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WO2017121696A1 - Pompe à vide à montage sur palier mobile axialement à aimants permanents - Google Patents

Pompe à vide à montage sur palier mobile axialement à aimants permanents Download PDF

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Publication number
WO2017121696A1
WO2017121696A1 PCT/EP2017/050315 EP2017050315W WO2017121696A1 WO 2017121696 A1 WO2017121696 A1 WO 2017121696A1 EP 2017050315 W EP2017050315 W EP 2017050315W WO 2017121696 A1 WO2017121696 A1 WO 2017121696A1
Authority
WO
WIPO (PCT)
Prior art keywords
bearing
rotor
vacuum pump
rotor shaft
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2017/050315
Other languages
German (de)
English (en)
Inventor
Rainer Hölzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Publication of WO2017121696A1 publication Critical patent/WO2017121696A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/642—Mounting; Assembling; Disassembling of axial pumps by adjusting the clearances between rotary and stationary parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/60—Shafts
    • F05D2240/61—Hollow

Definitions

  • the invention relates to a vacuum pump, in particular a turbomolecular vacuum pump.
  • Vacuum pumps such as turbomolecular vacuum pumps, include a rotor element.
  • the rotor element is composed, for example, in turbomolecular pumps of several rotor disks. At least one stator element cooperates with the at least one rotor element.
  • the stator has a plurality of stator disks, wherein the rotor disks and stator disks are arranged alternately.
  • the rotor element and the stator element could, for example, also be corresponding components of a Holweck pump, a Siegbahn pump, etc.
  • the rotor element and the stator element are arranged in a pump housing.
  • the rotor element is connected to a rotor shaft, which carries the at least one rotor element.
  • the rotor shaft and the at least one rotor element may also be integrally formed.
  • the rotor shaft is rotatably mounted in the housing via two bearing elements.
  • electromagnetic bearings are particularly in the case of high-speed vacuum pumps, such as turbomolecular pumps. These have the particular advantage that no wear occurs and high speeds of more than 1500 U / min can be realized with such non-contact bearings.
  • electromagnetic bearings have the disadvantage that the corresponding coils must be connected to a control device in order to accurately change the power supply, a high-precision axial Ensure alignment between the at least one rotor element and the at least one stator.
  • the object of the invention is to provide a vacuum pump in which the axial adjustability of non-contact bearing is simplified.
  • the vacuum pump according to the invention which is in particular a high-speed vacuum pump such as a turbomolecular pump, has a housing in which at least one rotor element and at least one stator element cooperating with the rotor element is arranged. Furthermore, a rotor shaft carrying the at least one rotor element is provided which, if appropriate, may be formed in one piece with individual or all rotor elements.
  • the rotor shaft is supported by two bearing elements.
  • the bearing elements for example, within a hollow rotor shaft, for example, a pin connected to the housing, be arranged, as well as the bearing elements on a pin of the Shaft be arranged and connected in a corresponding receiving device which is connected to the housing. Combinations of such, based on the rotor shaft, inside or outside bearing elements are possible.
  • At least one of the bearing elements is designed as a permanent magnet bearing.
  • the permanent magnet bearing has a stationary magnet element and a rotating magnet element connected to the rotor shaft.
  • an actuator is connected to the stationary magnetic element.
  • an axial displacement of the stationary magnetic element can take place. Due to the effective magnetic forces between the two permanent magnets is carried by moving the stationary magnetic element and a displacement of the rotating magnetic element and thereby an exact adjustment of the axial position between the at least one rotor element and the at least one stator.
  • an actuator device which causes an axial displacement of the stationary magnetic element, it is possible in a simple manner to align the two permanent magnets exactly to each other.
  • the second bearing element By displacing the stationary magnetic element, the axial force generated by the permanent magnet bearing is changed in the direction of the second bearing element.
  • the second bearing element which also generates an opposing axial force, the change in the axial force generated by a displacement of the rotor element is compensated.
  • the radial destabilization is significantly lower. It is also no longer necessary to provide electromagnetic bearings with a correspondingly complex control.
  • the second bearing element could for example be designed as a rolling bearing. It is also particularly preferred to design the second bearing element as a permanent magnet bearing, so that both bearing elements are contactless bearings. In order to realize a non-contact bearing of the rotor, it is necessary to control at least forces or position in one direction.
  • the vacuum pump has no thrust bearing.
  • the axial forces are generated exclusively by the non-contact permanent magnet bearings, which are viewed in the axial direction in a balance of forces, which can be changed by a displacement of the stationary magnetic element such that the rotor element changes its axial position relative to the stator. Due to the lack of a thrust bearing, the rotor element of the vacuum pump is mounted completely non-contact stable, whereby the friction can be significantly reduced.
  • the stationary magnetic element is axially displaceable via an actuator, it is preferred that only in a permanent magnet bearing, the stationary magnetic element is axially displaceable via an actuator.
  • the actuator device is an electromechanical device.
  • an actuator device for example, a, in particular finely controllable electric linear drive or the like, could be provided.
