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WO2009157077A1 - Panneau d'affichage électroluminescent organique et son procédé de fabrication - Google Patents

Panneau d'affichage électroluminescent organique et son procédé de fabrication Download PDF

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Publication number
WO2009157077A1
WO2009157077A1 PCT/JP2008/061643 JP2008061643W WO2009157077A1 WO 2009157077 A1 WO2009157077 A1 WO 2009157077A1 JP 2008061643 W JP2008061643 W JP 2008061643W WO 2009157077 A1 WO2009157077 A1 WO 2009157077A1
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Prior art keywords
organic
substrate
display panel
light
donor sheet
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Ceased
Application number
PCT/JP2008/061643
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English (en)
Japanese (ja)
Inventor
浩 大畑
明 平沢
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Pioneer Corp
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Pioneer Corp
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Priority to PCT/JP2008/061643 priority Critical patent/WO2009157077A1/fr
Publication of WO2009157077A1 publication Critical patent/WO2009157077A1/fr
Anticipated expiration legal-status Critical
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/875—Arrangements for extracting light from the devices
    • H10K59/879—Arrangements for extracting light from the devices comprising refractive means, e.g. lenses

Definitions

  • the present invention provides an anode sandwiching a stack of organic compound thin films (organic functional films) including a light emitting layer containing an organic compound (fluorescent material or phosphorescent material) that exhibits electroluminescence (hereinafter referred to as EL) that emits light by current injection, and
  • EL electroluminescence
  • the present invention relates to a method for manufacturing an organic EL display panel of a display device in which a plurality of organic EL elements including a cathode are formed on a substrate in a matrix.
  • An organic EL display panel for example, a passive type is configured by sequentially laminating a row electrode, an organic functional film, and a column electrode intersecting the row electrode.
  • the row electrodes are each formed in a strip shape and are arranged so as to be parallel to each other at a predetermined interval. The same applies to the column electrodes.
  • the passive type organic EL display panel is formed by connecting a plurality of organic EL elements (light emitting units) formed at intersections of a plurality of row and column electrodes and arranged in a matrix and driving with a predetermined signal.
  • An image can be displayed, and further, a full color display device can be configured by forming a display region composed of organic EL elements emitting three primary colors of red R, green G and blue B.
  • a laser induced thermal drawing method (Laser Induced Thermal Imaging: LITI) is known.
  • Patent Document 1 discloses a fine pattern forming technique manufactured by bringing two objects into close contact with each other, filling a gap between them, creating a gas-liquid interface while moving the object, and evaporating the solvent from the solution. Are listed.
  • an alignment film is formed by rubbing a polymer material (eg, polytetrafluoroethylene) on a smooth surface (alignment film forming step), and a fine structure is formed on the alignment film.
  • a polymer material eg, polytetrafluoroethylene
  • a fine structure is formed on the alignment film.
  • Patent Documents 3 and 4 for the purpose of improving the light extraction efficiency by forming a grating between the substrate and the transparent electrode, the step of the grating is filled with a sol-gel coating liquid, or the step structure and the transparent electrode A technique for keeping the organic functional film smooth by forming a protective film therebetween is described.
  • Patent Document 5 describes a technique for forming a two-dimensional grating pattern on the light emission surface opposite to the element formation surface of the glass substrate.
  • Patent Document 6 relates to a method of forming a photonic crystal on a donor sheet to improve light extraction efficiency and thermally transferring the photonic crystal.
  • the transfer surface is transferred onto a second light emitting electrode or a protective film.
  • the technology is described. JP2003-151766 JP 2006-255878 A JP 2004-335299 A JP 2004-349111 A JP 2005-26228 A JP 2005-16663 A
  • Patent Document 1 since it is a method of forming on the entire surface of the substrate, it is difficult to form optical structures with different periods on the substrate, and furthermore, since the film forming method uses a solution, Since each color and the position of the optical structure need to be surely matched, positioning accuracy is required. In the organic EL element having a laminated structure, it is necessary not to dissolve the base material in film formation using a solvent, and the degree of freedom of the solvent is low.
