WO2017199463A1 - Pressure-sensitive adhesive composition and pressure-sensitive adhesive tape - Google Patents

Abstract

Disclosed are: a silicone-based pressure-sensitive adhesive composition which includes a crosslinked silicone structure and has a gel content of 70-95% and a degree of swelling of 260% or less; and a pressure-sensitive adhesive tape which comprises a substrate and, disposed on at least one surface thereof, a pressure-sensitive adhesive layer comprising the pressure-sensitive adhesive composition. The pressure-sensitive adhesive composition and the pressure-sensitive adhesive tape, even when used in high-temperature environments (for example, 300ºC), leave no adhesive residues upon stripping and can be stripped off with slight force.

Description

Adhesive composition and adhesive tape

For example, the adhesive tape used in a surface treatment process of a member such as heat-resistant glass or a manufacturing process of a semiconductor component such as a glass wafer does not leave adhesive when peeled even when used in a high temperature environment (for example, 300 ° C.). The present invention relates to a silicone-based pressure-sensitive adhesive composition and a pressure-sensitive adhesive tape that can be peeled off with a light force.

Silicone adhesive composition is excellent in heat resistance, cold resistance, weather resistance, electrical insulation and chemical resistance. Further, the pressure-sensitive adhesive tape having a silicone-based pressure-sensitive adhesive layer is unlikely to have adhesive residue at the time of peeling even when used in a high temperature environment. Therefore, such adhesive tapes are widely used in applications such as protection of members and parts, masking, temporary fixing, fixing during transportation, for example, in the surface treatment process of members such as heat-resistant glass and the manufacturing process of semiconductor parts such as glass wafers. It's being used.

Conventionally, many studies have been made on silicone-based pressure-sensitive adhesive compositions and pressure-sensitive adhesive tapes that do not easily cause adhesive residue. For example, Patent Document 1 discloses a silicone pressure-sensitive adhesive composition having no adhesive residue in an adhesive residue test at 250 ° C. to 290 ° C.

Patent Document 2 discloses an adhesive tape for surface protection that has a small increase in adhesive force when reflowed at 260 ° C. in the manufacturing process of a semiconductor component and that has little transfer foreign matter (adhesive residue) to the component.

Among the above patent documents, Patent Document 1 and Patent Document 2 relate to an adhesive tape used in a manufacturing process of a semiconductor component, and the temperature of the usage environment is assumed to be 250 ° C. to 290 ° C. or 260 ° C. . However, in recent semiconductor component manufacturing processes and other processes, an adhesive tape may be used at a temperature exceeding 290 ° C. (for example, 300 ° C.). If a conventional general adhesive tape is used in such a high temperature environment, adhesive residue is likely to occur at the time of peeling. Moreover, even if it is the conventional adhesive tape (patent document 1 and patent document 2 etc.) of the type which is hard to remain | survive with adhesive, there is a possibility that adhesive residue may occur at the time of peeling when used in a higher temperature environment than expected. In addition, the adhesive force increases by being exposed to a higher temperature than expected, and the force required for peeling tends to increase. And when a to-be-adhered body (for example, heat-resistant glass, a glass wafer) consists of a shape and a material which are thin and easy to break, there exists a possibility that a big force may be applied at the time of peeling and it may be broken.

JP2015-193803A JP 2013-147540 A

The present inventors have developed to solve the above-described problems of conventional adhesive tapes when used at a high temperature exceeding 290 ° C. (for example, 300 ° C.). That is, an object of the present invention is to provide a silicone-based pressure-sensitive adhesive composition and a pressure-sensitive adhesive tape that can be peeled off with a light force without leaving adhesive residue even when used in a high-temperature environment (for example, 300 ° C.).

As a result of intensive studies to achieve the above object, the inventors of the present invention have a balance between the gel fraction and the swelling degree of the silicone-based pressure-sensitive adhesive layer, and the adhesive residue at the time of peeling when used in a high-temperature environment (for example, 300 ° C.), The present inventors have found that it is related to various performances such as peeling force, and have completed the present invention.

