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WO2012091410A2 - Panneau tactile utilisant un film métallique mince et son procédé de fabrication - Google Patents

Panneau tactile utilisant un film métallique mince et son procédé de fabrication Download PDF

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Publication number
WO2012091410A2
WO2012091410A2 PCT/KR2011/010155 KR2011010155W WO2012091410A2 WO 2012091410 A2 WO2012091410 A2 WO 2012091410A2 KR 2011010155 W KR2011010155 W KR 2011010155W WO 2012091410 A2 WO2012091410 A2 WO 2012091410A2
Authority
WO
WIPO (PCT)
Prior art keywords
pattern
pattern electrode
electrode
touch panel
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2011/010155
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English (en)
Korean (ko)
Other versions
WO2012091410A3 (fr
Inventor
곽민기
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Korea Electronics Technology Institute
Original Assignee
Korea Electronics Technology Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Electronics Technology Institute filed Critical Korea Electronics Technology Institute
Publication of WO2012091410A2 publication Critical patent/WO2012091410A2/fr
Publication of WO2012091410A3 publication Critical patent/WO2012091410A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0445—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0416—Control or interface arrangements specially adapted for digitisers
    • G06F3/04164—Connections between sensors and controllers, e.g. routing lines between electrodes and connection pads
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04111—Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04112—Electrode mesh in capacitive digitiser: electrode for touch sensing is formed of a mesh of very fine, normally metallic, interconnected lines that are almost invisible to see. This provides a quite large but transparent electrode surface, without need for ITO or similar transparent conductive material

