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WO2016190601A1 - Contacteur à film et prise de test contenant celui-ci - Google Patents

Contacteur à film et prise de test contenant celui-ci Download PDF

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Publication number
WO2016190601A1
WO2016190601A1 PCT/KR2016/005287 KR2016005287W WO2016190601A1 WO 2016190601 A1 WO2016190601 A1 WO 2016190601A1 KR 2016005287 W KR2016005287 W KR 2016005287W WO 2016190601 A1 WO2016190601 A1 WO 2016190601A1
Authority
WO
WIPO (PCT)
Prior art keywords
insulating sheet
metal layer
sheet
electrode
conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2016/005287
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English (en)
Korean (ko)
Inventor
정영배
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ISC Co Ltd
Original Assignee
ISC Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ISC Co Ltd filed Critical ISC Co Ltd
Publication of WO2016190601A1 publication Critical patent/WO2016190601A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals

Definitions

  • the present invention relates to a film contactor and a test socket including the same, and more particularly, to a film contactor and a test socket including the same to minimize thermal deformation.
  • test apparatus In order to implement the above method, the test apparatus and the semiconductor device must be electrically connected.
  • the test medium is a test socket.
  • FIG. 1 is a cross-sectional view showing the configuration of a test socket in the form of an elastic conductive sheet which is generally used recently.
  • the elastic conductive sheet 10 is formed to penetrate in the thickness direction of an insulating sheet 11 made of a material having elasticity, for example, silicone rubber, and the insulating sheet 11, and the insulating sheet ( 11 includes a plurality of conductive parts 12 spaced apart from each other in the plane direction.
  • the insulating sheet 10 may be fixed by the supporting member 13 of the bottom edge.
  • the conductive portion 12 is formed at a position corresponding to the terminal 21 of the device under test 20, each of which is configured such that a plurality of conductive particles are arranged in the thickness direction of the insulating sheet 11.
  • the elastic conductive sheet 10 is disposed above the inspection device 30.
  • the pad 31 of the inspection apparatus 30 and the terminal 21 of the device under test 20 respectively contact the up-down direction of the conductive portion 12, the conductive particles in the conductive portion 12 contact each other to electrically conduct. Achieve a state. In this state, when a test signal flows from the pad 31 of the inspection apparatus 30, the test signal is transmitted to the terminal 21 of the device under test 20 via the conductive portion 12 to perform an electrical test. It can be.
  • the film contactor 40 includes an insulating mesh sheet 41 formed in a porous mesh form and a plurality of electrodes 42 integrally formed with the mesh sheet 41.
  • the electrodes 42 are formed at positions corresponding to the conductive portions 12 of the elastic conductive sheet 10.
  • the film contactor 40 According to the formation of the film contactor 40, a phenomenon such as separation of conductive particles from the conductive portion 12, breakage, or wear may be prevented. In addition, the overall strength may also be improved as compared with the case where the via holes are formed in the insulating sheet 11 at a narrow pitch.
  • the electrode 42 of the film contactor 40 and the conductive portion 12 of the elastic conductive sheet 10 are formed. There is a problem in terms of alignment.
  • the mesh sheet 41 of the film contactor 40 may undergo heat shrinkage during the heat treatment process. It causes a problem, causing the alignment to be different.
  • the present invention is to solve the above-mentioned problems of the prior art, in the arrangement of the film contactor on the elastic conductive sheet in the manufacture of the test socket, the alignment of the entire test socket is prevented from being twisted by the external environment. The purpose.
  • a film contactor for electrically connecting the terminal of the device under test and the pad of the inspection device, the insulating sheet made of a porous mesh form; An electrode formed integrally with the insulating sheet and formed at a position corresponding to the terminal of the device under test; And a metal layer laminated on an insulating region in which the electrode is not formed on the upper surface of the insulating sheet.
  • At least a portion of the metal layer may be stacked along the outermost edge of the insulating sheet.
  • the metal layer stacked along the outermost edge of the insulating sheet may be formed of a plurality of fragment pieces.
  • At least a part of the metal layer may be formed in a spiral pattern.
  • At least a part of the metal layer may be formed of polygons of different sizes having a center disposed at the same point.
  • a test socket for electrically connecting the terminal of the device under test and the pad of the test device, the insulating sheet, and formed to pass through the thickness direction of the insulating sheet, the device under test
  • An elastic conductive sheet including a conductive portion formed to correspond to a terminal of the elastic conductive sheet; And an electrode formed on an upper surface of the elastic conductive sheet, the porous insulating sheet, an electrode forming a conduction path in the thickness direction of the insulating sheet and corresponding to the terminals of the device under test, and the insulating sheet on which the electrode is not formed.
  • a test socket is provided, comprising a film contactor comprising a metal layer laminated on top.
