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WO2018199441A1 - Appareil et procédé pour diminuer un composé perfluoré et générer du fluorure d'étain - Google Patents

Appareil et procédé pour diminuer un composé perfluoré et générer du fluorure d'étain Download PDF

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Publication number
WO2018199441A1
WO2018199441A1 PCT/KR2018/001354 KR2018001354W WO2018199441A1 WO 2018199441 A1 WO2018199441 A1 WO 2018199441A1 KR 2018001354 W KR2018001354 W KR 2018001354W WO 2018199441 A1 WO2018199441 A1 WO 2018199441A1
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WIPO (PCT)
Prior art keywords
tin
unit
perfluorinated compound
reaction
tin fluoride
Prior art date
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Ceased
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PCT/KR2018/001354
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English (en)
Korean (ko)
Inventor
황지원
양원
정수화
방병열
이은도
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Korea Institute of Industrial Technology KITECH
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Korea Institute of Industrial Technology KITECH
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Priority to CN201880027568.9A priority Critical patent/CN110573233B/zh
Publication of WO2018199441A1 publication Critical patent/WO2018199441A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G19/00—Compounds of tin
    • C01G19/04—Halides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/151—Reduction of greenhouse gas [GHG] emissions, e.g. CO2
    • Y02P20/155—Perfluorocarbons [PFC]; Hydrofluorocarbons [HFC]; Hydrochlorofluorocarbons [HCFC]; Chlorofluorocarbons [CFC]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/50—Improvements relating to the production of bulk chemicals

