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WO2018149574A1 - Improved adhesive connection by microstructuring a surface by means of a laser - Google Patents

Improved adhesive connection by microstructuring a surface by means of a laser Download PDF

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Publication number
WO2018149574A1
WO2018149574A1 PCT/EP2018/050830 EP2018050830W WO2018149574A1 WO 2018149574 A1 WO2018149574 A1 WO 2018149574A1 EP 2018050830 W EP2018050830 W EP 2018050830W WO 2018149574 A1 WO2018149574 A1 WO 2018149574A1
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WO
WIPO (PCT)
Prior art keywords
adhesive
laser
sensor
structuring
superstructure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2018/050830
Other languages
German (de)
French (fr)
Inventor
Ingo Buschke
Simon Keßler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Publication of WO2018149574A1 publication Critical patent/WO2018149574A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/3568Modifying rugosity
    • B23K26/3584Increasing rugosity, e.g. roughening
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/18Layered products comprising a layer of metal comprising iron or steel
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B19/00Layered products comprising a layer of natural mineral fibres or particles, e.g. asbestos, mica
    • B32B19/04Layered products comprising a layer of natural mineral fibres or particles, e.g. asbestos, mica next to another layer of the same or of a different material
    • B32B19/041Layered products comprising a layer of natural mineral fibres or particles, e.g. asbestos, mica next to another layer of the same or of a different material of metal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
    • B32B3/26Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
    • B32B3/28Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by a layer comprising a deformed thin sheet, i.e. the layer having its entire thickness deformed out of the plane, e.g. corrugated, crumpled
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
    • B32B3/26Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
    • B32B3/30Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by a layer formed with recesses or projections, e.g. hollows, grooves, protuberances, ribs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/12Interconnection of layers using interposed adhesives or interposed materials with bonding properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/22Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
    • G01F23/28Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
    • G01F23/296Acoustic waves
    • G01F23/2966Acoustic waves making use of acoustical resonance or standing waves
    • G01F23/2967Acoustic waves making use of acoustical resonance or standing waves for discrete levels
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/02Iron or ferrous alloys
    • B23K2103/04Steel or steel alloys
    • B23K2103/05Stainless steel
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/18Dissimilar materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2250/00Layers arrangement
    • B32B2250/022 layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/30Properties of the layers or laminate having particular thermal properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/50Properties of the layers or laminate having particular mechanical properties
    • B32B2307/54Yield strength; Tensile strength
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/70Other properties
    • B32B2307/714Inert, i.e. inert to chemical degradation, corrosion
    • B32B2307/7145Rot proof, resistant to bacteria, mildew, mould, fungi
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/70Other properties
    • B32B2307/73Hydrophobic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/70Other properties
    • B32B2307/732Dimensional properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment

