WO2010048030A2

WO2010048030A2 - Patterning of magnetic thin film using energized ions

Info

Publication number: WO2010048030A2
Application number: PCT/US2009/060868
Authority: WO
Inventors: Omkaram Nalamasu; Steven Verhaverbeke; Majeed Foad; Mahalingam Venkatesan; Nety M. Krishna
Original assignee: Applied Materials Inc
Current assignee: Applied Materials Inc
Priority date: 2008-10-22
Filing date: 2009-10-15
Publication date: 2010-04-29
Anticipated expiration: 2011-04-22
Also published as: JP2012506601A; JP2014209404A; TW201029003A; CN103996404A; CN102197426A; CN103996404B; TWI478159B; WO2010048030A4; WO2010048030A3; JP5640011B2; KR101622568B1; CN102197426B; JP5863882B2; KR20110090943A

Abstract

A method for patterning a magnetic thin film on a substrate includes: providing a pattern about the magnetic thin film, with selective regions of the pattern permitting penetration of energized ions of one or more elements. Energized ions are generated with sufficient energy to penetrate selective regions and a portion of the magnetic thin film adjacent the selective regions. The substrate is placed to receive the energized ions. The portion of the magnetic thin film may be subjected to thermal excitation. The portions of the magnetic thin film are rendered to exhibit a magnetic property different than selective other portions. A method for patterning a magnetic media with a magnetic thin film on both sides of the media is also disclosed.

Description

PATTERNING OF MAGNETIC THIN FILM USING ENERGIZED IONS

FIELD OF THE INVENTION

[0001] The present invention relates generally to patterning of magnetic thin film, and more particularly to a method of patterning magnetic thin film of a magnetic recording medium, using energized ions.

BACKGROUND

[0002] There is an ever present need for higher density information storage media for computers. Currently, the prevalent storage media is the hard disk drive (HDD). An HDD is a non-volatile storage device which stores digitally encoded data on rapidly rotating disks with magnetic surfaces. The disks are circular, with a central hole. The disks are made from a non-magnetic material, usually glass or aluminum, and are coated on one or both sides with magnetic thin films, such as cobalt-based alloy thin films. HDDs record data by magnetizing regions of the magnetic film with one of two particular orientations, allowing binary data storage in the film. The stored data is read by detecting the orientation of the magnetized regions of the film.

[0003] A typical HDD design consists of a spindle which holds one or more disks, spaced sufficiently apart to allow read-write heads to access one or both sides of one or more disks. The disks are fixed to the spindle by clamps inserted into the central holes in the disks. The disks are spun at very high speeds. Information is written onto and read off a disk as it rotates past the read-write heads. The heads move in very close proximity to the surface of the magnetic thin film. The read-write head is used to detect and/or modify the magnetization of the material immediately underneath it. There is one head for each magnetic disk surface on the spindle. An arm moves the heads across the spinning disks, allowing each head to access almost the entire surface of a corresponding disk.

[0004] In a conventional magnetic media, each bit cell includes a plurality of magnetic grains randomly dispersed. Ideally, the plurality of magnetic grains are physically separated from each other so as to provide improved write-ability, signal to noise ratio (SNR) and thermal stability.

[0005] As the aerial density of magnetic recording media increases, number of bit cells per square inch increases. This reduces the size of the bit cell. To effectively measure a transition, a minimum number of magnetic grains are required in a bit cell. As the size of a bit cell reduces, the magnetic grain size has to be correspondingly reduced to provide a minimum number of magnetic grains in the bit cell. If isolation of magnetic grains and reduction in magnetic grain size are advanced to ensure low noise, the recording density will be limited because of thermal disturbances.

[0006] For improvement of a recording density, it is desirable to reduce a recording cell size on a media, which brings about reduction in signal magnetic field intensity generated from the media. In order to meet the SNR required for a recording system, noise must be reduced corresponding to reduction in signal intensity. The media noise is mainly caused by fluctuation of a magnetization transition, and the fluctuation is proportional to a size of a magnetization reversal unit made of magnetic grains. Therefore, in order to reduce the media noise, it is required to isolate magnetic grains by disrupting exchange interaction between magnetic grains.

[0007] Magnetic energy of a single isolated magnetic grain is given by a product of magnetic anisotropy energy density and volume of the grain. It is desirable to reduce the media thickness in order to reduce a magnetization transition width. It is also desirable to reduce the grain size in order to meet a requirement for low noise. Reduced magnetic grain size significantly lowers the volume of magnetic grain, and further significantly lowers magnetic energy of the grain. If the magnetic energy of a given magnetic grain in a magnetic media is several hundred times the thermal energy at an operating temperature (for example, at room temperature), resistance against thermal disturbance is considered to be sufficient. However, if the magnetic energy of the magnetic grain is less than a hundred times the thermal energy, there is a possibility that the magnetization direction of the magnetic grain may be reversed by thermal disturbance, potentially leading to loss of recorded information.

[0008] Various alternatives have been proposed to overcome the problem of thermal disturbances. One alternative is to use a magnetic material with high magnetic anisotropy. These magnetic materials need higher recording saturation magnetic field from a head to write the magnetic media. Another alternative is to use thermally assisted recording, where a highly anisotropic magnetic material is used and a recording portion is heated by light irradiation during recording. The heat lowers the anisotropy of magnetic grains and the recording saturation magnetic field. This permits writing of the magnetic media with conventional magnetic head.

[0009] As the aerial density increases, there are a minimum number of magnetic grains that are still required per bit cell and there is a limitation on how small a magnetic grain can be practically achieved.

