[go: up one dir, main page]

WO2012011517A1 - Atomiseur à ondes acoustiques de surface - Google Patents

Atomiseur à ondes acoustiques de surface Download PDF

Info

Publication number
WO2012011517A1
WO2012011517A1 PCT/JP2011/066515 JP2011066515W WO2012011517A1 WO 2012011517 A1 WO2012011517 A1 WO 2012011517A1 JP 2011066515 W JP2011066515 W JP 2011066515W WO 2012011517 A1 WO2012011517 A1 WO 2012011517A1
Authority
WO
WIPO (PCT)
Prior art keywords
acoustic wave
surface acoustic
comb
substrate
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2011/066515
Other languages
English (en)
Japanese (ja)
Inventor
陽平 石上
正紀 岡野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp filed Critical Panasonic Corp
Priority to JP2012525420A priority Critical patent/JP5861121B2/ja
Publication of WO2012011517A1 publication Critical patent/WO2012011517A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0623—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers coupled with a vibrating horn
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0653—Details
    • B05B17/0669—Excitation frequencies

Definitions

  • the present invention relates to a surface acoustic wave atomizer.
  • a surface wave atomizer is known (see, for example, Patent Document 1).
  • This surface acoustic wave atomizer suppresses the presence of liquids that are not involved in atomization by forming a slender liquid distribution along the surface of the surface acoustic wave by surface tension to maintain the balance between the liquid supply amount and the atomization amount.
  • it is intended to stably spray a large amount of fine particles with less power consumption.
  • the present invention solves the above-mentioned problems, and generates and propagates a surface acoustic wave having a large wave amplitude and a small spread with a simple configuration, and stably atomizes with high energy efficiency. It is an object of the present invention to provide a surface acoustic wave atomization device capable of performing the above.
  • a surface acoustic wave atomization apparatus includes a substrate made of a piezoelectric material, a pair of comb electrodes provided on the substrate to generate surface acoustic waves on the surface of the substrate, and a substrate.
  • a liquid supply unit that supplies a liquid to be atomized by the surface acoustic wave generated on the surface of the substrate to the substrate, and the pair of comb-shaped electrodes are engaged with each other.
  • the matching length is characterized by being 10 times or less the wavelength of the surface acoustic wave generated by the comb-shaped electrode.
  • the meshing length of the comb teeth is 5 times or more the wavelength of the surface acoustic wave generated by the comb electrode.
  • the liquid supply unit is disposed to face the surface of the substrate, and includes a supply member for distributing the liquid supplied onto the substrate in a film shape by the surface tension of the liquid,
  • the supply member preferably has a surface that faces the surface of the substrate with a uniform height from the surface of the substrate and forms a gap space between the surface of the substrate and the substrate. Further, it is preferable that the supply member is configured so that the length in the direction orthogonal to the traveling direction of the surface acoustic wave generated on the surface of the substrate is equal to or less than the meshing length of the comb teeth.
  • this supply member is provided apart from the comb-shaped electrode so that the comb-shaped electrode is not normally exposed to the liquid distributed in the form of a film.
  • this surface acoustic wave atomization device it is preferable that the meshing length of the comb teeth is constant in each comb tooth of the pair of comb-shaped electrodes.
  • the pair of comb electrodes preferably include a reflective electrode for constituting a unidirectional electrode.
  • the surface acoustic wave atomization device of the present invention by making the opening width appropriate, the surface acoustic waves generated by the comb-shaped electrode are not spread and a large amplitude is maintained.
  • the region can be limited and atomization can be performed efficiently.
  • FIG.1 (a) is a top view about the surface acoustic wave atomizer based on one Embodiment of this invention
  • FIG.1 (b) is the side view
  • FIG.1 (c) is atomization of the apparatus It is principal part sectional drawing of an area
  • FIG. 2A is a plan view of a pair of comb-shaped electrodes when the meshing length of comb teeth is long (opening width is wide)
  • FIG. 2B is a plan view when the meshing length is short (opening width is narrow).
  • FIG. 3 is a graph showing the relationship between the amplitude of the surface acoustic wave and the opening width of the comb electrode at three points with different distances from the comb electrode in the surface acoustic wave atomizer.
  • FIG. 1A, 1B, and 1C show a surface acoustic wave atomizer 1.
  • FIG. The surface acoustic wave atomization apparatus 1 is generated on a surface 2 of a substrate 2 made of a piezoelectric material, a pair of comb electrodes 21 provided on the substrate 2 to generate a surface acoustic wave W on the surface S of the substrate 2, and the surface S.
  • a liquid supply unit 3 for supplying the liquid atomized by the surface acoustic wave W to the substrate 2.
  • the surface acoustic wave W is generated by applying a high frequency voltage to the comb electrode 21.
