[go: up one dir, main page]

WO2015005667A1 - Appareil de production de torche à plasma liquide - Google Patents

Appareil de production de torche à plasma liquide Download PDF

Info

Publication number
WO2015005667A1
WO2015005667A1 PCT/KR2014/006143 KR2014006143W WO2015005667A1 WO 2015005667 A1 WO2015005667 A1 WO 2015005667A1 KR 2014006143 W KR2014006143 W KR 2014006143W WO 2015005667 A1 WO2015005667 A1 WO 2015005667A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
flow path
liquid
dielectric
conductive liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2014/006143
Other languages
English (en)
Korean (ko)
Inventor
석동찬
노태협
정용호
유승민
유승열
박준석
홍은정
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Korea Basic Science Institute KBSI
Original Assignee
Korea Basic Science Institute KBSI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Basic Science Institute KBSI filed Critical Korea Basic Science Institute KBSI
Publication of WO2015005667A1 publication Critical patent/WO2015005667A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/246—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using external electrodes

Definitions

  • the present invention relates to a plasma torch generator, and more particularly, to an apparatus capable of generating a plasma torch based on a liquid.
  • Plasma refers to an ionized gas, and excitation using energy to a gas composed of atoms or molecules forms a plasma composed of electrons, ions, decomposed gases, photons, and the like.
  • plasma is used in various ways, such as fusion power generation, surface treatment of a substrate in the semiconductor field, or surface treatment of a powder.
  • the plasma is generated as follows. When energy is applied to a solid, it becomes a liquid. When energy is applied to a liquid, it becomes a gas. When high energy is applied to a gas, a plasma is generated by separating the gas into negatively charged electrons and positively charged ions.
  • Patent Application No. 2009-0045210 discloses "Generation apparatus and method of a high density underwater plasma torch".
  • the apparatus and method for generating a high density underwater plasma torch require a regulator for controlling the injection of gas or air into the space between the transparent quartz tube and the conductive discharge electrode of the underwater plasma reactor, the plasma cannot be generated using only pure liquid. There is this.
  • the present inventors have recognized the problems of the prior arts and, after research, have introduced the following configuration, and have developed an apparatus capable of generating plasma based on pure liquids while supplying an appropriate amount of energy.
  • the technical problem to be solved by the present invention is to provide an apparatus capable of generating a plasma torch based on pure liquid only without a separate gas source.
  • the liquid plasma torch generating apparatus comprises a first electrode; Second electrode; A first dielectric disposed between the first electrode and the second electrode; And a flow path penetrating the first electrode, the second electrode, and the first dielectric, and when a voltage is applied to the first electrode and the second electrode, the plasma is based on the conductive liquid passing through the flow path. Generates.
  • a liquid plasma torch generator in another aspect, includes a liquid supply unit for supplying a conductive liquid to the flow path; And a power supply unit applying a voltage to the first electrode and the second electrode.
  • the power supply unit may apply a direct current, alternating current, bidirectional or unidirectional pulse voltage, and the magnitude of the voltage may be 300 V or more.
  • the conductive liquid is supplied to one side of the flow path, and in the area of the flow path penetrating through the first dielectric, the conductive liquid is vaporized to generate a plasma, and the generated plasma is formed on the other side of the flow path. Discharged to the side.
  • the flow path is open at both ends, and one side of the flow path means either one of the open ends, and the other side of the flow path means the other side.
  • the distance between the second electrodes and the magnitude of the voltage are respectively determined.
  • the conductivity of the conductive liquid is 10 ⁇ S / cm to 1S / cm.
  • the flow path is a capillary tube (capillaty tube), it may be configured to supply the conductive liquid to the flow path without a separate liquid supply device for supplying the conductive liquid by the capillary phenomenon.
  • a liquid plasma torch generator includes a first electrode; Second electrode; Third electrode; A first dielectric disposed between the first electrode and the second electrode; A second dielectric disposed between the second electrode and the third electrode; And a flow path passing through the first electrode, the second electrode, the third electrode, the first dielectric, and the second dielectric, wherein a voltage is applied to the first electrode, the second electrode, and the third electrode. When applied, a plasma is generated based on the conductive liquid passing through the flow path.
  • two ground electrodes are spaced apart from each other by a predetermined distance with one electrode applied to a high voltage therebetween. May be in a closed state.
  • two electrodes having a high voltage may be disposed to be spaced apart from each other by one ground electrode.
  • the conductive liquid is supplied to one side of the flow path, and vaporizes the conductive liquid passing through the flow path in a region penetrating the first dielectric, and passes through the second dielectric in the region of the flow passage.
