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WO2015080109A1 - Capteur piézo-électrique et terminal portable - Google Patents

Capteur piézo-électrique et terminal portable Download PDF

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Publication number
WO2015080109A1
WO2015080109A1 PCT/JP2014/081140 JP2014081140W WO2015080109A1 WO 2015080109 A1 WO2015080109 A1 WO 2015080109A1 JP 2014081140 W JP2014081140 W JP 2014081140W WO 2015080109 A1 WO2015080109 A1 WO 2015080109A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric
piezoelectric film
glass plate
piezoelectric sensor
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2014/081140
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English (en)
Japanese (ja)
Inventor
斉藤誠人
遠藤潤
河村秀樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of WO2015080109A1 publication Critical patent/WO2015080109A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0414—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
    • H10N30/073—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies by fusion of metals or by adhesives
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/304—Beam type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/308—Membrane type

Definitions

  • the present invention relates to a piezoelectric sensor that detects pressure and a portable terminal including the piezoelectric sensor.
  • the piezoelectric sensor is mounted on a multifunctional mobile terminal, for example, and is used to detect a press on the touch panel.
  • a conventional piezoelectric sensor for example, there is a transparent piezoelectric sheet described in Patent Document 1.
  • This transparent piezoelectric sheet includes a piezoelectric film, an adhesive layer, and a flat plate electrode.
  • the flat plate electrode is disposed on the main surface of the piezoelectric film via an adhesive layer.
  • the transparent piezoelectric sheet described in Patent Document 1 since the pressure is relaxed by the adhesive layer, the pressure may not be sufficiently transmitted to the piezoelectric film. In this case, a sufficient voltage is not generated in the piezoelectric film. Moreover, there exists a possibility that the elasticity modulus of an adhesive bond layer may change a lot with use temperature. In this case, the pressure transmitted to the piezoelectric film and the voltage generated in the piezoelectric film vary depending on the operating temperature. As a result, the transparent piezoelectric sheet may not be able to detect the press with high accuracy.
  • An object of the present invention is to provide a piezoelectric sensor capable of accurately detecting a pressure regardless of a change in operating temperature.
  • the piezoelectric sensor of the present invention includes a plate member, a piezoelectric film, and a sticking layer.
  • the plate member is distorted by pressing.
  • the piezoelectric film is attached to the plate member.
  • the sticking layer is disposed between the plate member and the piezoelectric film.
  • the plate member, piezoelectric film, and adhesive layer are arranged in layers.
  • the adhesive layer has an elastic modulus that is less temperature dependent within the use temperature range than outside the use temperature range.
  • the elastic modulus of the adhesive layer affects the sensor output.
  • the temperature dependence of the elastic modulus is small within the operating temperature range, fluctuations in the sensor output due to the operating temperature are suppressed. For this reason, it is possible to detect the press with high accuracy regardless of the change in the use temperature.
  • the elastic modulus is 0.9 MPa to 1.1 MPa at ⁇ 30 ° C. to 60 ° C.
  • the adhesive layer has a substantially constant elastic modulus with a predetermined size in the operating temperature range. For this reason, the distortion of the plate member can be reliably transmitted to the piezoelectric film. Moreover, the fluctuation
  • the adhesive layer is made of rubber, silicone or polyethylene adhesive.
  • the elastic modulus of the adhesive layer can be made almost constant at a predetermined size in the operating temperature range.
  • the piezoelectric sensor of the present invention includes first and second flat plate electrodes.
  • the first flat plate electrode is disposed between the plate member and the piezoelectric film.
  • the second flat plate electrode faces the first flat plate electrode through the piezoelectric film.
  • the attaching layer attaches the piezoelectric film and the first flat plate electrode.
  • the plate member is a glass plate or a stainless plate.
  • the piezoelectric film is formed from a chiral polymer.
  • the chiral polymer is polylactic acid.
  • the polylactic acid is L-type polylactic acid.
  • PVDF polyvinylidene fluoride
  • a change in operating temperature may affect the piezoelectric characteristics of the piezoelectric film.
  • polylactic acid does not have pyroelectricity, it is possible to accurately detect pressing by the piezoelectric film.
  • the portable terminal of the present invention includes the piezoelectric sensor of the present invention.
  • FIG. 1 is a cross-sectional view of the piezoelectric sensor according to the first embodiment, taken along the line AA.
