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WO2013165174A1 - Sonde de test et procédé de fabrication d'une sonde de test - Google Patents

Sonde de test et procédé de fabrication d'une sonde de test Download PDF

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Publication number
WO2013165174A1
WO2013165174A1 PCT/KR2013/003770 KR2013003770W WO2013165174A1 WO 2013165174 A1 WO2013165174 A1 WO 2013165174A1 KR 2013003770 W KR2013003770 W KR 2013003770W WO 2013165174 A1 WO2013165174 A1 WO 2013165174A1
Authority
WO
WIPO (PCT)
Prior art keywords
barrel
base material
plunger
inspection
inspection probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2013/003770
Other languages
English (en)
Korean (ko)
Inventor
이재학
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of WO2013165174A1 publication Critical patent/WO2013165174A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer

Definitions

  • the present invention relates to a method for manufacturing an inspection probe and an inspection probe, and more particularly, to a method for manufacturing an inspection probe and an inspection probe that can be easily manufactured to reduce manufacturing costs.
  • the completed semiconductor device performs an electrical test to confirm the existence or reliability of normal operation.
  • This test connects all the input and output terminals of the semiconductor package with the test signal generation circuit to check the normal operation and disconnection, and connects some input and output terminals such as the power input terminal of the semiconductor package with the test signal generation circuit for stress.
  • There is a burn-in test that checks the life of a semiconductor package and whether a defect occurs by applying the same.
  • test socket is basically determined according to the shape of the semiconductor package, and serves as a medium for connecting the test board by mechanical contact between the external connection terminal of the semiconductor package and the socket lead.
  • test socket is connected to the semiconductor package and at the same time connected to the test substrate, thereby connecting the test socket, thereby transmitting a signal of the test substrate to the semiconductor package to perform the test.
  • a socket pin is embedded in a test socket body made of plastic.
  • a probe device called a pogo pin is used.
  • the probe device 100 electrically connects the terminal 151 of the device under test 150 and the pad 161 of the test device 160 to each other, and has a cylindrical barrel shape. 110, an upper plunger 120 disposed above the barrel 110 and having a plurality of irregularities 121 formed at an upper end thereof, and a lower plunger 130 which is protruded from the inside of the barrel 110 to the outside. And a spring (not shown) disposed inside the barrel 110 to elastically bias the lower plunger 130 downward.
  • the outer peripheral surface of the barrel 110 is provided with a flange 111 protruding outward, the flange 111 to prevent the probe device 100 is caught in the housing 140 to be separated from the outside.
  • the housing 140 is the upper housing 141 is formed with a first through-hole 141a extending with a constant inner diameter in the vertical direction, and is disposed below the upper housing 141 and the first through-hole It is disposed inside the lower housing 142 having a larger diameter than 141a but having a second through hole 142a narrowed by a step 142b protruding inwardly to enable electrical connection.
  • the probe device is mounted on the inspection device in a state in which the lower plunger is in contact with the pad of the inspection device, and has a plurality of terminals on the upper side thereof which can contact the upper plunger. Is placed.
  • the terminal of the device under test contacts the unevenness of the upper plunger and lowers the probe as a whole.
  • the barrel is also lowered along with the upper plunger, where the lower plunger is inserted into the barrel to ensure contact with the pad disposed at the bottom thereof.
  • the spring disposed inside the barrel can more securely make contact between the upper plunger and the terminal and the lower plunger and the pad by the elastic repulsive force.
  • the signal is transmitted to a terminal of the device under test through a lower plunger, a barrel, and an upper plunger, whereby a predetermined electrical inspection can be performed.
  • a cylindrical base material 110 ′ having a predetermined thickness is prepared and the surface of the base material 110 ′ is cut by a shelf or the like so that the flange 111 may be provided on the surface. . That is, as shown in FIG. 4, the portion indicated by the dotted line is removed by cutting so that a protruding flange may be formed on the surface of the barrel 110 to be manufactured. Thereafter, as shown in FIG. 5, the lower end of the barrel 110 is bent inward.
  • the flange is disposed inside the housing as described above, and serves to prevent the barrel from being separated out.