Definitions

  • the invention relates to a method for producing an adhesive bond between a first body which consists at least partially of stainless steel and a second body. Furthermore, the present invention relates to a sensor unit for a vibronic sensor, which is produced by the method according to the invention, and a vibronic sensor with a corresponding sensor unit.
  • Joining processes for joining two components made of different materials are becoming increasingly important today. Depending on the materials used, some completely different problems can be considered, and proven methods can not easily be applied to other material classes. Typical joining methods involve gluing, or thermal processes such as laser welding. It is known that the quality of the respective joint decisively depends on the surface quality of the respective components. To ensure adequate adhesion, at least one of the surfaces to be joined of one of the two components is suitably pretreated in many cases, in particular surfaces are roughened in order to increase the contact surface of the components to be bonded. In the case of plastics, for example, various chemical processes are known, while for metals in particular structuring of the respective surface, for example by means of a variety of grinding or blasting processes, in particular sandblasting, offers.
  • WO2014 / 094729A2 discloses a method for structuring a non-conductive workpiece surface in order to achieve a selective and adherent metallization thereof.
  • the document also deals with the use of ultra-short pulse lasers, which are particularly suitable when the surface to be structured does not withstand high thermal stress.
  • metallic surfaces again reference is made, for example, to the article "High-rate laser processing of metals using high-average power ultra-short pulse lasers" by J. Schille, L. Schneider, L. Hartwig and U. Loeschner, published in the paper No. 3932 - 38th MATADOR Conference.
  • Typical laser-induced structures are, for example, various periodic trench and grating structures, which are also referred to as corrugations.
  • CLPs cone-like-protrusions
  • Vibronic sensors are widely used in process and / or automation technology and serve to determine and / or monitor at least one process variable
  • level measuring devices they have at least one mechanical
  • oscillatory unit such as a tuning fork, a monobloc or a membrane. This is in operation by means of a drive / receiving unit, often in the form of a
  • electromechanical transducer unit excited to mechanical vibrations which in turn may be, for example, a piezoelectric actuator or an electromagnetic drive.
  • the mechanically oscillatable unit can also be designed as a vibratable tube which is flowed through by the respective medium, for example in a measuring device operating according to the Coriolis principle.
  • Corresponding field devices are manufactured by the applicant in great variety and distributed in the case of level measuring devices, for example under the name LIQUIPHANT or SOLIPHANT.
  • the underlying measurement principles are in principle made of a variety of
  • the drive / receiver actuation stimulates the mechanically oscillatable unit to generate mechanical vibrations by means of an electrical signal. Conversely, the drive / receiving unit, the mechanical vibrations of the mechanical
  • the drive / receiving unit is in many cases part of a feedback electrical resonant circuit, by means of which the excitation of the mechanically oscillatable unit to mechanical vibrations takes place.
  • the resonant circuit condition according to which the amplification factor is> 1 and all phases occurring in the resonant circuit are multiples of 360 ° must be satisfied.
  • a certain phase shift between the excitation signal and the received signal must be ensured.
  • a predefinable value for the phase shift that is to say a setpoint value for the phase shift between the excitation signal and the received signal, is frequently set.
  • both analogous and digital methods such as, for example, the documents DE102006034105A1, DE102007013557A1, DE 102005015547A1, DE102009026685A1, are known from the prior art.
  • vibronic sensors are also suitable for determining the density and / or viscosity, as described for example in DE10050299A1, DE102007043811A1, DE10057974A1, or DE102015102834A1.
  • a steatite disk is usually glued before the drive / receiver unit is integrated.
  • the quality of the sensor depends on the sensitive
  • the present invention seeks to provide a way to produce a high quality adhesive bond between a stainless steel and a non-metallic component.
  • the object according to the invention is achieved by a method for producing an adhesive bond between a first body which at least partially consists of a stainless steel and a second non-metallic body, comprising the following
  • Stainless steel is a chemically resistant material with a passive surface. Adhesives therefore adhere to stainless steel comparatively poorly. Due to the surface structuring by means of an ultrashort pulse laser on the one hand an enlargement of the one for the production of the
  • Adhere adhesive bond to the available surface Furthermore, a targeted
  • the surface is preferably structured such that a substantially complete wetting of the enlarged surface can be realized or achieved by means of the adhesive. This allows a uniform flow of the adhesive, which essential for the greatest possible adhesion and, accordingly, crucial for the reproducibility and long-term stability of the adhesive bond.
  • Another advantage of using an ultrashort pulse laser is that the respective structured surface has fewer so-called melting artifacts or even spikes. Due to the short pulse durations in the range of picoseconds or femtoseconds can be achieved in conjunction with a targeted spatial focusing of the laser beam, that the heat introduced sufficient to evaporate material in a given region of the surface (removal) without a larger heat affected zone can form ,
  • only one surface of one of the two bodies is structured by means of the laser. This leads to an increased reproducibility of the splice.
  • the second body has a substantially smooth surface, lateral displacements between the first and second surfaces of the first and second bodies do not result in altered geometry around the joint.
  • the second body consists at least partially of steatite or soapstone.
  • the realization of high quality joining of stainless steel and steatite is generally difficult to realize.
  • the adhesion properties of both materials are usually very different with respect to different adhesives.
  • the laser is operated in a burst mode.
  • burst mode the energy of a single laser pulse is split into a group of individual pulses of different frequencies. This allows a precise adjustment of the laser fluence and, consequently, a particularly gentle possibility of surface structuring. It can be achieved that the respectively structured surface is substantially free of artifacts, in particular melts or spikes.
  • An embodiment of the method includes that the laser is operated at a power of about 50-200 ⁇ and / or a scanning speed parallel to a longitudinal direction of the first surface of about 0.1-1cm / s. Preferred pulse lengths are 5-30ps. Furthermore, a laser with a frequency of 100-1000 kHz is preferably used. Frequencies ⁇ 500 kHz are particularly preferred since so-called shielding effects can be avoided at these frequencies. In the text which follows, a shielding effect is understood to mean that an incident laser pulse is absorbed or scattered on plasma and / or material vapor clouds generated by pulses preceding this pulse. A further embodiment includes that structuring in the form of a superstructure and a fine structure superimposed on the superstructure is produced at least in the first subregion of the first surface. The parameters used for the operation of the laser are thus set appropriately.
  • the superstructure is a periodic structure with a periodicity in the micrometer range, in particular in the range of up to 50 ⁇ m.
  • Particularly preferred are structures having a periodicity in the range of 5-30 ⁇ .
  • the fine structure is a periodic structure with a periodicity in the nanometer range.
  • the fine structure is characterized in particular by a comparatively low aspect ratio. This in turn leads to a significant increase in the wettable surface by means of the adhesive.
  • the fine structure has a periodicity in the range of ⁇ 1 ⁇ .
  • CLPS cone-like protrusions
  • the superstructure has an average structure height (peak-to-valley) of up to 25 ⁇ , preferably 2-20 ⁇ .
  • the average structure height of the fine structure is preferably in a range of about 300-1500 nm.
  • the structures produced according to the invention have comparatively low average structural heights and, consequently, a low aspect ratio, both for the superstructure and also for the fine structure. This is surprisingly particularly advantageous with respect to the wetting of the surface with the adhesive. Although the surface increases with increasing mean structure height.
  • the surface can be wetted completely with the adhesive, since the adhesive can not flow completely into the structures.
  • the transition here is fluid and depends in particular on the viscosity of the adhesive.
  • the periodicity of the structures plays a decisive role in this respect. The larger the periodicity, the greater the average structure height can be selected. However, with increasing periodicity, the effect of surface augmentation may be lower than at lower periodicity with lower average struc- tural height.
  • at least the first subregion of the first surface of the first body, in particular by means of the laser is rendered hydrophobic. The structuring thus leads to a hydrophobization of the surface.
  • a hydrophobic surface leads to improved wetting with, preferably heat-curing, adhesives in the form of epoxy resins.
  • adhesives are cured at temperatures> 100 ° C and have at the beginning of the thermally induced curing usually comparatively low mixing viscosities.
  • At least the first subregion of the first surface is structured in such a way that the adhesive bond produced in each case
  • Method according to at least one of the preceding claims having an adhesive tensile strength of at least 20 MPa.
  • the adhesive tensile strength represents a measure of the quality of the adhesive bond.
  • a sensor unit for a vibronic sensor comprising at least one mechanically oscillatable unit made of a stainless steel and a steatite disk fastened to the sensor unit by means of an adhesive connection, wherein the adhesive connection is produced by means of a method according to one of the preceding claims.
  • the adhesive connection between the vibronic sensor is produced by means of a method according to one of the preceding claims.
  • the adhesive bond has a great influence on the rigidity of the oscillatable unit, from which the resonant frequency of the oscillatable unit directly depends.
  • the structuring of a surface of the oscillatable unit also influences its rigidity, so that structuring with a low average structural height is advantageous here in two respects.
  • a substantially complete wetting of the surface can be achieved by the adhesive used.
  • the rigidity of the oscillatable unit is influenced as little as possible.
  • the adhesive connection is produced in such a way that an anti-resonance frequency of the oscillatable unit is at a maximum of 600 Hz.
  • Antiresonance is determined inter alia by the mechanical coupling between the oscillatable unit and the drive-receiving unit, which in turn depends on the adhesive bond between the oscillatory unit and the steatite disc. Basically, in the case of a vibronic sensor, the distance between the
  • Resonance frequency and the anti-resonant frequency can be influenced by various measures, for. B .:
  • the bond between the oscillatable unit and steatite disk can be optimized without having to accept a loss in terms of mechanical vibration quality.
  • Conventional laser structures with larger mean heights of structure adversely affect the mechanical vibration quality of the vibronic sensor.
  • the present invention relates to a vibronic sensor, comprising at least one sensor unit produced according to the invention.
  • FIGS. 1 to 3 shows two components joined by means of an adhesive connection, wherein the first component is a stainless steel, and wherein the second component consists of a non-metallic material,
  • FIG. 2 shows two images of two surfaces structured according to the invention
  • FIG. 3 shows a schematic sketch (a) of a vibronic sensor according to the prior art, and (b) a tuning fork with a steatite disk attached thereto.
  • Fig. 1 a are a first body 1 made of stainless steel and a second body 2 of a
  • the first surface has a structuring 4, which was produced by means of a method according to the invention.
  • FIG. 1 b A more detailed view of a preferred embodiment of the achieved structuring is shown in Fig. 1 b.
  • the structuring 4 is composed of a superstructure 5 and a superstructure 6 superimposed on this superstructure 5, which is shown only in a partial area.
  • the parameters used for the operation of the laser are thus set appropriately.
  • the superstructure 5 has a periodicity pi in the micrometer range, while the
  • Periodicity p2 (not shown) of the fine structure 6 is in the nanometer range. Moreover, it is advantageous if the superstructure 5 has an average structure height hi (peak-to-valley) of up to 25 ⁇ , preferably 2-20 ⁇ .
  • the aspect ratio is generally understood to mean the ratio of depth or height h of a structure in comparison to its lateral extent, that is to say in comparison with its periodicity p. In the case where an adhesive bond is to be made, a comparatively low aspect ratio h / p is desirable, as this generally results in a significant increase in the surface wettable by the adhesive.
  • Fig. 2 shows two stainless steel surfaces, which were structured according to the invention.
  • Structuring was a picosecond laser with a wavelength of 1064nm at a power of 150 ⁇ used.
  • the feed (lateral velocity along the surface) was 600mm / s for the surface shown in Fig. 2a and 200mm / s for the surface shown in Fig. 2b.
  • At the top right of each image are enlarged sections of the sample surface for a more detailed view.
  • the periodicity pi of the superstructure for the surface shown in Fig. 2a is about 18 ⁇ , and the average structure height ⁇ is.
  • the fine structures are similar for both figures with a periodicity p2 of ⁇ 1 ⁇ and an average structure height of about 0.8 ⁇ . While the surface of Fig. 2a is surprisingly hydrophobic, that of Fig. 2b is hydrophilic. Although no significant difference was found with respect to the adhesion of adhesives with respect to the two different surface structures. However, it has been found that in a structuring according to the example of the sample according to FIG. 2a, an increased quality of the adhesive bond could be achieved. Thus, for example, consistently adhesive strengths of the two respectively joined bodies of> 50 MPa were achieved.
  • a vibronic sensor 7 is shown with a sensor unit 8 comprising a vibratable unit 9 in the form of a tuning fork, which partially immersed in a medium 10, which is located in a container 11.
  • the oscillatable unit 9 is excited by the exciting / receiving unit 12 to mechanical vibrations, and may be, for example, a piezoelectric stack or bimorph drive.
  • an electronic unit 13 is shown, by means of which the signal detection, evaluation and / or - power supply takes place.
  • Fig. 3b is a more detailed view of a sensor unit 8 for a vibronic sensor 7 is shown, which also has an oscillatable unit 9 in the form of a tuning fork, as they are integrated, for example, in the marketed by the applicant under the name LIQUIPHANT vibronic sensors 1.
  • the tuning fork 9 comprises two prongs 15a, 15b which are integrally formed on a membrane 14 and which each consist of a vibrating rod and a paddle formed thereon.
  • Steatitility 18 is attached by means of an adhesive bond to the oscillatable unit 9 in the region of the diaphragm 17.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Acoustics & Sound (AREA)
  • Electromagnetism (AREA)
  • Thermal Sciences (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Adhesives Or Adhesive Processes (AREA)

Abstract

The invention relates to a method for producing an adhesive connection between a first body (1), consisting at least partially of a stainless steel, and a second body (2), comprising the following method steps: structuring (4) at least one first sub-region of a first surface (1a) of the first body (1) by means of an ultrashort pulse laser; and producing an adhesive connection at least between the first sub-region of the first surface (1a) and the first body (1) and at least one second sub-region of a second surface (2a) of the second body (2) by means of an adhesive agent (3). The invention also relates to a sensor unit for a vibronic sensor, wherein an adhesive connection is produced by means of the method according to the invention, as well as a vibronic sensor having a sensor unit according to the invention.

Description

VERBESSERTE KLEBEVERBINDUNG DURCH MIKROSTRUKTURIERUNG EINER OBERFLÄCHE MITTELS LASER  IMPROVED ADHESIVE CONNECTION BY MICROSTRUCTURING A SURFACE WITH A LASER

Die Erfindung betrifft ein Verfahren zur Herstellung einer Klebeverbindung zwischen einem ersten Körper, welcher zumindest teilweise aus Edelstahl besteht und einem zweiten Körper. Ferner betrifft die vorliegende Erfindung eine Sensoreinheit für einen vibronischen Sensor, welche nach dem erfindungsgemäßen Verfahren hergestellt ist, sowie einen vibronischen Sensor mit einer entsprechenden Sensoreinheit. The invention relates to a method for producing an adhesive bond between a first body which consists at least partially of stainless steel and a second body. Furthermore, the present invention relates to a sensor unit for a vibronic sensor, which is produced by the method according to the invention, and a vibronic sensor with a corresponding sensor unit.