  • the shape of the optical structure formed by the molecular structure of the material to be rubbed is determined and rubbed by the method of forming the base of the optical structure by rubbing a polymer material or the like on the substrate. Since the molecular structure of the polymer is the source of the optical structure as it is, it is difficult to change the period finely. In addition, when two or more colors are formed on the same substrate, an optical structure corresponding to the emission color must be formed, and this method makes it difficult to achieve high definition.
  • a photonic crystal which is an optical structure
  • an organic functional film which is an organic EL element, and upper and lower electrodes
  • the place where the optical structure is formed is on a substrate, an electrode formed on the substrate, or in the case of top emission.
  • a method of forming on the inside of the protective film formed on the upper surface electrode or on the light emission surface of the protective film is generally used.
  • nanoimprinting or drawing with an electron beam is generally used.
  • the nanoimprint method is more effective because electron beam drawing is difficult.
  • the treatment is performed at a high temperature, the nanoimprint mold is greatly damaged. The cost will be high.
  • the glass substrate needs to be deformed at a certain temperature, the selectivity of the glass is also lowered.
  • the present invention provides an organic EL display panel that can be transferred with a small amount of light energy, can transfer a material film at once, and has improved light extraction efficiency, and a method for manufacturing the same.
  • an organic EL display panel that can be transferred with a small amount of light energy, can transfer a material film at once, and has improved light extraction efficiency, and a method for manufacturing the same.
  • the inventor has paid attention to the fact that a part of the organic functional film becomes thin in the organic functional film formation process from the nanoimprint experimental result in the manufacture of the organic EL display panel. That is, if the thickness of the organic functional film can be controlled, it has been found that the light extraction efficiency is improved, and the present invention has been achieved.
  • a plurality of organic EL elements having an anode and a cathode sandwiching a stack of organic functional films including a light emitting layer containing an organic compound exhibiting electroluminescence that emits light by current injection are formed in a matrix form.
  • a method for producing an organic EL display panel formed on a substrate, A light-transmitting substrate, a plurality of convex optical structures formed on the main surface of the light-transmitting substrate, and a film formed on the main surface of the light-transmitting substrate and the optical structure Forming a donor sheet comprising a heat conversion layer and a material film of a material to be transferred; Forming a transfer substrate; and Contacting the material film of the donor sheet on a portion of the transfer substrate; From the light transmissive substrate side of the donor sheet, irradiating light to heat the donor sheet; Peeling the donor sheet from the transferred substrate, and transferring the uneven shape of the material film corresponding to the optical structure to the transferred substrate; It is characterized by including.
  • the organic EL display panel of the present invention is a substrate in which a plurality of organic EL elements having an anode and a cathode sandwiching an organic functional film including a light emitting layer containing an organic compound exhibiting electroluminescence that emits light by current injection are arranged in a matrix.
  • An organic EL display panel formed above, It includes a periodic optical structure that causes a periodic refractive index difference at an interface inside the organic functional film.
  • ⁇ Donor sheet light transmissive substrate forming step> First, by using electron beam lithography, photolithography, or the like, for example, the surface of a silicon substrate or the like is finely processed to create a master sheet (not shown) of a donor sheet. For example, in the case of a panel having light emitting regions (organic EL device regions) of three colors of red, green and blue, a master disk for each periodic nanostructure is created. For the master disk creation, a so-called nanoimprint mold making process or a microprint mold creation method can be used.
  • liquid polymer is applied on each master board.
  • the liquid polymer include a resin such as PET (polyethylene terephthalate) and a silicon-based elastomer such as polydimethylsiloxane.
  • FIG. 1 is a schematic perspective view of an example of a light-transmitting substrate 11 of a donor sheet carrying a periodic nanostructure region 111 formed with periodic nanostructures on the entire surface. Since the periodic nanostructure is present in the entire donor sheet, positioning of the donor sheet and the substrate to be transferred (not shown) is performed by the transfer device and the substrate to be transferred, and high transfer position accuracy can be obtained. is there.
