WO2015186932A1 - Contact sheet and socket structure - Google Patents

Abstract

The present invention relates to a contact sheet, and more specifically, to a contact sheet which is electrically connected with a test target device by coming into contact with the test target device which has electrode patterns having a predetermined array, the contact sheet being provided in the form of a sheet having a predetermined area and thickness, wherein the contact sheet comprises: a sheet body which constitutes the main body, is made of an insulating material, and has a predetermined area; and a plurality of contact patterns which are arranged on the sheet body and are electrically connected to the electrode patterns on the test target device, and the contact sheet has the thickness of the outer part and the thickness of the center part to be different.

Description

Contact Sheet and Socket Structure

The present invention relates to a contact sheet, and more particularly, to a contact sheet in contact with a device under test having an electrode pattern having a predetermined arrangement and electrically connected to the device under test, wherein the contact sheet has a predetermined area and A sheet body having a thickness, the sheet body constituting the main body and made of an insulating material and having a predetermined area; and a plurality of contact patterns arranged on the sheet body and electrically connected to electrode patterns of the device under test; The contact sheet is provided, and the contact sheet is related with the contact sheet formed in which the thickness of an outer part and the thickness of a center part differ.

The socket is a member that mediates the connection of a given electrical device and is used with the device to facilitate the connection. These sockets are used in various fields, such as testing various electrical components in addition to the ordinary electrical components.

When performing a test through such a connection between a socket and a given device, it is very important to reliably achieve contact between the pad formed in the socket and the terminal between the device.

However, as the number of terminals of the device increases and the size increases, warpage occurs, and the flatness of the outer portion and the center portion is different from each other, so that the height between the terminals is different so that contact failure may occur.

For example, FIG. 1 shows a case in which the outer portion of the device D1 is lowered downward, and in this case, a poor connection between the terminal between the socket D2 and the device D1 may occur, in particular, the center portion. There is a high probability that a bad connection will occur at the terminal. Of course, the opposite case is also possible, and in the opposite case, in particular, a connection failure of a terminal located at an outer circumferential portion may occur.

Accordingly, there is a need to develop a member that reliably achieves the connection between the socket and the device.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problem, and is a contact sheet in contact with a device under test having an electrode pattern having a predetermined arrangement and electrically connected to the device under test, wherein the contact sheet has a predetermined area and A sheet body having a thickness, the sheet body constituting the main body and made of an insulating material and having a predetermined area; and a plurality of contact patterns arranged on the sheet body and electrically connected to electrode patterns of the device under test; The contact sheet is provided to provide a contact sheet in which the thickness of the outer portion and the thickness of the center portion are different from each other.

The contact sheet according to an embodiment of the present invention is a contact sheet that is in contact with the device under test in contact with the device under test having an electrode pattern having a predetermined arrangement, and the contact sheet has a predetermined area and thickness. And a sheet body constituting a main body and composed of an insulating material and having a predetermined area; and a plurality of contact patterns arranged on the sheet body and electrically connected to electrode patterns of the device under test. The thickness of the outer portion and the center portion is different from the contact sheet.

Preferably, the contact sheet is configured to become thicker from the outer portion to the center portion.

Preferably, the contact sheet is configured such that the thickness becomes thinner from the outer portion to the center portion.

Preferably, the contact sheet is configured to have a curvature by rounding at least one cross-sectional shape of an upper surface and a lower surface.

Preferably, the contact sheet has a flat lower surface and an upper surface configured to have a convex surface ascending from the outer portion to the center portion, or to have a concave surface descending toward the central portion at the outer portion.

Preferably, the contact pattern is formed by containing a conductive powder in the elastic insulating material.

Preferably, the contact sheet further comprises an upper film covering an upper surface.

A socket structure according to an embodiment of the present invention includes a socket structure in electrical contact with a device under test in contact with a device under test having an electrode pattern having a predetermined arrangement, the socket body having a predetermined socket pattern; A contact sheet disposed on the socket body, wherein the contact sheet is configured in the form of a sheet having a predetermined area and thickness, and comprises a sheet body constituting the main body and made of an insulating material and having a predetermined area; and And a plurality of contact patterns arranged on the body and electrically connected to the electrode pattern of the device under test and the socket pattern of the socket body, wherein the contact sheet is formed so that the thickness of the outer portion and the thickness of the center portion are different from each other.