[0010] An alternate magnetic media that is being explored is a patterned media, where magnetic portions alternate with non-magnetic portions. For example, a bit patterned media may have magnetic portions defining a magnetic domain as islands surrounded by non-magnetic portions. A track patterned media may have for example, a concentric track of magnetic portions separated by nonmagnetic portions.

[0011] Various alternatives have been proposed to manufacture these media, however there still remains a need to come up with a method that is cost effective and compatible with high volume manufacturing. It is in this context that the embodiments of this disclosure arise.

SUMMARY OF THE INVENTION

[0012] The concepts and methods of this disclosure allow for high volume manufacturing of magnetic media with some portions of the magnetic thin film rendered to exhibit a magnetic property different than other portions of the magnetic thin film. [0013] In one aspect, the present disclosure is a method of patterning a magnetic thin film on a substrate. The method includes providing a pattern about the magnetic thin film, with selective regions of the pattern permitting penetration of energized ions of one or more elements through and impinges upon portions of the magnetic thin film. Energized ions of one or more elements are generated with sufficient energy to penetrate selective regions of the pattern and a portion of the magnetic thin film adjacent the selective regions. The substrate is placed to receive the energized ions. The portions of the magnetic thin film adjacent the selective regions are rendered to exhibit a magnetic property different than selective other portions of the magnetic thin film.

[0014] In another aspect, the present disclosure is a method for patterning a magnetic media having two sides with a magnetic thin film on both sides. The method includes, providing a pattern about the magnetic thin film on both sides of the magnetic media, with selective regions of the pattern permitting penetration of energized ions of one or more elements through and impinge upon portions of the magnetic thin film. Energized ions of one or more elements are generated with sufficient energy to penetrate selective regions of the pattern and a portion of the magnetic thin film adjacent the selective regions on both sides of the magnetic media. The magnetic media is placed to receive energized ions. The portions of the magnetic thin film adjacent the selective regions on both sides of the magnetic media are rendered to exhibit a magnetic property different than selective other portions of the magnetic thin film.

BRIEF DESCRIPTION OF THE DRAWINGS

[0015] These and other aspects and features of the present invention will become apparent to those ordinarily skilled in the art upon review of the following description of specific embodiments of the invention in conjunction with the accompanying figures, wherein:

[0016] FIG. 1 is process flow chart of an exemplary method of this disclosure;

[0017] FIG. 2 is a partial plan view of an exemplary mask for use about the magnetic thin film, as a pattern; [0018] FIG. 3 is an exemplary resist with a pattern disposed about the magnetic thin film;

[0019] FIG. 4 is a schematic of a process chamber for use with this disclosure, showing a first disk holder apparatus of this disclosure;

[0020] FIG. 5 is a cross-sectional representation of a pattern about the magnetic thin film;

[0021] FIG. 6 is a cross-sectional representation of the magnetic thin film, after ion penetration;

[0022] FIG. 7A and 7B show Helium ion penetration profile through the resist and the magnetic thin film;

[0023] FIG. 7C shows magnetization curve for portion of the magnetic film not subjected to Helium ion implantation;

[0024] FIG. 7D shows magnetization curve for portion of the magnetic film subjected to Helium ion implantation;

[0025] FIG. 8A and 8B show Boron ion penetration profile through the resist and the magnetic thin film;

[0026] FIG. 8C shows concentration of Boron and Cobalt ions in the magnetic thin film, after Boron ion implantation;

[0027] FIG. 8D shows magnetization curve for portion of the magnetic film not subjected to Boron ion implantation;

[0028] FIG. 8E shows magnetization curve for portion of the magnetic film subjected to Helium ion implantation;

[0029] FIG. 9A shows Silicon ion penetration profile through the magnetic thin film; and

- ^ - [0030] FIG. 9B shows depth profile of Silicon ions in the magnetic thin film, after Silicon ion implantation.

DETAILED DESCRIPTION OF THE PREFERRD EMBODIMENTS

[0031] The present disclosure will now be described in detail with reference to the drawings, which are provided as illustrative examples of the disclosure so as to enable those skilled in the art to practice the disclosure. Notably, the figures and examples below are not meant to limit the scope of the present disclosure to a single embodiment, but other embodiments are possible by way of interchange of some or all of the described or illustrated elements. Moreover, where certain elements of the present disclosure can be partially or fully implemented using known components, only those portions of such known components that are necessary for an understanding of the present disclosure will be described, and detailed descriptions of other portions of such known components will be omitted so as not to obscure the disclosure. In the present specification, an embodiment showing a singular component should not be considered limiting; rather, the disclosure is intended to encompass other embodiments including a plurality of the same component, and vice-versa, unless explicitly stated otherwise herein. Moreover, applicants do not intend for any term in the specification or claims to be ascribed an uncommon or special meaning unless explicitly set forth as such. Further, the present disclosure encompasses present and future known equivalents to the known components referred to herein by way of illustration.

[0032] In general, the present disclosure contemplates providing a pattern with selective regions permitting penetration of ions of one or more elements through and impinges upon portions of a magnetic thin film. Energized ions of one or more elements are generated with sufficient energy to penetrate selective regions of the pattern and a portion of the magnetic thin film adjacent the selective region. The substrate is placed to receive the energized ions. Portions of the magnetic thin film adjacent the selective regions are rendered to exhibit magnetic property different than other portions of the magnetic thin film. This method is applicable to hard disk drive fabrication, allowing very high aerial density information storage. [0033] An exemplary method of the current disclosure is shown in Figure 1. The method for patterning a magnetic thin film on a substrate includes the following steps: (1) providing a pattern about the magnetic thin film, with selective regions permitting penetration of energized ions of one or more elements; (2) generating energized ions of one or more elements with sufficient energy to penetrate selective regions of the pattern and a portion of the magnetic thin film adjacent the selective regions; (3) placing the substrate to receive the energized ions; and (4) rendering portions of the magnetic thin film adjacent the selective regions to exhibit a magnetic property different than selective other portions of the magnetic thin film.