Definitions

  • the present invention relates to a touch panel and a manufacturing method thereof, and more particularly, to a touch panel using a metal thin film and a manufacturing method thereof.
  • a touch panel is an input device that is mounted on the display surface and converts a physical contact such as a user's finger into an electrical signal to operate the product.
  • the touch panel can be widely applied to various display devices. It is growing rapidly.
  • Such touch panels may be classified into resistive, capacitive, ultrasonic (SAW), infrared (IR), and the like according to the operation principle.
  • SAW resistive, capacitive, ultrasonic
  • IR infrared
  • Conventional touch panels basically include a substrate, a metal wiring layer, and a pattern layer.
  • the pattern layer is composed of a plurality of pattern electrodes (touch patterns), and each pattern electrode generates an electrical signal in response to external physical contact.
  • the generated electrical signal is transmitted to the controller of the product through metal wires connected to the pattern electrode to operate the product.
  • the surface resistance of the transparent conductive film (ITO), which is a conductive material constituting the pattern electrodes, is larger than that of the metal thin film, the resistance between the pattern electrodes is increased when manufacturing a touch panel having a large area and excellent performance. There was a problem that the sensitivity is somewhat reduced. In addition, there is a problem in that a patterning mark is visible in a region where the pattern electrode exists due to a difference in transmittance between a region where the pattern electrode exists and a region that does not exist.
  • Embodiments of the present invention reduce the resistance between the pattern electrodes or between the pattern electrodes and the wiring electrodes by forming the pattern electrode in the shape of a mesh using a metal, the touch panel having an improved performance in terms of conductivity, detection sensitivity and transmittance and It is intended to provide a method of manufacturing the same.
  • the glass substrate A pattern electrode part formed on the glass substrate, and having a first pattern electrode arranged in a first direction and a second pattern electrode arranged in a second direction crossing the first pattern electrode and formed in a mesh shape and the pattern
  • a metal pattern part including a wiring electrode part connected to the electrode part;
  • An insulating layer formed on the metal pattern portion;
  • a bridge electrode part formed on the insulating layer and electrically connecting the first pattern electrode or the second pattern electrode to each other.
  • the pattern electrode may have a line width of 1 to 20 ⁇ m, and may have a mesh shape formed of fine lines having a spacing between lines of 200 ⁇ m or more.
  • the glass substrate is disposed between the glass substrate and the metal pattern portion, it may be characterized in that it further comprises a first dielectric thin film layer having a dielectric constant higher than the dielectric constant of the glass substrate.
  • the insulation layer 150 may be made of a material having a dielectric constant higher than that of air, and the material may be selected from SiO 2, SiN, Al 2 O 3, MgF 2, BN, Li 2 O, and CuO.
  • the metal pattern portion 130 and the insulating layer 150 are disposed between the metal pattern portion 130 and the insulating layer 150, and may further include a second dielectric thin film layer having a dielectric constant higher than that of air.
  • the refractive index of the second dielectric thin film layer may be lower than the first dielectric thin film layer.
  • a pattern electrode formed in a mesh shape is provided with a first pattern electrode disposed in a first direction on the glass substrate and a second pattern electrode disposed in a second direction crossing the first pattern electrode.
  • the metal pattern part may simultaneously form the pattern electrode part and the wiring electrode part.
  • Embodiments of the present invention can improve the conductivity and detection strength of the touch panel by reducing the resistance between the pattern electrodes or between the pattern electrodes and the wiring electrodes by forming a pattern electrode in a mesh shape using a metal.
  • the pattern electrode in a mesh shape, the permeability of the large area touch panel can be improved, and the price competitiveness of the product can be improved by forming the pattern electrode without using ITO.
  • the pattern electrode and the wiring electrode can be formed at the same time, a touch panel with a simple work process can be manufactured.
  • FIG. 1 is an exploded perspective view of a touch panel according to an embodiment of the present invention.
  • FIG. 2 is a front view of the metal pattern part of FIG. 1.
  • FIG. 3 is a front view of the touch panel of FIG. 1.
  • FIG. 4 is a cross-sectional view of a touch panel on which a metal pattern part is formed according to an embodiment of the present invention.
  • FIG. 5 is a cross-sectional view of the touch panel in which the insulating layer is formed in FIG. 4.
  • FIG. 6 is a cross-sectional view of a touch panel in which a bridge electrode part is formed in FIG. 5.
  • FIG. 1 is an exploded perspective view of a touch panel 100 according to an embodiment of the present invention.
  • the touch panel 100 may include a glass substrate 110, a metal pattern portion 130 formed on the glass substrate 110, and an insulating layer 150 formed on the metal pattern portion 130. ) And a bridge electrode part 190 formed on the insulating layer 150.
  • a first dielectric thin film layer (not shown) disposed between the glass substrate 110 and the metal pattern portion 130 and a second dielectric thin film layer (not shown) disposed on the metal pattern portion 130 may be further included. have.
  • the glass substrate 110 supports the metal pattern part 130, the insulating layer 150, and the bridge electrode part 190.
  • the glass substrate 110 may be a glass substrate based on SiO 2 or a tempered glass substrate.
  • the metal pattern part 130 is formed on the glass substrate 110.
  • the metal pattern portion 130 includes a patterned electrode portion 132 having a mesh shape formed of thin wires, and a wiring electrode portion 134 connected to the patterned electrode portion 132.
  • a first dielectric thin film layer (not shown) may be interposed between the glass substrate 110 and the metal pattern portion 130.
  • the first dielectric thin film layer may be made of a material having a dielectric constant higher than that of the glass substrate 110.
  • the first dielectric thin film layer is an inorganic metal oxide selected from Al 2 O 3 , TiO 3 , Ta 2 O 5 , Y 2 O 3, and TiO 2 , or PbZr x Ti 1-x O 3 (PZT), Bi.
  • ferroelectric insulators selected from 4 Ti 3 O 12 , BaMgF 4 , SrBi 2 (Ta 1-x Nb x ) 2 O 9 , Ba (Zr 1-x Ti x ) O 3 (BZT), BaTiO 3 and SrTiO 3 Can be.
  • a second dielectric thin film layer (not shown) may be interposed between the metal pattern part 130 and the insulating layer 150.
  • the second dielectric thin film layer may be made of a material having a dielectric constant higher than that of air.
  • the second dielectric thin film layer may be made of a material selected from SiO 2 , SiN, Al 2 O 3 , MgF 2 , BN, Li 2 O, and CuO.
  • the insulating layer 150 may replace the role of the second dielectric thin film layer.
  • the insulating layer 150 may be made of a material having a dielectric constant higher than that of air, for example, selected from SiO 2 , SiN, Al 2 O 3 , MgF 2 , BN, Li 2 O, and CuO. It can be prepared from the material.
  • the capacitance of the metal pattern part 130 is increased, thereby improving touch sensitivity.
  • the second dielectric thin film layer may be manufactured using materials such as SnO 2 , Y 2 O 3 , MgO, SiO 2 , and ZnO having a lower refractive index than the first dielectric thin film layer.
  • FIG. 2 is a front view of the metal pattern part 130 of FIG. 1.
  • the pattern electrode part 132 crosses the first pattern electrode 132a disposed in the first direction and the second pattern electrode 132b intersecting with the first pattern electrode 132a. It includes.
  • the first direction and the second direction may be, for example, the X-axis direction and the Y-axis direction based on the front surface of the touch panel 100, respectively.
  • the direction of the pattern electrode is not limited to this, but other directions are possible, but for the convenience of description, the first direction is the X-axis direction and the second direction is Y based on the front of the touch panel 100. The case in the axial direction will be described below.
