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WO2018178036A3 - Verfahren zur bestimmung des partialdrucks oder einer konzentration eines dampfes - Google Patents

Verfahren zur bestimmung des partialdrucks oder einer konzentration eines dampfes Download PDF

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Publication number
WO2018178036A3
WO2018178036A3 PCT/EP2018/057700 EP2018057700W WO2018178036A3 WO 2018178036 A3 WO2018178036 A3 WO 2018178036A3 EP 2018057700 W EP2018057700 W EP 2018057700W WO 2018178036 A3 WO2018178036 A3 WO 2018178036A3
Authority
WO
WIPO (PCT)
Prior art keywords
vapour
volume
partial pressure
concentration
determining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2018/057700
Other languages
English (en)
French (fr)
Other versions
WO2018178036A2 (de
Inventor
Michael Long
Birgit Irmgard Beccard
Claudia Cremer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aixtron SE
Original Assignee
Aixtron SE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102017123682.1A external-priority patent/DE102017123682A1/de
Application filed by Aixtron SE filed Critical Aixtron SE
Publication of WO2018178036A2 publication Critical patent/WO2018178036A2/de
Publication of WO2018178036A3 publication Critical patent/WO2018178036A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/543—Controlling the film thickness or evaporation rate using measurement on the vapor source
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02809—Concentration of a compound, e.g. measured by a surface mass change

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)

Abstract

Die Erfindung betrifft ein Verfahren zur Bestimmung des Partialdrucks oder der Konzentration eines Dampfes in einem Volumen (2), wobei eine Sensoroberfläche (6) eines mit einer Oszillationsfrequenz oszillierenden Sensorkörpers (5) auf eine Temperatur temperiert wird, bei der der Dampf unter Ausbildung einer stetig anwachsenden, die Oszillationsfrequenz beeinflussenden Massenanhäufung auf der Sensoroberfläche (6) kondensiert. Zur Erhöhung der Standzeit wird vorgeschlagen, dass die Temperatur so gewählt ist, dass beim Unterschreiten eines Grenzpartialdrucks oder einer Grenzkonzentration des Dampfes im Volumen (2) die Massenanhäufung abnimmt. Die Massenänderung für die Zeit (t1) eines Prozessschrittes, in dem der Dampf durch die Transportleitung (1) strömt oder sich im Volumen (2) befindet, wächst an und nimmt in einer Prozesspause (t2) zwischen zwei Prozessschritten, in der kein Dampf durch die Transportleitung (1) strömt oder sich im Volumen (2) befindet, bis auf Null ab.
PCT/EP2018/057700 2017-03-31 2018-03-27 Verfahren zur bestimmung des partialdrucks oder einer konzentration eines dampfes Ceased WO2018178036A2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE202017106117 2017-03-31
DE202017106117.5 2017-03-31
DE102017123682.1 2017-10-11
DE102017123682.1A DE102017123682A1 (de) 2017-03-31 2017-10-11 Verfahren zur Bestimmung des Partialdrucks oder einer Konzentration eines Dampfes

Publications (2)

Publication Number Publication Date
WO2018178036A2 WO2018178036A2 (de) 2018-10-04
WO2018178036A3 true WO2018178036A3 (de) 2018-12-13

Family

ID=61911544

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2018/057700 Ceased WO2018178036A2 (de) 2017-03-31 2018-03-27 Verfahren zur bestimmung des partialdrucks oder einer konzentration eines dampfes

Country Status (1)

Country Link
WO (1) WO2018178036A2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11359286B2 (en) * 2020-05-01 2022-06-14 Applied Materials, Inc. Quartz crystal microbalance concentration monitor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6125687A (en) * 1998-08-20 2000-10-03 International Business Machines Corporation Apparatus for measuring outgassing of volatile materials from an object
JP2008276998A (ja) * 2007-04-26 2008-11-13 Sony Corp 膜厚センサ、薄膜形成装置、有機ｅｌ表示装置の製造装置、及び有機ｅｌ表示装置の製造方法
JP2012127711A (ja) * 2010-12-14 2012-07-05 Ulvac Japan Ltd 真空蒸着装置及び薄膜の製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7275436B2 (en) 2003-04-21 2007-10-02 Tangidyne Corporation Method and apparatus for measuring film thickness and film thickness growth
US9856563B2 (en) 2012-08-22 2018-01-02 Uchicago Argonne, Llc Micro-balance sensor integrated with atomic layer deposition chamber
DE102014102484A1 (de) 2014-02-26 2015-08-27 Aixtron Se Verwendung eines QCM-Sensors zur Bestimmung der Dampfkonzentration beim OVPD-Verfahren beziehungsweise in einem OVPD-Beschichtungssystem
DE102015104240A1 (de) 2015-03-20 2016-09-22 Aixtron Se Durch Aufheizen zu reinigender QCM-Sensor und dessen Verwendung in einem OVPD-Beschichtungssystem

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6125687A (en) * 1998-08-20 2000-10-03 International Business Machines Corporation Apparatus for measuring outgassing of volatile materials from an object
JP2008276998A (ja) * 2007-04-26 2008-11-13 Sony Corp 膜厚センサ、薄膜形成装置、有機ｅｌ表示装置の製造装置、及び有機ｅｌ表示装置の製造方法
JP2012127711A (ja) * 2010-12-14 2012-07-05 Ulvac Japan Ltd 真空蒸着装置及び薄膜の製造方法

Also Published As

Publication number Publication date
WO2018178036A2 (de) 2018-10-04

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