Definitions

  • the present invention relates to an apparatus and method for reducing perfluorinated compounds and generating tin fluoride, and more particularly, to reducing perfluorinated compounds, which are global warming gases, and at the same time, to reducing perfluorinated compounds for producing tin fluoride, which is a high value added material.
  • An apparatus and a method for generating tin fluoride is provided.
  • Perfluorinated compounds are gases that cause global warming, typically sulfur hexafluoride (SF 6 ).
  • Sulfur hexafluoride is a chemically inert, stable gas, and has been widely used in high-capacity power equipment, liquid crystal panels, and semiconductors because it has excellent dielectric strength, fast insulation recovery, and stable arc.
  • sulfur hexafluoride is known to have a global warming index of about 23,900 times higher than carbon dioxide, a representative substance of global warming, due to its infrared absorption ability and chemical stability. This is more than twice as high as that of general perfluorinated compounds, which is 6,500 to 9,200 times higher than CO2. Domestic sulfur fluoride emissions are 19.1 million tons CO 2 eq. 2.7%.
  • sulfur hexafluoride is used as an insulated gas with a high purity of 99.9% or more, but when the sulfur hexafluoride concentration is 97% or less, the total amount of sulfur hexafluoride is used.
  • the demand for perfluorinated compound treatment technology is continuously increasing.
  • sulfur hexafluoride is 64 MtCO2eq. 133.2 MtCO2eq.
  • SOF 6 sulfur hexafluoride
  • various fluorine gases such as hexafluoroethane (C 2 F 6 ), carbon tetrafluoride (CF 4 ), nitrogen trifluoride (NF 3 ), or F -Gas is used, especially in Korea, semiconductors and displays that use a large amount of F-Gas are the main industries, and the perfluorinated compound reduction technology is necessary to simultaneously achieve the goal of coping with climate change and fostering the national civil specialty industry.
  • the most widely used technique is combustion technology, but in order to remove perfluorinated compounds through combustion technology, thermal decomposition temperature of each target material (800 degrees NF 3 , 1200 degrees SF 6 , 1600 degrees CF 4 or more) It is known that it is necessary to maintain the high temperature atmosphere as described above, and even if the temperature condition is insufficient, 100% removal is impossible when the reactants necessary for proper mixing and pyrolysis subsequent reactions are insufficient. In other words, the combustion technology is not economical due to the large amount of energy used, difficult to completely remove the perfluorinated compound, there is a problem that it is difficult to reduce the NOx, CO generated during combustion.
  • the catalyst technology has a very short replacement cycle of the catalyst
  • plasma technology also has a problem that it is difficult and economical to maintain the continuity of operation due to frequent replacement of the torch material.
  • An object of the present invention for solving the above problems is to provide a perfluorinated compound reduction and tin fluoride generating device and method for efficiently reducing the perfluorinated compound which is a global warming gas and at the same time to produce tin fluoride, which is a high value added material. will be.
  • the configuration of the present invention for achieving the above object is a reaction unit accommodated in the liquid tin (Sn); And a raw material input unit for inputting a perfluorinated compound (PFC) to the reaction unit, wherein the perfluorinated compound and the liquid tin react in the reaction unit to generate tin fluoride (SnF 2 ).
  • An apparatus for reducing fluorinated compounds and generating tin fluoride is provided.
  • the perfluorinated compound may be characterized in that sulfur hexafluoride (SF 6 ).
  • the perfluorinated compound may include all perfluorinated compounds including fluorine and fluorinated gas.
  • the representative chemical reaction occurring in the reaction unit may be characterized in that SF 6 + 4Sn-> 3SnF 2 + SnS.
  • the heating unit may include a heating unit connected to the reaction unit, and the heating unit may heat the liquid tin contained in the reaction unit to a predetermined temperature.
  • the heating unit may be characterized in that for heating the temperature of the liquid tin contained in the reaction unit 850 to 950 degrees.
  • the measuring unit may be characterized in that for measuring the temperature of the liquid tin contained in the reaction unit, the modification rate of the tin fluoride.
  • the heating unit when the temperature of the liquid tin contained in the reaction unit is heated to 600 to 650 degrees, when the modification rate of the tin fluoride reaches a predetermined target modification rate, the liquid tin
  • the temperature of may be characterized in that for heating to 850 degrees to 950 degrees.
  • a plurality of distribution parts provided spaced apart from each other in the longitudinal direction of the reaction unit is provided below the reaction unit, the distribution unit, the perfluorinated compound introduced from the raw material input unit is the reaction unit When injected into the inside, it may be characterized in that it is provided to be dispersed and injected.
  • condensation portion provided on the upper portion of the reaction portion, the condensation portion, characterized in that the condensation of the tin fluoride in the gas phase generated as a result of the chemical reaction of the reaction portion in the liquid phase or solid phase have.
  • the liquid tin storage unit is further provided on the reaction unit, the liquid tin storage unit may be characterized in that for supplying the liquid tin to the reaction unit.
  • the composition of the present invention for achieving the above object is a) supplying the liquid tin to the reaction unit; b) heating the liquid tin contained in the reaction unit to a predetermined temperature; c) adding the perfluorinated compound to the heated liquid tin and reacting it; And d) condensing tin fluoride produced by the reaction of the liquid tin with the perfluorinated compound.
  • the step b) may be characterized in that for heating the temperature of the liquid tin to 850 to 950 degrees.
  • the step b) may be characterized in that for heating the temperature of the liquid tin 600 to 650 degrees.
  • step c) the modification rate of the tin fluoride may be characterized.