  • 2 is a cross-sectional view of the sensor unit 13 along AA. It is sectional drawing explaining the press detection by the piezoelectric sensor which concerns on 1st Embodiment. It is a graph which shows the output charge amount with respect to the elasticity modulus of the sticking layers 22, 23, and 28. It is a top view of the piezoelectric sensor which concerns on 2nd Embodiment. It is a BB sectional view of a piezoelectric sensor concerning a 2nd embodiment.
  • FIG. 1 is a plan view of the piezoelectric sensor 10.
  • FIG. 2 is a cross-sectional view of the piezoelectric sensor 10 taken along the line AA.
  • the piezoelectric sensor 10 includes a box-like back side housing part 11, a rectangular flat plate-like glass plate 12, a stripe-like sensor part 13, and a circuit part (not shown).
  • casing part 11 is comprised from the frame-shaped side surface and the rectangular bottom face, and has a rectangular-shaped opening part.
  • a rectangular parallelepiped casing 14 having a hollow portion is configured.
  • the sensor unit 13 is attached to the glass plate 12 with an adhesive so as to be disposed inside the housing 14.
  • the sensor unit 13 is disposed at the end of the glass plate 12 in the longitudinal direction in plan view.
  • the longitudinal direction of the sensor unit 13 is parallel to the lateral direction of the glass plate 12.
  • the circuit unit is disposed inside the housing 14 and is electrically connected to the sensor unit 13.
  • the longitudinal direction of the main surface of the housing 14 is referred to as the X direction
  • the short direction of the main surface of the housing 14 is referred to as the Y direction
  • the direction perpendicular to the main surface of the housing 14 is referred to as the Z direction.
  • FIG. 3 is a cross-sectional view of the sensor unit 13 taken along the line AA.
  • the sensor unit 13 includes a piezoelectric film 21, adhesive layers 22 and 23, flat plate electrodes 24 and 25, and base material layers 26 and 27.
  • a plate electrode 24 is disposed on one main surface of the piezoelectric film 21 with a sticking layer 22 interposed therebetween.
  • the adhesive layer 22 has a flat plate electrode 24 attached to one main surface of the piezoelectric film 21.
  • a plate electrode 25 is disposed on the other main surface of the piezoelectric film 21 with a sticking layer 23 interposed therebetween.
  • the affixing layer 23 affixes the plate electrode 25 to the other main surface of the piezoelectric film 21.
  • the plate electrodes 24 and 25 are electrically connected to a circuit unit (not shown).
  • a base material layer 26 is disposed on the main surface of the plate electrode 24 opposite to the piezoelectric film 21 side.
  • a base material layer 27 is disposed on the main surface of the plate electrode 25 opposite to the piezoelectric film 21 side.
  • the sensor unit 13 is disposed on the main surface of the glass plate 12 via the adhesive layer 28 so that the base material layer 26 side faces the glass plate 12. That is, the adhesive layers 22 and 28 are disposed between the glass plate 12 and the piezoelectric film 21. The sticking layer 28 sticks the sensor unit 13 to the glass plate 12.
  • the piezoelectric film 21, the adhesive layers 22 and 23, the flat plate electrodes 24 and 25, the base material layers 26 and 27, and the glass plate 12 are arranged in layers.
  • the glass plate 12 corresponds to the plate member of the present invention.
  • the adhesive layers 22 and 28 correspond to the “adhesive layer” of the present invention.
  • the plate electrode 24 corresponds to the first plate electrode of the present invention.
  • the plate electrode 25 corresponds to the second plate electrode of the present invention.
  • the piezoelectric film 21 is formed from PLLA (L-type polylactic acid).
  • PLLA is a chiral polymer, and the main chain has a helical structure.
  • PLLA is uniaxially stretched and has piezoelectricity when the molecules are oriented.
  • the piezoelectric constant of uniaxially stretched PLLA belongs to a very high class among polymers.
  • PLLA generates piezoelectricity by molecular orientation processing such as stretching, and there is no need to perform poling processing like other polymers such as PVDF and piezoelectric ceramics. That is, the piezoelectricity of PLLA that does not belong to ferroelectrics is not expressed by the polarization of ions like ferroelectrics such as PVDF and PZT, but is derived from a helical structure that is a characteristic structure of molecules. is there. For this reason, the pyroelectricity generated in other ferroelectric piezoelectric materials does not occur in PLLA.
  • the temperature of the piezoelectric film of the piezoelectric sensor is likely to change due to the temperature of the operator's finger or the heat generated by the battery.
  • stable pressure detection can be realized by using PLLA for the piezoelectric film of the piezoelectric sensor.
  • PVDF or the like shows a change in piezoelectric constant over time, and in some cases, the piezoelectric constant may be significantly reduced, but the piezoelectric constant of PLLA is extremely stable over time.