  • each periodic nanostructure 11a is shown as a rectangle when viewed from the front, but is not limited thereto, and may be a polygon, a circle, a polygonal pyramid, an ellipse, or a star.
  • FIG. 5 is an enlarged partial cross-sectional view of the periodic nanostructure 11a corresponding to the organic EL element.
  • Periodic nanostructures 11a that are periodic steps having a rectangular cross-sectional shape are formed on the surface of the light-transmitting substrate 11.
  • a periodic nanostructure 11a 300 to 800 nm period, one-dimensional or two-dimensional arrangement, depth of several nm to several ⁇ m
  • a photonic crystal or a grating is formed on the surface of the light transmissive substrate 11 by nanoimprinting or the like.
  • the periodic nanostructure is a convex portion from the base material, and its size, for example, one side, height, and diameter of the root portion is on the order of nanometers, for example, 1 nm to 1000 nm, 10 nm to 1000 nm, 50 nm to 1000 nm. Or in the range of 100 nm to 1000 nm.
  • the periodic nanostructure is, for example, a polygonal cylinder, a cylinder, a polygonal pyramid, a cone, a truncated polygonal pyramid, or a truncated cone.
  • Periodic nanostructures include not only the same shape but also similar shapes that differ only in size, and are structures in which they are repeatedly arranged.
  • the group of periodic nanostructures has a square columnar matrix arrangement, for example, a height of 10 nm to 100 nm and a repetition pitch of 200 nm to 600 nm.
  • a light emitting layer material corresponding to a heat conversion layer and a material film 13 to be transferred is sputtered on the surface of the light transmissive substrate 11 on the side where the periodic nanostructure 11 a is present.
  • the film is formed in order.
  • the material film 13 includes a thin portion between the periodic nanostructures 11a and a thick portion (periodic optical structure 13a) on the periodic nanostructure 11a.
  • the heat conversion layer is selected from materials whose adhesion to the light transmissive substrate 11 is higher than adhesion to the material film 13. In the formation of the material film 13, it has been discovered that a part of the film becomes thinner depending on the level difference.
  • material film formation on a light-transmitting substrate is physical vapor deposition (PVD) such as resistance heating vapor deposition or electron beam vapor deposition in a vacuum layer, or chemical vapor deposition such as plasma CVD or MOCVD ( In addition to (CVD), it can be performed by wet coating such as spin coating, ink jet, and spraying.
  • PVD physical vapor deposition
  • MOCVD metal-organic chemical vapor deposition
  • wet coating such as spin coating, ink jet, and spraying.
  • the donor sheet DS comprising the light transmissive substrate 11, the periodic nanostructure 11a patterned on one main surface thereof, and the material film 13 of the periodic optical structure formed thereon. Is formed.
  • a substrate to be transferred on which an organic functional film 23 of a hole injection layer or a hole transport layer is formed is prepared.
  • the organic EL element of the organic EL display panel is a self-luminous element utilizing a phenomenon in which a current is passed through a fluorescent or phosphorescent organic functional film, and light is generated by combining electrons and holes with the organic functional film.
  • an organic EL element includes an organic functional film including an anode and a cathode, and a hole transport layer, a light emitting layer, and an electron transport layer sandwiched between the anode and the cathode.
  • a hole injection layer and an electron injection layer are provided between the anode and the hole transport layer and between the electron transport layer and the cathode, respectively. May be.
  • an electron blocking layer or a hole blocking layer may be further provided as necessary.
  • the organic functional film 23 may be provided individually, for example, but a hole injection layer or a hole transport layer common to adjacent organic EL elements can also be used.
  • the material film 13 to be transferred is an organic functional film such as a light emitting layer, and may further include at least one of a hole transport layer, an electron transport layer, a hole injection layer, and an electron injection layer.