  • the probe device according to the prior art has the following problems.
  • the barrel manufacturing method according to the prior art is to prepare a base material having a relatively thick thickness and then to form a flange by cutting the base material.
  • this manufacturing method has a disadvantage in that the part that must be removed from the base material inevitably occurs during the cutting process, causing waste of materials.
  • the gap between the probe devices is narrowed.
  • the thickness of the flange can be reduced, and it is easy to form such a fine flange by cutting.
  • the flange is in contact with the inner surface inside the housing, there is a risk that the flange is worn or damaged due to a number of contacts.
  • the present invention has been created to solve the above problems, and more particularly, to provide a test probe and a method for manufacturing a test probe that can be easily manufactured, easy to maintain and reduce the overall manufacturing cost.
  • the inspection probe and the inspection probe manufacturing method of the present invention are used to electrically connect the terminal of the device under test and the pad of the inspection device with each other and are arranged in a housing.
  • the apparatus In the apparatus,
  • An upper plunger that can be in contact with the terminal of the device under test
  • a barrel coupled to the upper plunger and having an inner cylindrical shape, the lower portion of which has a protrusion that is bent outwardly and protrudes;
  • It may include an elastic biasing member inserted into the barrel to elastically bias the lower plunger in a direction away from the upper plunger.
  • the lower plunger may include an upper portion having an inner diameter corresponding to an inner diameter of the barrel; And a lower portion connected integrally with the upper portion and extending downward and having an outer diameter smaller than the upper portion.
  • An upper portion of the protrusion may be provided with a recessed part that is bent inwardly so that a part of the lower plunger does not escape from the barrel.
  • the protrusion may have a shape in which the outer diameter gradually decreases from the lower end to the upper side.
  • the protruding portion may have a shape of irregularities protruding locally bent from a portion of the barrel.
  • the protrusions may be spaced apart from each other along the circumferential direction of the barrel.
  • the manufacturing method of the inspection probe device of the present invention for achieving the above object is a manufacturing method of the inspection probe device for electrical inspection
  • Step (b) is to prepare a conical mold which gradually increases from an outer diameter smaller than the diameter of the base material to an outer diameter larger than the diameter of the base material, and after placing the open lower end of the base material in the mold, the base material is lowered. By pressing, the lower end of the base material may be gradually expanded.
  • the probe having a sharp end may be pressed inward from the outside of the base material to form a recess.
  • the recessed parts may be spaced apart from each other along the circumferential direction of the base material.
  • a barrel having a hollow interior and having a cylindrical shape having a constant inner diameter and an outer diameter, the lower end of which has a protrusion which is bent outwardly and protrudes, and a barrel which is arranged on the upper side of the protrusion and bent inwardly;
  • a portion includes a lower plunger that is inserted into the barrel and the other portion protrudes downward from the barrel but is hooked to the recess so as not to fall out of the barrel.
  • the protrusion may extend in the circumferential direction along the circumference of the barrel and may have a morning glory shape as a whole.
  • the protrusion may be bent to protrude in a V shape.
  • the depression may be bent inward in a V shape.
  • the manufacturing is easy and the required material can be reduced.
  • the inspection probe device of the present invention has the advantage that the overall maintenance cost can be reduced because it can be easily reworked by bending even when the protrusion is damaged or broken.
  • 1 is a view showing the inspection probe device according to the prior art.
  • FIG. 2 is a view showing the operation of the inspection probe of Figure 1;
  • 3 to 5 is a view showing an example of a state of manufacturing a barrel of the inspection probe for inspection of FIG.
  • FIG. 6 is a view showing a test probe device according to an embodiment of the present invention.
  • FIG. 7 to 14 is a view showing a state of manufacturing the inspection probe device of FIG.
  • the inspection probe device 10 is used to electrically connect the terminal 81 of the device under test 80 and the pad 91 of the inspection device 90 to each other. It may be in contact with the terminal 81 of the device under test 80 and the lower end thereof may be in contact with the pad 91 of the test apparatus 90.