  • the PLLA Stretching direction of PLLA to take three axes, taking uniaxially and biaxially in a direction perpendicular to the three axial directions, the PLLA there is the piezoelectric constant of d 14 (piezoelectric constant shear).
  • the striped piezoelectric film 21 is cut so that the uniaxial direction is the thickness direction and the direction that forms an angle of 45 ° with respect to the triaxial direction (stretching direction) is the longitudinal direction. Thereby, when the piezoelectric film 21 expands and contracts in the longitudinal direction, the piezoelectric film 21 is polarized in the thickness direction.
  • the material of the adhesive layers 22, 23, 28 is an adhesive other than the acrylic adhesive.
  • the material of the adhesive layers 22, 23, 28 is preferably rubber, silicone or polyethylene adhesive.
  • the characteristic of the pressure-sensitive adhesive is that, while the adhesive is changed from a liquid to a solid at the time of bonding, the wet state is always kept stable.
  • the sensor part of this invention may be a type without the adhesive layers 22 and 23 and the base materials 26 and 27. That is, the sensor unit may have a structure in which a plate electrode (a resist may be laminated as a protective layer) is formed on a piezoelectric film without using an adhesive. In that case, the sticking layer 28 should just satisfy
  • the mobile terminal can be thinned.
  • the interval with the peripheral component becomes wide, unnecessary coupling with the peripheral component can be reduced.
  • the plate electrodes 24 and 25 are made of a metal film such as copper foil. By using a hard metal material for the flat plate electrode 24 disposed between the piezoelectric film 21 and the glass plate 12, the strain of the glass plate 12 due to pressing is easily transmitted to the piezoelectric film 21.
  • the material of the base material layers 26 and 27 is a resin such as polyimide.
  • FIG. 4 is a cross-sectional view for explaining detection of pressing (pushing) by the piezoelectric sensor 10.
  • the end portion of the glass plate 12 is fixed to the back side housing portion 11, so that the glass plate 12 bends so as to be convex in the pushed-in direction.
  • the sensor unit 13 attached to the main surface extends in the longitudinal direction (Y direction). Since the piezoelectric film 21 (see FIG. 3) constituting the sensor unit 13 extends in the longitudinal direction, the piezoelectric film 21 is polarized in the thickness direction by the piezoelectric effect as described above.
  • Electric charges are induced in the plate electrodes 24 and 25 by the electric charges generated on both main surfaces of the piezoelectric film 21.
  • the charges induced in the plate electrodes 24 and 25 are absorbed by the circuit unit (not shown).
  • the circuit unit converts this flow of electric current (current) into a voltage. In this way, the pressure applied to the glass plate 12 can be detected as a voltage.
  • FIG. 5 is a graph showing the amount of output charge with respect to the elastic modulus of the adhesive layers 22, 23, and 28.
  • the output charge amount is the amount of charge that flows from the sensor unit 13 to the circuit unit when a predetermined pressure is applied to the piezoelectric sensor 10.
  • the output charge amount when the elastic modulus of the adhesive layer is 10 9 Pa is 100%.
  • the output charge amount is almost constant, and the value is close to 0%.
  • the elastic modulus of the adhesive layer is changed from 10 5 Pa to 10 8 Pa, the output charge amount increases.
  • the elastic modulus of the adhesive layer is changed from 10 6 Pa to 10 7 Pa, the output charge amount changes greatly.
  • the elastic modulus of the adhesive layer is 10 8 Pa to 10 9 Pa, the output charge amount is almost constant, and the value is close to 100%.
  • the lower surface of the glass plate 12 (the side on which the sensor unit 13 is attached) extends and the upper surfaces of the adhesive layers 22 and 28 (the glass plate 12 side) extend.
  • the lower surface (the piezoelectric film 21 side) of the adhesive layers 22 and 28 does not extend much. That is, when the elastic modulus of the adhesive layers 22 and 28 is small, the adhesive layers 22 and 28 relieve the strain on the lower surface of the glass plate 12 (the vertical strain in the Y direction). For this reason, even if the lower surface of the glass plate 12 extends, the piezoelectric film 21 hardly extends.
  • the strain on the lower surface of the glass plate 12 is not sufficiently transmitted to the piezoelectric film 21.
  • the elastic modulus of the adhesive layers 22 and 28 is small, the output charge amount is small.
  • the elastic modulus of the adhesive layers 22 and 28 is large, the distortion of the lower surface of the glass plate 12 is not relieved by the adhesive layers 22 and 28, so that the distortion of the lower surface of the glass plate 12 is transmitted to the piezoelectric film 21 with certainty.
  • the elastic modulus of the adhesive layers 22 and 28 is large, the output charge amount becomes large. That is, the elastic modulus of the adhesive layers 22 and 28 disposed between the glass plate 12 and the piezoelectric film 21 affects the output charge amount and further the sensor output (voltage).