  • the first pattern electrodes 132a may be disposed on the X axis while being connected to each other, and the second pattern electrodes 132b may be disposed on the Y axis independently of each other.
  • the shapes of the first pattern electrode 132a and the second pattern electrode 132b are not limited.
  • the first pattern electrode 132a and the second pattern electrode 132b may be disposed so as not to overlap each other, and the shape may be a rhombus, a square, a rectangle, a circle, or an unshaped shape (for example, a dendrite structure). Tree branches are entangled)
  • the first pattern electrode 132a and the second pattern electrode 132b will be described with reference to a case where a rhombus is formed. As shown in FIG. 2, the first pattern electrode 132a and the second pattern electrode 132b are disposed in a rhombus so as not to overlap each other. In this case, the first pattern electrode 132a is connected to the wiring electrode part 134, and the second pattern electrode 132b is not connected to the wiring electrode part 134. The connection between the second pattern electrode 132b and the wiring electrode unit 134 will be described in detail later.
  • the pattern electrode part 132 and the wiring electrode part 134 are electrically connected to each other, and the wiring electrode part 134 controls an electrical signal generated from the pattern electrode part 132 when the user makes physical contact from the outside. It serves to deliver to the flexible circuit board (not shown) or not shown.
  • the control unit or the flexible circuit board may be connected to the wiring electrode unit 132 through a separate connection unit (not shown).
  • the metal pattern part 130 may be made of any one of Ag, Al, Cr, Ni, Mo, or an alloy thereof. Since the metal pattern part 130 is made of metal, it serves to reduce the resistance between the pattern electrode parts 132 provided in the metal pattern part 130 or between the pattern electrode part 132 and the wiring electrode part 134. This improves the conductivity and detection sensitivity of the touch panel 100.
  • the manufacturing process of the touch panel 100 may be simplified.
  • the pattern electrode part 132 is formed in a mesh shape composed of fine wires. Since the pattern electrode part 132 is formed in a mesh shape formed of thin wires, the pattern electrode may be reduced in a region where the pattern electrode is present, thereby improving the transmittance of the touch panel 100. .
  • the thin lines may have a line width of about 1 ⁇ m to about 20 ⁇ m.
  • the line width is narrower than 1 ⁇ m, the defective rate of the touch panel 100 may increase, and when the line width is larger than 20 ⁇ m, the effect of improving the transmittance of the touch panel 100 may be slightly reduced.
  • an interval between the lines of the thin lines in the pattern electrode part 132 may be 200 ⁇ m or more.
  • the transmittance of the touch panel 100 may be reduced than desired.
  • the insulating layer 150 is formed on the metal pattern part 130 to form a bridge electrode part 170 that electrically connects the second pattern electrode 132b to the first pattern electrode 132a and the second. Insulate the pattern electrode 132b from each other.
  • the insulating layer 150 may be formed on the pattern electrode part 132 and the wiring electrode part 134.
  • the insulating layer 150 may be formed by not removing the photoresist composition used when forming the metal pattern portion 130. That is, the photoresist composition may make up the insulating layer 150.
  • the insulating layer 150 may be formed of an organic material such as polyethylene, which may be a photo process or a printing process, or may be formed of an insulating material such as ceramic.
  • the bridge electrode part 170 is formed on the insulating layer 150 and is formed to electrically connect the second pattern electrode 132b of the pattern electrode part 132.
  • the bridge electrode unit 170 electrically connects the second pattern electrode 132b to detect an electrical signal generated when the user makes a physical contact and connect the second pattern electrode 132b to recognize it. do.
  • the bridge electrode unit 170 may be made of any one of Ag, Al, Cr, Ni, Mo, or an alloy thereof. On the other hand, at least one of the position, size or shape of the bridge electrode unit 170 is not limited.
  • the bridge electrode part 190 may be manufactured in a rod shape or a strip shape.
  • FIG. 4 is a cross-sectional view of the touch panel 100 in which the metal pattern part 130 is formed
  • FIG. 5 is a cross-sectional view of the touch panel 100 in which the insulating layer 150 is formed in FIG. 4.
  • 6 is a cross-sectional view of the touch panel 100 in which the bridge electrode unit 170 is formed in FIG. 5.
  • 4 to 6 are cross-sectional views taken along the line IV-IV of FIG. 3.
  • a mesh-shaped pattern electrode part formed of fine wires on the glass substrate 110 made of glass or tempered glass and the pattern electrode part are formed.
  • the metal pattern part 130 having the wiring electrode part connected to the metal is formed.
  • a metal film is formed on the glass substrate 100 using a sputter system, an E-Beam system, or a thermal system. At this time, it is also possible to use a printing process to omit the above process.
  • the metal film is formed of any one of Ag, Al, Cr, Ni, Mo, or an alloy thereof.
  • the photoresist composition is coated on the metal film, and the pattern electrode part 132 and the wiring electrode part 134 are formed using an exposure process.
  • the pattern electrode portion and the wiring electrode portion can be formed at one time.
  • the pattern electrode part 132 may be formed by being divided into a first pattern electrode 132a disposed in a first direction and a second pattern electrode 132b disposed in a second direction crossing the first pattern electrode 132a. Can be.
  • the first pattern electrodes 132a may be formed in the X-axis direction while being connected to each other, and the second pattern electrodes 132b may be formed in the Y-axis direction independently of each other.
  • the first pattern electrode 132a and the second pattern electrode 132b are the same as or similar to those described above, and thus a detailed description thereof will be omitted (see FIG. 4).
  • an insulating layer 150 is formed on the metal pattern part 130.
  • the method of forming the insulating layer 150 may be a method of coating an organic material such as polyethylene or an insulating material such as ceramic, which is capable of a photo process or a printing process, using a sputter system, an E-Beam system, a thermal system, or an atmospheric pressure coating system. Can be used.
  • the photoresist composition itself may be used as the insulating layer 150 by not removing the photoresist composition formed on the metal film (see FIG. 5).
  • a plurality of via holes 175 are formed on the insulating layer 150. This is for electrically connecting the bridge electrode 170 and the second pattern electrode 132b, and a plurality of via holes 175 may be formed as necessary.
  • a method of forming the via hole 175 a method of removing the insulating layer 150 in a portion where the via hole 175 is to be formed using an etching process or the like may be used.
  • the bridge electrode part 170 is correspondingly formed on the via hole 175 to electrically connect the bridge electrode part 170 and the second pattern electrode 132b of the metal pattern part 130. That is, when the user physically contacts the bridge electrode unit 170, the generated electrical signal is transmitted to the metal pattern unit 130 through the via hole 175 to operate the touch panel.
  • the method of forming the bridge electrode unit 170 may be formed by coating a metal film made of any one of Ag, Al, Cr, Ni, Mo, or an alloy thereof and through a photoresist process (see FIG. 6 above).
  • embodiments of the present invention form a pattern electrode in a mesh shape using metal to reduce the resistance between the pattern electrodes or between the pattern electrodes and the wiring electrodes, thereby improving the conductivity and detection strength of the touch panel. Can be.
  • the transmittance of the touch panel can be improved, and the price competitiveness of the product can be improved by forming the pattern electrode without using ITO.
  • the pattern electrode and the wiring electrode can be formed at the same time, a touch panel with a simple work process can be manufactured.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Position Input By Displaying (AREA)
  • Manufacture Of Switches (AREA)