The contact film may further include a contact film disposed between the contact sheet and the socket body, wherein the contact film comprises a film body constituting the body and made of an insulating material and having a predetermined area; and arranged on the film body. And a plurality of contact patterns electrically connected to the contact patterns of the contact sheet and the socket patterns of the socket body, wherein the contact patterns constitute a conductive elastic region.

Preferably, the contact pattern is formed by containing a conductive powder in the elastic insulating material.

Preferably, the film body has a partially penetrated through area, and the contact pattern is disposed in the through area.

Since the contact sheet according to the present invention has a thickness different from that of the center portion and the thickness of the outer portion, it is possible to ensure a reliable electrical connection when contacting the device under test requiring inspection, thereby ensuring the reliability of the overall test.

1 illustrates a connection between a socket structure and a device according to the prior art.

2 illustrates a contact sheet according to an embodiment of the present invention.

3 illustrates a contact sheet according to an embodiment of the present invention.

4 is an enlarged view of a contact sheet according to an embodiment of the present invention.

5 is an enlarged view of a contact sheet according to an embodiment of the present invention.

6 is a view illustrating a socket structure provided with a contact sheet according to an embodiment of the present invention.

7 is a view illustrating a socket structure having a contact sheet according to an embodiment of the present invention.

8 is a view illustrating a socket structure provided with a contact sheet according to an embodiment of the present invention.

9 is a view illustrating a socket structure provided with a contact sheet according to an embodiment of the present invention.

10 is a view illustrating a socket structure having a contact sheet according to an embodiment of the present invention.

FIG. 11 is a view illustrating a connection between a socket structure having a contact sheet and a device under test according to an embodiment of the present invention. FIG.

12 is a view illustrating a connection between a socket structure having a contact sheet and a device under test according to an embodiment of the present invention.

13 to 15 are steps illustrating a method of manufacturing a contact sheet according to an embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings.

2 and 3 are views illustrating a contact sheet 100 according to an embodiment of the present invention, and FIGS. 4 and 5 are enlarged views of a contact sheet 100 according to an embodiment of the present invention. 6 to 10 illustrate a socket structure having a contact sheet 100 according to an embodiment of the present invention, and FIGS. 11 and 12 illustrate a contact sheet 100 according to an embodiment of the present invention. 13 is a view illustrating a connection between a socket structure provided with a device under test and FIGS. 13 to 15 are steps illustrating a method of manufacturing a contact sheet 100 according to an embodiment of the present invention.

The contact sheet 100 according to an embodiment of the present invention is a contact sheet 100 that is in contact with the device under test having an electrode pattern and is electrically connected to the device under test, wherein the contact sheet 100 has a predetermined area. And a sheet body having a thickness, the sheet body constituting the main body and made of an insulating material and having a predetermined area; And a plurality of contact patterns 120 arranged on the sheet body 110 and electrically connected to the electrode patterns of the device under test, wherein the contact sheet 100 has a thickness different from that of the outer portion and the thickness of the center portion. Is formed.

The contact sheet 100 according to the present invention has a sheet-like configuration as a whole having a predetermined area and thickness.

The contact sheet 100 constitutes a main body and has a sheet body 110 made of an insulating material and having a predetermined area. The seat body 110 is a sheet-like member having a predetermined thickness and area, and substantially constitutes the main body of the contact sheet 100 according to the present invention. The seat body 110 may be made of a material having insulation and flexibility, and may include, for example, a synthetic resin sheet made of rubber, polyimide resin, liquid crystal polymer, polyester, fluorine resin, silicone, and the like, but is not limited thereto. No.

A plurality of contact patterns 120 may be provided and arranged on the sheet body 110 in a form corresponding to an electrode pattern of a device under test requiring contact. The arrangement form of the contact pattern 120, and the number thereof is not limited, and any form of arrangement form that can be connected to the electrode pattern corresponding to the electrode pattern formed in the device in which the contact sheet 100 according to the present invention is used. It is possible. The contact pattern 120 is a pad-shaped member having a predetermined area and thickness, and a plurality of contact patterns 120 are arranged in the sheet body 110 to partially occupy an area on the sheet body 110. The contact pattern 120 has a structure in which conductive powder is arranged in a thickness direction in an elastic insulating material such as silicone rubber.

