélectrique CF étant enroulé sur la surface circonférentielle externe du conducteur interne C11 dans un état dans lequel un côté d'extrémité dans le sens de la largeur et un autre côté d'extrémité adjacent se chevauchent mutuellement dans la direction d'extension du conducteur interne C11.
PCT/JP2018/045125 2017-12-11 2018-12-07 Capteur linéaire, capteur de type courroie et capteur plan Ceased WO2019117037A1 (fr)

Priority Applications (1)

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JP2019559603A JP6924516B2 (ja) 2017-12-11 2018-12-07 線状センサ、帯状センサ、および面状センサ

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JP2017-236693 2017-12-11
JP2017236693 2017-12-11
JP2017255283 2017-12-30
JP2017-255283 2017-12-30

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WO2019117037A1 true WO2019117037A1 (fr) 2019-06-20

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JPWO2021182208A1 (fr) * 2020-03-09 2021-09-16
JP2025075094A (ja) * 2020-02-05 2025-05-14 ロボセンサー技研株式会社 線状センサユニット
US12461447B2 (en) 2021-11-24 2025-11-04 Taiwan Semiconductor Manufacturing Co., Ltd. Optical assembly with coating and methods of use
KR102890582B1 (ko) * 2021-11-24 2025-11-24 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 코팅을 가진 광학 어셈블리 및 사용 방법

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2025075094A (ja) * 2020-02-05 2025-05-14 ロボセンサー技研株式会社 線状センサユニット
JPWO2021182208A1 (fr) * 2020-03-09 2021-09-16
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KR102890582B1 (ko) * 2021-11-24 2025-11-24 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 코팅을 가진 광학 어셈블리 및 사용 방법

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JP6924516B2 (ja) 2021-08-25
JP7144088B2 (ja) 2022-09-29
JPWO2019117037A1 (ja) 2020-12-17
JP2022172341A (ja) 2022-11-15
JP2021170032A (ja) 2021-10-28

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