That is, the present invention includes a crosslinked silicone structure, a gel fraction measured by the following method is 70% or more and 95% or less, and a degree of swelling measured by the following method is 260% or less. The silicone-based pressure-sensitive adhesive composition.
(Gel fraction)
The gel fraction is obtained by the following formula, which is the ratio of the insoluble matter when the silicone pressure-sensitive adhesive composition is immersed in toluene at room temperature for 1 day.
Gel fraction (%) = (C / A) × 100%
A: Initial mass of silicone-based pressure-sensitive adhesive composition C: Dry mass of silicone-based pressure-sensitive adhesive composition after immersion in toluene (drying conditions: 130 ° C., 2 hours)
(Swelling degree)
The degree of swelling is obtained by the following formula, which is a swelling ratio due to absorption of toluene when the silicone-based pressure-sensitive adhesive composition is immersed in toluene at room temperature for 1 day.
Swelling degree (%) = ((B−A) / A) × 100%
A: Initial mass of silicone pressure-sensitive adhesive composition B: Swelling mass of silicone-based pressure-sensitive adhesive composition after immersion in toluene

Furthermore, this invention is an adhesive tape which has an adhesive layer which consists of said adhesive composition on the at least single side | surface of a base material.

According to the present invention, there are provided a silicone-based pressure-sensitive adhesive composition and a pressure-sensitive adhesive tape that can be peeled off with a light force without leaving adhesive residue even when used in a high-temperature environment (for example, 300 ° C.). In particular, since the pressure-sensitive adhesive tape of the present invention has the specific pressure-sensitive adhesive layer, even when heated at a high temperature (for example, 300 ° C.) in a surface treatment process such as heat-resistant glass or a semiconductor component manufacturing process such as a glass wafer, No adhesive remains at the time of peeling after the process, and it can be peeled with a light force. The adhesive tape of the present invention is very useful in this respect.

It is the graph which put together comprehensive evaluation of an Example and a comparative example in the correlation of a gel fraction and swelling degree.

<Adhesive composition>
The pressure-sensitive adhesive composition of the present invention is a pressure-sensitive adhesive composition containing a silicone-based pressure-sensitive adhesive as a main component. The gel fraction of the pressure-sensitive adhesive composition of the present invention is 70% to 95%, preferably 70% to 90%, more preferably 70% to 85%. Moreover, the swelling degree with respect to toluene of the adhesive composition of this invention is 260% or less, Preferably it is 250% or less, More preferably, it is 240% or less. Specific methods for measuring the gel fraction and the degree of swelling are described in the Examples section described below. In general, the degree of swelling depends on the crosslinking density of the pressure-sensitive adhesive composition. When the crosslinking density is high, the three-dimensionally crosslinked polymer chain constituting the pressure-sensitive adhesive is difficult to spread even when immersed in toluene, and the degree of swelling is low. On the other hand, when the crosslinking density is low, the polymer chain is easy to spread and the degree of swelling is high.

If the gel fraction and the degree of swelling are within the specific ranges of the present invention, even if used in a high-temperature environment (for example, 300 ° C.), no adhesive remains and it can be peeled off with a light force. When the gel fraction is less than 70%, the adhesive force to the adherend becomes strong, so that the force required for peeling increases, and adhesive residue due to insufficient cohesive force tends to occur. On the other hand, if the gel fraction exceeds 95%, the silicone rubber contained in the pressure-sensitive adhesive tends to undergo oxidative degradation under high temperature environment, and adhesive residue is likely to occur. Even if the gel fraction is in the range of 70% or more and 95% or less, if the swelling degree exceeds 260%, adhesive residue due to insufficient cohesion due to low crosslinking density is likely to occur, and peeling The power required for is increased.