  • Plasma generated by generating a plasma based on the vaporized liquid is discharged to the other side of the flow path.
  • the flow path is open at both ends, and one side of the flow path means either one of the open ends, and the other side of the flow path means the other side.
  • a liquid plasma torch generator in another aspect, includes a liquid supply unit for supplying a conductive liquid to the flow path; And a power supply unit applying a voltage to the first electrode, the second electrode, and the third electrode.
  • the power supply unit may apply a direct current, alternating current, bidirectional or unidirectional pulse voltage, and the magnitude of the voltage may be 300 V or more.
  • the distance between the second electrodes and the magnitude of the voltage are respectively determined.
  • all of the conductive liquid passing through the area of the flow path that penetrates the first dielectric may be vaporized.
  • the plasma may be generated based on some of the vaporized liquid. That is, all of the liquid may be vaporized, or some of the liquid may be vaporized and the remaining vaporized liquid may be plasmalized.
  • the distance between the third electrodes and the magnitude of the voltage are respectively determined.
  • a glow discharge or an arc discharge occurs when the liquid vaporized through the region of the flow path penetrating the first dielectric material passes through the region of the flow path penetrating the second dielectric material, vaporization occurs.
  • Plasma can be generated based on the prepared liquid.
  • a glow discharge or an arc discharge occurs when a plasma generated by passing through a region of a flow path that passes through the first dielectric material passes through a region that passes through the second dielectric of the flow path region. Since the generated plasma can be discharged once again, more ions or radicals can be generated.
  • the conductivity of the conductive liquid may be 10 ⁇ S / cm to 1S / cm.
  • the flow path may be a capillary tube, and the conductive liquid may be supplied to the flow path without a separate liquid supply device for supplying the conductive liquid by capillary action.
  • the present invention as described above, there is an effect that can generate a plasma based on the liquid without a separate gas supply device.
  • the plasma can be generated on the basis of the liquid, the plasma can be generated using water which can be easily obtained in the vicinity.
  • FIG. 1 is a first embodiment of a liquid plasma torch generator according to an embodiment of the present invention.
  • FIG. 2A is a view for explaining a principle that glow discharge or arc discharge occurs in a region of the flow path that passes through the first dielectric in the liquid plasma torch generator of FIG. 1.
  • FIG. 2B is a diagram for describing a glow discharge or an arc discharge occurring in a region of the flow path that passes through the first dielectric in the liquid plasma torch generator of FIG. 1.
  • FIG 3 is a view for explaining a condition under which glow discharge or arc discharge may occur.
  • Figure 4 is a second embodiment of a liquid plasma torch generator according to an embodiment of the present invention.
  • FIG. 5 is a third embodiment of a liquid plasma torch generator according to an embodiment of the present invention.
  • FIG. 6 is a fourth embodiment of a liquid plasma torch generating device according to an embodiment of the present invention.
  • FIG. 1 is a first embodiment of a liquid plasma torch generator according to an embodiment of the present invention.
  • the liquid plasma torch generator 100 includes a first electrode 110, a second electrode 120, a first dielectric 130, a flow path 140, and a power supply unit ( 150).
  • the first electrode 110 and the second electrode 120 are spaced apart from each other by a predetermined distance, and the first dielectric 130 is located between the first electrode 110 and the second electrode 120.
  • the flow path 140 has a hollow formed along the axial direction of the flow path 140, and penetrates through the first electrode 110, the second electrode 120, and the first dielectric 130, respectively.
  • one side of the flow path 140 may be connected to a liquid supply part (not shown).
  • the flow path 140 when the flow path 140 is a narrow and long capillary tube, when one side of the flow path 140 is immersed in the liquid in a direction perpendicular to the ground, the cohesion of the liquid and the flow path 140
  • the conductive liquid may be supplied to the flow path 140 by capillary phenomenon due to the adhesion between the liquid and the liquid. That is, when the flow path 140 is a capillary tube, the conductive liquid may be supplied to the flow path 140 even when there is no liquid supply unit, which is a separate liquid supply device for supplying the conductive liquid.
  • the liquid supply part may supply the conductive liquid to the flow path 140.
  • the conductive liquid is supplied to one side of the flow path 140 connected with the liquid supply part, and the liquid supplied by the liquid supply part passes through the flow path 140.
  • the power supply unit 150 is connected to the first electrode 110 and the second electrode 120, respectively, and applies a voltage to the first electrode 110 and the second electrode 120.
  • the power supply unit 150 may apply a direct current, alternating current, bidirectional or unidirectional pulse voltage.
  • the magnitude of the voltage applied by the power supply unit 150 is preferably 300V or more, since a high voltage is required to generate a plasma based on the liquid.