  • the temperature of the liquid tin may be characterized in that for heating to 850 degrees to 950 degrees.
  • the perfluorinated compound in step c), may be characterized in that sulfur hexafluoride (SF 6 ).
  • step c) the chemical reaction occurring in the reaction unit, may be characterized in that SF 6 + 4Sn-> 3SnF 2 + SnS.
  • the configuration of the present invention for achieving the above object provides a semiconductor or display facility to which the perfluorinated compound reduction and tin fluoride generating device is applied.
  • the configuration of the present invention for achieving the above object provides a semiconductor or display device to which the method of reducing the perfluorinated compound and generating tin fluoride.
  • the constitution of the present invention for achieving the above object provides a heavy electric fluoride gas recovery facility applying the method of reducing perfluorinated compounds and tin fluoride.
  • the constitution of the present invention for achieving the above object provides a heavy electric fluoride gas recovery facility applying the method of reducing perfluorinated compounds and tin fluoride.
  • the perfluorinated compound can be removed at a lower temperature than before, and the energy efficiency is high.
  • the combustion technology requires a lot of energy using high-temperature combustion of more than 1200 degrees to effectively remove sulfur hexafluoride, and more than 1600 degrees to effectively remove carbon tetrafluoride, the present invention is overburden even at a temperature of 600 to 650 degrees All the compounds can be removed. That is, the present invention is economical because it can remove all the perfluorinated compounds with less energy than the conventional one.
  • the present invention may remove the perfluorinated compound by reacting the liquid tin and the perfluorinated compound, and at the same time may generate a high value added material such as tin fluoride (SnF 2 ) and tin sulfide (SnS).
  • Tin fluoride is a high value added substance that is about 17 times more expensive than liquid tin and is used in oral cleaning products such as toothpaste.
  • the present invention is economical because it allows the removal of perfluorinated compounds and at the same time allows the production of high value added materials to yield additional revenue.
  • FIG. 1 is an exemplary view of a perfluorinated compound reduction and tin fluoride generating device according to an embodiment of the present invention.
  • FIG. 2 is a block diagram of a perfluorinated compound reduction and tin fluoride generating device according to an embodiment of the present invention.
  • Figure 3 is a graph showing the perfluorinated compound concentration of the perfluorinated compound reduction and tin fluoride generating device according to an embodiment of the present invention.
  • Figure 4 is a graph showing the modification rate of tin fluoride of the perfluorinated compound reduction and tin fluoride generating device according to an embodiment of the present invention.
  • Figure 5 is a flow chart of the perfluorinated compound reduction and tin fluoride production method according to an embodiment of the present invention.
  • a reaction part in which liquid tin (Sn) is accommodated; And a raw material input unit for inputting a perfluorinated compound (PFC) to the reaction unit, wherein the perfluorinated compound and the liquid tin react in the reaction unit to generate tin fluoride (SnF 2 ).
  • PFC perfluorinated compound
  • the device is a reduced compound and tin fluoride generating device.
  • FIG. 1 is an illustration of a perfluorinated compound reduction and tin fluoride generating apparatus according to an embodiment of the present invention
  • Figure 2 is a block diagram of a perfluorinated compound reduction and tin fluoride generating apparatus according to an embodiment of the present invention.
  • the perfluorinated compound reduction and tin fluoride generating device 100 is a reaction unit 110, the liquid tin storage unit 120, the heating unit 130, the measuring unit 140, raw materials Including the input unit 150, the distribution unit 160 and the condensation unit 170, in the reaction unit 110, the perfluorinated compound (PFC) and the liquid tin (Sn) is reacted with tin fluoride (SnF2 ) May be generated.
  • the reaction unit 110 may be provided in the form of a container in which the liquid tin can be accommodated, and may be formed of a material having heat resistance so that damage does not occur even in a high temperature environment of 1000 degrees or more.
  • the liquid tin storage unit 120 may be provided at an upper portion of the reaction unit 110, and supply the liquid tin to the reaction unit 110.
  • the liquid tin storage unit 120 may be provided by heating the liquid tin to be supplied to the reaction unit 110 to be the same as the temperature of the liquid tin contained in the reaction unit (110).
  • liquid tin storage unit 120 may be provided to selectively supply the liquid tin in consideration of the amount of the liquid tin in the reaction unit 110 measured by the measuring unit 140.
  • the heating unit 130 may be connected to the reaction unit 110, and the heating unit 130 may heat the liquid tin contained in the reaction unit 110 to a predetermined temperature. Specific heating temperature of the heating unit 130 will be described later.
  • the measurement unit 140 may be further provided to be connected to the reaction unit 110 and the heating unit 130, the measurement unit 140, the temperature of the liquid tin contained in the reaction unit 110, The modification rate of the tin fluoride can be measured.
  • the measurement unit 140 may generate temperature data by measuring the temperature of the liquid tin contained in the reaction unit 110.
  • the heating unit 130 includes a temperature of the liquid tin contained in the reaction unit 110 within a preset temperature range. Can be controlled.
  • the measurement unit 140 generates a modification rate data by measuring the modification rate of the tin fluoride included in the reaction unit 110, and provides the modification rate data generated to the heating unit 130. Can be.
  • the raw material input part 150 may inject a perfluorinated compound into the reaction part 110, and may be provided at one side of the lower end of the reaction part 110. That is, the perfluorinated compound may be introduced from the lower side of the reaction unit 110 and move toward the upper side.