[0034] In one embodiment, a mask that is not conducive to the penetration of energized ions through with selective regions that permit the penetration of ions through may be used as a pattern. Figure 2 shows partial plan view of an exemplary mask 200 for use about the magnetic thin film as a pattern. For example, the mask 200 may be made of polymeric material, for example, polyvinyl alcohol (PVA) material with portions 202 not conducive to the penetration of energized ions through and selective regions 204 that are conducive to the penetration of energized ions through. An exemplary method to create PVA templates is described by Schaper in US Patent No. 6,849,558, which is incorporated by reference herein. The teachings of Schaper may be adapted to create the mask 200 with portions 202 not conducive to the penetration of energized ions through and selective regions 204 that are conducive to the penetration of energized ions through. For example, the thickness of the portions 202 may be chosen such that the energized ions do not penetrate completely through the portions 202. Although portions 202 have been shown to be round, as one skilled in the art appreciates, the shape and location of portions 202 may be beneficially chosen. For example, the shape of portions 202 may be oval, square, rectangular or any other shape depending upon the needs of the application.

[0035] In yet another embodiment, a resist may be coated over the magnetic thin film and a pattern created in the resist, for example, using nanoimprint lithography. There are two well known types of nanoimprint lithography that are applicable to the present disclosure. The first is thermoplastic nanoimprint lithography [T-NIL], which includes the following steps: (1) coat the substrate with a thermoplastic polymer resist; (2) bring a mold with the desired three-dimensional pattern in contact with the resist and apply a prescribed pressure; (3) heat the resist above its glass transition temperature; (4) when the resist goes above its glass transition temperature the mold is pressed into the resist; (5) cool the resist and separate the mold from the resist, leaving the desired three-dimensional pattern in the resist.

[0036] The second type of nanoimprint lithography is photo nanoimprint lithography [P- NIL], which includes the following steps: (1) a photo-curable liquid resist is applied to the substrate; (2) a transparent mold, with the desired three- dimensional pattern, is pressed into the liquid resist until the mold makes contact with the substrate; (3) the liquid resist is cured in ultraviolet light, to turn the liquid resist into a solid; (4) the mold is separated from the resist, leaving the desired three-dimensional pattern in the resist. In P-NIL the mold is made of a transparent material such as fused silica.

[0037] Figure 3 shows a cross-sectional representation of an exemplary pattern 300 after nanoimprint lithography. The patterned resist 310 on magnetic thin film 320 on substrate 330 is shown having a depression 340 with selective regions 350 where the resist has been substantially displaced. However, the selective regions 350 have a small amount of resist left covering the surface of the magnetic thin film 320. This is typical for a nanoimprint process. When using a resist pattern as a mask for ion implantation, it is not necessary for the entire resist layer to be removed in the areas where the implant species will be implanted. However, the remaining layer should be thin enough not to cause a substantial barrier for the implant species to penetrate through. Furthermore, the contrast between the areas with thick resist and thin remaining resist should be large enough so the resist in the areas that have the thick resist is capable of stopping the ion species before they reach the magnetic thin film. Alternatively, the thin remaining resist in selective regions 350 can be removed with an isotropic resist removal process such as a descum process or a slight ash process or any other appropriate technique.

[0038] In nanoimprint lithography, as the imprint process displaces resist to form selective regions 350, there is a need to control the amount of resist that is displaced when a mold having a plurality of projections corresponding to the depression 340 is brought in contact with the resist and pressure is applied. Typically, the width w of the depression 340 may be about the same dimension as the depth d of the depression 340 and the height h of the resist is at least as high as the depth d of the depression 340, in order to control the amount of resist that is displaced during the stamping process. If the depth d of the depression 340 is substantially higher than the width w of the depression 340, the amount of resist that is displaced may be so high it may be impractical to precisely transfer the pattern from a mold to the resist 310.

[0039] The nanoimprint lithography process can be implemented using a full disk nanoimprint scheme, where the mold is large enough to imprint one entire surface. Alternatively, a step and repeat imprint process can be used. In a preferred embodiment, a full disk scheme is used. The nanoimprint process can also be performed with both sides at once. For example, the disk may first be coated with a resist layer on both sides. Then the disk goes into a press where molds are pressed against both sides of the disk to imprint the desired pattern on both sides of the disk simultaneously.

[0040] Conventional photolithographic processes may also be used, in which case photoresist is spun on the disks, followed by exposure of the resist through a mask, and development of the exposed resist.

[0041] After the patterning, the disks have a pattern of resist with selective regions 350 of the pattern permitting penetration of energized ions through and impinge upon portions of the magnetic thin film 320 adjacent the selective regions 350. Portions of the resist other than the selective regions 350, for example, portion 360 have sufficient thickness to prevent the penetration of energized ions through, thereby preventing the energized ions to impinge upon the magnetic thin film.