Fügeprozesse zum Fügen zweier Bauteile aus unterschiedlichen Materialien gewinnen heute zunehmend an Bedeutung. Je nach den verwendeten Materialien sind teilweise vollkommen unterschiedliche Problematiken zu betrachten und in einem Bereich erprobte Verfahren lassen sich nicht ohne weiteres für andere Materialklassen anwenden. Typische Fügeverfahren betreffen das Kleben, oder auch thermische Verfahren, wie beispielsweise das Laserschweißen. Es ist bekannt, dass die Qualität der jeweiligen Fügestelle entscheidend von der Oberflächenbeschaffenheit der jeweiligen Bauteile abhängt. Zur Gewährleistung einer ausreichenden Haftung wird in vielen Fällen zumindest eine der zu fügenden Oberflächen eines der beiden Bauteile geeignet vorbehandelt, insbesondere werden Oberflächen aufgeraut um die Kontaktfläche der zu verklebenden Bauteile zu erhöhen. Im Falle von Kunststoffen sind beispielsweise diverse chemische Verfahren bekannt, während sich für Metalle insbesondere eine Strukturierung der jeweiligen Oberfläche, beispielsweise mittels verschiedenster Schleif- oder Strahlprozesse, insbesondere Sandstrahlen, anbietet. Joining processes for joining two components made of different materials are becoming increasingly important today. Depending on the materials used, some completely different problems can be considered, and proven methods can not easily be applied to other material classes. Typical joining methods involve gluing, or thermal processes such as laser welding. It is known that the quality of the respective joint decisively depends on the surface quality of the respective components. To ensure adequate adhesion, at least one of the surfaces to be joined of one of the two components is suitably pretreated in many cases, in particular surfaces are roughened in order to increase the contact surface of the components to be bonded. In the case of plastics, for example, various chemical processes are known, while for metals in particular structuring of the respective surface, for example by means of a variety of grinding or blasting processes, in particular sandblasting, offers.

Weiterhin ist es bekannt geworden, eine Oberfläche mittels eines geeigneten Laserverfahrens zu strukturieren. Dazu wird die jeweilige Oberfläche häufig mit gepulstem Laserlicht bestrahlt, wodurch selbstorganisierte Strukturen auf der Oberfläche hergestellt werden können. In dieser Hinsicht ist beispielsweise aus der WO2014/094729A2 ein Verfahren zur Strukturierung einer nicht leitenden Werkstückoberfläche bekannt geworden, um eine selektive und haftfeste Metallisierung derselben zu erreichen. In dem Dokument wird auch auf die Verwendung von Ultra-Kurzpuls-Lasern eingegangen, welche sich insbesondere dann eignen, wenn die zu strukturierende Oberfläche keiner hohen thermischen Belastung standhält. In Bezug auf metallische Oberflächen sei wiederum beispielsweise auf den Artikel„High-rate laser processing of metals using high-average power ultra Short pulse lasers" der Autoren J. Schille, L. Schneider, L. Hartwig und U. Loeschner, veröffentlicht im Paper No. 3932 - 38th MATADOR Conference verwiesen. Furthermore, it has become known to structure a surface by means of a suitable laser process. For this purpose, the respective surface is frequently irradiated with pulsed laser light, whereby self-organized structures can be produced on the surface. In this regard, WO2014 / 094729A2, for example, discloses a method for structuring a non-conductive workpiece surface in order to achieve a selective and adherent metallization thereof. The document also deals with the use of ultra-short pulse lasers, which are particularly suitable when the surface to be structured does not withstand high thermal stress. With regard to metallic surfaces, again reference is made, for example, to the article "High-rate laser processing of metals using high-average power ultra-short pulse lasers" by J. Schille, L. Schneider, L. Hartwig and U. Loeschner, published in the paper No. 3932 - 38th MATADOR Conference.

Die jeweils entstehenden Strukturen auf der jeweiligen Oberfläche hängen grundsätzlich empfindlich von dem jeweils verwendeten Laser und den jeweils für dessen Betrieb verwendeten Parametern ab. Typische laser-induzierte Strukturen sind beispielsweise verschiedene periodische Graben- und Gitterstrukturen, welche auch als Riffeln bezeichneten werden. Außerdem sind statistische Strukturen, welche auch als Cone-like-protrusions, kurz CLPs, bezeichnet werden, beobachtbar. Letztere bestehen aus einer Überstruktur im Mikrometerbereich, welcher eine Nanostruktur im Nanometerbereich überlagert ist. Die jeweilige Struktur auf der Oberfläche hat dabei einen erheblichen Einfluss auf den jeweiligen Fügeprozess. The resulting structures on the respective surface are fundamentally sensitive to the particular laser used and the parameters used in each case for its operation. Typical laser-induced structures are, for example, various periodic trench and grating structures, which are also referred to as corrugations. There are also statistical Structures, which are also referred to as cone-like-protrusions, CLPs short, observable. The latter consist of a superstructure in the micrometer range, which is superimposed on a nanostructure in the nanometer range. The respective structure on the surface has a considerable influence on the respective joining process.

Vibronische Sensoren finden vielfach Anwendung in der Prozess- und/oder Automatisierungstechnik und dienen der Bestimmung und/oder Überwachung mindestens einer Prozessgröße eines Vibronic sensors are widely used in process and / or automation technology and serve to determine and / or monitor at least one process variable

Mediums. Im Falle von Füllstandsmessgeräten weisen sie zumindest eine mechanisch Medium. In the case of level measuring devices, they have at least one mechanical

schwingfähige Einheit, wie beispielsweise eine Schwinggabel, einen Einstab oder eine Membran auf. Diese wird im Betrieb mittels einer Antriebs-/Empfangseinheit, häufig in Form einer oscillatory unit, such as a tuning fork, a monobloc or a membrane. This is in operation by means of a drive / receiving unit, often in the form of a

elektromechanischen Wandlereinheit zu mechanischen Schwingungen angeregt, welche wiederum beispielsweise ein piezoelektrischer Antrieb oder ein elektromagnetischer Antrieb sein kann. Die mechanisch schwingfähige Einheit kann im Falle von Durchflussmessgeräten aber auch als schwingfähiges Rohr ausgebildet sein, welches von dem jeweiligen Medium durchflössen wird, wie beispielsweise in einem nach dem Coriolis-Prinzip arbeitenden Messgerät. electromechanical transducer unit excited to mechanical vibrations, which in turn may be, for example, a piezoelectric actuator or an electromagnetic drive. In the case of flowmeters, however, the mechanically oscillatable unit can also be designed as a vibratable tube which is flowed through by the respective medium, for example in a measuring device operating according to the Coriolis principle.

Entsprechende Feldgeräte werden von der Anmelderin in großer Vielfalt hergestellt und im Falle von Füllstandsmessgeräten beispielsweise unter der Bezeichnung LIQUIPHANT oder SOLIPHANT vertrieben. Die zugrundeliegenden Messprinzipien sind im Prinzip aus einer Vielzahl von Corresponding field devices are manufactured by the applicant in great variety and distributed in the case of level measuring devices, for example under the name LIQUIPHANT or SOLIPHANT. The underlying measurement principles are in principle made of a variety of