The contact pattern 120 has an arrangement in which at least one portion overlaps an electrode pattern provided in a predetermined device. That is, each contact pattern 120 may be arranged so that at least one portion overlaps with the electrode pattern provided in the device so as to have an arrangement corresponding to the electrode pattern provided in the predetermined device. Here, the overlap means that the contact pattern 120 provided in the contact sheet 100 and the electrode pattern of the device are mutually seen when the state in which the contact sheet 100 according to the present invention is placed and covered on a predetermined device is viewed from above. It can be understood at least in part to overlap.

In the contact sheet 100 according to the present invention, the thickness of the outer portion and the center portion is different. That is, as an example, as shown in Figure 2, the thickness M of the outer portion may be formed thinner than the thickness N of the central portion. Accordingly, the contact sheet 100 according to the present invention may have a predetermined inclined surface and may have a shape in which a central portion thereof rises relatively upward. Meanwhile, as shown in FIG. 2, the present invention is not necessarily limited to the case where the outermost part has a pointed attachment, and may also have a region having a partly the same thickness.

As another example, as shown in FIG. 3, the thickness M of the outer portion may be thicker than the thickness N of the center portion. Accordingly, the contact sheet 100 according to the present invention may have a predetermined inclined surface and may have a shape in which an outer portion thereof rises in a relatively upward direction. On the other hand, it is not necessarily limited to the case where all have different thicknesses, and likewise, may also have a region having a partly the same thickness.

In this case, according to an embodiment, the contact sheet 100 may be thicker or thinner from the outer portion to the center portion, or may be formed to have a curvature by rounding a cross-sectional shape. That is, the contact sheet 100 according to the exemplary embodiment may have an inclined surface having a cross section, but may have a smooth inclined surface that is rounded to form a curved surface rather than a straight inclined surface.

According to an embodiment, the contact sheet 100 is formed to have a convex surface ascending from the flat lower surface and the outer portion toward the center, or having a concave surface descending toward the central portion from the outer portion. That is, according to one embodiment, the contact sheet 100, the inner side is formed to be thick, the lower surface is formed to have a flat lower surface, the upper surface may be formed to have a convex surface rising from the outer portion to the center portion. have. According to another example, the contact sheet 100 may be formed to have a thin outer shell portion and a thick center portion, the lower surface of which is flat and has a flat lower surface, and an upper surface thereof rises from the center portion to the outer portion to have a concave surface. .

As described above, in the contact sheet 100 according to the present invention, the thickness of the center portion and the thickness of the outer portion are different, so that the contact sheet 100 according to the present invention is contacted with a predetermined device to perform a predetermined electrical test. The electrical connection can be secured reliably.

For example, in the case of a conventional device under test, as shown in FIG. 1, the contact between the electrodes provided in the device may not be reliably performed as a whole due to a uniform height. That is, for example, when the electrode connection between the predetermined device under test D1 and the socket structure D2 is performed, a warpage occurs as the number of terminals constituting the electrode pattern included in the device D1 increases and the size of the device D1 increases. At this time, according to an example, as shown in FIG. 1, the height of the electrode pattern of the outer portion of the device D1 placed on the upper portion is formed to be low, resulting in nonuniformity of the spacing H between the electrode patterns, and thus the outer portion of the device D1. Compared with the contact between the electrode patterns of the contact between the electrode pattern of the inner portion is not made reliably and therefore a contact failure may occur. Of course, on the contrary, it is also possible that the height of the outer portion is high and the height of the center portion is formed low so that a failure occurs in contact between the electrode patterns of the outer portion.

However, when the contact between the device and the socket structure is mediated using the contact sheets 100 having partially different thicknesses, such as the contact sheet 100 of the present invention, such a defect can be prevented, Thus, the contact between the devices can be made reliably. In addition, as the contact sheet 100 is formed in the thickness of the outer portion and the center portion differently as in the present invention, as described above, poor contact due to the difference between the electrode pattern of the outer portion and the inner portion can be easily prevented. have.

Preferably, the seat body 110 includes a silicone rubber, and the contact pattern 120 is composed of a mixture of silicon and the conductive powder 122 contained in the silicon.