  • the substrate 2 provided with a pair of comb-shaped electrodes 21 constitutes a vibrator that generates a surface acoustic wave W. Further, on the surface S, a reflective comb electrode 22 is disposed adjacent to the comb electrode 21.
  • the longitudinal direction of the comb teeth of the comb-shaped electrode 21 is defined as direction Y
  • the direction perpendicular to the comb teeth is defined as direction X (right direction)
  • the origin X 0 in the direction X is set to the maximum on the direction X side. The outermost position of the outer comb teeth.
  • the substrate 2 is made of a piezoelectric material made of a piezoelectric body itself such as LiNbO 3 (lithium niobate), for example.
  • This piezoelectric material may be one in which a piezoelectric thin film, for example, a PZT thin film (lead, zirconium, titanium alloy thin film) is formed on the surface of a non-piezoelectric substrate. A surface acoustic wave is excited in the surface portion of the piezoelectric thin film on the surface.
  • the pair of comb-shaped electrodes 21 are electrodes (IDT: inter-digital transducer) formed by meshing each comb-tooth portion of two comb-shaped electrodes on the surface of the piezoelectric material. Comb teeth adjacent to each other of the comb-shaped electrode 21 belong to different electrodes, and are arranged at a pitch having a length half the wavelength ⁇ of the surface acoustic wave W to be excited.
  • the mutual meshing length of the comb teeth of the pair of comb-shaped electrodes 21, that is, the width at which the comb teeth intersect is a dimension that defines the width of the surface acoustic wave W generated by the comb-shaped electrode 21.
  • the opening width D of the comb electrode 21 is defined.
  • the opening width D (engagement length) is 5 to 10 times the wavelength ⁇ of the surface acoustic wave generated by the comb electrode 21.
  • the comb teeth of the comb-shaped electrode 21 have the same length, and the meshing length of the comb teeth is constant in each comb tooth.
  • the opening width D will be described in detail later (see FIGS. 2, 3, and 4).
  • the liquid supply unit 3 is disposed opposite to the liquid container 31, the liquid deriving member 32 for deriving the liquid 4 from the liquid container 31 and supplying the liquid 4 to the surface S, and the surface S of the substrate 2 to distribute the liquid in a film shape.
  • the supply member 30 is provided.
  • the supply member 30 forms a gap space G for distributing the liquid 4 supplied onto the substrate 2 on the surface S of the substrate 2 in a film shape by the surface tension of the liquid 4.
  • the supply member 30 is an elongated member and has a surface that forms a gap space G with the surface S of the substrate 2, and the surface is spaced from the surface S of the substrate 2 by a uniform height g, Opposite the surface S.
  • the supply member 30 has its longitudinal direction directed in a direction Y orthogonal to the traveling direction X of the surface acoustic wave W generated on the surface S of the substrate 2, and the length in the direction Y (the gap space G is formed).
  • the length of the surface is equal to or smaller than the opening width D.
  • the gap space G is formed such that the width in the width direction Y orthogonal to the traveling direction X of the surface acoustic wave W is equal to or less than the opening width D.
  • the supply member 30 is disposed so that the entire width of the gap space G in the direction Y is substantially within the opening width D desired from the comb-shaped electrode 21.
  • the liquid 4 is distributed in the form of a film on the surface S by being held in the gap space G by its own surface tension. Accordingly, the distribution of the liquid 4 in the direction Y is approximately within the opening width D.
  • the supply member 30 is configured using a pipe having pores through which the liquid 4 leaks, or a member that has a fine structure on the surface and transports the liquid 4 by capillary action, such as a bar or plate. You can do it.
  • the operation of the surface acoustic wave atomizer 1 will be described.
  • a high-frequency (for example, MHz band) voltage from the electric circuit 23 for applying a high-frequency voltage to the comb-shaped electrode 21 the electrical energy is converted into wave mechanical energy by the comb-shaped electrode 21, and is applied to the surface of the substrate 2.
  • a surface acoustic wave W called a Rayleigh wave is excited.
  • the surface acoustic wave W excited by the comb-shaped electrode 21 is generated with a width based on the opening width D and propagates in both directions of the comb-shaped electrode 21, that is, the direction X and the opposite direction (left direction).
  • the amplitude of the excited surface acoustic wave W is determined by the magnitude of the voltage applied to the comb electrode 21.
  • the surface acoustic wave propagating in the left direction is reflected and returned by the reflective comb electrode 22 provided on the left side of the comb electrode 21.
  • the reflective comb electrode 22 constitutes a so-called reflector that totally reflects the surface acoustic wave.
  • the comb-shaped electrode 21 is combined with the reflective comb-shaped electrode 22 to form a so-called unidirectional electrode that generates a surface acoustic wave W that propagates only in the X direction.
  • the configuration of the unidirectional electrode is not limited to that shown in this embodiment.