  • electromechanically excitable membranes as the actuator device.
  • this has in particular a plurality of piezo elements stacked on one another. By appropriate driving of these piezoelectric elements, an exact axial displacement of the stationary magnetic element can be realized.
  • the actuator device is connected to a regulating or control device which regulates the axial displacement.
  • a regulating or control device which regulates the axial displacement.
  • the control / control device can thus take place an exact axial displacement of the stationary magnetic element.
  • the control / regulating device is connected to a sensor device. With the aid of the sensor device, in particular, a detection of the position of the at least one rotor element and / or a detection of the relative position between the at least one rotor element and the at least one stator element take place.
  • piezoelectric elements when using piezoelectric elements as the actuator device, it is possible to use the piezoelectric elements themselves as sensors, since it can be detected via the piezoelectric elements whether tensile forces or compressive forces act on them from the permanent magnets. Depending on these magnetic forces, a corresponding driving of the piezoelectric elements can take place.
  • the sensor device in the actuator device and in particular to use the actuator device or elements of the actuator device itself as sensors.
  • the second bearing element is an unregulated bearing element, wherein it is particularly preferred that this bearing element is also designed as a permanent magnet bearing.
  • this bearing element is also designed as a permanent magnet bearing.
  • the components of both designed as a permanent magnet bearing bearing elements are identical. As a result, a cost saving is possible and simplifies the installation.
  • the stationary components of the bearing elements i. e.
  • the two stationary magnetic elements of the two permanent magnet bearings are each arranged on a pin. The pin projects into the hollow rotor shaft, wherein the rotor shaft does not have to be hollow throughout.
  • the projecting into the rotor shaft pin is connected to the actuator device.
  • a fishing camp is provided at least in the designed as a permanent magnet bearing bearing element.
  • This is preferably a ball bearing, which is used only in the overload of the magnetic bearing.
  • both bearing elements are designed as contactless bearings, it is preferred that in each case a fishing camp is provided in the region of both bearing elements. The axial and radial directions can be secured by different bearings.
  • the invention relates to a method for controlling the axial position of a rotor element of a vacuum pump as described above, wherein the axial position of the rotor element is achieved relative to the stator by displacing the stationary magnetic element.
  • the activation of the actuator device which displaces the stationary magnetic element by the control / regulating device takes place.
  • the figure shows a simplified schematic sectional view of an embodiment of a turbomolecular pump according to the invention.
  • the turbomolecular pump has a plurality of rotor disks 10, which together form a rotor element.
  • the rotor disks 10 are arranged on a rotor shaft 12 which is at least partially hollow in the illustrated embodiment.
  • the rotor disks 10 cooperate with stator disks 14, which form a stator element.
  • the rotor disks 10 and the stator disks 14 are alternately arranged in the axial direction.
  • an unillustrated electric motor is connected to the shaft 12.
  • the rotor shaft 12 could be mounted for example via bearing journals.
  • the rotor shaft 12 has two recesses, in each of which a pin 16, 18 projects.
  • a first bearing element 20 and a second bearing element 22 is arranged between the pins 16, 18 and the inside of the at least partially hollow rotor shaft 12.
  • both bearing elements 20, 22 are permanent magnet bearings. These each have a provided on the inside of the rotor shaft 12 rotating magnetic element 24 and a connected to the respective pin 16, 18 stationary magnetic element 26.
  • 18 catcher 28 are provided at the respective inner ends of the pins 16,.
  • the two ends of the pins 16, 18 opposite can be connected to an inner region of the rotor shaft 12 pin-shaped projections 29.
  • the pins 29 serve as axial stops.
  • the pins 29 may be formed, for example, as ceramic pins, which faces a hard surface of the pins 16, 18.
  • the pin 16 is connected in particular to a housing 30 surrounding the pump.
  • the designed as a permanent magnet bearing bearing element 20 is formed as an unregulated bearing element.
  • the interior part of the Permanent bearing 20 formed by the pin 16 can be moved for adjustment purposes.
  • the pin 18 is connected to an intermediate element such as a connecting plate 32.
  • the intermediate element 32 - or the pin 18 directly - is connected to an actuator 34.
  • the actuator means an axial displacement of the pin 18 in the direction of an arrow 36 is possible.
  • an axial displacement of the stationary magnetic element 26 takes place. In this way, a fine adjustment or alignment of the bearings between the rotor element 10 and the stator element 14 can take place.
  • the actuator device 34 is connected to a control / regulating device 38 shown schematically. With the aid of the control / regulating device 38, an exact displacement of the stationary magnetic elements 26 in the direction of the arrow 36 can take place. For this purpose, it is preferred that, for example via an electrical line 40, the control / regulating device 38 is connected to sensors, not shown.
  • the sensors are, in particular, sensors which detect the relative position between the stator element 14 and the rotor element 10. From the position detection can then be made in the direction of arrow 36 with the aid of the control / regulating device 38, a correspondingly precise control of the axial displacement.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