  • the adhesive layers 22, 23, 28 are designed, for example, such that the elastic modulus is greater than 10 5 Pa in the operating temperature range.
  • the operating temperature range is set to, for example, ⁇ 30 ° C. to 60 ° C.
  • the temperature dependence of the elastic modulus is smaller in the use temperature range than in the use temperature range.
  • the adhesive layers 22, 23, 28 are designed such that the change in elastic modulus with respect to the change in use temperature is within ⁇ 10% of the average value of the elastic modulus in the use temperature range. Thereby, the fluctuation
  • the adhesive layers 22, 23, 28 are preferably designed so that the elastic modulus is 0.9 MPa to 1.1 MPa at ⁇ 30 ° C. to 60 ° C.
  • a pressure sensitive adhesive other than an acrylic pressure sensitive adhesive such as rubber, silicone or polyethylene pressure sensitive adhesive is selected as the material of the adhesive layers 22, 23 and 28 satisfying such conditions. It is particularly effective to use such an adhesive for the material of the adhesive layers 22 and 28 disposed between the glass plate 12 and the piezoelectric film 21.
  • the adhesive layers 22, 23, 28 have a predetermined size and a substantially constant elastic modulus in the operating temperature range. Thereby, the distortion of the glass plate 12 due to pressing is reliably transmitted to the piezoelectric film 21 as described above. Moreover, the fluctuation
  • the sensor unit 13 is provided on a part of the glass plate 12, but the present invention is not limited to this form.
  • a plurality of sensor units may be arranged in the X direction, or the sensor units may have substantially the same area as the glass plate in plan view.
  • FIG. 6 is a plan view of the piezoelectric sensor 30.
  • FIG. 7 is a cross-sectional view of the piezoelectric sensor 30 taken along the line BB.
  • the piezoelectric sensor 30 includes a back housing 11, a glass plate 12, a sensor unit 13, spacers 35 a and 35 b, a striped SUS (stainless steel) plate 36, a columnar pusher 37, and a circuit unit (not shown).
  • the SUS plate 36 corresponds to the plate member of the present invention.
  • a housing 14 is composed of the back housing portion 11 and the glass plate 12.
  • the spacers 35 a and 35 b are disposed inside the housing 14.
  • the spacer 35 a is disposed in the vicinity of the first side surface parallel to the X direction among the side surfaces of the housing 14.
  • the spacer 35b is disposed in the vicinity of the second side surface (side surface facing the first side surface) of the housing 14.
  • the spacers 35a and 35b are disposed at a substantially central portion of the housing 14 in the X direction.
  • the SUS plate 36 is disposed inside the housing 14 so that its main surface is parallel to the main surface of the glass plate 12.
  • the SUS plate 36 is disposed at a substantially central portion in the X direction of the housing 14.
  • the longitudinal direction of the SUS plate 36 is parallel to the Y direction. Both ends in the longitudinal direction of the SUS plate 36 are supported by spacers 35a and 35b, respectively. Spaces are formed between the SUS plate 36 and the glass plate 12 and between the SUS plate 36 and the bottom surface of the back-side housing unit 11.
  • the sensor unit 13 is affixed to the main surface of the SUS plate 36 on the glass plate 12 side with an adhesive so that the longitudinal direction is the Y direction.
  • the circuit unit is disposed inside the housing 14 and is electrically connected to the sensor unit 13.
  • the pusher 37 is disposed between the glass plate 12 and the sensor unit 13 and is in contact with the glass plate 12 and the sensor unit 13.
  • the pusher 37 is shorter than the sensor unit 13 in the Y direction.
  • the pusher 37 is disposed at a substantially central portion of the SUS plate 36 in the Y direction.
  • the SUS plate 36 When the glass plate 12 is pushed in, the SUS plate 36 is pushed in via the pusher 37. The SUS plate 36 bends so as to be convex in the pushed-in direction. Since the main surface on the glass plate 12 side of the main surface of the SUS plate 36 contracts, the piezoelectric film 21 (see FIG. 3) attached to the main surface contracts. The charges induced in the plate electrodes 24 and 25 by the piezoelectric effect are absorbed by the circuit unit (not shown). The circuit unit converts this flow of electric current (current) into a voltage. In this way, the pressure applied to the glass plate 12 can be detected as a voltage.
  • the adhesive layers 22, 23, and 28 have a predetermined size and a substantially constant elastic modulus in the operating temperature range. Thereby, the distortion of the SUS plate 36 due to pressing is reliably transmitted to the piezoelectric film 21. Moreover, the fluctuation
  • the piezoelectric sensor of this invention is not limited to this.
  • a panel in which a glass plate, a touch panel and a liquid crystal panel are stacked in layers may be used.
  • the piezoelectric sensor of the present invention can be used for small electronic devices such as smartphones, tablet terminals, and displays for personal computers.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