  • thermal contraction or thermal expansion can be prevented as the metal layer is formed on the upper surface of the insulating sheet formed in the form of a porous mesh. Can be.
  • 1 and 2 are cross-sectional views showing the configuration of a general test socket.
  • FIG 3 is a plan view showing the configuration of a test socket according to an embodiment of the present invention.
  • FIG. 4 is a cross-sectional view showing the configuration of a test socket according to an embodiment of the present invention.
  • FIG. 5 is a plan view illustrating a configuration of a test socket according to another exemplary embodiment of the present invention.
  • FIG. 3 is a plan view illustrating a semiconductor test socket according to an exemplary embodiment of the present invention
  • FIG. 4 is a cross-sectional view taken along line AA ′ of FIG. 3.
  • the semiconductor test socket includes a film contactor 400 disposed on the elastic conductive sheet 100.
  • the elastic conductive sheet 100 includes, for example, an insulating sheet 110 made of an elastic material such as silicone rubber and a plurality of conductive portions 120 formed on the insulating sheet 110.
  • the elastic conductive sheet 100 may be fixed by the support member 130 formed in the peripheral portion.
  • the plurality of conductive parts 120 are formed to penetrate the thickness direction of the insulating sheet 110, respectively, and the plurality of conductive parts 120 are spaced apart from each other by the insulating sheet 110 and are insulated.
  • Each conductive portion 120 is filled with conductive particles.
  • the conductive particles may be formed of any material as long as the material is excellent in conductivity.
  • the particles may be made of particles of a metal having magnetic properties such as iron, cobalt, nickel, or particles of alloys thereof, and the metal particles having excellent conductivity such as gold, silver, palladium, rhodium, etc. It may consist of particles which are plated.
  • it may be made by plating a conductive magnetic metal such as nickel or cobalt on the surface by using inorganic material particles or polymer particles such as nonmagnetic metal particles or glass beads as core particles.
  • the particle diameter of electroconductive particle is 1-100 micrometers, More preferably, it may be formed in 2-50 micrometers, More preferably, it is 3-30 micrometers, Especially preferably, it is 4-20 micrometers.
  • the plurality of conductive parts 120 may be spaced apart from each other by a predetermined pitch, and the pitch may be the same as the pitch between the terminals 210 of the device to be inspected 200.
  • the film contactor 400 according to the exemplary embodiment of the present invention is disposed on the elastic conductive sheet 100.
  • the elastic conductive sheet 100 and the film contactor 400 may be attached to each other, but are not limited thereto.
  • the film contactor 400 is composed of an insulating sheet 410 and a plurality of electrodes 420.
  • Insulating sheet 410 may be implemented as a mesh-like sheet preferably made of a porous mesh.
  • the insulating sheet 410 is made of an organic fiber or a porous silicon film having insulation, and as the organic fiber, fluorine resin fibers such as polytetrafluoroethylene resin, aramid fiber, polyethylene fiber, polyarylate fiber, nylon fiber, poly Ester fibers and the like can be used.
  • the thickness of the insulating sheet 410 is too thin, there is a risk of damage due to repeated contact with the device under test 200 due to deterioration in durability, and conversely, if the thickness of the insulating sheet 410 is too thick, the insulating sheet The resistance 410 may increase, and the thickness of the electrode 420 formed on the insulating sheet 410 must also be thick, which may adversely affect the energization side. Therefore, it is preferable to make the thickness of the insulating sheet 410 suitable, for example, to form the thickness in 10-100 micrometers, More preferably, 20-50 micrometers.
  • the insulating sheet 410 is formed to be porous, if the size of the formed hole is too small, the contact area between the electrode 420 and the conductive portion 120 is small may adversely affect the electrical flow. On the contrary, if the size of the hole is too large, durability of the insulating sheet 410 may be lowered, and the insulating sheet 410 may be damaged by the electrode 420. Therefore, the pore size to be formed in the insulating sheet 410 should be selected within an appropriate range, for example, the average pore size is preferably 10 to 700 mu m, preferably 10 to 400 mu m.
  • the electrode 420 formed on the insulating sheet 410 serves to electrically connect the terminal 210 of the device under test 200 with the pad 310 of the test apparatus 300. To this end, the lower surface of the electrode 420 is filled in the insulating sheet 410 to be in contact with the upper surface of the conductive portion 120 of the elastic conductive sheet 100. That is, the electrode 420 is integrally formed with the insulating sheet 410 and has electrical conductivity in the vertical direction on the insulating sheet 410.
  • the electrode 420 is configured to form a conductive path in the thickness direction of the insulating sheet 410, and is integrally formed with the insulating sheet 410.
  • the electrode 420 protrudes from a portion of the insulating sheet 410 based on the upper surface of the insulating sheet 410 and is exposed to the lower surface of the insulating sheet 410.
  • the electrode 420 may be made of a material having excellent conductivity, and preferably made of a material having a high hardness for repetitive contact with the terminal 210 of the device under test 200.
  • it may be made of a single material metal such as nickel or cobalt, or may be made of an alloy material such as nickel-cobalt or nickel-tungsten, but may also be made of materials such as copper, gold, silver, palladium, and iron. Can be.