Specific examples of the silicone-based pressure-sensitive adhesive used in the present invention include silicone raw rubber (polydimethylsiloxane long-chain polymer having a structure composed mainly of D units [(CH ₃ ) ₂ SiO)) and MQ resin (M units). And a pressure-sensitive adhesive containing [(CH ₃ ) ₃ SiO _1/2 ] and a polymer of a three-dimensional silicone resin having a structure consisting of Q units [SiO _4/2 ]). Such a pressure-sensitive adhesive containing a raw silicone rubber and an MQ resin is superior in adhesiveness compared to a single silicone raw rubber. In addition, by changing the ratio of silicone raw rubber and MQ resin in the adhesive, basic adhesive properties such as adhesive strength, holding power, and tack can be controlled. Silicone pressure-sensitive adhesives are roughly classified into an addition-curing type and a peroxide-curing type depending on the curing mechanism.

The addition-curable silicone-based pressure-sensitive adhesive includes, for example, a main agent made of silicone raw rubber containing alkenyl groups, MQ resin, and a crosslinking agent made of polyorganosiloxane containing SiH groups. And it hardens | cures by heating under a platinum catalyst and carrying out a crosslinking reaction. The silicone raw rubber containing an alkenyl group is typically a polyorganosiloxane having at least two alkenyl groups (for example, vinyl groups) bonded to silicon atoms in one molecule. The polyorganosiloxane containing SiH groups is typically a polyorganosiloxane having at least two hydrogen atoms bonded to silicon atoms in one molecule. In general, in addition-curable silicone-based pressure-sensitive adhesives, the gel fraction increases when the blending ratio of the MQ resin to the silicone raw rubber is lowered or the content ratio of the alkenyl group in the silicone raw rubber (and / or MQ resin) is increased. Tend to be. In general, when the content ratio of alkenyl groups in the silicone raw rubber (and / or MQ resin) is increased, the degree of swelling tends to decrease. Therefore, as a method for obtaining a pressure-sensitive adhesive composition having a specific gel fraction and swelling degree of the present invention using an addition-curing type silicone pressure-sensitive adhesive, for example, the blending ratio of MQ resin to the silicone raw rubber and the silicone raw rubber (and There is a method of appropriately adjusting the content ratio of alkenyl groups in (/ MQ resin). However, the pressure-sensitive adhesive composition of the present invention is not limited to that obtained by such an adjustment method.

The peroxide-curing silicone-based pressure-sensitive adhesive contains, for example, a main agent made of silicone raw rubber not containing an alkenyl group, and MQ resin. And after adding peroxides, such as benzoyl peroxide, as a hardening | curing agent, removing a solvent, it hardens | cures by heating at high temperature. In general, in a peroxide curable silicone pressure-sensitive adhesive, the gel fraction tends to increase when the blending ratio of the MQ resin to the silicone raw rubber is lowered or the amount of peroxide added is increased. In general, when the amount of peroxide added is increased, the degree of swelling tends to decrease. Therefore, as a method for obtaining a pressure-sensitive adhesive composition having a specific gel fraction and swelling degree of the present invention using a peroxide-curable silicone pressure-sensitive adhesive, for example, the blending ratio of MQ resin to silicone raw rubber and the peroxide There is a method of appropriately adjusting the amount of the product added. However, the pressure-sensitive adhesive composition of the present invention is not limited to that obtained by such an adjustment method.

¡Silicon adhesives may be used in combination of two or more. In particular, the pressure-sensitive adhesive composition of the present invention preferably contains a cross-linked addition-curable silicone pressure-sensitive adhesive. The crosslinking curing reaction of the silicone pressure-sensitive adhesive is usually carried out by heating. However, depending on the type of the pressure-sensitive adhesive or the curing agent, the crosslinking curing can be performed by a condensation reaction or ultraviolet irradiation. In the case of using an addition-curable silicone pressure-sensitive adhesive, the amount of the crosslinking agent made of a polyorganosiloxane containing a SiH group may be appropriately adjusted.

Also, a pressure-sensitive adhesive composition having a specific gel fraction and swelling degree of the present invention can be obtained using a mixture of two or more types of silicone-based pressure-sensitive adhesives. Specifically, for example, a silicone pressure-sensitive adhesive having a relatively high gel fraction and swelling degree and a silicone pressure-sensitive adhesive having a relatively low gel fraction and swelling degree are mixed at an appropriate ratio and crosslinked and cured. A pressure-sensitive adhesive composition having a gel fraction and a swelling degree within the range of the present invention can be obtained. However, the pressure-sensitive adhesive composition of the present invention is not limited to those obtained by such a method.