  • the liquid plasma torch generator 100 according to an exemplary embodiment of the present invention generates plasma based on a conductive liquid passing through the flow path 140 when a voltage is applied to the first electrode 110 and the second electrode 120. The generated plasma is discharged to the other side of the flow path 140.
  • FIG. 2A is a view for explaining the principle of glow discharge or arc discharge occurring in a region penetrating the first dielectric of the flow path region in the liquid plasma torch generator of FIG. 1.
  • FIG. 1 In the liquid plasma torch generator of FIG. 1, a glow discharge or arc discharge occurs in a region of the flow path passing through the first dielectric, and
  • FIG. 3 is a glow discharge or arc. (arc) It is a figure for demonstrating the conditions which can generate discharge.
  • the liquid when a voltage is applied between the first electrode 110 and the second electrode 120 when the conductive liquid passes through the flow path 140, the liquid is electrolyzed or the liquid generates thermal energy. It can be supplied and vaporized, and bubbles are generated around the electrode. For example, bubbles may be generated around the second electrode 120.
  • the glow discharge or the arc discharge may be started in the generated bubbles.
  • the bubbles generated around the electrode continue to grow, and the area where the glow discharge or the arc discharge occurs also increases as the bubbles grow.
  • the state in which the glow discharge or the arc discharge occurs in the region penetrating the first dielectric 130 in the region of the flow path 140 is maintained. Therefore, even if the conductive liquid is directly supplied to the flow path 140, the resistance of the liquid passing through the flow path 140 is destroyed, so that the plasma can be generated based on the liquid.
  • the conductivity of the conductive liquid, the flow path 40 is increased.
  • the cross-sectional area of, the distance between the first electrode 10 and the second electrode 20, and the magnitude of the voltage should be determined in advance, and the following Equation 1 should be satisfied.
  • Equation 1 S is the conductivity of the conductive liquid, A 1 is the cross-sectional area of the flow path, L 1 is the distance between the first electrode and the second electrode.
  • the resistance R 1 of the region penetrating the first dielectric 130 in the region of the flow path 140 should be configured to be 40 ⁇ or more.
  • the conductivity of the conductive liquid is preferably 10 ⁇ S / cm to 1S / cm.
  • Figure 4 is a second embodiment of a liquid plasma torch generator according to an embodiment of the present invention.
  • the liquid plasma torch generator 100 may include a first electrode 110, a second electrode 120, a first dielectric 130, a flow path 140, and a power supply unit ( 150).
  • the first electrode 110 and the second electrode 120 are spaced apart from each other by a predetermined distance, and the first dielectric 130 is located between the first electrode 110 and the second electrode 120.
  • An area in which the glow discharge or the arc discharge may occur is formed in the first dielectric 130, and the area is configured to communicate with the first electrode 110. That is, a hollow is formed in the first electrode 110 and is connected to an area formed inside the first dielectric 130.
  • the flow passage 140 has a hollow formed along the axial direction of the flow passage 140 and penetrates through the first dielectric 130.
  • one side of the flow path 140 may be connected to a liquid supply part (not shown).
  • the flow path 140 when the flow path 140 is a narrow and long capillary tube, when one side of the flow path 140 is immersed in the liquid in a direction perpendicular to the ground, the cohesion of the liquid and the flow path 140
  • the conductive liquid may be supplied to the flow path 140 by capillary phenomenon due to the adhesion between the liquid and the liquid. That is, when the flow path 140 is a capillary tube, the conductive liquid may be supplied to the flow path 140 even when there is no liquid supply unit, which is a separate liquid supply device for supplying the conductive liquid.
  • the liquid supply part may supply the conductive liquid to the flow path 140.
  • the conductive liquid is supplied to one side of the flow path 140 connected with the liquid supply part, and the liquid supplied by the liquid supply part passes through the flow path 140.
  • the power supply unit 150 is connected to the first electrode 110 and the second electrode 120, respectively, and applies a voltage to the first electrode 110 and the second electrode 120.
  • the power supply unit 150 may apply a direct current, alternating current, bidirectional or unidirectional pulse voltage.
  • the magnitude of the voltage applied by the power supply unit 150 is preferably 300V or more, since a high voltage is required to generate a plasma based on the liquid.
  • the liquid plasma torch generator 100 generates plasma based on a conductive liquid passing through the flow path 140 when a voltage is applied to the first electrode 110 and the second electrode 120.
  • the generated plasma is discharged and discharged through an opening formed in the first electrode 110.
  • FIG. 5 is a third embodiment of the liquid plasma torch generator according to the embodiment of the present invention
  • FIG. 6 is a fourth embodiment of the liquid plasma torch generator according to the embodiment of the present invention.