  • any material having electrical conductivity may be used as the material of the electrode 420 of the present invention.
  • the electrode 420 may be formed in a form in which two or more alloy metals or two or more metals are stacked.
  • the electrode 420 may be disposed at a position corresponding to the terminal 210 of the device under test 200.
  • the insulating sheet formed in the insulating region A 410 serves to insulate the upper surface of the conductive portion 120 of the elastic conductive sheet 100.
  • the conductive portion 120 is formed at a predetermined interval on the elastic conductive sheet 100, except for the conductive portion 120 formed at a position corresponding to the terminal 210 of the device under test 200.
  • the upper part is covered by the insulating sheet 410.
  • the conductive region B in the insulating sheet 410 has a hollow rectangular shape in the film contactor 400, the inner and outer edges of the conductive region B are insulated. This may be referred to as the area A.
  • the electrode 420 formed in the conductive region B is formed at a position corresponding to the conductive portion 120 of the elastic conductive sheet 100, through which the terminal 210 of the device under test 200 and the inspection apparatus ( The pad 310 of the 300 may be electrically connected to the electrode 410 through the conductive part 120.
  • the conductive part 120 of the elastic conductive sheet 100 and the electrode of the film contactor 400 ( 420 Alignment is very important.
  • the insulating sheet 410 of the film contactor 400 is made of organic fibers or the like, even if the film contactor 400 is accurately aligned and disposed on the elastic conductive sheet 100, the adhesive sheet may be attached later. At the time of a process or a heat processing process, the alignment will shift according to the heat shrink of the insulating sheet 410.
  • the metal layer 430 is disposed in at least a portion of the insulating region A of the upper region of the insulating sheet 410, that is, the region where the electrode 420 is not formed. Laminated.
  • the metal layer 430 may be formed to be attached to an upper surface of the insulating sheet 410.
  • the metal layer 430 serves to prevent deformation of the insulating sheet 410 by heat. Specifically, since the metal layer 430 is less sensitive to heat than the insulating sheet 410, even if a process is performed under a high temperature environment or a test is performed, thermal contraction or thermal expansion of the insulating sheet 410 may be prevented.
  • a metal having a low coefficient of thermal expansion for example, molybdenum, tungsten, chromium, platinum, or an alloy thereof may be used.
  • the metal layer 430 may be formed of an alloy of two or more kinds of metals, or may be formed in a form in which two or more kinds of metal layers are stacked.
  • the metal layer 430 is preferably formed to an appropriate width. According to an embodiment, the distance between the metal layer 430 and the adjacent electrode 420 may be formed to be greater than or equal to the distance between the electrodes 420.
  • the thickness of the insulating sheet 410 may be appropriately selected below the height at which the electrode 420 protrudes from the insulating sheet 410.
  • the metal layer 430 is preferably formed at the edge of the insulating sheet 410. Since the edge of the insulating sheet 410 is fixed to the metal layer 430, thermal deformation of the insulating sheet 410 may be further minimized.
  • the thermal deformation of the film contactor 400 in a thermal process or a high temperature environment is prevented, and thus, the electrode 420 and the elastic conductive sheet 100 Alignment between the conductive parts 120 may be continuously maintained.
  • the thermal deformation phenomenon may be further prevented.
  • FIG. 5 is a plan view illustrating a configuration of a test socket according to another exemplary embodiment of the present invention.
  • the pattern of the metal layer 430 formed on the upper surface of the insulating sheet 410 of the film contactor 400 is different from that of the embodiment described with reference to FIGS. 3 and 4. It can be seen that.
  • the metal layer 430 formed at the outermost edge of the insulating sheet 410 is composed of a plurality of fragment pieces 431 spaced apart from each other.
  • the plurality of fragment pieces 431 are virtually extended in the length direction thereof, a hollow rectangular shape having the same shape as the outermost edge of the insulating sheet 410 is obtained.
  • some of the metal layers 430 may be formed of a plurality of fragment pieces 431 formed along the outermost edge of the insulating sheet 410.
  • the insulating sheet 410 and the metal layer 430 of the film contactor 400 have a large difference in characteristics that react to heat, there is a possibility that the insulating sheet 410 is damaged due to the characteristic difference at a high temperature, and the insulating sheet 410 As the metal layer 430 formed at the outermost edge of the plurality of pieces 431 is formed, the possibility of breakage of the insulating sheet 410 due to the difference in characteristics may be partially reduced.
  • the metal layer 430 formed inside the conductive region B in the rectangular shape may also be formed in a pattern different from that described with reference to FIGS. 3 and 4.
  • a portion of the insulating sheet 410 may be exposed in the metal layer 430.
  • the metal layer 430 may be formed in a spiral (spiral), as shown in (c) of Figure 5, centered on the same point Square metal patterns 432 having different sizes may be formed in the metal layer 430.
  • the metal layer 430 may also have another shape, for example, a circular shape. Or it may be formed into a polygon.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)