An additive may be added to the pressure-sensitive adhesive composition of the present invention for the purpose of improving various properties. Specific examples of additives include inorganic fillers such as carbon black and silica; polyorganosiloxanes such as silicone resin, polydimethylsiloxane and polydimethylphenylsiloxane; and antioxidants such as phenolic antioxidants and amine antioxidants. Agents; silane coupling agents. However, the type and amount of the additive must be appropriately selected so as not to impair the effects of the invention.

<Adhesive tape>
The pressure-sensitive adhesive tape of the present invention is a pressure-sensitive adhesive tape having a pressure-sensitive adhesive layer composed of the pressure-sensitive adhesive composition of the present invention described above on at least one side of a base material, and typically the pressure-sensitive adhesive is applied to one side or both sides of a base film. It is an adhesive tape having an agent layer. The thickness of the pressure-sensitive adhesive layer is not particularly limited, but is preferably 5 to 100 μm, more preferably 5 to 75 μm, and particularly preferably 5 to 50 μm.

The pressure-sensitive adhesive tape of the present invention is a double-sided pressure-sensitive adhesive tape having a pressure-sensitive adhesive layer made of the pressure-sensitive adhesive composition of the present invention on one side of a substrate and a pressure-sensitive adhesive layer made of a conventional pressure-sensitive adhesive composition on the other side. There may be. For example, a pressure-sensitive adhesive made of a conventional pressure-sensitive adhesive composition excellent in fixing force by affixing a pressure-sensitive adhesive layer made of the pressure-sensitive adhesive composition of the present invention to a component side such as glass, which can be peeled off even when used in a high temperature environment When the layer is attached to the carrier (conveying body) side, the double-sided tape remains on the carrier side and does not remain on the component side when the component is peeled after the process.

The pressure-sensitive adhesive layer can be formed by cross-linking and curing reaction of the pressure-sensitive adhesive composition. For example, the pressure-sensitive adhesive composition can be applied on a base material and crosslinked and cured by heating or condensation reaction or ultraviolet irradiation to form a pressure-sensitive adhesive layer on the base material. In addition, the pressure-sensitive adhesive composition is applied onto a release paper or other film, and is subjected to crosslinking and curing by heating or condensation reaction or ultraviolet irradiation to form a pressure-sensitive adhesive layer. The pressure-sensitive adhesive layer is applied to one or both sides of the substrate. It can also be combined.

In order to reduce the viscosity of the pressure-sensitive adhesive composition during application, a solvent may be added. Specific examples of the solvent include aromatic solvents such as toluene and xylene; aliphatic solvents such as hexane, octane and isoparaffin; ketone solvents such as methyl ethyl ketone and methyl isobutyl ketone; ester solvents such as ethyl acetate and isobutyl acetate. And ether solvents such as diisopropyl ether and 1,4-dioxane.

The coating method is not particularly limited, and a known method may be used. Specific examples thereof include coating using a comma coater, lip coater, roll coater, die coater, knife coater, blade coater, rod coater, kiss coater or gravure coater; screen coating; dip coating; cast coating. It is done.

The substrate is not particularly limited, but a film-like substrate is preferable. In particular, a resin film having high heat resistance that can be processed at a high temperature is preferable. Specific examples thereof include polyimide (PI), polyetheretherketone (PEEK), polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyphenylene sulfide (PPS), polyamideimide (PAI), polyethersulfone ( Examples thereof include resin films such as PES) and polytetrafluoroethylene (PTFE). These films can be used as a single layer or a laminated film of two or more layers. Of these, a polyimide film is preferred. The thickness of the substrate is not particularly limited, but is preferably 5 to 200 μm, more preferably 5 to 160 μm, and particularly preferably 5 to 130 μm.