  • This inspection probe device 10 is disposed in the housing 70.
  • the housing 70 has an upper housing 71 in which a first through hole 71 a penetrates an upper surface and a lower surface with a predetermined diameter, and has a diameter slightly larger than that of the first through hole 71 a, and has a stepped lower end. It consists of a lower housing 72 is formed a second through hole (72a) is reduced in diameter by 72b). At this time, the inspection probe device 10 is placed in a state disposed inside the first through hole (71a) and the second through hole (72a).
  • the inspection probe device 10 includes an upper plunger 20, a barrel 30, a lower plunger 40, and an elastic bias member 50.
  • the upper plunger 20 is formed with an unevenness at an upper end thereof so as to be in contact with the terminal 81 of the device under test 80.
  • the upper uneven portion 21, the middle portion 22 and the insertion portion 23 is composed of.
  • the upper concave-convex portion 21 is formed in a substantially cylindrical shape, but protrudes to the outside of the housing.
  • the upper concave-convex portion 21 has a plurality of concave-convex 211 in the shape of a cone or a square pyramid is formed on the upper end.
  • the unevenness 211 has a shape capable of increasing electrical conductivity by making sure that the terminal surface of the device to be inspected 80 is in contact with the terminal surface.
  • the irregularities may be plated with excellent conductive material such as gold to increase conductivity.
  • the intermediate portion 22 is a portion in which the outer diameter extends from the upper concave-convex portion 21 and is formed by combining a substantially truncated cone and a cylinder.
  • the inserting portion 23 is a portion inserted into the barrel 30, the groove 231 is concave in the center is formed in the circumferential direction, the lower end is provided with a pin protruding toward the lower end .
  • the insertion part 23 is configured such that the groove 231 can be fixed by the depression 31 of the barrel 30.
  • the barrel 30 is configured to be combined with the upper plunger 20 and have an inner cylindrical shape, but having a protrusion 32 which is bent and protruded outward at a lower portion thereof.
  • the barrel 30 may have a conductive plating layer having excellent conductivity both inside and outside thereof, but is not limited thereto.
  • a conductive plating layer may be formed only inside the barrel 30.
  • a recess 31 is bent and inwardly provided on the upper side of the barrel 30, and the recess 31 is fitted into the groove 231 of the insertion portion 23 so that the upper plunger 20 is barreled. Position it at (30).
  • a lower portion of the barrel 30 is provided with a protrusion 32 which is bent and protruded outward.
  • the protrusion 32 has a shape in which the outer diameter increases toward the lower end, and the outer diameter of the bottom of the barrel 30 is slightly larger than the upper or middle portion of the barrel 30.
  • the protrusion 32 of the barrel 30 performs a function of being caught inside the housing and not exiting to the outside.
  • a recess 31 is bent inward so that a portion of the lower plunger 40 is not bent out of the barrel 30.
  • the depression 31 has a shape substantially the same as the depression 31 above the barrel 30.
  • the lower plunger 40 is partially inserted into the barrel 30 and the other part protrudes downward from the barrel 30 and is in contact with the pad 91 of the inspection apparatus 90.
  • the lower plunger 40 includes an upper portion 41 having an inner diameter corresponding to the inner diameter of the barrel 30, and a lower portion 42 connected integrally with the upper portion 41 and extending downward. It is configured by.
  • the upper portion 41 is formed in a substantially cylindrical shape, the upper portion or the lower portion in the interior of the barrel 30.
  • the upper portion 41 serves to prevent the lower plunger 40 from escaping to the outside by the lower end is caught by the depression 31 of the barrel 30.
  • the lower portion 42 is a portion extending downward from the upper portion 41 and protrudes outwardly of the barrel 30, and the lower portion of the lower portion may contact the pad 91 of the inspection device 90. have.
  • the lower part 42 is formed in a substantially fin shape.
  • the elastic bias member 50 is inserted into the barrel 30 to elastically bias the lower plunger 40 in a direction away from the upper plunger 20.
  • a compression coil spring is generally used. At this time, in order to facilitate the electrical flow, it is also possible to form a conductive plating layer having excellent conductivity on the surface of the spring.
  • the elastic bias member 50 is inserted into the barrel 30, the upper end is in contact with the upper plunger 20 and the lower end is in contact with the lower plunger 40 is always the lower plunger 40 ) To be elastically pressurized.