Abstract

Un mode de réalisation de l'invention concerne un contacteur à film pour connecter électriquement une borne d'un dispositif à tester et une pastille d'un dispositif de test, le contacteur comprenant : une feuille d'isolation ayant la forme d'une maille poreuse ; une électrode faisant partie intégrante de la feuille d'isolation à un emplacement correspondant à la borne du dispositif à tester ; et une couche de métal stratifiée sur une région d'isolation, dans laquelle l'électrode n'est pas formée, de la surface supérieure de la feuille d'isolation.
PCT/KR2016/005287 2015-05-22 2016-05-18 Contacteur à film et prise de test contenant celui-ci Ceased WO2016190601A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2015-0071548 2015-05-22
KR1020150071548A KR20160137038A (ko) 2015-05-22 2015-05-22 필름 컨택터 및 이를 포함하는 테스트 소켓

Publications (1)

Publication Number Publication Date
WO2016190601A1 true WO2016190601A1 (fr) 2016-12-01

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2016/005287 Ceased WO2016190601A1 (fr) 2015-05-22 2016-05-18 Contacteur à film et prise de test contenant celui-ci

Country Status (3)

Country Link
KR (1) KR20160137038A (fr)
TW (1) TW201641939A (fr)
WO (1) WO2016190601A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101930866B1 (ko) * 2018-08-08 2018-12-20 황동원 반도체 디바이스 테스트용 콘택트 및 소켓장치
KR102257740B1 (ko) * 2020-05-19 2021-05-28 (주)티에스이 테스트 소켓용 절연 필름 및 이를 포함하는 테스트 소켓
KR102410156B1 (ko) * 2020-06-02 2022-06-17 (주)티에스이 반도체 패키지의 테스트 장치
KR102773953B1 (ko) * 2023-08-21 2025-02-27 주식회사 유씨에스 전자 디바이스 테스트용 소켓

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003092317A (ja) * 2001-09-19 2003-03-28 Jsr Corp シート状コネクターおよびプローブ装置
JP2004145782A (ja) * 2002-10-28 2004-05-20 Kawaguchiko Seimitsu Co Ltd タッチパネル
JP2005300279A (ja) * 2004-04-08 2005-10-27 Jsr Corp 異方導電性コネクター装置およびその製造方法並びに回路装置の検査装置
KR20110104326A (ko) * 2010-03-16 2011-09-22 이재학 시트형 접속체, 그 시트형 접속체의 제조방법 및 테스트 소켓
KR20130034273A (ko) * 2011-09-28 2013-04-05 엘지이노텍 주식회사 터치윈도우용 원판시트 및 그 제조방법

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003092317A (ja) * 2001-09-19 2003-03-28 Jsr Corp シート状コネクターおよびプローブ装置
JP2004145782A (ja) * 2002-10-28 2004-05-20 Kawaguchiko Seimitsu Co Ltd タッチパネル
JP2005300279A (ja) * 2004-04-08 2005-10-27 Jsr Corp 異方導電性コネクター装置およびその製造方法並びに回路装置の検査装置
KR20110104326A (ko) * 2010-03-16 2011-09-22 이재학 시트형 접속체, 그 시트형 접속체의 제조방법 및 테스트 소켓
KR20130034273A (ko) * 2011-09-28 2013-04-05 엘지이노텍 주식회사 터치윈도우용 원판시트 및 그 제조방법

Also Published As

Publication number Publication date
TW201641939A (zh) 2016-12-01
KR20160137038A (ko) 2016-11-30

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