Veröffentlichungen bekannt. Die Antriebs-/Empf angsei nheit regt die mechanisch schwingfähige Einheit mittels eines elektrischen Anregesignals zu mechanischen Schwingungen an. Umgekehrt kann die Antriebs-/Empfangseinheit die mechanischen Schwingungen der mechanisch Publications known. The drive / receiver actuation stimulates the mechanically oscillatable unit to generate mechanical vibrations by means of an electrical signal. Conversely, the drive / receiving unit, the mechanical vibrations of the mechanical

schwingfähigen Einheit empfangen und in ein elektrisches Empfangssignal umwandeln. Dabei ist die Antriebs-/Empfangseinheit in vielen Fällen Teil eines rückgekoppelten elektrischen Schwingkreises, mittels welchem die Anregung der mechanisch schwingfähigen Einheit zu mechanischen Schwingungen erfolgt. Beispielsweise muss für eine resonante Schwingung die Schwingkreisbedingung, gemäß welcher der Verstärkungsfaktor >1 ist und alle im Schwingkreis auftretenden Phasen ein Vielfaches von 360° ergeben, erfüllt sein. Zur Anregung und Erfüllung der Schwingkreisbedingung muss eine bestimmte Phasenverschiebung zwischen dem Anregesignal und dem Empfangssignal gewährleistet sein. Deshalb wird häufig ein vorgebbarer Wert für die Phasenverschiebung, also ein Sollwert für die Phasenverschiebung zwischen dem Anregesignal und dem Empfangssignal eingestellt. Hierfür sind aus dem Stand der Technik unterschiedlichste Lösungen, sowohl analoge als auch digitale Verfahren, wie beispielsweise die in den Dokumenten DE102006034105A1 , DE102007013557A1 , DE 102005015547A1 , DE102009026685A1 , receive oscillatable unit and convert it into a received electrical signal. In this case, the drive / receiving unit is in many cases part of a feedback electrical resonant circuit, by means of which the excitation of the mechanically oscillatable unit to mechanical vibrations takes place. For example, for a resonant oscillation, the resonant circuit condition according to which the amplification factor is> 1 and all phases occurring in the resonant circuit are multiples of 360 ° must be satisfied. To excite and satisfy the resonant circuit condition, a certain phase shift between the excitation signal and the received signal must be ensured. For this reason, a predefinable value for the phase shift, that is to say a setpoint value for the phase shift between the excitation signal and the received signal, is frequently set. For this purpose, very different solutions, both analogous and digital methods, such as, for example, the documents DE102006034105A1, DE102007013557A1, DE 102005015547A1, DE102009026685A1, are known from the prior art.

DE102009028022A, DE102010030982A1 oder DE00102010030982A1 beschriebenen. Neben einem, insbesondere vorgebbaren, Füllstand eines Mediums in einem Behälter, welcher anhand einer Änderung einer Resonanzfrequenz oder einer Amplitude der mechanisch schwingfähigen Einheit detektierbar ist, eignen sich vibronische Sensoren ebenfalls zur Ermittlung der Dichte und/oder Viskosität, wie beispielsweise in DE10050299A1 , DE102007043811A1 , DE10057974A1 , oder DE102015102834A1 beschrieben. DE102009028022A, DE102010030982A1 or DE00102010030982A1 described. In addition to a, in particular specifiable, level of a medium in a container, which reference a change in a resonant frequency or an amplitude of the mechanically oscillatable unit is detected, vibronic sensors are also suitable for determining the density and / or viscosity, as described for example in DE10050299A1, DE102007043811A1, DE10057974A1, or DE102015102834A1.

An die mechanisch schwingfähige Einheit eines vibronischen Sensors, welche häufig aus einem Edelstahl besteht, wird üblicherweise eine Steatitscheibe geklebt, bevor die Antriebs- /Empfangseinheit integriert wird. Dabei hängt die Qualität des Sensors empfindlich von der To the mechanically oscillatable unit of a vibronic sensor, which is often made of stainless steel, a steatite disk is usually glued before the drive / receiver unit is integrated. The quality of the sensor depends on the sensitive

Klebeverbindung ab. Gerade Klebeverbindung zwischen einem Edelstahl und einem zweiten, nichtmetallischen Bauteil sind jedoch schwierig zu realisieren, wie eingangs ausgeführt. Adhesive connection from. Straight adhesive bond between a stainless steel and a second, non-metallic component, however, are difficult to implement, as stated above.

Ausgehend vom Stand der Technik liegt der vorliegenden Erfindung die Aufgabe zugrunde, eine Möglichkeit zur Herstellung einer qualitativ hochwertigen Klebeverbindung zwischen einem Edelstahl und einem nichtmetallischen Bauteil anzugeben. Starting from the prior art, the present invention seeks to provide a way to produce a high quality adhesive bond between a stainless steel and a non-metallic component.

Diese Aufgabe wird gelöst durch das erfindungsgemäße Verfahren nach Anspruch 1 sowie durch die Sensoreinheit nach Anspruch 12 und den vibronischen Sensor nach Anspruch 15. This object is achieved by the method according to the invention as claimed in claim 1 and by the sensor unit according to claim 12 and the vibronic sensor according to claim 15.

Vorteilhafte Ausgestaltungen sind in den abhängigen Ansprüchen angegeben. Advantageous embodiments are specified in the dependent claims.

Bezüglich des Verfahrens wird die erfindungsgemäße Aufgabe gelöst durch ein Verfahren zur Herstellung einer Klebeverbindung zwischen einem ersten Körper, welcher zumindest teilweise aus einem Edelstahl besteht und einem zweiten nichtmetallischen Körper, umfassend folgende With regard to the method, the object according to the invention is achieved by a method for producing an adhesive bond between a first body which at least partially consists of a stainless steel and a second non-metallic body, comprising the following

Verfahrensschritte: Steps:

- Strukturieren zumindest eines ersten Teilbereichs einer ersten Oberfläche des ersten - Structure at least a first portion of a first surface of the first

Körpers mittels eines Ultrakurzpulslasers, und Body by means of an ultrashort pulse laser, and

Herstellen einer Klebeverbindung zumindest zwischen dem ersten Teilbereich der ersten Oberfläche des ersten Körpers und zumindest eines zweiten Teilbereichs einer zweiten Oberfläche des zweiten Körpers vermittels eines Klebemittels.  Producing an adhesive bond at least between the first subregion of the first surface of the first body and at least one second subregion of a second surface of the second body by means of an adhesive.

Edelstahl ist ein chemisch beständiges Material mit einer passiven Oberfläche. Klebemittel haften daher auf Edelstahl vergleichsweise schlecht. Durch die Oberflächenstrukturierung mittels eines Ultrakurzpulslasers lässt sich einerseits eine Vergrößerung der für die Herstellung der Stainless steel is a chemically resistant material with a passive surface. Adhesives therefore adhere to stainless steel comparatively poorly. Due to the surface structuring by means of an ultrashort pulse laser on the one hand an enlargement of the one for the production of the

Klebeverbindung zur Verfügung stehenden Oberfläche erreichen. Weiterhin ist eine gezielte Adhere adhesive bond to the available surface. Furthermore, a targeted

Modifikation der Oberfläche möglich. Die Oberfläche wird bevorzugt derart strukturiert, dass eine im Wesentlichen vollständige Benetzung der vergrößerten Oberfläche mittels des Klebemittels realisiert bzw. erreicht werden kann. Dies ermöglicht ein gleichmäßiges Anfließen des Klebemittels, was grundlegend für eine möglichst große Adhäsion und entsprechend entscheidend für die Reproduzierbarkeit und Langzeitbeständigkeit der Klebeverbindung ist. Modification of the surface possible. The surface is preferably structured such that a substantially complete wetting of the enlarged surface can be realized or achieved by means of the adhesive. This allows a uniform flow of the adhesive, which essential for the greatest possible adhesion and, accordingly, crucial for the reproducibility and long-term stability of the adhesive bond.

Ein weiterer Vorteil bei der Verwendung eines Ultrakurzpulslasers besteht darin, dass die jeweils strukturierte Oberfläche weniger sogenannte Schmelzartefakte oder auch Spikes aufweist. Durch die kurzen Pulsdauern im Bereich von Pikosekunden oder Femtosekunden kann einhergehend mit einer gezielten räumlichen Fokussierung des Laserstrahls erreicht werden, dass die jeweils eingebrachte Wärme ausreicht, um Material in einer vorgegeben Region der Oberfläche zu verdampfen (Abtrag) ohne dass sich eine größere Wärmeeinflusszone ausbilden kann. Another advantage of using an ultrashort pulse laser is that the respective structured surface has fewer so-called melting artifacts or even spikes. Due to the short pulse durations in the range of picoseconds or femtoseconds can be achieved in conjunction with a targeted spatial focusing of the laser beam, that the heat introduced sufficient to evaporate material in a given region of the surface (removal) without a larger heat affected zone can form ,

Erfindungsgemäß wird nur eine Oberfläche einer der beiden Körper mittels des Lasers strukturiert. Dies führt zu einer erhöhten Reproduzierbarkeit der Klebestelle. Indem der zweite Körper eine im Wesentlichen glatte Oberfläche aufweist, führen laterale Verschiebungen zwischen der ersten und zweiten Oberfläche des ersten und zweiten Körpers nicht zu einer veränderten Geometrie im Bereich der Fügestelle. According to the invention, only one surface of one of the two bodies is structured by means of the laser. This leads to an increased reproducibility of the splice. As the second body has a substantially smooth surface, lateral displacements between the first and second surfaces of the first and second bodies do not result in altered geometry around the joint.

