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WO2009135447A3 - Interferometric system with compensation of the refractive index fluctuation of the environment - Google Patents

Interferometric system with compensation of the refractive index fluctuation of the environment Download PDF

Info

Publication number
WO2009135447A3
WO2009135447A3 PCT/CZ2009/000064 CZ2009000064W WO2009135447A3 WO 2009135447 A3 WO2009135447 A3 WO 2009135447A3 CZ 2009000064 W CZ2009000064 W CZ 2009000064W WO 2009135447 A3 WO2009135447 A3 WO 2009135447A3
Authority
WO
WIPO (PCT)
Prior art keywords
compensation
environment
refractive index
interferometric system
index fluctuation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CZ2009/000064
Other languages
French (fr)
Other versions
WO2009135447A2 (en
Inventor
Josef Lazar
Ondrej Cip
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institute Of Scientific Instruments As Cr V V I
Original Assignee
Institute Of Scientific Instruments As Cr V V I
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institute Of Scientific Instruments As Cr V V I filed Critical Institute Of Scientific Instruments As Cr V V I
Priority to EP09737327A priority Critical patent/EP2286176A2/en
Publication of WO2009135447A2 publication Critical patent/WO2009135447A2/en
Publication of WO2009135447A3 publication Critical patent/WO2009135447A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

An interferometric system with compensation of the refractive index fluctuation of the environment comprising two interferometers (1a, 1b) and a light source (2) common to the two interferometers (1a, 1b) where between the two interferometers (1a, 1b) there is a common movable reflector (5) and in front of the first interferometer (1a) there is a beamsplitter (7) for beam supply of a part of the light beam into the second interferometer (1b) where the detectors of the first (1a) as well as the second interferometer (1b) are connected to a controller (4), which, is also connected with the light source (2).
PCT/CZ2009/000064 2008-05-06 2009-05-04 The interferometric system with compensation of the refractive index fluctuation of the ambiance Ceased WO2009135447A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP09737327A EP2286176A2 (en) 2008-05-06 2009-05-04 The interferometric system with compensation of the refractive index fluctuation of the ambiance

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CZ20080280A CZ302520B6 (en) 2008-05-06 2008-05-06 Interferometric system with compensation for fluctuations in medium index of refraction
CZPV2008-280 2008-05-06

Publications (2)

Publication Number Publication Date
WO2009135447A2 WO2009135447A2 (en) 2009-11-12
WO2009135447A3 true WO2009135447A3 (en) 2010-01-14

Family

ID=41165697

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CZ2009/000064 Ceased WO2009135447A2 (en) 2008-05-06 2009-05-04 The interferometric system with compensation of the refractive index fluctuation of the ambiance

Country Status (3)

Country Link
EP (1) EP2286176A2 (en)
CZ (1) CZ302520B6 (en)
WO (1) WO2009135447A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ306015B6 (en) * 2014-10-20 2016-06-22 Vysoké Učení Technické V Brně Interferometric system and method of measuring the spatial distribution of refractive index
US10578421B2 (en) 2015-09-08 2020-03-03 Institut National De La Recherche Scientifique System and method for phase-readout and active stabilization of optical interferometers
DE102017100991B3 (en) * 2017-01-19 2017-11-30 Carl Mahr Holding Gmbh Measuring device and method for detecting at least one length measured variable
DE102017100992A1 (en) * 2017-01-19 2018-07-19 Carl Mahr Holding Gmbh Measuring device and method for operating a measuring device
WO2024003545A1 (en) * 2022-06-28 2024-01-04 Edinburgh Instruments Limited Optical system and method
GB2623738A (en) * 2022-06-28 2024-05-01 Edinburgh Instr Optical system and method
JP2024121186A (en) * 2023-02-27 2024-09-06 セイコーエプソン株式会社 Optical Devices and Spectroscopic Instruments

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD120082A1 (en) * 1975-06-20 1976-05-20
DE3124357A1 (en) * 1981-06-20 1983-01-13 Daimler-Benz Ag, 7000 Stuttgart Laser interferometer
DE3503007A1 (en) * 1985-01-30 1986-07-31 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Method for measuring geometrical variables and device for carrying out the method
DE4100773A1 (en) * 1991-01-12 1992-07-16 Jenoptik Jena Gmbh INTERFEROMETRIC LENGTH MEASURING DEVICE

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4183669A (en) * 1977-09-06 1980-01-15 Laser Precision Corporartion Dual beam Fourier spectrometer
DE3632978A1 (en) * 1986-09-29 1988-03-31 Siemens Ag Interferometer for the remote measurement of lengths
DE3930273A1 (en) * 1989-09-11 1991-03-14 Helios Messtechnik Measurement interferometer supplied with light from laser - is stimulated by laser diodes and has reference interferometer in control loop for frequency stabilisation
JP2725434B2 (en) * 1990-03-30 1998-03-11 横河電機株式会社 Absolute length measuring method and absolute length measuring device using FM heterodyne method
WO2001014837A1 (en) * 1999-08-19 2001-03-01 Siemens Aktiengesellschaft Michelson interferometer with a calibration device
JP2003172656A (en) * 2001-12-06 2003-06-20 Shibasoku:Kk Interferometer
US7405829B2 (en) * 2005-06-17 2008-07-29 Jds Uniphase Corporation Apparatus and method for characterizing pulsed optical signals

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD120082A1 (en) * 1975-06-20 1976-05-20
DE3124357A1 (en) * 1981-06-20 1983-01-13 Daimler-Benz Ag, 7000 Stuttgart Laser interferometer
DE3503007A1 (en) * 1985-01-30 1986-07-31 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Method for measuring geometrical variables and device for carrying out the method
DE4100773A1 (en) * 1991-01-12 1992-07-16 Jenoptik Jena Gmbh INTERFEROMETRIC LENGTH MEASURING DEVICE

Also Published As

Publication number Publication date
EP2286176A2 (en) 2011-02-23
CZ2008280A3 (en) 2009-11-18
CZ302520B6 (en) 2011-06-29
WO2009135447A2 (en) 2009-11-12

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