L'invention concerne une pompe à vide, en particulier une pompe turbomoléculaire, qui comprend un élément formant rotor (10) disposé dans un boîtier (30). Un élément formant stator (14) coopère avec l'élément formant rotor (10). L'élément formant rotor (10) est relié à un arbre de rotor (12) qui est monté sur deux éléments formant palier (20, 22). Au moins un des éléments formant palier est conçu comme un palier à aimant permanent (22). Le palier à aimant permanent (22) comprend un élément magnétique fixe (26) et un élément magnétique rotatif (24) relié à l'arbre de rotor (12). Pour régler l'élément formant rotor (10) par rapport à l'élément formant stator (14), l'élément magnétique fixe (26) est relié à un moyen actionneur (34) destiné à effectuer un déplacement axial dans la direction d'une flèche (36).
PCT/EP2017/050315 2016-01-11 2017-01-09 Pompe à vide à montage sur palier mobile axialement à aimants permanents Ceased WO2017121696A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202016000085.4 2016-01-11
DE202016000085.4U DE202016000085U1 (de) 2016-01-11 2016-01-11 Vakuumpumpe

Publications (1)

Publication Number Publication Date
WO2017121696A1 true WO2017121696A1 (fr) 2017-07-20

Family

ID=57758638

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2017/050315 Ceased WO2017121696A1 (fr) 2016-01-11 2017-01-09 Pompe à vide à montage sur palier mobile axialement à aimants permanents

Country Status (2)

Country Link
DE (1) DE202016000085U1 (fr)
WO (1) WO2017121696A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20190145418A1 (en) * 2017-11-16 2019-05-16 L Dean Stansbury Turbomolecular vacuum pump for ionized matter and plasma fields

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3444478B1 (fr) * 2017-08-18 2024-10-16 Pfeiffer Vacuum Gmbh Pompe à vide
WO2019199321A1 (fr) * 2018-04-13 2019-10-17 Dresser-Rand Company Compresseur centrifuge avec roue sans arbre
GB2578899B (en) * 2018-11-13 2021-05-26 Edwards Ltd Vacuum pump

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0642531A (ja) * 1992-07-23 1994-02-15 Ebara Corp 磁気軸受装置及びその制御方法
EP2884125A2 (fr) * 2013-12-13 2015-06-17 Pfeiffer Vacuum Gmbh Système rotatif

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0642531A (ja) * 1992-07-23 1994-02-15 Ebara Corp 磁気軸受装置及びその制御方法
EP2884125A2 (fr) * 2013-12-13 2015-06-17 Pfeiffer Vacuum Gmbh Système rotatif

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20190145418A1 (en) * 2017-11-16 2019-05-16 L Dean Stansbury Turbomolecular vacuum pump for ionized matter and plasma fields
US10557471B2 (en) * 2017-11-16 2020-02-11 L Dean Stansbury Turbomolecular vacuum pump for ionized matter and plasma fields

Also Published As

Publication number Publication date
DE202016000085U1 (de) 2017-04-12

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