  • the perfluorinated compound includes refrigerants (CHF 3 , C2HF 3 , C 3 HF 7, etc.) containing SF 6 , CF 4 , C2F 6 , C3F 8 , CHF 3 , NF 3 and fluorine, which are non-carbon greenhouse gases. do.
  • the distribution unit 160 may be provided in the lower side of the inside of the reaction unit 110, a plurality of spaced apart from each other in the longitudinal direction of the reaction unit 110.
  • the distribution unit 160 when the perfluorinated compound introduced from the raw material input unit 150 is injected into the reaction unit 110, by being dispersed and injected, the raw material input unit ( The perfluorinated compound introduced from 150 may be rapidly reacted with the liquid tin.
  • the condensation unit 170 may be provided at an upper portion of the reaction unit 110, and the condensation unit 170 may be provided to condense the tin fluoride in a liquid phase or a solid phase.
  • the condensation unit 170 when condensation of the tin fluoride has moisture in the gas to be condensed, the tin fluoride may dissolve in water and consequently hydrolyze when condensed to 100 degrees or less. Therefore, the condensation temperature of the condensation unit 170 may be characterized in that more than 100 degrees less than 850 degrees.
  • the condensation unit 170 may vaporize and remove the moisture, and condensate the tin fluoride into a liquid or solid phase to recover the tin fluoride.
  • the upper portion of the reaction unit 110 connected to the condensation unit 170 may move up to a predetermined area as the upper portion of the reaction channel 110 moves smoothly to the condensation unit 170. It may be arranged to decrease gradually.
  • the reaction unit 110 provided as described above may speed up the flow rate of the tin fluoride, thereby allowing the tin fluoride to move quickly toward the condensation unit 170.
  • Formula 1 is a chemical reaction formula when sulfur hexafluoride is added, and the reaction formula may vary depending on the perfluorinated compound.
  • Figure 3 is a graph showing the perfluorinated compound concentration of the perfluorinated compound reduction and tin fluoride generating apparatus according to an embodiment of the present invention
  • Figure 4 is a perfluorinated compound reduction and tin fluoride generation according to an embodiment of the present invention It is a graph which shows the modification rate of tin fluoride of a device.
  • the concentration of the sulfur hexafluoride which is a perfluorinated compound contained in the liquid tin, converges to 0 at about 600 degrees or more, and can be completely removed.
  • the modification rate of tin fluoride is about Converge to 100% above 600 degrees.
  • the heating unit 130 will be described with respect to the temperature for heating the liquid tin contained in the reaction unit (110).
  • the liquid tin has a boiling point of about 2600 degrees, the boiling point of tin sulfide is about 1230 degrees, the boiling point of tin fluoride is about 850 degrees. That is, when the temperature of the liquid tin is heated to 850 degrees to 1230 degrees, the tin fluoride is vaporized, and the liquid tin and the tin sulfide are present in a liquid state.
  • the heating unit 130 may heat the temperature of the liquid tin accommodated in the reaction unit 110 850 to 950 degrees. Specifically, when the heating unit 130 heats the liquid tin accommodated in the reaction unit 110 at 850 degrees to 950 degrees, the perfluorinated compound contained in the reaction unit 110 is separated from the liquid tin and the formula (1). Can be removed by reaction. At the same time, the tin fluoride generated through the reaction of Chemical Formula 1 may be generated and vaporized and moved to the condenser 170 to condense.
  • the heating unit 130 may be heated to 850 degrees to heat above the boiling point of the tin fluoride, it may be set to 950 degrees or less to minimize the energy required for heating.
  • the heating unit 130 the temperature of the liquid tin accommodated in the reaction unit 110 to 600 to 650 degrees, the modification rate of the tin fluoride reaches a predetermined target modification rate.
  • it may be provided to heat the temperature of the liquid tin to 850 degrees to 950 degrees.
  • the perfluorinated compound may not be all the reaction as shown in the formula (1) at less than 600 degrees, more than 650 degrees may consume more energy than necessary. Therefore, the heating unit 130 may be heated first to 600 degrees to 650 degrees to remove all of the perfluorinated compound and at the same time consume minimal energy.
  • the heating temperature of the heating unit 130 is any one of CF 4 , C 2 F 6 , C 3 F 8 , CHF 3 , and NF 3 other than sulfur hexafluoride.
  • the heating temperature of the heating unit 130 is The perfluorinated compound and sulfur hexafluoride can be appropriately adjusted to a temperature at which both can react.
  • the heating unit 130 adjusts the temperature of the liquid tin accommodated in the reaction unit 110 to 850. Heating to degrees 950 degrees. As such, when the temperature of the liquid tin is heated to 850 degrees to 950 degrees, all of the tin fluoride may be vaporized to move to the condensation unit 170 to condense. That is, the heating unit 130 according to another embodiment may modify the perfluorinated compound into tin fluoride and condensate tin fluoride with less energy than the heating unit 130 according to the embodiment.
  • the perfluorinated compound reduction and tin fluoride generating device 100 may further include a filter unit (not shown) and the recovery unit (not shown).
  • the heating unit 130 since the tin sulfide produced by the reaction of the perfluorinated compound and the liquid tin has a melting point of about 880 degrees, after all of the tin fluoride is vaporized and condensed, the heating unit 130 according to another embodiment reacts the reaction. In the process of cooling the temperature of the liquid tin in the unit 110 to 600 degrees to 650 degrees, it may change into a solid state.
  • the filter unit may be connected to the reaction unit 110 to collect solid tin sulfide before the raw material input unit 150 injects the perfluorinated compound into the reaction unit 110 again.
  • the recovery unit is provided in connection with the filter unit, and the liquid tin moved together to collect the solid tin sulfide may be transferred back to the liquid tin storage unit 120 to recycle the liquid tin. have.