In einer bevorzugten Ausgestaltung besteht der zweite Körper zumindest teilweise aus Steatit bzw. Speckstein. Die Realisierung einer qualitativ hochwertigen Fügung von Edelstahl und Steatit ist im Allgemeinen schwierig zu realisieren. Beispielsweise sind üblicherweise die Haftungseigenschaften beider Materialien bezüglich verschiedener Klebstoffe sehr unterschiedlich. In a preferred embodiment, the second body consists at least partially of steatite or soapstone. The realization of high quality joining of stainless steel and steatite is generally difficult to realize. For example, the adhesion properties of both materials are usually very different with respect to different adhesives.

In einer weiteren bevorzugten Ausgestaltung wird der Laser in einem Burstmodus betrieben. Im Burstmodus wird die Energie eines einzelnen Laserpulses in eine Gruppe von Einzelpulsen unterschiedlicher Frequenz aufgeteilt. Dies erlaubt eine präzise Einstellung der Laserfluenz und damit einhergehend eine besonders schonende Möglichkeit der Oberflächenstrukturierung. Es kann erreicht werden, dass die jeweils strukturierte Oberfläche im Wesentlichen frei von Artefakten, insbesondere Schmelzen oder Spikes, ist. In a further preferred embodiment, the laser is operated in a burst mode. In burst mode, the energy of a single laser pulse is split into a group of individual pulses of different frequencies. This allows a precise adjustment of the laser fluence and, consequently, a particularly gentle possibility of surface structuring. It can be achieved that the respectively structured surface is substantially free of artifacts, in particular melts or spikes.

Eine Ausgestaltung des Verfahrens beinhaltet, dass der Laser mit einer Leistung von etwa 50-200μϋ und/oder einer Rastergeschwindigkeit parallel zu einer Längsrichtung der ersten Oberfläche von etwa 0,1-1cm/s betrieben wird. Bevorzugte Pulslängen sind 5-30ps. Ferner wird bevorzugt ein Laser mit einer Frequenz von 100-1000kHz verwendet. Besonders bevorzugt sind Frequenzen <500kHz, da bei diesen Frequenzen sogenannte Abschirmeffekte vermieden werden können. Unter einem Abschirmeffekt wird im Folgenden verstanden, dass ein einfallender Laserpuls an durch diesem Puls vorausgehenden Pulsen erzeugten Plasma- und/oder Materialdampfwolken absorbiert oder gestreut wird. Eine weitere Ausgestaltung beinhaltet, dass zumindest im ersten Teilbereich der ersten Oberfläche eine Strukturierung in Form einer Überstruktur und einer der Überstruktur überlagerten Feinstruktur erzeugt wird. Die für den Betrieb des Lasers verwendeten Parameter werden also jeweils geeignet eingestellt. An embodiment of the method includes that the laser is operated at a power of about 50-200μϋ and / or a scanning speed parallel to a longitudinal direction of the first surface of about 0.1-1cm / s. Preferred pulse lengths are 5-30ps. Furthermore, a laser with a frequency of 100-1000 kHz is preferably used. Frequencies <500 kHz are particularly preferred since so-called shielding effects can be avoided at these frequencies. In the text which follows, a shielding effect is understood to mean that an incident laser pulse is absorbed or scattered on plasma and / or material vapor clouds generated by pulses preceding this pulse. A further embodiment includes that structuring in the form of a superstructure and a fine structure superimposed on the superstructure is produced at least in the first subregion of the first surface. The parameters used for the operation of the laser are thus set appropriately.

Für diese Ausgestaltung ist es von Vorteil, wenn es sich bei der Überstruktur um eine periodische Struktur mit einer Periodizität im Mikrometerbereich, insbesondere im Bereich von bis zu 50μιη handelt. Besonders bevorzugt sind Strukturen mit einer Periodizität im Bereich von 5-30 μιη. Ebenso ist es von Vorteil, wenn es sich bei der Feinstruktur um eine periodische Struktur mit einer Periodizität im Nanometerbereich handelt. Die Feinstruktur zeichnet sich insbesondere durch ein vergleichsweise geringes Aspektverhältnis aus. Dies führt wiederum zu einer signifikanten Zunahme der mittels des Klebemittels benetzbaren Oberfläche. Vorzugsweise weist die Feinstruktur eine Periodizität im Bereich von <1 μιη auf. For this embodiment, it is advantageous if the superstructure is a periodic structure with a periodicity in the micrometer range, in particular in the range of up to 50 μm. Particularly preferred are structures having a periodicity in the range of 5-30 μιη. Likewise, it is advantageous if the fine structure is a periodic structure with a periodicity in the nanometer range. The fine structure is characterized in particular by a comparatively low aspect ratio. This in turn leads to a significant increase in the wettable surface by means of the adhesive. Preferably, the fine structure has a periodicity in the range of <1 μιη.

Es ist weiterhin von Vorteil, wenn bei der Strukturierung sogenannte Cone-like-Protrusions (CLPS) erzeugt werden. It is furthermore advantageous if so-called cone-like protrusions (CLPS) are generated in the structuring.

Außerdem ist es vorteilhaft, wenn die Überstruktur eine mittlere Strukturhöhe (peak-to-valley) von bis zu 25μιη aufweist, bevorzugt 2-20 μιη. Dagegen liegt die mittlere Strukturhöhe der Feinstruktur bevorzugt in einem Bereich von etwa 300-1500nm. Moreover, it is advantageous if the superstructure has an average structure height (peak-to-valley) of up to 25μιη, preferably 2-20 μιη. In contrast, the average structure height of the fine structure is preferably in a range of about 300-1500 nm.

Im Vergleich zu herkömmlichen Verfahren zur Laserstrukturierung weisen die erfindungsgemäß hergestellten Strukturen vergleichsweise geringe mittlere Strukturhöhen und damit einhergehend ein geringes Aspektverhältnis auf, sowohl für die Überstruktur als auch hinsichtlich der Feinstruktur. Dies ist überraschender Weise insbesondere vorteilhaft in Bezug auf die Benetzung der Oberfläche mit dem Klebemittel. Zwar nimmt die Oberfläche mit zunehmender mittlerer Strukturhöhe zu. In comparison to conventional methods for laser structuring, the structures produced according to the invention have comparatively low average structural heights and, consequently, a low aspect ratio, both for the superstructure and also for the fine structure. This is surprisingly particularly advantageous with respect to the wetting of the surface with the adhesive. Although the surface increases with increasing mean structure height.

Allerdings kann im Falle größerer mittlerer Strukturhöhen ggf. nicht mehr gewährleistet werden, dass die Oberfläche vollständig mit dem Klebemittel benetzt werden kann, da der Klebstoff nicht vollständig in die Strukturen fließen kann. Der Übergang hierbei ist fließend und hängt insbesondere von der Viskosität des Klebemittels ab. Neben der mittleren Strukturhöhe spielt in dieser Hinsicht auch die Periodizität der Strukturen eine entscheidende Rolle. Desto größer die Periodizität, desto größer kann die mittlere Strukturhöhe gewählt werden. Allerdings wird mit zunehmend größerer Periodizität der Effekt der Oberflächenvergrößerung gegebenenfalls geringer als bei geringerer Periodizität mit geringerer mittlerer Strukturhöhe. In einer weiteren bevorzugten Ausgestaltung des Verfahrens wird zumindest der erste Teilbereich der ersten Oberfläche des ersten Körpers, insbesondere mittels des Lasers, hydrophobiert. Die Strukturierung führt also zu einer Hydrophobierung der Oberfläche. Überraschenderweise führt eine hydrophobe Oberfläche zu einer verbesserten Benetzung mit, vorzugsweise heißhärtenden, Klebemitteln in Form von Epoxidharzen. Solche Klebemitteln werden bei Temperaturen >100°C ausgehärtet und weisen zu Beginn der thermisch induzierten Aushärtung üblicherweise vergleichsweise geringe Mischviskositäten auf. However, in the case of larger average structural heights, it may no longer be possible to ensure that the surface can be wetted completely with the adhesive, since the adhesive can not flow completely into the structures. The transition here is fluid and depends in particular on the viscosity of the adhesive. In addition to the average structure height, the periodicity of the structures plays a decisive role in this respect. The larger the periodicity, the greater the average structure height can be selected. However, with increasing periodicity, the effect of surface augmentation may be lower than at lower periodicity with lower average struc- tural height. In a further preferred embodiment of the method, at least the first subregion of the first surface of the first body, in particular by means of the laser, is rendered hydrophobic. The structuring thus leads to a hydrophobization of the surface. Surprisingly, a hydrophobic surface leads to improved wetting with, preferably heat-curing, adhesives in the form of epoxy resins. Such adhesives are cured at temperatures> 100 ° C and have at the beginning of the thermally induced curing usually comparatively low mixing viscosities.