Abstract

L'invention porte sur un panneau tactile utilisant un film métallique mince et sur son procédé de fabrication. Le panneau tactile selon un mode de réalisation de la présente invention comprend : un substrat verrier ; une unité de motif métallique qui est formée sur le substrat verrier, et qui comprend une unité d'électrode à motif et une unité d'électrode de câblage connectée à l'unité d'électrode à motif, l'unité d'électrode à motif comprenant une première électrode à motif agencée dans une première direction et une seconde électrode à motif agencée dans une seconde direction de sorte que la seconde électrode à motif croise la première électrode à motif, et l'unité d'électrode à motif a une forme de maille ; une couche d'isolation formée sur la surface supérieure de l'unité de motif métallique ; et une unité d'électrode de pont qui est formée sur la surface supérieure de la couche d'isolation, et qui se connecte électriquement à la première électrode à motif ou à la seconde électrode à motif.
PCT/KR2011/010155 2010-12-27 2011-12-27 Panneau tactile utilisant un film métallique mince et son procédé de fabrication Ceased WO2012091410A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2010-0135331 2010-12-27
KR20100135331 2010-12-27

Publications (2)

Publication Number Publication Date
WO2012091410A2 true WO2012091410A2 (fr) 2012-07-05
WO2012091410A3 WO2012091410A3 (fr) 2012-10-04

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KR (1) KR101427768B1 (fr)
WO (1) WO2012091410A2 (fr)

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KR101865685B1 (ko) * 2013-05-23 2018-06-08 동우 화인켐 주식회사 투명 전극 패턴 적층체 및 이를 구비한 터치 스크린 패널
KR102194818B1 (ko) 2013-08-06 2020-12-24 삼성디스플레이 주식회사 플렉서블 터치 표시 패널
KR102119827B1 (ko) * 2013-10-18 2020-06-05 엘지이노텍 주식회사 터치 패널
KR102212869B1 (ko) * 2014-01-14 2021-02-05 엘지이노텍 주식회사 터치 윈도우
WO2015167212A1 (fr) * 2014-04-29 2015-11-05 동우 화인켐 주식회사 Écran tactile capacitif
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EP3026536A1 (fr) * 2014-11-25 2016-06-01 LG Innotek Co., Ltd. Fenêtre tactile comprenant mailles de filet

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KR20120074258A (ko) 2012-07-05
WO2012091410A3 (fr) 2012-10-04

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