  • the first electrode 210, the second electrode 220, the third electrode 230, the first dielectric 240, the second dielectric 250, The flow path 260 and the power supply unit 270 may be included.
  • the first electrode 210, the second electrode 220, and the third electrode 230 are spaced apart from each other by a predetermined distance, and the first dielectric 240 is positioned between the first electrode 210 and the second electrode 220.
  • the second dielectric 250 is positioned between the second electrode 220 and the third electrode 230.
  • the first dielectric 240 constituting the liquid plasma torch generator 200 may be connected to the second dielectric 250 to form a dielectric. have.
  • the flow path 260 is hollow along the axial direction of the flow path 260, and includes a first electrode 210, a second electrode 220, a third electrode 230, a first dielectric 240, and a second. Each penetrates through the dielectric 250.
  • one side of the flow path 260 may be connected to a liquid supply part (not shown).
  • the flow path 260 when the flow path 260 is a narrow and long capillaty tube, when one side of the flow path 260 is immersed in the liquid in a direction perpendicular to the ground, the cohesion of the liquid and the flow path 260
  • the conductive liquid may be supplied to the flow path 260 by capillary phenomenon due to the adhesion between the liquid and the liquid. That is, when the flow path 260 is a capillary tube, the conductive liquid may be supplied to the flow path 260 even when there is no liquid supply unit, which is a separate liquid supply device for supplying the conductive liquid.
  • the liquid supply part may supply the conductive liquid to the flow path 260.
  • the conductive liquid is supplied to one side of the flow path 260 connected to the liquid supply part, and the liquid supplied by the liquid supply part passes through the flow path 260.
  • the power supply unit 270 is connected to the first electrode 210, the second electrode 220, and the third electrode 230, respectively, between the first electrode 210 and the second electrode 220 and the second electrode 220. ) And a third electrode 230 are applied.
  • the power supply unit 270 may apply a direct current, alternating current, bidirectional or unidirectional pulse voltage.
  • the magnitude of the voltage applied by the power supply unit 270 is preferably 300 V or more, and a high voltage is required to generate a plasma based on the liquid.
  • the liquid plasma torch generator 200 has a conductivity passing through the flow path 260 when a voltage is applied to the first electrode 210, the second electrode 220, and the third electrode 230. Generate a plasma based on the liquid.
  • the region in which the plasma is generated is a region penetrating the first dielectric material 240 and a region penetrating the second dielectric material 250, and the conductive liquid supplied to the flow channel 260 is a first dielectric ( 240 and the second dielectric 250 are sequentially penetrated.
  • all of the conductive liquid passing through the flow path 260 may be vaporized by glow discharge or arc discharge, or part of the liquid may be vaporized, and the rest may be plasma.
  • plasma may be generated based on the liquid vaporized by the glow discharge or the arc discharge, or the plasma generated in the region penetrating the first dielectric 240 may be discharged again. have.
  • the conductivity of the conductive liquid, the cross-sectional area of the flow path 260, and the first electrode The distance between the 210 and the second electrode 220 and the magnitude of the voltage must be determined in advance, and the following Equation 2 must be satisfied.
  • Equation 2 S is the conductivity of the conductive liquid, A 2 is the cross-sectional area of the flow path 260, L 2 is the distance between the first electrode 210 and the second electrode 220.
  • the resistance R 1 of the region penetrating the first dielectric material 240 in the region of the flow path 260 should be configured to be 40 ⁇ or more, and the conductivity of the conductive liquid ( conductivity) is preferably 10 ⁇ S / cm to 1S / cm.
  • the conductivity of the conductive liquid and the cross-sectional area A of the flow path 260 are defined. 2 ), the distance L 3 and the magnitude of the voltage between the second electrode 220 and the third electrode 230 must be determined in advance, and the following Equation 2 must be satisfied.
  • Equation 3 (1 / S) ⁇ (L 3 / A 2 )
  • Equation 3 S is the conductivity of the conductive liquid, A 2 is the cross-sectional area of the flow path 260, L 3 is the distance between the second electrode 220 and the third electrode 230.
  • the resistance R 3 of the region penetrating the second dielectric 250 of the region of the flow path 260 should be configured to be 40 ⁇ or more, and the conductivity of the conductive liquid ( conductivity) is preferably 10 ⁇ S / cm to 1S / cm.
  • Winries and conditions for causing a glow discharge or an arc discharge in a region penetrating the first dielectric material 240 and a region penetrating the second dielectric material 250 in the region of the flow path 260 are respectively It is the same as the method described with reference to FIG.
  • the liquid plasma torch generator 200 may generate two times of a glow discharge or an arc discharge in succession. Therefore, the amount of generated ions or radicals in the plasma may be higher than in the case of only causing the glow discharge or the arc discharge once, and the plasma flame length may be further increased.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Fluid Mechanics (AREA)
  • Plasma Technology (AREA)