  • the perfluorinated compound reduction and tin fluoride generation apparatus provided as described above may be applied to semiconductor equipment, heavy electric equipment, liquid crystal panel manufacturing apparatus, and the like. That is, the perfluorinated compound reduction and tin fluoride generating device 100 may be applied to both the perfluorinated compound generating device.
  • Figure 5 is a flow chart of the perfluorinated compound reduction and tin fluoride production method according to an embodiment of the present invention.
  • the method of reducing perfluorinated compound and generating tin fluoride may first perform a step of supplying liquid tin to the reaction unit (S210).
  • the liquid tin storage unit 120 may supply liquid tin to the reaction unit 110, the liquid tin supplied from the liquid tin storage unit 120 may be preheated to a predetermined temperature in advance. have.
  • the step of heating the liquid tin contained in the reaction unit to a predetermined temperature (S220).
  • the heating unit 130 may heat the liquid tin to a predetermined temperature.
  • the heating unit 130 may heat the liquid tin temperature of 850 to 950 degrees.
  • the heating unit 130 may heat the temperature of the liquid tin to 600 to 650 degrees.
  • a step (S230) may be performed by adding a perfluorinated compound to the heated liquid tin.
  • the raw material input unit 150 may inject the perfluorinated compound into the reaction unit 110, in which the perfluorinated compound is the reaction unit 110 by the distribution unit 160 It can be dispersed and injected into the liquid tin contained in the.
  • step S230 of adding the perfluorinated compound to the liquid tin may be reacted as in Chemical Formula 1.
  • the heating unit 130 is set to the heating temperature according to an embodiment vaporizes the tin fluoride formed by the reaction of the perfluorinated compound and the liquid tin at the same time to react the tin fluoride in the gas phase the condensation unit ( 170).
  • the heating unit 130 according to one embodiment provided as described above may be applied when the perfluorinated compound and the liquid tin are continuously added to the reaction unit 110 to continuously perform the reaction.
  • supplying the liquid tin to the reaction unit (S210), heating the liquid tin contained in the reaction unit to a predetermined temperature (S220) and heated Injecting the perfluorinated compound into the liquid tin (S230) may be carried out continuously at the same time.
  • the heating unit 130 is set to the heating temperature according to another embodiment, first, the perfluorinated compound and the liquid tin reacts at 600 to 650 degrees, the modification rate of the tin fluoride and the temperature of the liquid tin It may be provided from the measuring unit 140. When the modification rate of the tin fluoride reaches a predetermined target modification rate, the heating unit 130 may vaporize the tin fluoride by heating the temperature of the liquid tin to 850 degrees to 950 degrees.
  • the heating unit 130 uses the minimum energy that allows the reaction of Chemical Formula 1 to be produced when the tin fluoride is made by reacting the perfluorinated compound with the liquid tin, and generated tin fluoride.
  • the energy efficiency can be improved by heating to the temperature above the boiling point of tin fluoride only when vaporizing.
  • heating unit 130 may be applied when a predetermined amount of perfluorinated compound is added to each section to make the reaction.
  • the application of the heating unit 130 in which the heating temperature is set according to one embodiment and the other embodiment may be easily changed and applied according to an embodiment.
  • the perfluorinated compound has been described as sulfur hexafluoride, but includes all of SF 6 , CF 4 , C 2 F 6 , C 3 F 8 , CHF 3 , and NF 3 .
  • the condenser 170 may condense the vaporized tin fluoride in a liquid or solid state in a previous step.
  • the tin sulfide produced by the reaction of the perfluorinated compound with the liquid tin has a melting point of about 880 degrees. Accordingly, after the tin sulfide is all condensed by vaporizing the tin fluoride, when the heating unit 130 according to another embodiment cools the temperature of the liquid tin to 600 degrees to 650 degrees, it may change into a solid state. .
  • the tin sulfide and the liquid tin may be transferred to the filter unit to collect tin sulfide.
  • the raw material input unit 150 may collect the solid tin sulfide using the filter unit before the perfluorinated compound is introduced into the reaction unit 110 again.
  • the liquid tin that has passed through the filter unit may be further transferred to the liquid tin storage unit.
  • the liquid tin moved together while collecting the solid tin sulfide may be transferred to the liquid tin storage unit 120 through a recovery unit and recycled.
  • the present invention provided as described above can remove the perfluorinated compound at a lower temperature than conventional combustion technology, and thus has high energy efficiency.
  • the combustion technique requires a lot of energy using high-temperature combustion up to 1600 degrees or more to remove all the perfluorinated compounds, but the present invention can remove all the perfluorinated compounds even at a temperature of 600 to 650 degrees. That is, the present invention is economical because it can remove all the perfluorinated compounds with less energy than the conventional one.
  • the present invention may remove the perfluorinated compound by reacting the liquid tin and the perfluorinated compound and at the same time to produce a high value added material such as tin fluoride and tin sulfide.
  • tin fluoride is a high value-added substance that has a price difference of about 17 times that of liquid tin, and is used in oral cleaning products such as toothpaste.
  • the present invention is economical because it allows the removal of perfluorinated compounds and at the same time allows the production of high value added materials to yield additional revenue.
  • the method of reducing perfluorinated compound and generating tin fluoride prepared as described above may be applied to a semiconductor facility, a heavy electric machine, a liquid crystal panel manufacturing apparatus, or the like. That is, the method of reducing the perfluorinated compound and generating tin fluoride may be applied to both the apparatus and the method for producing the perfluorinated compound.

