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WO2019099401A3 - Ensemble piège et système pour le piégeage de vapeurs de polymère dans des systèmes de vide de four de traitement - Google Patents

Ensemble piège et système pour le piégeage de vapeurs de polymère dans des systèmes de vide de four de traitement Download PDF

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Publication number
WO2019099401A3
WO2019099401A3 PCT/US2018/060814 US2018060814W WO2019099401A3 WO 2019099401 A3 WO2019099401 A3 WO 2019099401A3 US 2018060814 W US2018060814 W US 2018060814W WO 2019099401 A3 WO2019099401 A3 WO 2019099401A3
Authority
WO
WIPO (PCT)
Prior art keywords
vapors
trap
condensation
vacuum systems
trap assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2018/060814
Other languages
English (en)
Other versions
WO2019099401A2 (fr
Inventor
William A. MOFFAT
Craig Walter McCOY
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yield Engineering Systems
Original Assignee
Yield Engineering Systems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yield Engineering Systems filed Critical Yield Engineering Systems
Publication of WO2019099401A2 publication Critical patent/WO2019099401A2/fr
Publication of WO2019099401A3 publication Critical patent/WO2019099401A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
    • B01D5/0033—Other features
    • B01D5/0045—Vacuum condensation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D21/00—Defrosting; Preventing frosting; Removing condensed or defrost water
    • F25D21/14—Collecting or removing condensed and defrost water; Drip trays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4487—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by using a condenser
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Formation Of Insulating Films (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Drying Of Solid Materials (AREA)

Abstract

La présente invention concerne un système de piège conçu pour piéger le polyimide ou d'autres vapeurs sortant d'une chambre de traitement. Les vapeurs sont acheminées depuis la chambre de traitement par l'intermédiaire d'une ligne de sortie chauffée à basse pression, puis refroidies, ce qui entraîne la condensation à un emplacement sélectionné. Les vapeurs condensées s'accumulent dans un piège de liquide. L'invention concerne également un procédé de condensation de vapeurs de polymère dans des lignes de sortie sous vide de chambres de traitement, le flux qui peut avoir une vapeur de polymère vaporisé étant refroidi pour améliorer la condensation à un emplacement choisi. Le piège à liquide peut être vidé et remplacé, conduisant à l'élimination du liquide condensé. Les lignes de sortie de chambre sont protégées contre l'accumulation de condensation.
PCT/US2018/060814 2016-11-14 2018-11-13 Ensemble piège et système pour le piégeage de vapeurs de polymère dans des systèmes de vide de four de traitement Ceased WO2019099401A2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662421671P 2016-11-14 2016-11-14
US15/812,753 2017-11-14
US15/812,753 US20180292122A1 (en) 2016-11-14 2017-11-14 System for trapping polymer vapors in process oven vacuum systems

Publications (2)

Publication Number Publication Date
WO2019099401A2 WO2019099401A2 (fr) 2019-05-23
WO2019099401A3 true WO2019099401A3 (fr) 2019-10-17

Family

ID=62110046

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/US2017/061631 Ceased WO2018090048A1 (fr) 2016-11-14 2017-11-14 Système de piégeage de vapeurs polymère dans des systèmes sous vide de four de traitement
PCT/US2018/060814 Ceased WO2019099401A2 (fr) 2016-11-14 2018-11-13 Ensemble piège et système pour le piégeage de vapeurs de polymère dans des systèmes de vide de four de traitement

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/US2017/061631 Ceased WO2018090048A1 (fr) 2016-11-14 2017-11-14 Système de piégeage de vapeurs polymère dans des systèmes sous vide de four de traitement

Country Status (3)

Country Link
US (1) US20180292122A1 (fr)
TW (1) TWI854964B (fr)
WO (2) WO2018090048A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110064262A (zh) * 2019-05-16 2019-07-30 深圳市中科智诚科技有限公司 一种除尘效果好的具有疏通功能的煤化工湿式除尘设备
US11444053B2 (en) 2020-02-25 2022-09-13 Yield Engineering Systems, Inc. Batch processing oven and method
US11688621B2 (en) 2020-12-10 2023-06-27 Yield Engineering Systems, Inc. Batch processing oven and operating methods
US12374569B2 (en) 2021-10-20 2025-07-29 Yield Engineering Systems, Inc. Batch processing oven for magnetic anneal
CN117427452A (zh) * 2022-07-14 2024-01-23 长鑫存储技术有限公司 半导体加工装置、废气处理机构和方法
CN117488274B (zh) * 2023-12-28 2024-03-26 杭州嘉悦智能设备有限公司 冷凝收集结构及氧化亚硅生产设备