Furthermore, the surface on which the pressure-sensitive adhesive layer of the substrate is provided may be subjected to an easy adhesion treatment as necessary. Examples of the easy adhesion treatment include primer treatment, corona treatment, etching treatment, plasma treatment, and sandblast treatment.

A release liner may be provided on the adhesive tape of the present invention. The release liner is for protecting the pressure-sensitive adhesive layer of the pressure-sensitive adhesive tape, and is peeled off immediately before application, and the pressure-sensitive adhesive is exposed and the pressure-sensitive adhesive tape is attached to the adherend. The kind of release liner is not particularly limited, and a known release liner can be used. Specific examples thereof include those obtained by subjecting the surface of a base material such as fine paper, glassine paper, and synthetic resin film to a release agent treatment. For the release agent treatment, a release agent such as a fluorine-substituted alkyl-modified silicone resin may be used. In particular, the release liner to be laminated on the silicone-based pressure-sensitive adhesive layer is preferably one obtained by releasing the surface of the polyethylene terephthalate film with a fluorine-substituted alkyl-modified silicone resin. Moreover, when the adhesiveness of the adhesive layer is low, a resin film that has not been subjected to a release treatment may be used as a release liner. Specific examples thereof include a polyethylene terephthalate (PET) film, a polyethylene (PE) film, and a polypropylene (PP) film.

The adhesive tape of the present invention does not leave glue even when used in a high temperature environment and can be peeled off with a light force. In particular, if the adhesive strength after use is moderately low in a high temperature environment, it can be easily peeled off with a light force. Specifically, the adhesive strength after heating at 300 ° C. measured by the following method of the pressure-sensitive adhesive tape of the present invention is preferably 0.70 N / 10 mm or less, more preferably 0.50 N / 10 mm or less. More detailed measurement conditions are described in the column of Examples described later.
(Adhesive strength after heating at 300 ° C)
A 20 mm wide adhesive tape is attached to a heat-resistant glass plate, heated at 300 ° C. for 1 hour, then cooled, and the force (N / 10 mm) required to peel the tape at an angle of 180 ° at a speed of 300 mm / min. taking measurement.

Further, the adhesive strength before heating of the adhesive tape of the present invention, that is, the adhesive strength at normal temperature (23 ° C.) measured by the following method is not particularly limited, but is preferably 0.01 N / 10 mm or more. is there.
(Normal temperature adhesive strength)
A 20 mm wide adhesive tape is attached to a heat resistant glass plate, and the force (N / 10 mm) required to peel the tape at an angle of 180 ° at a speed of 300 mm / min is measured.

The pressure-sensitive adhesive tape of the present invention is particularly useful for use in a high temperature environment (preferably over 290 ° C., more preferably 300 ° C.). As specific examples, in the surface treatment process of members such as heat-resistant glass and the manufacturing process of semiconductor parts such as glass wafers, the protection of the adherend (for example, heat-resistant glass, glass wafer), masking, temporary fixing, fixing during transportation Applications are listed.

However, the use of the pressure-sensitive adhesive tape of the present invention is not limited to the use in the high temperature environment as described above. For example, in recent years, plasma processing may be performed in the manufacturing process of various electronic components. The temperature at the time of plasma treatment itself is from room temperature to about 120 ° C., but in that case, the side surface of the end of the adhesive tape may be directly exposed to the plasma, and the adhesive residue tends to be generated at the end due to the influence. . On the other hand, the pressure-sensitive adhesive tape of the present invention has a characteristic that it is difficult for adhesive residue to remain, so that the problem can be reduced even when used in a process including plasma treatment. That is, the pressure-sensitive adhesive tape of the present invention is very useful in applications where a problem of adhesive residue occurs due to factors other than temperature.

Hereinafter, the present invention will be described in more detail with reference to examples. However, the present invention is not limited to these examples. In the following description, “part” means “part by mass”.