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Abstract

La présente invention concerne un appareil et un procédé pour diminuer les composés perfluorés (PFC) et générer du fluorure d'étain et, plus spécifiquement, un appareil et un procédé pour diminuer les PFC et générer du fluorure d'étain, l'appareil et le procédé ayant pour objet de réduire efficacement les PFC, qui sont des gaz de réchauffement global, et de générer simultanément du fluorure d'étain qui est un matériau à valeur élevée. La présente invention concerne l'appareil pour diminuer le PFC et générer du fluorure d'étain, comprenant : une partie de réaction ayant de l'étain liquide (Sn) reçu à l'intérieur de celle-ci; et une partie d'injection de matériau pour injecter des PFC dans la partie de réaction, les PFC et l'étain liquide réagissant de manière à générer du fluorure d'étain (SnF2) dans la partie de réaction.
PCT/KR2018/001354 2017-04-26 2018-01-31 Appareil et procédé pour diminuer un composé perfluoré et générer du fluorure d'étain Ceased WO2018199441A1 (fr)

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CN201880027568.9A CN110573233B (zh) 2017-04-26 2018-01-31 用于减少全氟化合物并生成氟化锡的装置和方法

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KR1020170053613A KR101859110B1 (ko) 2017-04-26 2017-04-26 과불화 화합물 저감 및 불화주석 생성 장치 및 방법
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Cited By (1)

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RU2713840C1 (ru) * 2018-12-24 2020-02-07 Федеральное государственное бюджетное образовательное учреждение высшего образования "Юго-Западный государственный университет" (ЮЗГУ) Способ получения фторида олова (II) из металла и его диоксида

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WO2023054752A1 (fr) * 2021-09-29 2023-04-06 한국생산기술연구원 Dispositif de réduction de gaz à effet de serre à l'aide d'un métal liquide et son procédé de fonctionnement

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