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WO2011010821A3 - Clamp for ingot squaring and grinding equipment - Google Patents

Clamp for ingot squaring and grinding equipment Download PDF

Info

Publication number
WO2011010821A3
WO2011010821A3 PCT/KR2010/004490 KR2010004490W WO2011010821A3 WO 2011010821 A3 WO2011010821 A3 WO 2011010821A3 KR 2010004490 W KR2010004490 W KR 2010004490W WO 2011010821 A3 WO2011010821 A3 WO 2011010821A3
Authority
WO
WIPO (PCT)
Prior art keywords
ingot
clamp
squaring
centre
grinding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2010/004490
Other languages
French (fr)
Korean (ko)
Other versions
WO2011010821A2 (en
Inventor
정현권
나익균
박주호
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HANMISEMICONDUCTOR CO Ltd
Hanmi Semiconductor Co Ltd
Original Assignee
HANMISEMICONDUCTOR CO Ltd
Hanmi Semiconductor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HANMISEMICONDUCTOR CO Ltd, Hanmi Semiconductor Co Ltd filed Critical HANMISEMICONDUCTOR CO Ltd
Publication of WO2011010821A2 publication Critical patent/WO2011010821A2/en
Publication of WO2011010821A3 publication Critical patent/WO2011010821A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0088—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being angularly adjustable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
    • B24B5/02—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The present invention relates to a clamp for holding ingots, which are used as materials for solar cells, when the ingots are being processed in squaring and grinding processing equipment. The present invention provides a clamp for ingot squaring and grinding equipment which implements a novel form of clamping method in which the centre of rotation of a clamp chuck in contact with the end of an ingot is pulled towards the ingot to the maximum extent and is set substantially in a position in contact with the end of the ingot during clamping for the purpose of ingot processing, thereby making it possible to reduce product defects to zero even when the end of the ingot is tilted, since the centre of the ingot and the centre of the clamp can be accurately aligned, and ultimately the ingot can be subjected to accurate squaring, surface grinding and cylindrical grinding processing.
PCT/KR2010/004490 2009-07-20 2010-07-09 Clamp for ingot squaring and grinding equipment Ceased WO2011010821A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2009-0065723 2009-07-20
KR1020090065723A KR20110008390A (en) 2009-07-20 2009-07-20 Clamps on Ingot Squareing and Grinding Equipment

Publications (2)

Publication Number Publication Date
WO2011010821A2 WO2011010821A2 (en) 2011-01-27
WO2011010821A3 true WO2011010821A3 (en) 2011-06-03

Family

ID=43499517

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/004490 Ceased WO2011010821A2 (en) 2009-07-20 2010-07-09 Clamp for ingot squaring and grinding equipment

Country Status (3)

Country Link
KR (1) KR20110008390A (en)
TW (1) TW201108351A (en)
WO (1) WO2011010821A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6154354B2 (en) * 2014-05-09 2017-06-28 株式会社Ｂｂｓ金明 Workpiece processing equipment
KR102221516B1 (en) * 2014-07-09 2021-02-26 에스케이실트론 주식회사 Grinding Apparatus for Silicon Single Crystal Ingot
WO2019192677A1 (en) * 2018-04-03 2019-10-10 Applied Materials, Inc. Carrier for supporting a substrate or a mask

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4398579A (en) * 1981-03-20 1983-08-16 Toolmark Co. Lathe work centers
JPH04244346A (en) * 1991-01-31 1992-09-01 Shin Etsu Handotai Co Ltd Monocrystal bar clamp positioning jig and monocrystal bar clamp positioning method using this jig
US5205080A (en) * 1991-01-31 1993-04-27 Shin-Etsu Handotai Company, Limited Jig for clamp-positioning single crystal ingot
EP0359591B1 (en) * 1988-09-16 1995-11-22 Shin-Etsu Handotai Company Limited Apparatus for shaping ingots into right circular cylindrical form

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4398579A (en) * 1981-03-20 1983-08-16 Toolmark Co. Lathe work centers
EP0359591B1 (en) * 1988-09-16 1995-11-22 Shin-Etsu Handotai Company Limited Apparatus for shaping ingots into right circular cylindrical form
JPH04244346A (en) * 1991-01-31 1992-09-01 Shin Etsu Handotai Co Ltd Monocrystal bar clamp positioning jig and monocrystal bar clamp positioning method using this jig
US5205080A (en) * 1991-01-31 1993-04-27 Shin-Etsu Handotai Company, Limited Jig for clamp-positioning single crystal ingot

Also Published As

Publication number Publication date
TW201108351A (en) 2011-03-01
KR20110008390A (en) 2011-01-27
WO2011010821A2 (en) 2011-01-27

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