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US3370440A (en) * 1966-01-06 1968-02-27 Ac & R Components Inc Suction accumulator
US3537049A (en) * 1969-04-15 1970-10-27 Ronald J Borrup Electrical induction apparatus
WO1992012811A1 (fr) * 1991-01-18 1992-08-06 Emerson Electric Co. Distillateur d'eau dont les organes de fonctionnement sont amovibles pour permettre un nettoyage
US5236306A (en) * 1991-07-03 1993-08-17 Licentia Patent-Verwaltungs-Gmbh Axial blower for cooling the condenser of an air conditioner
US5974828A (en) * 1996-10-23 1999-11-02 Valeo Thermique Moteur Condenser with removable reservoir for a refrigeration circuit, in particular
US6260379B1 (en) * 1999-12-01 2001-07-17 Visteon Global Technologies, Inc. Condenser with integral receiver dryer
US20080072822A1 (en) * 2006-09-22 2008-03-27 White John M System and method including a particle trap/filter for recirculating a dilution gas
DE202009009910U1 (de) * 2009-07-21 2009-09-24 Truma Gerätetechnik GmbH & Co. KG Wärmetauscher mit Strömungsumlenker
US20160139091A1 (en) * 2014-10-08 2016-05-19 Perkinelmer Health Sciences, Inc. Traps for use with chromatography systems

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US2162550A (en) * 1937-10-27 1939-06-13 Frank P Frankford Air cleaner
DE3248501A1 (de) * 1982-12-29 1984-07-05 Peter W. D. van der 4926 Dörentrup Heijden Kuehlvorrichtung fuer vakuum-destillierapparate und verfahren zur durchfuehrung der destillationskuehlung
US5488833A (en) * 1994-09-26 1996-02-06 Stewart; Jeffrey Tangential flow cold trap
US6063197A (en) * 1997-09-29 2000-05-16 Advanced Micro Devices, Inc. Trap for capturing waste by-product generated by a chemical vapor deposition system
US6197119B1 (en) * 1999-02-18 2001-03-06 Mks Instruments, Inc. Method and apparatus for controlling polymerized teos build-up in vacuum pump lines
US6908499B2 (en) * 2002-10-11 2005-06-21 Taiwan Semiconductor Manufacturing Co., Ltd Cold trap for CVD furnace
US6949622B2 (en) * 2003-08-26 2005-09-27 General Electric Company Method of separating a polymer from a solvent
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US20110139331A1 (en) * 2009-12-15 2011-06-16 E. I. Du Pont De Nemours And Company Method for increasing the strength and solvent resistance of polyimide nanowebs
JPWO2011099079A1 (ja) * 2010-02-12 2013-06-13 ジーエルサイエンス株式会社 試料の捕集方法およびその捕集装置
US9057388B2 (en) * 2012-03-21 2015-06-16 International Business Machines Corporation Vacuum trap

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3370440A (en) * 1966-01-06 1968-02-27 Ac & R Components Inc Suction accumulator
US3537049A (en) * 1969-04-15 1970-10-27 Ronald J Borrup Electrical induction apparatus
WO1992012811A1 (fr) * 1991-01-18 1992-08-06 Emerson Electric Co. Distillateur d'eau dont les organes de fonctionnement sont amovibles pour permettre un nettoyage
US5236306A (en) * 1991-07-03 1993-08-17 Licentia Patent-Verwaltungs-Gmbh Axial blower for cooling the condenser of an air conditioner
US5974828A (en) * 1996-10-23 1999-11-02 Valeo Thermique Moteur Condenser with removable reservoir for a refrigeration circuit, in particular
US6260379B1 (en) * 1999-12-01 2001-07-17 Visteon Global Technologies, Inc. Condenser with integral receiver dryer
US20080072822A1 (en) * 2006-09-22 2008-03-27 White John M System and method including a particle trap/filter for recirculating a dilution gas
DE202009009910U1 (de) * 2009-07-21 2009-09-24 Truma Gerätetechnik GmbH & Co. KG Wärmetauscher mit Strömungsumlenker
US20160139091A1 (en) * 2014-10-08 2016-05-19 Perkinelmer Health Sciences, Inc. Traps for use with chromatography systems

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
RAPER: "High Performance Co-Polyimide Synthesis for Cosmic Radiation Shielding", UNDERGRADUATE HONORS THESES. PAPER 201., April 2015 (2015-04-01), College of William and Mary, XP055644570, Retrieved from the Internet <URL:https://scholarworks.wm.edu/cgi/viewcontent.cgi?article=1205&context=honorstheses> *

Also Published As

Publication number Publication date
WO2019099401A2 (fr) 2019-05-23
WO2018090048A1 (fr) 2018-05-17
TW201924761A (zh) 2019-07-01
TWI854964B (zh) 2024-09-11
US20180292122A1 (en) 2018-10-11

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