WO2011014027A3 - Cleaning fluid composition and a cleaning method for a panel using the same - Google Patents
Cleaning fluid composition and a cleaning method for a panel using the same Download PDFInfo
- Publication number
- WO2011014027A3 WO2011014027A3 PCT/KR2010/005002 KR2010005002W WO2011014027A3 WO 2011014027 A3 WO2011014027 A3 WO 2011014027A3 KR 2010005002 W KR2010005002 W KR 2010005002W WO 2011014027 A3 WO2011014027 A3 WO 2011014027A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- fluid composition
- cleaning
- panel
- same
- cleaning fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/26—Organic compounds containing nitrogen
- C11D3/28—Heterocyclic compounds containing nitrogen in the ring
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/32—Organic compounds containing nitrogen
- C11D7/3281—Heterocyclic compounds
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
- Detergent Compositions (AREA)
- Liquid Crystal (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012522766A JP5890306B2 (en) | 2009-07-29 | 2010-07-29 | Cleaning liquid composition and panel cleaning method using the same |
| CN201080038438.9A CN102639686B (en) | 2009-07-29 | 2010-07-29 | Cleaning fluid composition and a cleaning method for a panel using the same |
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2009-0069505 | 2009-07-29 | ||
| KR1020090069506A KR20110011996A (en) | 2009-07-29 | 2009-07-29 | Cleaning liquid composition and cleaning method using the same |
| KR10-2009-0069506 | 2009-07-29 | ||
| KR1020090069505A KR20110011995A (en) | 2009-07-29 | 2009-07-29 | Cleaning liquid composition and cleaning method using the same |
| KR10-2009-0073683 | 2009-08-11 | ||
| KR1020090073683A KR20110016136A (en) | 2009-08-11 | 2009-08-11 | Cleaning liquid composition and cleaning method using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO2011014027A2 WO2011014027A2 (en) | 2011-02-03 |
| WO2011014027A3 true WO2011014027A3 (en) | 2011-06-16 |
Family
ID=43529887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/KR2010/005002 Ceased WO2011014027A2 (en) | 2009-07-29 | 2010-07-29 | Cleaning fluid composition and a cleaning method for a panel using the same |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5890306B2 (en) |
| CN (1) | CN102639686B (en) |
| TW (1) | TWI481706B (en) |
| WO (1) | WO2011014027A2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI491729B (en) * | 2011-08-31 | 2015-07-11 | Dongwoo Fine Chem Co Ltd | Cleaning composition |
| CA2941253A1 (en) * | 2014-03-27 | 2015-10-01 | Frank Hulskotter | Cleaning compositions containing a polyetheramine |
| CN109074002A (en) * | 2016-03-30 | 2018-12-21 | 日产化学株式会社 | The coating aqueous solution of resist pattern and the pattern forming method for having used the aqueous solution |
| CN110198932B (en) * | 2017-01-26 | 2023-04-07 | 东曹株式会社 | Alkanolamine, friction reducer, and lubricating oil composition |
| WO2024250132A1 (en) | 2023-06-05 | 2024-12-12 | Dow Global Technologies Llc | Cleaning compositions with n-substituted piperazines |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000232063A (en) * | 1998-12-09 | 2000-08-22 | Kishimoto Sangyo Co Ltd | Resist residual removal agent |
| JP2005154558A (en) * | 2003-11-25 | 2005-06-16 | Kishimoto Sangyo Co Ltd | Detergent |
| KR100599849B1 (en) * | 2003-01-07 | 2006-07-13 | 토소가부시키가이샤 | Cleaning material and method for cleaning using it |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4304909B2 (en) * | 2002-04-03 | 2009-07-29 | 東ソー株式会社 | Cleaning agent and cleaning method using the same |
| US6951710B2 (en) * | 2003-05-23 | 2005-10-04 | Air Products And Chemicals, Inc. | Compositions suitable for removing photoresist, photoresist byproducts and etching residue, and use thereof |
| JP2005336342A (en) * | 2004-05-27 | 2005-12-08 | Tosoh Corp | Cleaning composition |
| US7888302B2 (en) * | 2005-02-03 | 2011-02-15 | Air Products And Chemicals, Inc. | Aqueous based residue removers comprising fluoride |
| KR101251594B1 (en) * | 2006-03-23 | 2013-04-08 | 주식회사 동진쎄미켐 | Chemical rinse composition for removing resist stripper |
| JP4692497B2 (en) * | 2007-02-28 | 2011-06-01 | ナガセケムテックス株式会社 | Photoresist stripper composition |
| JP4716225B2 (en) * | 2007-05-15 | 2011-07-06 | ナガセケムテックス株式会社 | Photoresist stripper composition |
| JP2009021377A (en) * | 2007-07-11 | 2009-01-29 | Yushiro Chem Ind Co Ltd | Cleaning composition for electronic material and cleaning method for electronic material |
| TW200925800A (en) * | 2007-12-06 | 2009-06-16 | Mallinckrodt Baker Inc | Fluoride-free photoresist stripper or residue removing cleaning compositions containing conjugate oligomeric or polymeric material of alpha-hydroxycarbonyl compound/amine or ammonia reaction |
| WO2009078123A1 (en) * | 2007-12-17 | 2009-06-25 | Sanyo Chemical Industries, Ltd. | Cleaning agent and cleaning method for electronic material |
-
2010
- 2010-07-29 WO PCT/KR2010/005002 patent/WO2011014027A2/en not_active Ceased
- 2010-07-29 JP JP2012522766A patent/JP5890306B2/en active Active
- 2010-07-29 CN CN201080038438.9A patent/CN102639686B/en active Active
- 2010-07-29 TW TW099125187A patent/TWI481706B/en active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000232063A (en) * | 1998-12-09 | 2000-08-22 | Kishimoto Sangyo Co Ltd | Resist residual removal agent |
| KR100599849B1 (en) * | 2003-01-07 | 2006-07-13 | 토소가부시키가이샤 | Cleaning material and method for cleaning using it |
| JP2005154558A (en) * | 2003-11-25 | 2005-06-16 | Kishimoto Sangyo Co Ltd | Detergent |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102639686A (en) | 2012-08-15 |
| TWI481706B (en) | 2015-04-21 |
| WO2011014027A2 (en) | 2011-02-03 |
| CN102639686B (en) | 2014-09-03 |
| JP2013500601A (en) | 2013-01-07 |
| JP5890306B2 (en) | 2016-03-22 |
| TW201109435A (en) | 2011-03-16 |
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