<Example 1>
First, a plurality of prototypes (I to IX) of an addition curing type silicone-based adhesive stock solution were prepared. The plurality of prototypes are obtained by appropriately changing the blending ratio of the MQ resin to the silicone raw rubber and the content ratio of the alkenyl group in the silicone raw rubber (and / or the MQ resin), after the crosslinking and curing measured by the method described later. This is a prototype of an adhesive adjusted so that the gel fraction and the degree of swelling exhibit various values. These prototypes all use a common MQ resin. In this example, among these prototypes, an addition-curable silicone-based adhesive stock solution (I) having a gel fraction after cross-linking and curing of 81% and a swelling degree of 247% was selected and used. . Specifically, 100 parts of an addition curable silicone pressure sensitive adhesive stock solution (I) having a solid content concentration of 50% by mass, 50 parts of toluene as a diluting solvent, and 0.4 part of a platinum catalyst as a curing catalyst are uniformly mixed. A liquid (1) was obtained.

Next, the pressure-sensitive adhesive solution was applied to one side of a primer-treated 25 μm-thick polyimide (PI) film so that the thickness of the pressure-sensitive adhesive layer after drying was 30 μm. Was cured and dried to form an adhesive layer. Then, an untreated PET film having a thickness of 38 μm was bonded to the adhesive layer as a release liner to obtain an adhesive tape.

<Example 2>
From the plurality of prototypes described above, the addition-curing silicone-based pressure-sensitive adhesive stock solution (II) (solid content concentration 50% by mass) having a gel fraction of 81% after crosslinking and a swelling degree of 207% is selected. A pressure-sensitive adhesive solution (2) was prepared in the same manner as in Example 1 except that it was used in place of the pressure-sensitive adhesive stock solution (I) to prepare a pressure-sensitive adhesive tape.

<Example 3>
Of the plurality of prototypes described above, the addition-curing silicone pressure-sensitive adhesive stock solution (III) (solid content concentration 50% by mass) having a gel fraction after crosslinking and curing of 89% and a swelling degree of 222% is selected. A pressure-sensitive adhesive solution (3) was prepared in the same manner as in Example 1 except that it was used in place of the pressure-sensitive adhesive stock solution (I) to prepare a pressure-sensitive adhesive tape.

<Example 4>
Of the plurality of prototypes described above, the addition-curing silicone pressure-sensitive adhesive stock solution (IV) (solid content concentration: 50% by mass) having a gel fraction after cross-linking and curing of 73% and a swelling degree of 211% A pressure-sensitive adhesive solution (4) was prepared in the same manner as in Example 1 except that it was used in place of the pressure-sensitive adhesive stock solution (I) to prepare a pressure-sensitive adhesive tape.

<Comparative Example 1>
Of the plurality of prototypes described above, the addition-curing silicone-based pressure-sensitive adhesive stock solution (V) (solid content concentration: 50% by mass) having a gel fraction after crosslinking and curing of 96% and a swelling degree of 333% is selected. A pressure-sensitive adhesive solution (5) was prepared in the same manner as in Example 1 except that it was used in place of the pressure-sensitive adhesive stock solution (I) to prepare a pressure-sensitive adhesive tape.

<Comparative Example 2>
Of the plurality of prototypes described above, the addition-curing silicone-based pressure-sensitive adhesive stock solution (VI) (solid content concentration 50% by mass) having a gel fraction after crosslinking and curing of 90% and a swelling degree of 329% is selected. A pressure-sensitive adhesive solution (6) was prepared in the same manner as in Example 1 except that it was used in place of the pressure-sensitive adhesive stock solution (I) to prepare a pressure-sensitive adhesive tape.

<Comparative Example 3>
Of the plurality of prototypes described above, the addition-curing silicone-based pressure-sensitive adhesive stock solution (VII) (solid content concentration 50% by mass) having a gel fraction of 87% after crosslinking and a swelling degree of 267% is selected. A pressure-sensitive adhesive solution (7) was prepared in the same manner as in Example 1 except that it was used in place of the pressure-sensitive adhesive stock solution (I) to prepare a pressure-sensitive adhesive tape.