In einer weiteren bevorzugten Ausgestaltung wird zumindest der erste Teilbereich der ersten Oberfläche derart strukturiert, dass die jeweils hergestellte Klebeverbindung  In a further preferred embodiment, at least the first subregion of the first surface is structured in such a way that the adhesive bond produced in each case

Verfahren nach zumindest einem der vorhergehenden Ansprüche, eine Haftzugfestigkeit von mindestens 20MPa aufweist. Die Haftzugfestigkeit stellt hierbei ein Maß für die Qualität der Klebeverbindung dar. Method according to at least one of the preceding claims, having an adhesive tensile strength of at least 20 MPa. The adhesive tensile strength represents a measure of the quality of the adhesive bond.

Die erfindungsgemäße Aufgabe wird ferner gelöst durch eine Sensoreinheit für einen vibronischen Sensor, umfassend zumindest eine mechanisch schwingfähige Einheit aus einem Edelstahl und eine mittels einer Klebeverbindung an der Sensoreinheit befestigte Steatitscheibe, wobei die Klebeverbindung mittels eines Verfahrens nach einem der vorhergehenden Ansprüche hergestellt ist. Im Falle eines vibronischen Sensors beeinflusst die Klebeverbindung zwischen der The object according to the invention is also achieved by a sensor unit for a vibronic sensor, comprising at least one mechanically oscillatable unit made of a stainless steel and a steatite disk fastened to the sensor unit by means of an adhesive connection, wherein the adhesive connection is produced by means of a method according to one of the preceding claims. In the case of a vibronic sensor, the adhesive connection between the

schwingfähigen Einheit und der Steatitscheibe maßgeblich die Schwingungseigenschaften des Sensors. Insbesondere hat die Klebeverbindung einen großen Einfluss auf die Steifigkeit der schwingfähigen Einheit, von welcher die Resonanzfrequenz der schwingfähigen Einheit direkt abhängt. oscillatory unit and the steatite disc significantly the vibration characteristics of the sensor. In particular, the adhesive bond has a great influence on the rigidity of the oscillatable unit, from which the resonant frequency of the oscillatable unit directly depends.

Die Strukturierung einer Oberfläche der schwingfähigen Einheit beeinflusst ebenfalls deren Steifigkeit, so dass eine Strukturierung mit einer geringen mittleren Strukturhöhe hier in zweierlei Hinsicht vorteilhaft ist. Zum einen kann, wie bereits erwähnt eine im Wesentlichen vollständige Benetzung der Oberfläche durch das verwendete Klebemittel erzielt werden. Zum anderen wird aufgrund der geringen Strukturhöhe gewährleistet, dass die Steifigkeit der schwingfähigen Einheit möglichst wenig beeinflusst wird. The structuring of a surface of the oscillatable unit also influences its rigidity, so that structuring with a low average structural height is advantageous here in two respects. On the one hand, as already mentioned, a substantially complete wetting of the surface can be achieved by the adhesive used. On the other hand, due to the low structural height, it is ensured that the rigidity of the oscillatable unit is influenced as little as possible.

In einer bevorzugten Ausgestaltung ist die Klebeverbindung derart hergestellt ist, dass eine Antiresonanzfrequenz der schwingfähigen Einheit bei maximal 600Hz liegt. Die Lage der In a preferred embodiment, the adhesive connection is produced in such a way that an anti-resonance frequency of the oscillatable unit is at a maximum of 600 Hz. The location of

Antiresonanz ist unter anderem durch die mechanische Kopplung zwischen der schwingfähigen Einheit und der Antriebs-Empfangseinheit bestimmt, welche wiederum von der Klebeverbindung zwischen der schwingfähigen Einheit und der Steatitscheibe abhängt. Grundsätzlich kann im Fall eines vibronischen Sensors der Abstand zwischen der Antiresonance is determined inter alia by the mechanical coupling between the oscillatable unit and the drive-receiving unit, which in turn depends on the adhesive bond between the oscillatory unit and the steatite disc. Basically, in the case of a vibronic sensor, the distance between the

Resonanzfrequenz und der Antiresonanzfrequenz durch verschiedene Maßnahmen beeinflusst werden, z. B.: Resonance frequency and the anti-resonant frequency can be influenced by various measures, for. B .:

1 ) Einstellung der mechanischen Schwingungsgüte der mechanisch schwingfähigen Einheit durch Änderung der Formgebung bzw. Geometrie (Membrandicke, Übergänge zwischen Membran und schwingfähiger Einheit) und/oder des Materials (u. a. beispielsweise die Steifigkeit); 1) adjustment of the mechanical vibration quality of the mechanically oscillatable unit by changing the shape or geometry (membrane thickness, transitions between membrane and oscillatable unit) and / or the material (including, for example, the stiffness);

2) Vermeidung oder Verringerung von Energieverlusten, z. B. durch einen symmetrischen Aufbau und/oder die Schwingungsübertragungen zwischen Antriebs-/Empfangseinheit, Membran und schwingfähiger Einheit auftreten.  2) prevention or reduction of energy losses, eg. B. by a symmetrical structure and / or the vibration transmission between drive / receiving unit, membrane and oscillatory unit occur.

3) Reduzierung der Anzahl von Bauteilen;  3) reducing the number of components;

4) Vermeidung von mechanischen Verspannungen;  4) avoidance of mechanical tension;

5) Gegebenenfalls Einstellung der Dicke einer isolierenden Scheibe zwischen Membran und Antriebs-Empfangseinheit, wie beispielsweise in der EP0985916B1 beschrieben;  5) Optionally, adjusting the thickness of an insulating disk between the diaphragm and the drive-receiving unit, as described for example in EP0985916B1;

6) Einstellung des Kopplungsfaktors der Antriebs-/Empfangseinheit;und  6) Setting the coupling factor of the drive / receiver unit; and

7) Optimierung von Klebungen und Kontaktierungen.  7) Optimization of bonds and contacts.

Vorteilhaft kann erfindungsgemäß die Klebung zwischen schwingfähiger Einheit und Steatitscheibe optimiert werden, ohne einen Verlust hinsichtlich der mechanischen Schwingungsgüte hinnehmen zu müssen. Herkömmliche Laserstruktunerungen mit größeren mittlerer Strukturhöhen beeinflussen nachteilig die mechanische Schwingungsgüte des vibronischen Sensors. Advantageously, according to the invention, the bond between the oscillatable unit and steatite disk can be optimized without having to accept a loss in terms of mechanical vibration quality. Conventional laser structures with larger mean heights of structure adversely affect the mechanical vibration quality of the vibronic sensor.

Es ist ferner von Vorteil, wenn es sich bei einem für die Herstellung der Klebeverbindung It is also advantageous if it is one for the production of the adhesive bond

verwendeten Klebemittel um ein Klebemittel mit einer Glasübergangstemperatur, welche used adhesive to an adhesive having a glass transition temperature, which

Glasübergangstemperatur außerhalb eines Arbeitsbereiches des Sensors liegt, handelt. Glass transition temperature is outside a working range of the sensor, is.

Weitere wichtige Eigenschaften des verwendeten Klebemittels betreffen die Viskosität und Other important properties of the adhesive used concern the viscosity and

Oberflächenspannung des Klebemittels, sowie die Haftungseigenschaften bezüglich der Surface tension of the adhesive, as well as the adhesion properties with respect to the

Steatitscheibe, deren Oberfläche erfindungsgemäß nicht bearbeitet wird. Steatitscheibe whose surface is not processed according to the invention.

Schließlich betrifft die vorliegende Erfindung einen vibronischen Sensor, umfassend zumindest eine erfindungsgemäß hergestellte Sensoreinheit.  Finally, the present invention relates to a vibronic sensor, comprising at least one sensor unit produced according to the invention.

Es sei darauf verwiesen, dass die im Zusammenhang mit dem erfindungsgemäßen Verfahren genannten Ausführungsformen mutatis mutandis auch für die erfindungsgemäße Sensoreinheit und den erfindungsgemäßen vibronischen Sensor anwendbar sind und umgekehrt. It should be pointed out that the embodiments mentioned in connection with the method according to the invention are mutatis mutandis also applicable to the sensor unit according to the invention and the vibronic sensor according to the invention, and vice versa.