  • Inspection probe device 10 according to an embodiment of the present invention can be manufactured as follows.
  • a cylindrical base material 30 ′ having an upper and lower ends and a constant outer diameter maintained therein refers to a pipe before the barrel 30 is completed. Prepare. At this time, the base material 30 'can use a pipe of a normal metal material.
  • the lower side of the base material 30 'to prepare a conical mold 60, the outer diameter of which is gradually increased from the outer diameter smaller than the diameter of the base material 30' to the outer diameter larger than the diameter of the base material 30 ', the mold After placing the open lower end of the base material 30 'in 60, the base material 30' is pressed downward so that the lower end of the base material 30 'is gradually expanded.
  • the shape of the base material 30 'as viewed from the bottom side is as shown in FIG.
  • a part or the entirety of the base material 30 ′ is bent inward as the upper side of the protruding portion 32 to form the depression 31.
  • the tip-shaped probe with the pointed end is pressed inward from the outside of the base material 30 'so that the recess 31 is formed.
  • the inner direction means a direction toward the central axis of the base material (30 ').
  • the base material 30 ′ in which the depressions 31 are generated is shown in FIG. 12.
  • the lower plunger 40 is inserted through the upper end of the base material 30 ′ to be seated so as to be caught by the recess 31, and then a spring and The upper plunger 20 is inserted sequentially.
  • the upper portion of the base material 30 ′ into which the upper plunger 20 is inserted is bent and recessed to generate the recess 31.
  • the depression 31 is formed on the upper portion of the base material 30 ′ so that the depression 31 may be fitted into the groove 231 of the upper plunger 20.
  • the recess 31 may be spaced apart from each other along the circumferential direction of the base material 30 '.
  • the present invention is not limited thereto, and a single recess 31 may be formed in the base material 30 ′.
  • the recess 31 may be bent inward while having a V-shaped cross section, and may be configured in various other forms.
  • the inspection probe device 10 of the present invention has the following effects.
  • the terminal 81 of the device under test 80 contacts the upper plunger 20 while the upper plunger 20 and the barrel are in contact with each other. Lower (30).
  • the lower plunger 40 is inserted into the barrel 30 and is elastically supported by the elastic bias member 50 so as to reliably contact the pad 91 of the inspection device 90.
  • an electrical signal is applied from the pad 91 of the inspection device 90, the signal passes through the lower plunger 40, the elastic bias member 50 and / or the barrel 30, and the upper plunger 20. It is delivered to the terminal 81 of the device under test 80 so that a predetermined electrical test is performed.
  • the inspection probe device of the present invention can easily form a protrusion required for a pipe-type barrel without mechanically cutting a round bar having a predetermined thickness as in the past, thereby increasing the convenience of manufacturing and waste of material.
  • the advantage is that it can be minimized.
  • the inspection probe device of the present invention has the advantage that it can be easily bent outwards to easily produce a new protrusion even when the protrusion is worn or damaged due to frequent operation, easy maintenance.
  • the inspection probe device of the present invention has the advantage that it can be easily applied to the terminal of the device under inspection having a fine pitch since the projection is not formed by mechanical cutting.
  • the protruding portion is configured in such a way that the diameter thereof is expanded as a whole.
  • the morning glory is formed in the same shape, but is not limited thereto.
  • the protrusions 32 may be formed only on one side of the barrel 30, may be formed on both sides, or may be formed on top, bottom, left and right, respectively, and may be formed in various other forms.
  • a tool such as a mold or a tablet is used to form an indentation or a protrusion, but the present invention is not limited thereto and may be formed by bending part or all of the barrel using various tools not illustrated. It is possible to do
  • the inspection probe device and the method of manufacturing the same according to the present invention are not limited thereto, and may be modified in various forms, and the range of such modifications ranges from the claims to the reasonable interpretation.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
PCT/KR2013/003770 2012-05-01 2013-05-01 Sonde de test et procédé de fabrication d'une sonde de test Ceased WO2013165174A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020120045984A KR101330198B1 (ko) 2012-05-01 2012-05-01 검사용 탐침장치 및 검사용 탐침장치의 제조방법
KR10-2012-0045984 2012-05-01