[0042] If a mask 200 is used instead, the mask 200 is placed adjacent the magnetic thin film and selective regions 204 of the mask 200 will permit the penetration of energized ions through the mask and impinge upon portions of the magnetic thin film adjacent the selective regions 204. In one embodiment, the mask 200 is positioned proximate the magnetic thin film. In another embodiment, the mask 200 is positioned in contact with the magnetic thin film or magnetic thin film covered with a coating. The coating may be conducive to the adhesion of the mask. The coating may also act as a protective coating over the magnetic thin film. The coating may be a carbon layer acting as a protective coating over the magnetic thin film.

[0043] Now referring back to Figure 1 , in step 104, energized ions of one or more elements are generated with sufficient energy to penetrate selective regions of the pattern and impinge upon portions of the magnetic thin film adjacent the selective regions. In one embodiment, a vacuum chamber is provided and one or more gases containing compounds of one or more elements are injected. A plasma is ignited by using high voltage and energized ions of one or more elements are released.

[0044] In step 106, the substrate is placed to receive the energized ions. In one embodiment, the substrate is placed in a vacuum chamber where energized ions of one or more elements are generated. In one embodiment, the substrate is placed in a plasma containing one or more energized ions. In one embodiment, the substrate is biased to attract the energized ions. If a mask 200 is used, the energized ions pass through the selective regions 204 of the mask 200 and impinge upon portions of the magnetic thin film adjacent the selective regions 204. If a resist 310 is used as a pattern, the energized ions pass through the selective regions 350 and impinge upon portions of the magnetic thin film adjacent the selective regions 350. In one embodiment, the energized ions penetrate into portions of the magnetic thin film adjacent the selective regions 350. In one embodiment, the energized ions partially penetrate into portions of the magnetic film adjacent the selective regions 350. In one embodiment, the energized ions substantially penetrate into portions of the magnetic thin film adjacent the selective regions 350.

[0045] In one embodiment, plasma ion immersion implantation may be used to provide high implant doses at low energies. Since the sputtered magnetic thin films are typically only tens of nanometers thick the low ion energies are effective and the high dose provides high throughput. Furthermore, as is clear from Figure 4, plasma ion implantation of both sides of the disks can be carried out at the same time. Although a double side plasma ion implant is preferred, a single side plasma ion implant can be used without departing from the spirit of the disclosure. In the single side plasma ion implant a first side will be implanted, then the disk will be flipped over and the second side will be implanted.

[0046] A plasma ion implantation tool 400 configured for handling disks, for example, a substrate with a magnetic thin film, with a pattern about the magnetic thin film, with selective regions of the pattern permitting penetration of energized ions of one or more elements through and impinge upon portions of the magnetic thin film is shown in Fig. 4.

[0047] Referring to Fig. 4, a chamber 410 is maintained under vacuum by vacuum pump 420. Gas supply 430 is connected by pipe 432 and valve 435 to the chamber 410. More than one gas may be supplied through valve 435 and multiple gas supplies and valves may be used. For example, dopant gases containing one or more species elements may be supplied to the chamber 410. A rod 440 holds disks 450. A radio frequency (RF) power supply 460 is connected between the rod 440 and the wall of the chamber 410. The wall of the chamber 410 is connected to an electrical earth. In addition to the RF power supply an impedance matching device and a power supply for applying a direct current (DC) bias may be included. The rod 440 may be coated with graphite or silicon to protect it from the plasma. Furthermore, the rod and its surface are highly conductive to facilitate a good electrical contact between the rod and the disks. The disks 450 can be fixed in place using clamps 455 or other means; the clamps 455 will not only fix the disks 450 in place but also ensure a good electrical connection between the disks 450 and the rod 440. The rod is configured to carry many disks (only three disks 450 are shown for ease of illustration). Furthermore, the chamber 410 can be configured to hold many rods loaded with disks for simultaneous plasma ion implantation. The rods 440 are readily moved in and out of the chamber 410.

[0048] Processing of the disks in the plasma ion implantation tool 400 proceeds as follows. One or more of the disks 450 are loaded onto the rod 440. The rod 440 is loaded into the chamber 410. The vacuum pump 420 operates to achieve a desired chamber pressure. A desired gas containing implant species is leaked into the chamber from gas supply 430 through valve 435 until a desired operating pressure is reached. The RF power supply 460 is operated so as to ignite a plasma which surrounds the surfaces of one or more of the disks 450. The DC power supply can be used to control the energy of ions that are implanted into the magnetic thin film. RF biasing may also be used.

[0049] Ions that can be readily implanted from a plasma and that will be effective in modifying the magnetic properties of a typical sputtered magnetic thin films, such as Co-Pt and Co-Pd, are: hydrogen, helium, boron, sulfur, aluminum, lithium, neon and germanium and combinations of these elements. This list is not intended to be exhaustive. Any ion readily formed in a plasma and effective in modifying the magnetic property of a magnetic thin film will suffice. Ideally, the ion that can change magnetic property of the magnetic thin film into thermally stable less magnetic or more magnetic areas at the lowest dose will be preferred.

[0050] Further details of plasma ion implantation chambers and process methods are available in US Patents Nos. 7,288,491 and 7,291 ,545 to Collins et al., incorporated by reference herein. The primary difference between the chamber of the present disclosure and the chamber of Collins et al. is the different configuration for holding the substrates. The disk holders of the present disclosure allow implantation of both sides at once, whereas the substrates in Collins et al. sit on a wafer chuck during processing. Those skilled in the art will appreciate how the plasma ion implantation tools and methods of Collins et al. can be utilized in the present disclosure.