<Comparative Example 4>
Of the plurality of prototypes described above, an addition-curing silicone pressure sensitive adhesive stock solution (VIII) (solid content concentration 50% by mass) having a gel fraction of 97% after crosslinking and a swelling degree of 240% is selected. A pressure-sensitive adhesive liquid (8) was prepared in the same manner as in Example 1 except that it was used in place of the pressure-sensitive adhesive stock solution (I) to prepare a pressure-sensitive adhesive tape.

<Comparative Example 5>
Of the plurality of prototypes described above, the addition-curing silicone pressure sensitive adhesive stock solution (IX) (solid content concentration 50% by mass) having a gel fraction after cross-linking and curing of 96% and a swelling degree of 201% is selected. A pressure-sensitive adhesive liquid (9) was prepared in the same manner as in Example 1 except that it was used in place of the pressure-sensitive adhesive stock solution (I) to prepare a pressure-sensitive adhesive tape.

<Gel fraction and swelling degree of pressure-sensitive adhesive composition>
The pressure-sensitive adhesive liquids (1) to (9) obtained in Examples and Comparative Examples were each applied on a release liner so that the thickness after drying was 150 μm. Subsequently, it was heated in a drying oven, cured and dried to obtain an adhesive composition, which was used as a sample. The heating temperature at this time is 130 ° C. and 2 minutes.

The obtained sample was cut into 50 mm × 50 mm, the release liner was peeled off, and a measurement sample comprising a sheet-like pressure-sensitive adhesive composition was obtained. The initial mass (A) of this measurement sample (= mass of the pressure-sensitive adhesive composition before swelling) was measured. Then, this measurement sample was immersed and swollen in toluene at 250 times the initial mass (A) at room temperature (23 ° C.) for 1 day. The sample for measurement was taken out after immersion, and swelling mass (B) (= mass of the adhesive composition swollen with toluene) was measured. Further, this measurement sample was dried with a dryer at 130 ° C. for 2 hours to remove the absorbed solvent, and the dry mass (C) (= the mass of the dried pressure-sensitive adhesive composition) was measured. The gel fraction and swelling degree of the pressure-sensitive adhesive composition were obtained by the following formula.
Gel fraction (%) = (C / A) × 100
Swelling degree (%) = ((B−A) / A) × 100%

<Normal temperature (23 ° C) adhesion to glass>
The pressure-sensitive adhesive tape cut to a width of 20 mm was affixed to a heat-resistant glass plate, reciprocated once with a roller covered with a rubber layer having a weight of 2 kg, and left in a 23 ° C. environment for 30 minutes. Thereafter, the force required to peel the tape at an angle of 180 ° at a speed of 300 mm / min was measured using a tensile tester.

<Adhesiveness to glass after heating at 300 ° C, ease of peeling, adhesive residue>
The pressure-sensitive adhesive tape cut to a width of 20 mm was attached to a heat-resistant glass plate, reciprocated once with a roller covered with a rubber layer having a weight of 2 kg, and left in a dryer at 300 ° C. for 1 hour. This was taken out and allowed to cool at room temperature (23 ° C.). Then, the force (adhesive force) required to peel off the tape at an angle of 180 ° at a speed of 300 mm / min was measured using a tensile tester. Moreover, the ease of peeling was evaluated according to the following criteria based on the measured values.
○: Measurement value is 0.70 N / 10 mm or less ×: Measurement value is higher than 0.70 N / 10 mm

Furthermore, in said test, the presence or absence of the adhesive residue to the heat-resistant glass plate after peeling was confirmed visually, and the following references | standards evaluated.
○: No glue residue ×: There is glue residue

Table 1 shows the results of the above measurements.

<Evaluation results>
As shown in Table 1, the pressure-sensitive adhesive tapes of Examples 1 to 4 did not leave adhesive residue even when peeled after heating at 300 ° C., and the increase in the pressure-sensitive adhesive force was moderately suppressed. .70 N / 10 mm or less).

The adhesive tape of Comparative Example 1 had a high gel fraction and a high degree of swelling (that is, a low crosslink density), so that adhesive residue was generated.