  • the organic functional film 23 on the transferred substrate side is deposited through a predetermined mask opening (corresponding to the pixel region) in a vapor state by placing a glass substrate with a transparent electrode in a reduced pressure state, heating each organic substance.
  • the film can be formed by thermal evaporation.
  • ⁇ Contact process between transfer substrate and donor sheet> For example, using a photothermal printing apparatus (not shown), as shown in FIG. 9, the material film 13 side (periodic nanostructure 11a corresponding to the organic EL element) of the donor sheet DS is placed on the organic function of the substrate to be transferred. Contact the membrane 23. The transferred substrate and the donor sheet are bonded together by the support mechanism of the apparatus. Further, the pressing force may be applied in the range of 0.01 MPa to 10 MPa for 1 to 60 seconds.
  • a light transmissive support plate material (not shown) can be attached.
  • the support plate material is made of glass, polycarbonate, polyester, polyethylene naphthalate, polyester sulfonate, polysulfonate, polyarylate, polyethylene terephthalate, polyacryl, polyepoxy, polyethylene, polystyrene, polyacetate or polyimide.
  • the photothermal printing apparatus is configured so that the donor sheet and the transfer target substrate are separately fixed and can be transferred respectively, and the upper and lower stages are separated from each other by a support mechanism and can be moved up and down. ing.
  • Each stage has a suction port connected to a vacuum pump, and sucks through the suction port to support the donor sheet and the transferred substrate in a stable manner. It comprises an adhesion unit for attaching the transfer substrate and the donor sheet, and a light source for patterning by scanning laser light.
  • the laser light La is irradiated from the light transmissive substrate side (the opposite side of the periodic nanostructure region) of the donor sheet DS.
  • the heat conversion layer in the donor sheet DS converts light into heat, and the light-transmitting base material partially expands due to the heat, so that the material film 13 (between the periodic nanostructures 11a).
  • the periodic optical structure 13a) having a large thickness on the periodic nanostructure 11a are in close contact with the organic functional film 23.
  • the donor sheet DS is heated by irradiating the laser beam, and the material film 13 having a periodic convex shape (periodic optical structure 13a) is transferred to the organic functional film 23 of the transfer substrate.
  • the step of heating the donor sheet includes the step of patterning by moving the transfer target with the donor sheet in contact with the fixed laser beam. By selectively irradiating with laser light, the periodic optical structure can be transferred and formed together with the light emitting layer only on the portion of the substrate to which the light emitting layer of the donor sheet is to be transferred, and a high definition panel can be produced.
  • the material film 13 of the periodic optical structure 13 a is transferred to the organic functional film 23 by peeling the light transmissive substrate 11 of the donor sheet from the transfer target substrate 21 as shown in FIG. 12.
  • the element region DV is defined.
  • the material film unevenness such as the light emitting layer is transferred from the donor sheet to the transfer substrate 21, and the optical structure can be formed of a material such as the light emitting layer.
  • the organic functional film material can be applied with high definition, and a periodic optical structure can be formed inside the organic functional film.
  • a material film such as a light-emitting layer is formed in advance on a donor sheet for each emission color and transferred to a desired location
  • the optimum periodicity for each color An optical structure can be formed on the entire surface, and alignment of each color is simple only by performing at the time of transfer, and a high-definition display element can be created.
  • FIG. 13 shows the front surface of the transferred substrate 21 having a group of three color element regions DVR, DVG, DVB arranged in a stripe shape after being separately applied with the donor sheet DS.
  • the organic thin film can be effectively used for forming a color filter used for a liquid crystal in addition to an organic EL element that requires high definition and improved light extraction efficiency by a transfer method.
  • the organic functional films of the electron transport layer 14 and the electron injection layer 15 are sequentially laminated on the periodic optical structure 13 a in the element region DV.
  • an organic functional film having a refractive index different from the refractive index of the light emitting layer material that is, an electron transport layer or an electron injection layer (or an already formed hole transport layer or positive layer).