Publications (1)

Publication Number Publication Date
WO2013165174A1 true WO2013165174A1 (fr) 2013-11-07

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ID=49514525

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Application Number Title Priority Date Filing Date
PCT/KR2013/003770 Ceased WO2013165174A1 (fr) 2012-05-01 2013-05-01 Sonde de test et procédé de fabrication d'une sonde de test

Country Status (2)

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KR (1) KR101330198B1 (fr)
WO (1) WO2013165174A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113728238A (zh) * 2019-04-23 2021-11-30 株式会社友华 接触探针

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101627172B1 (ko) * 2013-11-23 2016-06-03 박상량 하나의 절연성 몸체로 구성되는 소켓
KR101396377B1 (ko) 2014-02-03 2014-05-20 주식회사 아이에스시 반도체 검사용 소켓의 판형 검사용 콘택터
KR101439194B1 (ko) * 2014-02-18 2014-09-16 주식회사 아이에스시 반도체 검사용 소켓의 판형 검사용 콘택터
KR101500609B1 (ko) * 2014-04-02 2015-03-19 리노공업주식회사 검사장치
KR20170000572A (ko) 2015-06-24 2017-01-03 주식회사 메가터치 전자 디바이스 테스트용 탐침 장치
KR101865257B1 (ko) * 2016-12-28 2018-06-07 부경대학교 산학협력단 반도체 소자 테스트용 소켓
KR102715188B1 (ko) * 2018-12-27 2024-10-11 주식회사 아이에스시 테스트 소켓용 컨택트 핀 및 이를 포함하는 테스트 소켓
KR102169588B1 (ko) * 2019-02-25 2020-10-23 이승용 포고 핀과 인터페이스를 포함한 테스트 소켓 및 그 테스트 소켓을 포함한 테스트 장치
JP6923821B2 (ja) * 2019-09-06 2021-08-25 山一電機株式会社 コンタクトプローブ及びこれを備えた検査用ソケット
KR102757094B1 (ko) * 2022-10-05 2025-01-21 주식회사 티에스이 테스트 소켓
KR102587516B1 (ko) * 2023-05-18 2023-10-11 주식회사 티에스이 테스트 소켓

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JP2004047162A (ja) * 2002-07-09 2004-02-12 Enplas Corp コンタクトピン及び電気部品用ソケット
JP2006300581A (ja) * 2005-04-18 2006-11-02 Yokowo Co Ltd プローブの組付け構造
JP2010060316A (ja) * 2008-09-01 2010-03-18 Masashi Okuma 異方性導電部材および異方導電性を有する測定用基板
KR20110103338A (ko) * 2010-03-12 2011-09-20 가부시키가이샤 아드반테스트 콘택트 프로브 및 소켓, 튜브상 플런저의 제조 방법, 및 콘택트 프로브의 제조 방법

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004047162A (ja) * 2002-07-09 2004-02-12 Enplas Corp コンタクトピン及び電気部品用ソケット
JP2006300581A (ja) * 2005-04-18 2006-11-02 Yokowo Co Ltd プローブの組付け構造
JP2010060316A (ja) * 2008-09-01 2010-03-18 Masashi Okuma 異方性導電部材および異方導電性を有する測定用基板
KR20110103338A (ko) * 2010-03-12 2011-09-20 가부시키가이샤 아드반테스트 콘택트 프로브 및 소켓, 튜브상 플런저의 제조 방법, 및 콘택트 프로브의 제조 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113728238A (zh) * 2019-04-23 2021-11-30 株式会社友华 接触探针

Also Published As

Publication number Publication date
KR101330198B1 (ko) 2013-11-15
KR20130122869A (ko) 2013-11-11

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