According to one embodiment of the present invention, preferably, the contact pattern 120, the conductive powder 122 is contained in the elastic insulating material 124 is configured. The elastic insulating material 124 may be silicone rubber as having good elasticity and insulating property, but is not limited thereto. The elastic insulating material 124 may be urethane resin, epoxy resin, acrylic resin, or the like, but is not limited thereto.

Conductive powder 122 is composed of a plurality of conductive particles having a predetermined size, is made of a material having an electrical conductivity as described above is contained in the silicon 124 is dispersed.

The conductive powder 122 is preferably a material that exhibits magnetic properties in terms of being easily oriented in the thickness direction within the contact pattern. Specific examples of the conductive powder 122 include particles of metals showing magnetic properties such as iron, cobalt, and nickel, particles of alloys thereof, particles containing these metals, or these particles as core particles. Metals having good conductivity such as gold, silver, palladium and rhodium are plated on the surface, or inorganic material particles or polymer particles such as nonmagnetic metal particles or glass beads as core particles, and nickel on the surface of the core particles. Plating of a conductive magnetic material such as cobalt, or coating both the conductive magnetic material and a metal having good conductivity to the core particles.

In these, it is preferable to use nickel particle as a core particle, and to apply the metal plating of metals, such as gold, silver, rhodium, palladium, ruthenium, tungsten, molybdenum, platinum, iridium, to the surface, and nickel plating is carried out to nickel particle. It is also preferable to use what coated several different metals, such as particle | grains which carried out gold plating on the surface layer as background plating. Although it does not specifically limit as a means which coat | covers a conductive metal on the surface of a core particle, For example, it can carry out by chemical plating or electrolytic plating.

In the case where the conductive metal is coated on the surface of the core particles, the coverage of the conductive metal (the ratio of the coating area of the conductive metal to the surface area of the core particles) on the particle surface is 40% or more in terms of obtaining good conductivity. It is preferable, More preferably, it is 45% or more, Especially preferably, it is 47 to 95%. In addition, the coating amount of the conductive metal is preferably 0.5 to 50% by weight of the core particles, more preferably 2 to 30% by weight, still more preferably 3 to 25% by weight, particularly preferably 4 to 20% by weight. to be. When the conductive metal to be coated is gold, the coating amount thereof is preferably 0.5 to 30% by weight of the core particles, more preferably 2 to 20% by weight, still more preferably 3 to 15% by weight, particularly preferably 4 To 10% by weight. In addition, when the conductive metal to be coated is silver, the coating amount thereof is preferably 4 to 50% by weight of the core particles, more preferably 5 to 40% by weight, still more preferably 10 to 30% by weight.

In addition, the particle diameter of each particle in the conductive powder 122 is preferably 1 to 1000 μm, more preferably 2 to 500 μm, still more preferably 5 to 300 μm, and particularly preferably 10 to 200 μm. In addition, the particle size distribution (Dw / Dn) of the conductive powder 122 is preferably 1 to 10, more preferably 1.01 to 7, still more preferably 1.05 to 5, particularly preferably 1.1 to 4. By using the conductive powder 122 that satisfies these conditions, the resulting electrode pattern is easily deformed under pressure, and sufficient electrical contact is obtained between the respective particles of the conductive powder 122. In addition, although the shape of each particle in the conductive powder 122 is not specifically limited, since it can be easily disperse | distributed in a polymer forming material, it is a spherical thing, a star shape, or the mass by the secondary particle which they aggregated. Is preferable.

As shown in FIG. 3, the arrangement between the contact pattern 120 and the seat body 110 may include a through area through which the sheet body 110 partially penetrates. It may have a configuration disposed in the through area. On the contrary, a plurality of pattern electrodes forming the contact pattern 120 are disposed to be spaced apart from each other, and the sheet body 110 is disposed between the pattern electrodes to support the contact pattern. It may be understood.

As described above, as the conductive powder 122 is contained in the silicon 124, the conductive powder 122 is applied when predetermined terminals of a device under test press the contact pattern 120. As they come into contact with each other, they have an electrical contact state and energization is possible.

As described above, the contact pattern 120 may have a conductive elastic region, and may have a configuration in which electricity may be supplied according to contact pressure. As the contact pattern 120 is composed of a conductive elastic region having elasticity, it is possible to prevent the pressure caused by electrical contact between the terminal and the device and the occurrence of scratches and breakage. That is, the contact pattern 120 of the contact sheet 100 according to the present invention is disposed between the electrodes formed in a predetermined device, and the contact pattern 120 has conductivity and elasticity to mediate contact between the electrodes and to scratch and It is possible to prevent damage due to impact.

