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WO2010006764A3 - Fibre-optic multiwavelength interferometer (mwli) for the absolute measurement of distances and topologies for surfaces at a large operating distance - Google Patents

Fibre-optic multiwavelength interferometer (mwli) for the absolute measurement of distances and topologies for surfaces at a large operating distance Download PDF

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Publication number
WO2010006764A3
WO2010006764A3 PCT/EP2009/005111 EP2009005111W WO2010006764A3 WO 2010006764 A3 WO2010006764 A3 WO 2010006764A3 EP 2009005111 W EP2009005111 W EP 2009005111W WO 2010006764 A3 WO2010006764 A3 WO 2010006764A3
Authority
WO
WIPO (PCT)
Prior art keywords
fibre
optic
distances
mwli
topologies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2009/005111
Other languages
German (de)
French (fr)
Other versions
WO2010006764A2 (en
Inventor
Ralf Nicolaus
Jürgen Petter
Theo Tschudi
André Noack
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Luphos GmbH
Original Assignee
Luphos GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Luphos GmbH filed Critical Luphos GmbH
Publication of WO2010006764A2 publication Critical patent/WO2010006764A2/en
Publication of WO2010006764A3 publication Critical patent/WO2010006764A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention relates to a sensor device for measuring distances with at least two radiation sources (101) which are designed to produce optical signals (112) at different wavelengths and the optical signals of which can be supplied to a sensor head (104; 124) via a fibre-optic coupling (102, 103), wherein the optical signals (112) for the at least two radiation sources (101) can be brought together in a common fibre (110) by means of at least one optical multiplexer device (102) and can be supplied to the sensor head (104; 124) by means of said fibre (110).
PCT/EP2009/005111 2008-07-18 2009-07-14 Fibre-optic multiwavelength interferometer (mwli) for the absolute measurement of distances and topologies for surfaces at a large operating distance Ceased WO2010006764A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008033942A DE102008033942B3 (en) 2008-07-18 2008-07-18 Fiber-optic multi-wavelength interferometer (MWLI) for the absolute measurement of distances and topologies of surfaces at a large working distance
DE102008033942.3 2008-07-18

Publications (2)

Publication Number Publication Date
WO2010006764A2 WO2010006764A2 (en) 2010-01-21
WO2010006764A3 true WO2010006764A3 (en) 2010-11-18

Family

ID=41395556

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2009/005111 Ceased WO2010006764A2 (en) 2008-07-18 2009-07-14 Fibre-optic multiwavelength interferometer (mwli) for the absolute measurement of distances and topologies for surfaces at a large operating distance

Country Status (2)

Country Link
DE (1) DE102008033942B3 (en)
WO (1) WO2010006764A2 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011011065B4 (en) 2011-02-11 2013-04-04 Luphos Gmbh Method and device for the high-precision measurement of surfaces
DE102012212663A1 (en) 2012-07-19 2014-01-23 Carl Zeiss Smt Gmbh Microlithographic projection exposure apparatus with an optical distance measuring device
DE102012017015B4 (en) 2012-08-20 2015-03-19 Luphos Gmbh Method and device for the high-precision measurement of surfaces
EP2806246B1 (en) 2013-05-24 2019-11-20 Attocube Systems AG Dual laser interferometer
DE102015201754A1 (en) 2015-02-02 2016-08-04 Picofine GmbH Device and method for adjusting a laser interferometer
DE102015209567B3 (en) * 2015-05-26 2016-10-27 Carl Zeiss Industrielle Messtechnik Gmbh Optical multi-wavelength sensor for measuring distances to a surface and corresponding measuring device
DE102016100745B3 (en) * 2016-01-18 2017-03-09 Friedrich Vollmer Feinmessgerätebau Gmbh Method for optical distance measurement and a distance measuring device
DE202016100211U1 (en) 2016-01-18 2017-04-19 Friedrich Vollmer Feinmessgerätebau Gmbh distance measuring device
EP3401634A1 (en) 2017-05-12 2018-11-14 Taylor Hobson Limited Distance measuring assembly for determining the distance to an object
EP3789727B1 (en) 2019-09-04 2024-04-10 Taylor Hobson Limited Interferometric measuring device
DE102021112120A1 (en) 2021-05-10 2022-11-10 Carl Mahr Holding Gmbh Fiber optic point probe and distance measurement system with a fiber optic point probe
GB2622565B (en) 2022-07-15 2025-05-28 Taylor Hobson Ltd A collision protection apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2848664A1 (en) * 2002-12-11 2004-06-18 Micro Module Position and reflectivity meter for use in photometry and metrology has a light source with at least two different wavelengths that are processed separately by a measurement system
WO2005001445A2 (en) * 2001-12-18 2005-01-06 Massachusetts Institute Of Technology Systems and methods for phase measurements

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4552457A (en) * 1983-02-01 1985-11-12 Giallorenzi Thomas G Fiber optic interferometer using two wavelengths or variable wavelength
JPS62106306A (en) * 1985-11-01 1987-05-16 Olympus Optical Co Ltd Multiwavelength interferometer
DE4139865C2 (en) * 1991-12-03 1994-03-10 Deutsche Aerospace Tunable two-wavelength laser for super heterodyne interferometers
TW367407B (en) * 1997-12-22 1999-08-21 Asml Netherlands Bv Interferometer system with two wavelengths, and lithographic apparatus provided with such a system
US6781699B2 (en) * 2002-10-22 2004-08-24 Corning-Tropel Two-wavelength confocal interferometer for measuring multiple surfaces
DE102005042733B3 (en) * 2005-09-05 2007-01-25 Universität Stuttgart Interferometric method e.g. for recording of separation and form and optical coherence tomography (OCT), involves having multi-wavelength source or tunable source and imaging on receiver by focusing systems
JP2007047043A (en) * 2005-08-10 2007-02-22 Pentax Corp Multi-wavelength interferometer
WO2007087301A2 (en) * 2006-01-23 2007-08-02 Zygo Corporation Interferometer system for monitoring an object

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005001445A2 (en) * 2001-12-18 2005-01-06 Massachusetts Institute Of Technology Systems and methods for phase measurements
FR2848664A1 (en) * 2002-12-11 2004-06-18 Micro Module Position and reflectivity meter for use in photometry and metrology has a light source with at least two different wavelengths that are processed separately by a measurement system

Also Published As

Publication number Publication date
WO2010006764A2 (en) 2010-01-21
DE102008033942B3 (en) 2010-04-08

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