La présente invention concerne un capteur piézo-électrique comprenant une plaque de verre (12), un film piézoélectrique (21) et une couche de liaison (22). La plaque de verre (12) se déforme sous l'action d'une pression. Le film piézoélectrique (21) est lié à la plaque de verre (12). La couche de liaison (22) est disposée entre la plaque de verre (12) et le film piézoélectrique (21). La plaque de verre (12), le film piézoélectrique (21) et la couche de liaison (22) sont agencés en couches. La couche de liaison (22) présente un module d'élasticité dont la dépendance à la température est moindre au sein de la plage de température d'utilisation qu'en dehors de la plage de température d'utilisation.
PCT/JP2014/081140 2013-11-27 2014-11-26 Capteur piézo-électrique et terminal portable Ceased WO2015080109A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013244715 2013-11-27
JP2013-244715 2013-11-27

Publications (1)

Publication Number Publication Date
WO2015080109A1 true WO2015080109A1 (fr) 2015-06-04

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PCT/JP2014/081140 Ceased WO2015080109A1 (fr) 2013-11-27 2014-11-26 Capteur piézo-électrique et terminal portable

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017051865A1 (fr) * 2015-09-24 2017-03-30 株式会社村田製作所 Panneau tactile et dispositif d'entrée tactile
CN108759659A (zh) * 2018-06-06 2018-11-06 常州信息职业技术学院 油漆钣金件刮板测试平台控制系统
CN108760103A (zh) * 2018-06-06 2018-11-06 常州信息职业技术学院 油漆钣金件刮板测试平台用压力传感器
CN108955961A (zh) * 2018-06-06 2018-12-07 常州信息职业技术学院 油漆钣金件刮板测试平台的制造方法
CN110764644A (zh) * 2019-10-11 2020-02-07 维沃移动通信有限公司 电子设备及压力补偿方法
EP3929540A1 (fr) * 2020-06-26 2021-12-29 TE Connectivity Norge AS Système de fixation pour fixer un capteur sur un substrat, procédé de fixation d'un capteur sur un substrat
JPWO2023153430A1 (fr) * 2022-02-10 2023-08-17
US11906373B2 (en) * 2017-07-26 2024-02-20 Murata Manufacturing Co., Ltd. Pressure sensor and electronic equipment
WO2025028141A1 (fr) * 2023-07-28 2025-02-06 株式会社村田製作所 Capteur et appareil électronique