  • the liquid 4 is supplied to the surface S of the substrate 2 by the liquid supply unit 3, atomized by the surface acoustic wave W that has propagated through the surface S, and fly as fine particles 41.
  • the liquid 4 held by the surface tension is consumed by atomization, it is automatically replenished via the liquid lead-out member 32 by the action of the surface tension.
  • Atomization by the surface acoustic wave W is performed by the droplets leaving and flying from the surface of the liquid 4 by surface tension waves (capillary waves) propagating on the surface of the liquid 4. Therefore, if the film thickness of the liquid 4 is thick, the energy of the surface acoustic wave is attenuated before reaching the surface of the liquid 4 and cannot be atomized.
  • Concentration of high energy on the liquid 4 can be performed by an appropriate design of the opening width D, and the film thickness of the liquid 4 can be further adjusted by adjusting the above-described height g, and further by adjusting the roughness of the surface S and the liquid. It can be optimized by adjusting affinity and the like.
  • the surface acoustic wave atomizer 1 is used as, for example, a medical atomizer driven by a low-power dry battery.
  • the atomized liquid 4 is water or a chemical solution in which a chemical is dissolved in water.
  • it is used as a humidity adjusting device for preventing drying, for example.
  • the optimization of the opening width D is performed together with the optimization of the position of the atomization region on the surface S of the substrate 2, that is, the region where the liquid 4 is present and atomization is performed. That is, when the comb-shaped electrode 21 is normally exposed to the liquid 4, the deterioration of the electrode proceeds. Therefore, the atomization region needs to be set apart from the comb-shaped electrode 21 to some extent. Further, if the atomization region is too far from the comb-shaped electrode 21, the efficiency of atomization deteriorates due to the spread and attenuation of the surface acoustic wave.
  • the opening width D is set as follows.
  • the atomization region is set by the shape and arrangement of the gap space G formed by the supply member 30.
  • a substrate 2 having a different opening width D by changing the meshing length of the comb teeth of the comb electrode 21 is prepared, and the direction X of the comb electrode 21 is measured by a laser Doppler vibrometer.
  • the distribution of the amplitude A of the surface acoustic wave on the side was measured, and the measurement results shown in FIGS. 3 and 4 were obtained.
  • the atomization area is not used.
  • the size of the measurement area is 70 ⁇ in the direction X and 20 ⁇ in the direction Y.
  • the frequency of the high-frequency voltage applied to the comb-shaped electrode 21 is in the MHz band, and similar measurement results are obtained from 20 MHz to 400 MHz.
  • the amplitude A shown in FIG. 3 shows a change in a mountain shape that increases and decreases as the aperture width D increases, and decreases as the position in the direction X increases. It shows a tendency to become.
  • Such a change in the amplitude A is understood as a result of the surface acoustic waves generated at each point within the range of the opening width D in the comb electrode 21 interfering with each other when propagating in the direction X while spreading.
  • the aperture width D is preferably not more than 10 times the wavelength ⁇ , that is, D ⁇ 10 ⁇ .
  • the spread due to propagation is large in this way, it is conceivable to use a surface acoustic wave in a spread state.
  • the energy density of the source is increased to sufficiently increase the amplitude A in the atomization region, the comb-shaped electrode 21 is used. This is not preferable because the load on the battery becomes excessive.
  • the amplitude A of the wave is increased, and the spread of the wave generated by narrowing the opening width D is defined as the opening width. This can be avoided by setting it to an appropriate lower limit value or more for D. That is, the amplitude A of the wave is increased by setting the opening width D to D ⁇ 10 ⁇ , and the spread of the wave can be avoided by setting 5 ⁇ ⁇ D. Thereby, the surface acoustic wave atomization apparatus 1 can be atomized efficiently and efficiently.
  • the gap space G so that the length in the width direction orthogonal to the traveling direction of the surface acoustic wave W generated on the surface S of the substrate 2 is equal to or less than the opening width D, the surface acoustic wave
  • the liquid 4 distributed with a width commensurate with the spread of W can be atomized, and the liquid 4 can be effectively used.
  • the range of the aperture width D is preferably 5 to 10 times the wavelength ⁇ , but it may be wider than this range by several wavelengths.
  • the present invention is not limited to the above configuration and can be variously modified.
  • the length of the wave packet of the excited surface acoustic wave W corresponds to the length of voltage application time, so that the comb-shaped electrode 21 is intermittently excited to generate a pulsed surface acoustic wave W. Then, it can be atomized in a pulse shape. By the pulse operation, the power can be concentrated and a dense fog can be generated.
  • the supply of the liquid 4 is performed by dropping the liquid 4 on the surface S instead of using the supply member 30, or by immersing a part of the substrate 2 in the liquid and the surface at the interface between the liquid surface and the surface S. You may carry out by using the creeping phenomenon by tension.