At this time, preferably, as shown in FIG. 5, the contact sheet 100 according to the present invention may further include an upper film 140 covering an upper surface thereof. Although not clearly illustrated, the upper film 140 may have a conductive region and a non-conductive region, which may be energized, like the contact sheet 100 described above, and the contact pattern 120 and The top surface of the seat body 110 may be disposed to cover the top surface. In this case, the conductive region of the upper film 140 may be located above the contact pattern 120. Accordingly, the upper surface of the contact sheet 100 may be protected from external impact and foreign matter. Meanwhile, in FIG. 5, the upper film is shown only for the embodiment in which the center part is thicker than the outer part, but the upper film 140 may be provided even when the outer part is thin.

6 to 10 illustrate a socket structure according to an embodiment of the present invention, and FIGS. 11 and 12 illustrate a connection between a socket structure and a device.

The socket structure according to an embodiment of the present invention is a socket structure which is in contact with the device under test 300 having the electrode pattern 310 having a predetermined arrangement and is electrically connected to the device under test 300. A socket body 200 having a socket pattern 210; And a contact sheet 100 disposed on the socket body 200, wherein the contact sheet 100 is formed in a sheet form having a predetermined area and thickness, and constitutes a main body and is made of an insulating material and A seat body (110) having an area of; And a plurality of contact patterns 120 arranged in the body and electrically connected to an electrode pattern 310 of the device under test 300 and a socket pattern 210 of the socket body 200. The sheet 100 is formed so that the thickness of an outer part and the thickness of a center part differ.

The contact sheet 100 according to the present invention may be used for a socket structure for performing a test of a predetermined device 300. Accordingly, the socket structure may comprise a contact sheet 100 according to the present invention. Therefore, the socket structure according to the present invention has the socket body 200 and the socket pattern 210 provided in the socket body 200 and composed of predetermined electrodes, and further include the contact sheet 100 as described above. Can be. In this case, the socket pattern 210 is electrically connected in contact with the contact pattern 120 provided in the contact sheet 100, the contact sheet 100 includes a different thickness as described above, the outer shell The thickness of the part and the thickness of the center part are formed differently.

Accordingly, the height of the upper surface of the socket structure is different from the center portion and the outer portion, and as described above, poor contact due to the difference between the outer portion and the electrode pattern 310 of the inner portion can be easily prevented. At this time, each of the figures shows the case where the thickness of the outer peripheral portion is thicker than the center portion, and the case where the thickness of the outer peripheral portion is thinner than the central portion, respectively. In addition, FIG. 10 shows an embodiment in which the contact sheet 100 according to the present invention described above includes the upper film 140.

Preferably, further comprising a contact film 400 disposed between the contact sheet 100 and the socket body 200, wherein the contact film 400, the body is composed of an insulating material and predetermined A film body having an area; And a plurality of film patterns arranged on the film body and electrically connected to the contact patterns 120 of the contact sheet 100 and the socket patterns 210 of the socket body 200. The contact pattern 120 may include a conductive elastic region.

The contact film 400 is a member in the form of a thin sheet having a predetermined area and thickness, and may include a film body made of an insulating material, and a film pattern arranged on the film body and having conductivity. The film pattern may be disposed between the socket pattern formed on the socket body 200 and the contact pattern formed on the contact sheet to electrically connect them. Preferably, the film body comprises a silicone rubber, the film pattern may be composed of a mixture of silicon and conductive powder contained in the silicon. Accordingly, the film pattern may have a configuration capable of energizing according to the contact pressure, and is composed of a conductive elastic region having elasticity, thereby preventing pressure and electrical damage caused by electrical contact between the terminal and the device. can do.

In addition, the film body may have a partially penetrated through area, and the film pattern may be disposed in the through area. That is, the film body may have a partially penetrated through region, and a material forming the film pattern may be disposed in the through region to form a conductive elastic region.

With such a configuration, the socket structure according to an embodiment of the present invention can easily achieve the connection between the device under test.

13 to 15 are steps illustrating a method for manufacturing a contact sheet 100 according to an embodiment of the present invention.