[0051] After placing the substrate to receive energized ions in step 106, the portion of the magnetic thin film adjacent the selective regions may be subjected to thermal excitation in step 108. In one embodiment, radio frequency or microwave energy may be used to heat the selective regions. In yet another embodiment, the substrate may be heated. In yet another embodiment, laser or flash annealing may be performed. In some embodiments, rapid thermal annealing or a furnace may be used.

[0052] As one skilled in the art appreciates, the thermal excitation step 108 may be performed with the resist layer still present on the magnetic thin film. In some embodiments, the resist layer may be removed and the magnetic thin film is subjected to thermal excitation. In this embodiment, the magnetic thin film with both portions subjected to ion implantation and portions not subjected to ion implantation will be subjected to thermal excitation. This approach may be advantageously used with certain types of magnetic thin films which may benefit from the thermal excitation, for example, on portions of the magnetic thin film that was not subjected to ion implantation.

[0053] If a mask 200, for example, a PVA mask is used, the process may additionally include removal of the mask 200. In one embodiment, the PVA mask may be removed using a process to dissolve the PVA mask 200, for example, using an aqueous solution. In some embodiments, non-aqueous solution may be used. In some embodiments, the mask 200 is removed and then, the magnetic thin film is subjected to thermal excitation. In this embodiment, the magnetic thin film with both portions subjected to ion implantation and portions not subjected to ion implantation will be subjected to thermal excitation. This approach may be advantageously used with certain types of magnetic thin films which may benefit from the thermal excitation, for example, on portions of the magnetic thin film that was not subjected to ion implantation. In some embodiments, the thermal excitation step 108 may be performed with mask 200 still present. [0054] In some embodiments, the magnetic thin film may be subjected to thermal excitation in the chamber 410 of the ion implantation tool 400, by incorporating an appropriate heat source in the chamber 410 and selectively turning on the heat source after ion implantation.

[0055] After the energized ion step 106 and/or the thermal excitation in step 108, the portions of the magnetic thin film adjacent the selective regions are rendered to exhibit a magnetic property different than selective other regions as illustrated in step 110. In one embodiment, the energized ions that penetrate into portions of the magnetic thin film adjacent the selective regions 350 render the portions of the magnetic thin film adjacent the selective regions to exhibit a magnetic property different than selective other regions. The process may additionally include a resist strip step, if a resist is used as a pattern. The resist strip step can be facilitated by a conventional descum and ash operation in the plasma ion implantation chamber prior to removing the disks. The resist strip step may be a wet chemical process that is well known in the art. In some embodiments, the resist strip step may be performed before thermal excitation step 108, as discussed above.

[0056] The energy of ions available from a plasma implantation process is in the range of about 10OeV to about 15keV. However, for implanting into the magnetic thin films, which are tens of nanometers thick, the desirable energy range is between about 1 keV to about 11 keV. The energy range that is selected is based upon the element chosen, the resist thickness, resist ion stopping capability and the desired magnetic properties. For example, bias voltages of about 1 kV to 11 kV may be used to generate desirable energy range.

[0057] Figure 5 is a cross-sectional representation of a pattern 510 disposed about the magnetic thin film 520, with arrows 530 representing general direction of bombardment of energized ions. The energized ions penetrate through selective regions 540 of the resist 510 and penetrate a portion 550 of the magnetic thin film 520, adjacent the selective regions 540. [0058] Figure 6 is a cross-sectional representation of the magnetic thin film 520 after ion implantation, with portions 550 subjected to ion implantation. The portions 550 of the magnetic thin film 520 are rendered to exhibit a magnetic property different than selective other portions 560 of the magnetic thin film 520.

[0059] Following examples are provided to illustrate various applications of ion implantation to achieve desired magnetic properties.

Examples:

[0060] Experiments were conducted to determine ion stopping properties of resist for Helium and Boron ions for a given bias voltage.

[0061] Helium ion implant: Experiments were conducted for Helium ion implantation at 7 kV and 2 kV bias voltages. At 7 kV, the resist thickness required to stop the penetration of the Helium ions through the resist layer was about 120 nm. The resist thickness at the selective regions of the pattern can be as high as 45 nm and still provide a penetration of Helium ions through a 20nm thick Co- based magnetic thin film adjacent the selective regions of the pattern. At 2 kV, the resist thickness required to stop the penetration of the Helium ions through the resist layer was about 85nm. The resist thickness at the selective regions of the pattern can be as high as 10 nm and still provide a penetration of Helium ions through a 20nm thick Co-based magnetic thin film adjacent the selective regions of the pattern.

[0062] Boron ion implant: Experiment was conducted for Boron ion implantation at 9 kV bias voltage. At 9 kV, the resist thickness required to stop the penetration of the Boron ions through the resist layer was about 65 nm. The resist thickness at the selective regions of the pattern can be as high as 10 nm and still provide a penetration of Boron ions through a 20 nm thick Co-based magnetic thin film adjacent the selective regions of the pattern.

Magnetic properties:

Example 1 a: [0063] A glass substrate sputtered with a FeNi alloy soft under layer of about 100nm was used. About 20 nm magnetic thin film layer of CoCrPt alloy was sputtered on the FeNi alloy soft under layer. The prepared sample as described above was subjected to a plasma containing He ions, by injecting dopant gas Helium into the process chamber. The process chamber pressure was about 15 mtorr, the RF bias voltage was about 2 kV, the source power was about 500 watts, the dopant gas Helium was injected at a flow rate of about 300 seem and the implant time was about 25 seconds. Optionally, an inert gas may also be injected to assist in the creation of plasma. For example, Argon at a flow rate of about 16 seem may also be injected.