Abstract

L'invention concerne un appareil de production de torche à plasma liquide. Selon un mode de réalisation de la présente invention, l'appareil de production de torche à plasma liquide comprend : une première électrode ; une deuxième électrode ; un premier diélectrique situé entre la première électrode et la deuxième électrode ; et un trajet d'écoulement pénétrant dans la première électrode, la deuxième électrode et le premier diélectrique, de façon que si une tension est appliquée à la première électrode et la deuxième électrode, l'appareil produit du plasma à base d'un liquide conducteur passant par le trajet d'écoulement.
PCT/KR2014/006143 2013-07-09 2014-07-09 Appareil de production de torche à plasma liquide Ceased WO2015005667A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2013-0080184 2013-07-09
KR20130080184A KR101493673B1 (ko) 2013-07-09 2013-07-09 액체 플라즈마 토치 발생장치

Publications (1)

Publication Number Publication Date
WO2015005667A1 true WO2015005667A1 (fr) 2015-01-15

Family

ID=52280269

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2014/006143 Ceased WO2015005667A1 (fr) 2013-07-09 2014-07-09 Appareil de production de torche à plasma liquide

Country Status (2)

Country Link
KR (1) KR101493673B1 (fr)
WO (1) WO2015005667A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11283023B2 (en) 2017-06-08 2022-03-22 Corning Incorporated Doping of other polymers into organic semi-conducting polymers
DE102014202383B4 (de) 2013-03-01 2022-12-29 Hitachi Astemo, Ltd. Lenkwinkelsensor und elektrische Servolenkung, die diesen einsetzt