Although the adhesive tape of Comparative Example 2 had a gel fraction within the range of the present invention, the degree of swelling was high (that is, the crosslink density was low), and adhesive residue was generated. Moreover, since the gel fraction was lower than that of Comparative Example 1, the increase in adhesive strength after heating at 300 ° C. was larger than that of Comparative Example 1. Such a high adhesive force increases the force required for peeling.

In the adhesive tape of Comparative Example 3, as with the adhesive tape of Comparative Example 2, although the gel fraction was within the range of the present invention, the degree of swelling was high (that is, the crosslink density was low), and thus adhesive residue was generated. However, since the degree of swelling is lower than that of the adhesive tape of Comparative Example 2, the increase in the adhesive strength after heating at 300 ° C. is not large.

In the adhesive tapes of Comparative Examples 4 and 5, although the degree of swelling was within the range of the present invention, the gel residue was high, so that adhesive residue was generated.

The pressure-sensitive adhesive composition of the present invention is particularly useful as a material for forming a pressure-sensitive adhesive layer of a pressure-sensitive adhesive tape, for example. The adhesive tape of the present invention is a process that requires treatment in a high-temperature environment, for example, a surface treatment process of a member such as heat-resistant glass or a manufacturing process of a semiconductor component such as a glass wafer. It is very useful for applications such as fixing during transportation. Furthermore, it is very useful in applications such as a process including plasma treatment where a problem of adhesive residue occurs due to factors other than temperature.

Claims (9)

A silicone-based pressure-sensitive adhesive comprising a crosslinked silicone structure, having a gel fraction measured by the following method of 70% to 95% and a swelling degree measured by the following method of 260% or less Agent composition.
(Gel fraction)
The gel fraction is obtained by the following formula, which is the ratio of the insoluble matter when the silicone pressure-sensitive adhesive composition is immersed in toluene at room temperature for 1 day.
Gel fraction (%) = (C / A) × 100%
A: Initial mass of silicone-based pressure-sensitive adhesive composition C: Dry mass of silicone-based pressure-sensitive adhesive composition after immersion in toluene (drying conditions: 130 ° C., 2 hours)
(Swelling degree)
The degree of swelling is obtained by the following formula, which is a swelling ratio due to absorption of toluene when the silicone-based pressure-sensitive adhesive composition is immersed in toluene at room temperature for 1 day.
Swelling degree (%) = ((B−A) / A) × 100%
A: Initial mass of silicone pressure-sensitive adhesive composition B: Swelling mass of silicone-based pressure-sensitive adhesive composition after immersion in toluene The silicone pressure-sensitive adhesive composition according to claim 1, wherein the gel fraction is 70% or more and 90% or less. The silicone-based pressure-sensitive adhesive composition according to claim 1, wherein the degree of swelling is 250% or less. The silicone pressure-sensitive adhesive composition according to claim 1, comprising an addition-curable silicone pressure-sensitive adhesive that has been crosslinked and cured. A pressure-sensitive adhesive tape having a pressure-sensitive adhesive layer made of the pressure-sensitive adhesive composition according to claim 1 on at least one side of a substrate. 6. The adhesive tape according to claim 5, wherein the substrate is a resin film. Resin film is polyimide (PI) film, polyetheretherketone (PEEK) film, polyethylene terephthalate (PET) film, polyethylene naphthalate (PEN) film, polyphenylene sulfide (PPS) film, polyamideimide (PAI) film, polyether The pressure-sensitive adhesive tape according to claim 6, comprising any one of a sulfone (PES) film and a polytetrafluoroethylene (PTFE) film. The pressure-sensitive adhesive tape according to claim 5, wherein the pressure-sensitive adhesive strength after heating at 300 ° C measured by the following method is 0.70 N / 10 mm or less.
(Adhesive strength after heating at 300 ° C)
A 20 mm wide adhesive tape is attached to a heat-resistant glass plate, heated at 300 ° C. for 1 hour, then cooled, and the force (N / 10 mm) required to peel the tape at an angle of 180 ° at a speed of 300 mm / min. taking measurement. The pressure-sensitive adhesive tape according to claim 5, which is used in a high temperature environment exceeding 290 ° C.

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