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JP2002338916A (ja) * 2001-05-22 2002-11-27 Nitto Denko Corp フレキシブルプリント配線板固定用接着シート及びフレキシブルプリント配線板への電子部品の実装方法
JP2009053109A (ja) * 2007-08-28 2009-03-12 Aisin Seiki Co Ltd 圧電フィルムセンサ
JP2011133455A (ja) * 2009-11-24 2011-07-07 Tokai Rubber Ind Ltd 曲げセンサおよび変形形状測定方法
WO2011138903A1 (fr) * 2010-05-06 2011-11-10 株式会社村田製作所 Écran tactile, appareil de saisie dactylographique et procédé de commande pour celui-ci
WO2013089048A1 (fr) * 2011-12-16 2013-06-20 株式会社村田製作所 Dispositif d'entrée tactile
WO2013088889A1 (fr) * 2011-12-13 2013-06-20 昭和電工株式会社 Procédé de production de feuille adhésive transparente double face, et feuille adhésive transparente double face

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002338916A (ja) * 2001-05-22 2002-11-27 Nitto Denko Corp フレキシブルプリント配線板固定用接着シート及びフレキシブルプリント配線板への電子部品の実装方法
JP2009053109A (ja) * 2007-08-28 2009-03-12 Aisin Seiki Co Ltd 圧電フィルムセンサ
JP2011133455A (ja) * 2009-11-24 2011-07-07 Tokai Rubber Ind Ltd 曲げセンサおよび変形形状測定方法
WO2011138903A1 (fr) * 2010-05-06 2011-11-10 株式会社村田製作所 Écran tactile, appareil de saisie dactylographique et procédé de commande pour celui-ci
WO2013088889A1 (fr) * 2011-12-13 2013-06-20 昭和電工株式会社 Procédé de production de feuille adhésive transparente double face, et feuille adhésive transparente double face
WO2013089048A1 (fr) * 2011-12-16 2013-06-20 株式会社村田製作所 Dispositif d'entrée tactile

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017051865A1 (fr) * 2015-09-24 2017-03-30 株式会社村田製作所 Panneau tactile et dispositif d'entrée tactile
JPWO2017051865A1 (ja) * 2015-09-24 2018-08-02 株式会社村田製作所 タッチパネル、タッチ式入力装置
US11906373B2 (en) * 2017-07-26 2024-02-20 Murata Manufacturing Co., Ltd. Pressure sensor and electronic equipment
CN108955961B (zh) * 2018-06-06 2020-06-02 常州信息职业技术学院 油漆钣金件刮板测试平台用压力传感器的制造方法
CN108955961A (zh) * 2018-06-06 2018-12-07 常州信息职业技术学院 油漆钣金件刮板测试平台的制造方法
CN108760103A (zh) * 2018-06-06 2018-11-06 常州信息职业技术学院 油漆钣金件刮板测试平台用压力传感器
CN108760103B (zh) * 2018-06-06 2020-06-02 常州信息职业技术学院 油漆钣金件刮板测试平台用压力传感器
CN108759659B (zh) * 2018-06-06 2020-06-09 常州信息职业技术学院 油漆钣金件刮板测试平台控制系统
CN108759659A (zh) * 2018-06-06 2018-11-06 常州信息职业技术学院 油漆钣金件刮板测试平台控制系统
CN110764644A (zh) * 2019-10-11 2020-02-07 维沃移动通信有限公司 电子设备及压力补偿方法
CN110764644B (zh) * 2019-10-11 2023-04-11 维沃移动通信有限公司 电子设备及压力补偿方法
EP3929540A1 (fr) * 2020-06-26 2021-12-29 TE Connectivity Norge AS Système de fixation pour fixer un capteur sur un substrat, procédé de fixation d'un capteur sur un substrat
JPWO2023153430A1 (fr) * 2022-02-10 2023-08-17
JP7622881B2 (ja) 2022-02-10 2025-01-28 株式会社村田製作所 センサ
WO2025028141A1 (fr) * 2023-07-28 2025-02-06 株式会社村田製作所 Capteur et appareil électronique

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