[0064] The penetration of the He ions into the sample was profiled using a simulation program with process parameters described above. A simulation program known as TRIM may be used to perform the simulation. TRIM program is available as part of a group of programs known as SRIM from www.srim.org. Figure 7A and 7B show the results of simulation. Now referring to Figure 7A, it is apparent that about 85nm thick resist will be sufficient to stop energized He ions from penetrating into the CoCrPt magnetic thin film layer. Now, referring to Figure 7B, it is apparent that about 10nm of resist layer and about 28 Angstroms of Carbon layer will be successfully penetrated by energized ions and further penetrate substantially through the CoCrPt magnetic thin film layer of about 20 nm.

[0065] The magnetic properties of the magnetic film for a sample that was not subjected to He ion implantation was measured using Physical Property Measurement System, to establish a base line. After subjecting the sample to He ion implantation, the magnetic properties of portions of the magnetic film subjected to He ion implantation was measured using Physical Property Measurement System. Figure 7C shows the magnetization curve for magnetic film not subjected to He ion implantation. It is evident from Figure 7C, the saturation magnetism (Ms) is about 1.36 tesla. Figure 7D shows the magnetization curve for portions of the magnetic film subjected to He ion implantation. It is evident from Figure 7D, the saturation magnetism (Ms) for the portion of magnetic film subjected to He ion implantation has dropped to about 0.1 tesla, as compared to base line magnetic thin film not subjected to He ion implantation. Therefore, a magnetic thin film may be subjected to He ion implantation under appropriate process conditions to substantially change the magnetic property to a state where the selective portion exhibits significantly different magnetic property.

Example 1 b:

[0066] Similar sample as used in Example 1 a was used in Example 1 b, except that the samples were subjected to thermal annealing. The thermal annealing was performed at both about 100 degree Celsius and about 200 degree Celsius, for about one hour in vacuum at a pressure of about 10 torr to about 5 torr.

[0067] After subjecting the samples to thermal annealing, the magnetic properties of portions of the magnetic film subjected to both He ion implantation and thermal annealing was measured using Physical Property Measurement System. The base line magnetization curve for a magnetic film not subjected to He ion implantation shows a saturation magnetism (Ms) of about 1.36 tesla. The magnetization curve for portions of the magnetic film subjected to both He ion implantation and thermal annealing at 100 degree Celsius showed a saturation magnetism (Ms) of about 0.01 tesla. The magnetization curve for portions of the magnetic film subjected to both He ion implantation and thermal annealing at 200 degree Celsius showed a saturation magnetism (Ms) of about 0.03 tesla. Based upon the results for samples in Example 1a and 1b, it is evident that thermal annealing of the samples further reduced the saturation magnetism (Ms) for the portions of the magnetic film subjected to annealing. Therefore, a magnetic thin film may be subjected to both He ion implantation and thermal annealing under appropriate process conditions to substantially change the magnetic property to a state where the selective portion exhibits significantly different magnetic property. Although the experiment was conducted at a bias voltage of about 2kV, the bias voltage may be in the range of 1 kV to 11 kV and preferably in the range of 1 kV to 3kV.

Example 2: [0068] Similar sample as used in Example 1a was used for penetration of Boron ions. The prepared sample as described above, was subjected to a plasma containing Boron ions, by injecting dopant gas BF3 into the process chamber. The process chamber pressure was maintained at about 15 mtorr, the RF bias voltage was about 9 kV, the source power was about 500 watts, the dopant gas BF3 was injected at a flow rate of about 300 seem and the implant time was about 20 seconds. Optionally, an inert gas may also be injected to assist in the creation of plasma. For example, Argon at a flow rate of about 16 seem may also be injected.

[0069] The penetration of the Boron ions into the sample was profiled using a simulation program with process parameters described above. Figure 8A and 8B show the results of the simulation. Now referring to Figure 8A, it is apparent that a 65 nm thick resist will be sufficient to stop energized Boron ions from penetrating into the CoCrPt magnetic thin film layer. It is evident from Figure 8A that about 10 nm of resist layer and about 28 Angstroms of Carbon layer can be successfully penetrated by energized ions. The energized ions can further penetrate substantially through the CoCrPt magnetic thin film layer of about 20 nm.

[0070] Referring to Figure 8C, concentration of Boron and Co atoms were determined using Secondary Ion Mass Spectroscope (SIMS). From Figure 8C, it is evident that Co concentration remained substantially unchanged. It is also evident that Boron concentration remained constant for about 10 nm deep and gradually decreased thereafter.

[0071] The magnetic properties of the magnetic film for a sample that was not subjected to Boron ion implantation was measured using Physical Property Measurement System, to establish a base line. After subjecting the sample to Boron ion implantation, the magnetic film subjected to Boron ion implantation was measured using Physical Property Measurement System. Figure 8D shows the magnetization curve for the magnetic film not subjected to Boron ion implantation. As it is apparent from Figure 8D, the saturation magnetism (Ms) is about 1.36 tesla. Figure 8E shows the magnetization curve for portions of the magnetic film subjected to Boron ion implantation. As it is apparent from Figure 8E, the saturation magnetism (Ms) for the portion of magnetic film subjected to Boron ion implantation has dropped to about 0.5 tesla, as compared to magnetic thin film not subjected to Boron ion implantation. The Boron ion implantation under these experimental conditions reduced the magnetization by about 50%.