First, the predetermined mold M is prepared. At this time, the mold (M) has a predetermined depression so as to suit the shape of the contact sheet 100 according to the present invention, the contact sheet 100 has a shape having a shape having a different thickness of the outer portion and the center portion It may have the shape of an appropriate depression. For example, in order to manufacture a contact sheet 100 having a thin outer portion, as shown in FIGS. 13 to 15, the inner side may have a forming frame P formed of a recessed portion deeply recessed, and vice versa. Although not shown, a forming frame P having a recessed portion in which the inner side is thin and the outer portion is deeply recessed may be provided.

Subsequently, silicon (S) or the like is injected into the forming mold P to form the contact sheet 100 according to the present invention. At this time, the silicon (S) may include a synthetic resin or the like as described above, and the contact sheet 100 according to the present invention is cured by heat or various processes in the state injected into the forming mold (P) Can be prepared.

In this case, a predetermined mold pin Q may be provided in the forming mold P formed in the mold M. For example, the mold pin Q is a member capable of applying an electric current or the like to form an electric field. The mold pin Q may be provided in plurality in the forming mold P.

In addition, in this case, the above-described conductive powder 122 may be contained in the liquid silicon S injected into the forming mold P. The conductive powder 122 may be contained in the liquid silicon (S), and may be configured to control its distribution by an electric field or the like as described above.

After injecting the liquid silicon S containing the conductive powder 122 into the forming mold P as described above, the mold pin Q is formed by applying a magnetic field to the mold pin Q before curing. The conductive powder 122 may be concentrated in a region. Accordingly, the contact pattern 120 may be formed in a region where the conductive powder 122 is concentrated, so that the contact sheet 100 according to the present invention may be manufactured.

Although the preferred embodiments have been illustrated and described above, the invention is not limited to the specific embodiments described above, and does not depart from the gist of the invention as claimed in the claims. Various modifications can be made by the vibrator, and these modifications should not be understood individually from the technical idea or the prospect of the present invention.

Claims (11)

A contact sheet in contact with a device under test having an electrode pattern having a predetermined arrangement and electrically connected to the device under test, The contact sheet is configured in the form of a sheet having a predetermined area and thickness, A seat body constituting the main body and made of an insulating material and having a predetermined area; and A plurality of contact patterns arranged on the sheet body and electrically connected to the electrode patterns of the device under test; The contact sheet, The contact sheet is formed in which the thickness of the outer portion and the thickness of the center portion is different. The method of claim 1, The contact sheet, A contact sheet configured to be thicker from the outer portion to the center portion. The method of claim 1, The contact sheet, A contact sheet configured to become thinner from the outer portion to the center portion. The method of claim 1, The contact sheet, A contact sheet formed by rounding a cross-sectional shape of at least one of an upper surface and a lower surface to have a curvature. The method of claim 1, The contact sheet, Flat bottom surface, A contact sheet having a top surface configured to have a convex surface ascending from the outer portion to the center portion, or to have a concave surface as it descends from the outer portion to the center portion. The method of claim 1, The contact pattern is, A contact sheet comprising conductive powder in an elastic insulating material. The method of claim 1, The contact sheet, The upper sheet to cover the upper surface; contact sheet further comprising. A socket structure in electrical contact with a device under test in contact with a device under test having an electrode pattern having a predetermined arrangement, A socket body having a predetermined socket pattern; And a contact sheet disposed on the socket body. The contact sheet is configured in the form of a sheet having a predetermined area and thickness, A seat body constituting the main body and made of an insulating material and having a predetermined area; and And a plurality of contact patterns arranged on the body and electrically connected to the electrode pattern of the device under test and the socket pattern of the socket body. The contact sheet, A socket structure in which the thickness of the outer portion and the thickness of the center portion are different from each other. The method of claim 8, It further comprises a contact film disposed between the contact sheet and the socket body, The contact film, A film body constituting the body and made of an insulating material and having a predetermined area; and And a plurality of contact patterns arranged on the film body and electrically connected to the contact patterns of the contact sheet and the socket patterns of the socket body. The contact pattern is, A socket structure forming a conductive elastic region. The method of claim 9, The contact pattern is, A socket structure composed of a conductive powder mixed in an elastic insulating material. The method of claim 9, The film body has a partially penetrated through area, And the contact pattern is disposed in the through area.

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