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180061967A (ko) * 2016-11-30 2018-06-08 한국수력원자력 주식회사 다중전극 플라즈마 토치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070085750A (ko) * 2004-12-03 2007-08-27 가부시키가이샤 도요다 지도숏키 액중 플라즈마용 전극, 액중 플라즈마 발생 장치 및 액중 플라즈마 발생 방법
JP2009285529A (ja) * 2008-05-27 2009-12-10 Clean Technology Co Ltd プラズマ処理装置
KR20100032186A (ko) * 2008-09-17 2010-03-25 (주)경우이앤씨 유통식 플라즈마 수산기 발생 장치
KR20100073320A (ko) * 2008-12-23 2010-07-01 한국기초과학지원연구원 액체상에서의 플라즈마 방전장치

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4123432B2 (ja) 2003-07-10 2008-07-23 国立大学法人東京工業大学 液体導入プラズマトーチ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070085750A (ko) * 2004-12-03 2007-08-27 가부시키가이샤 도요다 지도숏키 액중 플라즈마용 전극, 액중 플라즈마 발생 장치 및 액중 플라즈마 발생 방법
JP2009285529A (ja) * 2008-05-27 2009-12-10 Clean Technology Co Ltd プラズマ処理装置
KR20100032186A (ko) * 2008-09-17 2010-03-25 (주)경우이앤씨 유통식 플라즈마 수산기 발생 장치
KR20100073320A (ko) * 2008-12-23 2010-07-01 한국기초과학지원연구원 액체상에서의 플라즈마 방전장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014202383B4 (de) 2013-03-01 2022-12-29 Hitachi Astemo, Ltd. Lenkwinkelsensor und elektrische Servolenkung, die diesen einsetzt
US11283023B2 (en) 2017-06-08 2022-03-22 Corning Incorporated Doping of other polymers into organic semi-conducting polymers

Also Published As

Publication number Publication date
KR101493673B1 (ko) 2015-02-16
KR20150006604A (ko) 2015-01-19

Similar Documents

Publication Publication Date Title
WO2015088069A1 (fr) Dispositif générateur de plasma
WO2018199417A1 (fr) Appareil de réaction à plasma incandescent pour le traitement de l'eau et son procédé de fonctionnement
Machala et al. DC discharges in atmospheric air and their transitions
WO2015005667A1 (fr) Appareil de production de torche à plasma liquide
WO2018101679A1 (fr) Torche à plasma multiélectrode
Forster Progress in the understanding of electrical breakdown in condensed matter
WO2014171689A1 (fr) Dispositif générateur de rayon x et unité génératrice de rayon x et unité génératrice de haute tension le constituant
KR100653258B1 (ko) 이온화기 내에서 사용하기 위한 정적 중화기 및 기체 내에서 정적 중화를 이루기 위한 방법
WO2011027973A2 (fr) Appareil de génération de décharges de plasma en milieu liquide
CN102254774B (zh) 一种活性气体流的发生装置及其产生活性气体流的方法
WO2016108592A1 (fr) Dispositif d'électrode pour un appareillage de commutation isolé au gaz
DK1047165T3 (da) Barriereelektrode til overfladebehandling af elektrisk ledende eller ikke-ledende materialer samt arrangement af sådanne barriereelektroder
WO2020166960A1 (fr) Purificateur d'air à plasma dbd et dispositif de réduction de gaz d'échappement
Tu et al. Time‐resolved imaging of electrical discharge development in multiple bubbles immersed in water
WO2015093730A1 (fr) Appareil de formation de motif de type électrofilage
WO2022149795A1 (fr) Appareil de génération de plasma
WO2009123415A1 (fr) Dispositif de couplage conductif pour une interface esi
Takahashi et al. Development of pulsed discharge inside bubble in water
KR970016509A (ko) 아크 제어장치
WO2021172686A1 (fr) Ioniseur à plasma basse tension
CN101652016B (zh) 常压线状冷等离子体射流产生装置
WO2016017918A1 (fr) Source d'ions
WO2021091122A1 (fr) Dispositif de production d'eau stérilisée par plasma
Wu et al. A bipolar DC-driven touchable helium plasma jet operated in self-pulsed mode
Chang et al. Hysteresis effect of corona discharge in a narrow coaxial wire-pipe discharge tube with gas flow

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 14822279

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 14822279

Country of ref document: EP

Kind code of ref document: A1