Die Erfindung sowie ihre vorteilhaften Ausgestaltungen werden nachfolgend anhand der Figuren Fig. 1 - Fig. 3 näher beschrieben. Es zeigt: Fig. 1 zwei mittels einer Klebeverbindung gefügte Bauteile, wobei das erste Bauteil ein Edelstahl ist, und wobei das zweite Bauteil aus einem nichtmetallischen Material besteht, The invention as well as its advantageous embodiments will be described in more detail below with reference to FIGS. 1 to 3. It shows: 1 shows two components joined by means of an adhesive connection, wherein the first component is a stainless steel, and wherein the second component consists of a non-metallic material,

Fig. 2 (a) und (b) zwei Abbildungen zweier erfindungsgemäß strukturierter Oberflächen, und Fig. 3 eine schematische Skizze (a) eines vibronischen Sensors gemäß Stand der Technik, und (b) einer Schwinggabel mit einer daran befestigten Steatitscheibe. 2 (a) and (b) show two images of two surfaces structured according to the invention, and FIG. 3 shows a schematic sketch (a) of a vibronic sensor according to the prior art, and (b) a tuning fork with a steatite disk attached thereto.

In Fig. 1 a sind ein erster Körper 1 aus Edelstahl und ein zweiter Körper 2 aus einem In Fig. 1 a are a first body 1 made of stainless steel and a second body 2 of a

nichtmetallischen Werkstoff gezeigt, welche mittels des Klebemittels 3 entlang der Oberflächen 1 a und 2a miteinander verbunden sind. Zur Gewährleistung einer möglichst stabilen und langlebigen Klebeverbindung weist die erste Oberfläche eine Strukturierung 4 auf, welche mittels eines erfindungsgemäßen Verfahrens hergestellt wurde. shown non-metallic material, which are connected together by means of the adhesive 3 along the surfaces 1 a and 2a. To ensure the most stable and durable adhesive bond, the first surface has a structuring 4, which was produced by means of a method according to the invention.

Eine detailliertere Ansicht einer bevorzugten Ausgestaltung der erzielten Strukturierung ist in Fig. 1 b gezeigt. Die Strukturierung 4 setzt sich aus einer Überstruktur 5 und einer dieser Überstruktur 5 überlagerten Feinstruktur 6 zusammen, welche nur in einem Teilbereich dargestellt ist. Zu diesem Zwecke werden die für den Betrieb des Lasers verwendeten Parameter werden also jeweils geeignet eingestellt. Vorteilhaft weist die Überstruktur 5 eine Periodizität pi im Mikrometerbereich auf, während dieA more detailed view of a preferred embodiment of the achieved structuring is shown in Fig. 1 b. The structuring 4 is composed of a superstructure 5 and a superstructure 6 superimposed on this superstructure 5, which is shown only in a partial area. For this purpose, the parameters used for the operation of the laser are thus set appropriately. Advantageously, the superstructure 5 has a periodicity pi in the micrometer range, while the

Periodizität p2 (nicht eingezeichnet) der Feinstruktur 6 im Nanometerbereich liegt. Außerdem ist es vorteilhaft, wenn die Überstruktur 5 eine mittlere Strukturhöhe hi (peak-to-valley) von bis zu 25μιη, bevorzugt 2-20 μιη, aufweist. Unter dem Aspektverhältnis wird im Allgemeinen das Verhältnis aus Tiefe bzw. Höhe h einer Struktur im Vergleich zu ihrer lateralen Ausdehnung, also im Vergleich zu ihrer Periodizität p verstanden. Im Falle, dass eine Klebeverbindung hergestellt werden soll, ist ein vergleichsweise geringes Aspektverhältnis h/p wünschenswert, da dies im Allgemeinen zu einer signifikanten Zunahme der mittels des Klebemittels benetzbaren Oberfläche führt. Periodicity p2 (not shown) of the fine structure 6 is in the nanometer range. Moreover, it is advantageous if the superstructure 5 has an average structure height hi (peak-to-valley) of up to 25 μιη, preferably 2-20 μιη. The aspect ratio is generally understood to mean the ratio of depth or height h of a structure in comparison to its lateral extent, that is to say in comparison with its periodicity p. In the case where an adhesive bond is to be made, a comparatively low aspect ratio h / p is desirable, as this generally results in a significant increase in the surface wettable by the adhesive.

Fig. 2 zeigt zwei Edelstahl-Oberflächen, welche erfindungsgemäß strukturiert wurden. Zur Fig. 2 shows two stainless steel surfaces, which were structured according to the invention. to

Strukturierung wurde ein Picosekunden-Laser mit einer Wellenlänge von 1064nm bei einer Leistung von 150μϋ verwendet. Der Vorschub (laterale Geschwindigkeit entlang der Oberfläche) betrug für die in Fig. 2a gezeigte Oberfläche 600mm/s und für die in Fig. 2b gezeigte Oberfläche 200mm/s. Jeweils rechts oben in den Abbildungen finden sich vergrößerte Ausschnitte der Probenoberfläche für eine detailliertere Ansicht. Die Periodizität pi der Überstruktur für die in Fig. 2a gezeigte Oberfläche beträgt etwa 18μιη, und die mittlere Strukturhöhe

Figure imgf000011_0001
μιη ist. Dagegen beträgt bei der in Fig. 2b gezeigten Oberfläche die Periodizität p2 etwa 80μιη, und die mittlere Strukturhöhe liegt bei h2=60 μιη. Die Feinstrukturen sind für beide Figuren ähnlich mit einer Periodizität p2 von <1 μιη und einer mittleren Strukturhöhe von ca. 0,8 μιη. Während die Oberfläche aus Fig. 2a überraschenderweise hydrophob ist, ist diejenige gemäß Fig. 2b hydrophil. Zwar wurde bezüglich der Haftung von Klebemitteln bezüglich der beiden unterschiedlichen Oberflächenstrukturen kein signifikanter Unterschied festgestellt. Jedoch hat sich herausgestellt, dass bei einer Strukturierung entsprechend dem Beispiel der Probe gemäß Fig. 2a eine erhöhte Qualität der Klebeverbindung erzielt werden konnte. So wurden beispielsweise durchgängig Haftfestigkeiten der beiden jeweils gefügten Körper von >50MPa erreicht. Structuring was a picosecond laser with a wavelength of 1064nm at a power of 150μϋ used. The feed (lateral velocity along the surface) was 600mm / s for the surface shown in Fig. 2a and 200mm / s for the surface shown in Fig. 2b. At the top right of each image are enlarged sections of the sample surface for a more detailed view. The periodicity pi of the superstructure for the surface shown in Fig. 2a is about 18μιη, and the average structure height
Figure imgf000011_0001
μιη is. In contrast, in the surface shown in Fig. 2b, the periodicity p2 is about 80μιη, and the average structural height is h2 = 60 μιη. The fine structures are similar for both figures with a periodicity p2 of <1 μιη and an average structure height of about 0.8 μιη. While the surface of Fig. 2a is surprisingly hydrophobic, that of Fig. 2b is hydrophilic. Although no significant difference was found with respect to the adhesion of adhesives with respect to the two different surface structures. However, it has been found that in a structuring according to the example of the sample according to FIG. 2a, an increased quality of the adhesive bond could be achieved. Thus, for example, consistently adhesive strengths of the two respectively joined bodies of> 50 MPa were achieved.

In Fig. 3a ist schließlich ein vibronischer Sensor 7 mit einer Sensoreinheit 8 umfassend eine schwingfähige Einheit 9 in Form einer Schwinggabel gezeigt, welche teilweise in ein Medium 10 eintaucht, welches sich in einem Behälter 11 befindet. Die schwingfähige Einheit 9 wird mittels der Anrege-/Empfangseinheit 12 zu mechanischen Schwingungen angeregt, und kann beispielsweise ein piezoelektrischer Stapel- oder Bimorphantrieb sein. Es versteht sich jedoch von selbst, dass auch andere Ausgestaltungen eines vibronischen Sensors 7 unter die Erfindung fallen. Weiterhin ist eine Elektronikeinheit 13 dargestellt, mittels welcher die Signalerfassung, -auswertung und/oder - Speisung erfolgt. In Fig. 3a, finally, a vibronic sensor 7 is shown with a sensor unit 8 comprising a vibratable unit 9 in the form of a tuning fork, which partially immersed in a medium 10, which is located in a container 11. The oscillatable unit 9 is excited by the exciting / receiving unit 12 to mechanical vibrations, and may be, for example, a piezoelectric stack or bimorph drive. However, it goes without saying that other embodiments of a vibronic sensor 7 fall under the invention. Furthermore, an electronic unit 13 is shown, by means of which the signal detection, evaluation and / or - power supply takes place.

In Fig. 3b ist eine detailliertere Ansicht einer Sensoreinheit 8 für einen vibronischen Sensor 7 gezeigt, welcher ebenfalls eine schwingfähige Einheit 9 in Form einer Schwinggabel aufweist gezeigt, wie sie beispielsweise im von der Anmelderin unter dem Namen LIQUIPHANT vertriebenen vibronischen Sensoren 1 integriert sind. In Fig. 3b is a more detailed view of a sensor unit 8 for a vibronic sensor 7 is shown, which also has an oscillatable unit 9 in the form of a tuning fork, as they are integrated, for example, in the marketed by the applicant under the name LIQUIPHANT vibronic sensors 1.