  • a refractive index difference occurs at the interface with the hole injection layer).
  • the cathode 33 is deposited on the electron injection layer 15 in the element region DV.
  • a plurality of organic EL elements each composed of an organic functional film including a light emitting layer are arranged in a matrix by performing passivation on the film forming side of the transfer substrate 21 and further sealing with a sealing can.
  • the passive drive organic EL display panel thus obtained is obtained.
  • a partially enlarged rear view of such a panel is shown in FIG.
  • This organic EL display panel has a plurality of lower electrodes 22 (anode: transparent electrode), an organic functional film 23, and a plurality of upper electrodes 33 (cathode: metal electrodes) intersecting the lower electrode 22 on the substrate 21.
  • the display region DR is composed of a plurality of organic EL element light-emitting portions EP that are sequentially stacked and formed at the intersections of the upper and lower electrodes.
  • the upper electrode 33 is connected to the wiring electrode 19 through the connection portion Cn.
  • the above describes a simple matrix organic EL display panel in which a stripe-shaped transparent electrode is provided on a substrate, an organic functional film is laminated, and a stripe-shaped metal electrode that intersects the transparent electrode is provided.
  • the present invention can also be applied to manufacture of an active matrix display type organic EL display panel using a substrate on which an active element such as a TFT to be connected is formed.
  • the donor sheet in which the periodic steps (periodic nanostructures 11 a) having a rectangular cross-sectional shape are formed has been described.
  • the periodic nanostructures 11 a formed on the donor sheet It is also effective that the shape of the periodic nanostructure 11a is not triangular but the cross-sectional shape of the periodic nanostructure 11a is triangular, as shown in FIG. 17, or the cross-sectional shape of the periodic nanostructure 11a is truncated triangular as shown in FIG. .
  • the thickness of the material film 13 laminated on the top of the periodic nanostructure 11a is thinner than that laminated on the collar, so that the thick material film
  • the periodic optical structure 13a is formed between the periodic nanostructures 11a.
  • the material film of the material to be transferred formed on the periodic optical structure 13a is not only the light emitting layer but also other inorganic materials such as a metal compound, and any material constituting the organic EL element including the organic functional film. It may consist of organic matter.
  • Examples of the organic light emitting material formed by the organic light emitting layer include tris (8-quinolate) aluminum complex, tris (4-methyl-8-quinolato) aluminum complex, bis (8-quinolate) zinc complex, tris (4-methyl-5).
  • -Trifluoromethyl-8-quinolate) aluminum complex tris (4-methyl-5-cyano-8-quinolate) aluminum complex, bis (2-methyl-5-trifluoromethyl-8-quinolinolate) [4- (4 -Cyanophenyl) phenolate] aluminum complex, bis (2-methyl-5-cyano-8-quinolinolato) [4- (4-cyanophenyl) phenolate] aluminum complex
  • tris (8-quinolinolato) scandium complex 9,10-diaryl Anthracene derivatives, pyrene, coronene, perylene, rubre 1,1,4,4-tetraphenylbutadiene, bis [8- (para-tosyl) aminoquinoline] zinc complex and cadmium
  • Organic light-emitting materials formed by the organic light-emitting layer include coumarin phosphors, perylene phosphors, pyran phosphors, anthrone phosphors, porphyrin phosphors, quinacridone phosphors, N, N′-dialkyl Low molecular weight luminescent materials such as substituted quinacridone phosphors, naphthalimide phosphors, N, N′-diaryl substituted pyrrolopyrrole phosphors, and phosphorescent phosphors of Ir complexes dispersed in polymers. Can be used.
  • As the polymer polystyrene, polymethyl methacrylate, and polyvinyl carbazole can be used.