Landscapes

  • Special Spraying Apparatus (AREA)

Abstract

L'invention concerne un atomiseur à ondes acoustiques de surface (1) comprenant un substrat (2) fabriqué à partir d'un matériau piézoélectrique, une paire d'électrodes en forme de peigne (21) permettant de produire une onde acoustique de surface, et une unité d'alimentation en liquide (3) permettant de fournir un liquide (4) à atomiser, la longueur (D) d'engagement entre les dents de peigne de la paire d'électrodes en forme de peigne (21) étant au plus de dix fois la longueur d'onde (?) de l'onde acoustique de surface (W) produite par les électrodes en forme de peigne (21). Cette configuration permet d'augmenter l'amplitude de l'onde acoustique de surface et la réduction de la dispersion de l'onde acoustique de surface dans l'atomiseur à ondes acoustiques de surface (1).
PCT/JP2011/066515 2010-07-22 2011-07-21 Atomiseur à ondes acoustiques de surface Ceased WO2012011517A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012525420A JP5861121B2 (ja) 2010-07-22 2011-07-21 弾性表面波霧化装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-165379 2010-07-22
JP2010165379 2010-07-22

Publications (1)

Publication Number Publication Date
WO2012011517A1 true WO2012011517A1 (fr) 2012-01-26

Family

ID=45496935

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2011/066515 Ceased WO2012011517A1 (fr) 2010-07-22 2011-07-21 Atomiseur à ondes acoustiques de surface

Country Status (2)