Die Schwinggabel 9 umfasst zwei an eine Membran 14 angeformte Gabelzinken 15a, 15b, welche jeweils aus einem Schwingstab und einem daran angeformten Paddel bestehen. Bevor die The tuning fork 9 comprises two prongs 15a, 15b which are integrally formed on a membrane 14 and which each consist of a vibrating rod and a paddle formed thereon. Before the

Antriebs-Empfangseinheit12 in den Sensor 7 integriert wird, wird im Bereich der Membran 17 eine Steatitscheibe 18 mittels einer Klebeverbindung an der schwingfähigen Einheit 9 befestigt. Drive receiving unit 12 is integrated into the sensor 7, a Steatitscheibe 18 is attached by means of an adhesive bond to the oscillatable unit 9 in the region of the diaphragm 17.

Bezugszeichenliste LIST OF REFERENCE NUMBERS

1 Erster Körper 1 first body

1 a Oberfläche des ersten Körpers 2 Zweiter Körper  1 a Surface of the first body 2 Second body

2a Oberfläche des zweiten Körpers 2a surface of the second body

3 Klebemittel 3 adhesives

4 Strukturierung 4 structuring

5 Überstruktur 5 superstructure

6 Feinstruktur 6 fine structure

7 Vibronischer Sensor 7 Vibronic sensor

8 Sensoreinheit 8 sensor unit

9 Schwingfähige Einheit, Schwinggabel 10 Medium 9 Oscillating unit, tuning fork 10 Medium

1 1 Behälter 1 1 container

12 Antriebs-/Empfangseinheit 12 drive / receiver unit

13 Elektronikeinheit 13 electronics unit

14 Membran 14 membrane

15a, 15b Gabelzinken  15a, 15b forks

16 Steatitscheibe p,pi ,P2 Periodizität der Strukturierung h,hi ,h.2 mittlere Strukturhöhe 16 steatite slice p, pi, P2 Periodicity of structuring h, hi, h.2 mean height of structure

Claims

Patentansprüche claims 1. Verfahren zur Herstellung einer Klebeverbindung zwischen einem ersten Körper (1 ), welcher zumindest teilweise aus einem Edelstahl besteht und einem zweiten Körper (2), umfassend folgende Verfahrensschritte: 1. A method for producing an adhesive bond between a first body (1) which consists at least partially of a stainless steel and a second body (2), comprising the following method steps: Strukturieren (4) zumindest eines ersten Teilbereichs einer ersten Oberfläche (1 a) des ersten Körpers (1 ) mittels eines Ultrakurzpulslasers, und  Structuring (4) at least a first subregion of a first surface (1a) of the first body (1) by means of an ultrashort pulse laser, and Herstellen einer Klebeverbindung zumindest zwischen dem ersten Teilbereich der ersten Oberfläche (1a) des ersten Körpers (1 ) und zumindest eines zweiten Teilbereichs einer zweiten Oberfläche (2a) des weiten Körpers (2) vermittels eines Klebemittels (3).  Producing an adhesive bond at least between the first portion of the first surface (1a) of the first body (1) and at least a second portion of a second surface (2a) of the wide body (2) by means of an adhesive (3). 2. Verfahren nach Anspruch 1 , 2. The method according to claim 1, wobei der zweite Körper (2) zumindest teilweise aus Steatit besteht.  wherein the second body (2) consists at least partially of steatite. 3. Verfahren nach Anspruch 1 oder 2, 3. The method according to claim 1 or 2, wobei der Laser in einem Burstmodus betrieben wird.  the laser being operated in a burst mode. 4. Verfahren nach zumindest einem der vorhergehenden Ansprüche, 4. The method according to at least one of the preceding claims, wobei der Laser mit einer Leistung von 50-200μϋ betrieben wird und/oder einer  wherein the laser is operated with a power of 50-200μϋ and / or one Rastergeschwindigkeit parallel zu einer Längsrichtung der ersten Oberfläche von 0,1-1cm/s betrieben wird.  Grid speed is operated parallel to a longitudinal direction of the first surface of 0.1-1 cm / s. 5. Verfahren nach zumindest einem der vorhergehenden Ansprüche, 5. The method according to at least one of the preceding claims, wobei zumindest im ersten Teilbereich der ersten Oberfläche (1a) eine Strukturierung (4) in Form einer Überstruktur (5) und einer der Überstruktur (5) überlagerten Feinstruktur (6) erzeugt wird.  wherein at least in the first subregion of the first surface (1a) a structuring (4) in the form of a superstructure (5) and a superstructure (5) superimposed fine structure (6) is generated. 6. Verfahren nach Anspruch 5, 6. The method according to claim 5, wobei es sich bei der Überstruktur (5) um eine periodische Struktur mit einer Periodizität (pi) im Mikrometerbereich, insbesondere im Bereich von bis zu 50μιη, handelt.  wherein the superstructure (5) is a periodic structure having a periodicity (pi) in the micrometer range, in particular in the range of up to 50μιη, is. 7. Verfahren nach Anspruch5 oder 6, 7. The method according to claim 5 or 6, wobei es sich bei der Feinstruktur (6) um eine periodische Struktur mit einer Periodizität (P2) im Nanometerbereich handelt.  wherein the fine structure (6) is a periodic structure with a periodicity (P2) in the nanometer range. 8. Verfahren nach zumindest einem der Ansprüche 5-7, 8. The method according to at least one of claims 5-7, wobei bei der Strukturierung (4) sogenannte Cone-like-Protrusions (CLPS) erzeugt werden. wherein structuring (4) produces cone-like protrusions (CLPS). 9. Verfahren nach zumindest einem der Ansprüche 5-8, 9. The method according to at least one of claims 5-8, wobei die Überstruktur (5) eine mittlere Strukturhöhe (hi) von bis zu 25 μιη aufweist.  wherein the superstructure (5) has a mean structural height (hi) of up to 25 μιη. 10. Verfahren nach zumindest einem der vorhergehenden Ansprüche, 10. The method according to at least one of the preceding claims, wobei zumindest der erste Teilbereich der ersten Oberfläche (1 a) des ersten Körpers (1 ) hydrophobiert wird.  wherein at least the first portion of the first surface (1 a) of the first body (1) is rendered hydrophobic. 1 1. Verfahren nach zumindest einem der vorhergehenden Ansprüche, 1 1. A method according to at least one of the preceding claims, wobei zumindest der erste Teilbereich der ersten Oberfläche (1 a) nach der Strukturierung mittels des Lasers eine Haftzugfestigkeit von mindestens 20MPaaufweist.  wherein at least the first portion of the first surface (1 a) after structuring by means of the laser has an adhesive tensile strength of at least 20 MPa. 12. Sensoreinheit (8) für einen vibronischen Sensor (7), umfassend zumindest eine mechanisch schwingfähige Einheit (9) aus einem Edelstahl und eine mittels einer Klebeverbindung an der Sensoreinheit befestigte Steatitscheibe (17), wobei die Klebeverbindung mittels eines Verfahrens nach einem der vorhergehenden Ansprüche hergestellt ist.. 12. Sensor unit (8) for a vibronic sensor (7), comprising at least one mechanically oscillatable unit (9) made of a stainless steel and a steatite disk (17) fastened to the sensor unit by means of an adhesive connection, wherein the adhesive connection by means of a method according to one of the preceding Claims is made .. 13. Sensoreinheit (8) nach Anspruch 12,  13. Sensor unit (8) according to claim 12, wobei die Klebeverbindung derart hergestellt ist, dass eine Antiresonanz der schwingfähigen Einheit (9) bei maximal 600Hz liegt. wherein the adhesive bond is made such that an antiresonance of the oscillatable unit (9) is a maximum of 600Hz. 14. Sensoreinheit (8) nach Anspruch 12 oder 13, 14. Sensor unit (8) according to claim 12 or 13, wobei es sich bei einem für die Herstellung der Klebeverbindung verwendeten Klebemittel (3) um ein Klebemittel mit einer Glasübergangstemperatur, welche Glasübergangstemperatur außerhalb eines Arbeitsbereiches des Sensors (7) liegt, handelt. wherein an adhesive (3) used for the preparation of the adhesive bond is an adhesive having a glass transition temperature, which glass transition temperature is outside a working range of the sensor (7). 15. Vibronischer Sensor (7) umfassend zumindest eine Sensoreinheit (8) nach zumindest einem der Ansprüche 12-14. 15. Vibronic sensor (7) comprising at least one sensor unit (8) according to at least one of claims 12-14.
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