[0072] Therefore, a magnetic thin film may be subjected to Boron ion implantation under certain process conditions to change the magnetic property of the selective portions so as to exhibit different magnetic property. For example, the magnetic property of selective portions may be changed to exhibit less magnetic property than portions not subjected to Boron ion implantation. Although the experiment was conducted at a bias voltage of about 9kV, the bias voltage may be in the range of 1 kV to 11 kV and preferably in the range of 7kV to 11 kV.

Example 3:

[0073] Silicon substrate sputtered with about 20 nm of Co alloy layer was prepared as samples for this example. The prepared sample was subjected to a plasma containing Silicon ions, by injecting dopant gas SiH4 into the process chamber. The process chamber pressure was about 30 mtorr, the RF bias voltage was about 9 kV , the source power was about 500 watts, the dopant gas SiH4 was injected at a flow rate of about 75 seem and the implant time was about 20 seconds.

[0074] The penetration of the Silicon ions into the sample was profiled using a simulation program with process parameters as described above. Figure 9A show the results of the simulation. Now referring to Figure 9A, it is evident that Si penetrates about 5-6 nm deep, with some tail up to 10 nm deep.

[0075] After subjecting the sample to Silicon ion implantation, the depth profile of the Si implant in the 20nm Co film was measured using SIMS. Fig. 9B shows the depth profile for the Si implant. It is evident from Fig. 9B that Si ions penetrated about 5-6 nm deep. It is noteworthy that Si ion penetration depth profiled using the simulation program correlates well with the actual measurement of the Si penetration depth. [0076] In some embodiments, after ion implantation, the magnetic thin film may be subjected to thermal excitation, for example, by thermal annealing. It is anticipated that the thermal annealing would further reduce the saturation magnetism (Ms) of the portions of the magnetic thin film subjected to thermal excitation, as evident from Example 1 b.

[0077] It is evident from the above examples that the resist thickness needed to stop penetration of energized ions through the resist layer and impinge upon the magnetic thin film is dependent upon the element species being used, the process parameters and the desired penetration depth of the ions into the magnetic thin film adjacent the selective regions of the resist layer that permits the penetration of charged ions. As the dimension of the selective regions of the resist layer permitting the penetration of charged ions becomes small, there is a need to reduce the resist thickness, so as to permit effective nanolithography process during the pattern creation. As the resist thickness decreases, the resist layer may no longer be able to stop penetration of energized ions in regions other than the selective regions.

[0078] One way to overcome this problem is to add a dopant to the resist that increases the resistance to the penetration of the charged ions. For example, the resist may be doped with a silicon containing compound to increase the resistance to the penetration of charged ions through the resist. Other dopants that may be used to increase the resistance to the penetration of the charged ions include compounds containing sulfur and phosphorus. In one embodiment, nano particles can be added as additives to tune the resistance to the penetration of the charged ions. For example, nano particles of Aluminum oxide (AI2O3), Silicon dioxide (SiO2), Ceria (CeO2) and Titanium dioxide (TiO2 ) may be used to tune the resistance to the penetration of the charged ions.

[0079] It is evident from the above examples that different element species have different effects on the magnetic properties based upon the process parameters and the desired penetration depth of the ions into the magnetic thin film. For example, one or more elements may be advantageously used to modify the magnetic properties of the magnetic film. As an example, a combination of Helium and Boron may provide added benefit. For example, Helium with less molecular weight can penetrate deeper into the magnetic thin film and change the magnetic properties, using less bias voltage. Boron with a higher molecular weight may be used either before or after the penetration of Helium to further impact the magnetic properties of the magnetic thin film and also to act as a barrier for the Helium ions from escaping from the magnetic thin film, over time.

[0080] Although the combination of Helium and Boron has been described, one skilled in the art appreciates that various other permutation and combinations of elements may be used in sequence or together, to derive magnetic and other properties that are favorable to the retention and enhancement of the modifications of the magnetic properties.

[0081] It is also evident from the above examples that different element species may be used to modify the magnetic properties of the magnetic thin film. For example, a compound containing elements that increase the magnetic property of the thin film upon ion implantation may be used. For example, platinum ion implantation may increase the magnetic properties of the magnetic thin film.

[0082] The present disclosure may be used for various types of magnetic recording media. For, example, the teachings of this present disclosure may be used with recording media having a granular magnetic structure. The present disclosure may also be used for magnetic thin films that are multi-layered. The magnetic thin film may also be a continuous magnetic film and may be used with patterned media. The patterned media may be bit patterned media or track patterned media. In one embodiment, the magnetic thin film may be made of highly anisotropic magnetic material, suitable for a thermally assisted magnetic recording.

[0083] The present disclosure allows for very short process times. For example, it can take about ten seconds to implant the disks. Input and output vacuum loadlocks will enable rapid transfer of disks in and out of the chamber and avoid losing time for pumpdown, thus allowing for very high throughput. Those skilled in the art will appreciate how automated transfer systems, robotics and loadlock systems can be integrated with the plasma ion implantation apparatus of the present disclosure.

[0084] The present disclosure in certain embodiments provides a method to selectively modify the magnetic properties of portions of magnetic thin film of a magnetic media. The selective modifications can be advantageously used to increase one or more of the desirable properties like aerial density, whte-ability, SNR and thermal stability of the magnetic media.

[0085] Although the present disclosure has been particularly described with reference to the preferred embodiments thereof, it should be readily apparent to those of ordinary skill in the art that changes and modifications in the form and details may be made without departing from the spirit and scope of the disclosure. It is intended that the appended claims encompass such changes and modifications.