Country Link
JP (1) JP5861121B2 (fr)
WO (1) WO2012011517A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109417372A (zh) * 2016-06-28 2019-03-01 株式会社村田制作所 弹性波装置
WO2021045000A1 (fr) * 2019-09-02 2021-03-11 株式会社エンプラス Dispositif d'élimination de gouttelettes et procédé d'élimination de gouttelettes
US10986865B2 (en) * 2018-01-26 2021-04-27 China Tobacco Yunnan Industrial Co., Ltd. Surface acoustic wave electronic cigarette system
WO2024034126A1 (fr) * 2022-08-12 2024-02-15 日本たばこ産業株式会社 Instrument d'aspiration

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62254509A (ja) * 1986-04-26 1987-11-06 Alps Electric Co Ltd 弾性表面波素子
JPH05129882A (ja) * 1991-11-06 1993-05-25 Murata Mfg Co Ltd 表面波装置
JP2008104974A (ja) * 2006-10-26 2008-05-08 Matsushita Electric Works Ltd 弾性表面波霧化装置
JP2009226807A (ja) * 2008-03-24 2009-10-08 Casio Comput Co Ltd インクジェットプリントヘッド

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62254509A (ja) * 1986-04-26 1987-11-06 Alps Electric Co Ltd 弾性表面波素子
JPH05129882A (ja) * 1991-11-06 1993-05-25 Murata Mfg Co Ltd 表面波装置
JP2008104974A (ja) * 2006-10-26 2008-05-08 Matsushita Electric Works Ltd 弾性表面波霧化装置
JP2009226807A (ja) * 2008-03-24 2009-10-08 Casio Comput Co Ltd インクジェットプリントヘッド

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109417372A (zh) * 2016-06-28 2019-03-01 株式会社村田制作所 弹性波装置
US10986865B2 (en) * 2018-01-26 2021-04-27 China Tobacco Yunnan Industrial Co., Ltd. Surface acoustic wave electronic cigarette system
WO2021045000A1 (fr) * 2019-09-02 2021-03-11 株式会社エンプラス Dispositif d'élimination de gouttelettes et procédé d'élimination de gouttelettes
WO2024034126A1 (fr) * 2022-08-12 2024-02-15 日本たばこ産業株式会社 Instrument d'aspiration

Also Published As

Publication number Publication date
JPWO2012011517A1 (ja) 2013-09-09
JP5861121B2 (ja) 2016-02-16

Similar Documents

Publication Publication Date Title
JP5154658B2 (ja) 弾性表面波霧化装置
JP4915567B2 (ja) 弾性表面波霧化装置
RU2713347C1 (ru) Система распыления поверхностными акустическими волнами для электронной сигареты
WO2012096378A1 (fr) Pulvérisateur à ondes acoustiques de surface
JP5861121B2 (ja) 弾性表面波霧化装置
AU2013201383B2 (en) Atomisation apparatus using surface acoustic wave generaton
JP3386050B2 (ja) 噴霧装置
WO1997005960A1 (fr) Appareil atomiseur et procede utilisant des ondes acoustiques de surface
JP2008238058A (ja) 弾性表面波霧化装置
WO2011058955A1 (fr) Dispositif de pulvérisation à ondes acoustiques de surface
JPWO1997005960A1 (ja) 表面弾性波を利用した噴霧装置および噴霧方法
JP2010268474A (ja) 弾性表面波装置
JP3626222B2 (ja) 弾性表面波を用いた超音波霧化器
JP2012148256A (ja) 弾性表面波霧化装置
WO2016159202A1 (fr) Élément de guide d'ondes optiques
WO2021108281A3 (fr) Confinement d'énergie dans des dispositifs à ondes acoustiques
JP2010253347A (ja) 弾性表面波霧化装置
JP2015013234A (ja) 弾性表面波霧化装置
JP5906455B2 (ja) 霧化装置
JP2000233158A (ja) 噴霧装置
JP7336663B2 (ja) 液体霧化システム及びミスト発生システム
JP7300662B2 (ja) 液体霧化システム
WO2024034126A1 (fr) Instrument d'aspiration
WO2009005066A1 (fr) Elément de génération d'onde sonore, conteneur et analyseur
JP2015016407A (ja) Ｓａｗを用いた霧化装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 11809687

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2012525420

Country of ref document: JP

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 11809687

Country of ref document: EP

Kind code of ref document: A1