Claims

WHAT IS CLAIMED IS:

1. A method for patterning a thin film on a substrate, comprising: disposing a magnetic thin film on the substrate; disposing a pattern above the magnetic thin film, the pattern having selective regions which permit penetration of energized ions; generating energized ions of one or more elements; exposing at least a portion of the magnetic thin film to the energized ions of the one or more elements, wherein the substrate is biased within a range from about 1 kV to about 11kV; rendering portions of the magnetic thin film adjacent the selective regions to exhibit a magnetic property different than selective other portions of the magnetic thin film.

2. The method of claim 1 , wherein providing the pattern includes positioning a mask proximate to the magnetic thin film.

3. The method of claim 2, wherein the mask comprises polyvinyl alcohol.

4. The method of claim 1 , wherein the disposing a pattern comprises: depositing a resist on the surface of the magnetic thin film; contacting the resist with a mold having a three-dimensional pattern to create depressions in the resist, the depressions creating areas of thin resist and areas of thick resist, the thin resist corresponding to the selective regions which permit penetration of energized ions; and curing the resist.

5. The method of claim 4, wherein the exposing at least a portion of the magnetic thin film to energized ions comprises exposing the magnetic thin film to plasma, wherein the energized ions have sufficient energy to penetrate the thin resist to contact the magnetic thin film.

6. The method of claim 5, further comprising removing the resist.

7. The method of claim 5, wherein the resist is deposited and cured on the surface of the magnetic film using thermoplastic nanoimprint lithography or photo nanoimprint lithography.

8. The method of claim 5, wherein the one or more elements are selected from the group consisting of hydrogen, helium, boron, sulfur, aluminum, lithium, neon, germanium and combinations thereof.

9. The method of claim 8, wherein the substrate is biased within a range from about 1 kV to about 3 kV, the plasma comprises Helium, and the thin resist layer has a thickness of about 10 nm.

10. The method of claim 5, wherein the disposing a pattern above the magnetic thin film comprises disposing a pattern on both sides of the substrate.

11. A method for patterning a magnetic thin film on a substrate, comprising: providing a pattern about the magnetic thin film, with selective regions of the pattern permitting energized ions of one or more elements to contact portions of the magnetic thin film; generating energized ions of one or more elements with sufficient energy to penetrate selective regions of the pattern and a portion of the magnetic thin film adjacent the selective regions; exposing the substrate to the energized ions such that the energized ions contact the magnetic thin film; subjecting the portion of the magnetic thin film adjacent the selective regions to thermal excitation; and rendering portions of the magnetic thin film adjacent the selective regions to exhibit a magnetic property different than selective other portions of the magnetic thin film.

12. The method of claim 11 , wherein portions of the magnetic thin film adjacent the selective regions exhibiting a magnetic property different than before the penetration of ions.

13. The method of claim 11 , wherein the subjecting the portion of the magnetic thin film adjacent the selective regions to thermal excitation further includes subjecting selective other portions of the magnetic thin film to thermal excitation.

14. The method of claim 13, further comprising removing the pattern about the selective other portions before subjecting the selective other portions of the magnetic thin film to thermal excitation.

15. The method of claim 11 , wherein the providing the pattern includes coating a resist over the magnetic thin film and imprinting with a mold having a plurality of projections corresponding to the selective regions of the pattern, the imprinting creating a depression in the resist, the depression having a width and a depth, wherein resist surrounding the depression has a resist thickness at least as high as the depth of the depression and the resist thickness surrounding the depression is sufficient to substantially prevent penetration of energized ions through the resist surrounding the depression.

16. The method of claim 15, wherein the subjecting the portion of the magnetic thin film adjacent the selective regions to thermal excitation comprises heating the magnetic thin film by laser annealing, flash annealing, rapid thermal annealing, or applying microwave energy.

17 The method of claim 11 , wherein the providing a pattern about the magnetic thin film comprises providing a pattern on both sides of the substrate.

18. The method of claim 17, wherein the providing the pattern includes coating a resist over the magnetic thin film and imprinting with a mold having a plurality of projections corresponding to the selective regions of the pattern.

19. The method of claim 18, wherein generating energized ions of one or more elements includes providing a vacuum chamber, injecting one or more gases containing compounds of one or more elements, igniting a plasma by using high voltage and releasing energized ions of one or more elements and exposing the substrate includes disposing the substrate in the vaccum chamber and biasing the substrate to attract the energized ions.

20. An apparatus for processing recording media, comprising: a process chamber; a substrate support disposed within the process chamber, the substrate support having a surface with a plurality of substrate support sites thereon, the substrate support adapted to support a plurality of magnetic recording media; a power supply coupled to the process chamber and adapted to generate a plasma; and a doping gas supply coupled to the process chamber and adapted to provide a doping gas to the interior of the process chamber.

21. The apparatus of claim 20, wherein the substrate support comprises a conductive surface.

22. The apparatus of claim 20, wherein the substrate support comprises a plasma-protective coating.

23. A magnetic recording medium, comprising: a substrate having a plasma-doped magnetic thin film disposed thereon, the magnetic thin film comprising a cobalt alloy layer having: a pattern of first regions having a doped ion concentration, wherein the first regions having a doped ion concentration exhibit a magnetic property different than regions adjacent to the first regions.

24. The method of claim 23, wherein the doped ion is helium, and the doped ion concentration remains substantially constant for a depth of about 10 nm.

25. The method of claim 23, wherein the doped ion is selected from the group consisting of hydrogen, helium, boron, sulfur, aluminum, lithium, neon, germanium and combinations thereof.