  • poly (2-decyloxy-1,4-phenylene) DO-PPP
  • poly [2,5-bis- [2- (N, N, N— PPP derivatives such as triethylammonium) ethoxy] -1,4-phenyl-alt-1,4-phenyllene] dibromide poly [2- (2′-ethylhexyloxy) -5-methoxy-1,4-phenylenevinylene ] (MEH-PPV), poly [5-methoxy- (2-propanoxysulfonide) -1,4-phenylenevinylene] (MPS-PPV), poly [2,5-bis- (hexyloxy) -1 , 4-phenylene- (1-cyanovinylene)] (CN-PPV), poly (9,9-dioctylfluorene) (PDAF), polyspirofluorene, etc. It may be.
  • Examples of the hole transport material for forming the hole transport layer include copper phthalocyanine, metal phthalocyanines and metal-free phthalocyanines of tetra (t-butyl) copper phthalocyanine, quinacridone compounds, 1,1-bis (4-di-p- Tolylaminophenyl) cyclohexane, N, N′-diphenyl-N, N′-bis (3-methylphenyl) -1,1′-biphenyl-4,4′-diamine, N, N′-di (1-naphthyl) ) —N, N′-diphenyl-1,1′-biphenyl-4,4′-diamine, an aromatic amine-based low-molecular hole injection / transport material, polyaniline, polythiophene, polyvinylcarbazole, poly (3,4-ethylene) A polymer hole transport material such as a mixture of dioxythiophene) and polystyrenesulfonic
  • Examples of the electron transport material for forming the electron transport layer include 2- (4-bifinylyl) -5- (4-tert-butylphenyl) -1,3,4-oxadiazole, 2,5-bis (1 -Naphthyl) -1,3,4-oxadiazole, oxadiazole derivatives, bis (10-hydroxybenzo [h] quinolinolato) beryllium complexes, and triazole compounds can be used.
  • the position of the structure can be determined at the time of positioning for transferring the light emitting layer, and can be easily formed.
  • the low degree of freedom of the solvent because the present invention is formed on the donor sheet, it is sufficient to select a solvent that does not dissolve the substrate of the donor sheet, A wide range of options.
  • the light emitting layer is transferred and the optical structure is formed at the same time. What is necessary is just to change, and high definition is easy.
  • the optical structure is formed by nanoimprint or the like, the target periodic optical structure can be created with good reproducibility.
  • the present invention can form the light emitting layer and the optical structure in the same process, and when forming the optical structure, nanoimprinting is also easy, so it is excellent in mass productivity. ing.
  • it is not necessary to make a periodic optical structure on a substrate it is possible to use a conventional substrate, and it is not necessary to select a substrate.
  • the present invention is a method of extracting light confined in the organic functional film, and the periodic convex shape of the material film emits light. Since it is close to the region, light emission does not blur and sharpness that is a characteristic of the organic EL element is not lost. That is, since the present invention forms an optical structure in the organic functional film, it is possible to extract light that propagates and is lost in the organic functional film.
  • the periodic optical structure is formed in the organic functional film in the present invention, both the top emission and the bottom emission are effective, and the present invention is easy to form in the organic functional film.

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Abstract

La présente invention porte sur un procédé de fabrication d'un panneau d'affichage électroluminescent (EL) organique, comprenant une pluralité d'éléments EL organiques disposés sous forme de matrice sur un substrat, l'élément EL organique comprenant une anode et une cathode, un stratifié d'un film fonctionnel organique comprenant une couche luminescente contenant un composé organique, qui, lors d'une injection de courant, émet une électroluminescence, est maintenu entre l'anode et la cathode. Le procédé comprend l'étape de formation d'une feuille donneuse comprenant un matériau de base transparent à la lumière, une pluralité de structures optiques convexes disposées sur la surface principale du matériau de base transparent à la lumière, et une couche de conversion thermique et d'un film de matériau, d'un matériau devant être transféré, disposé sur la surface principale du matériau de base transparent à la lumière et la structure optique, l'étape de fourniture d'un substrat de transfert, l'étape consistant à amener la feuille de matériau dans la feuille donneuse en contact avec la partie supérieure d'une partie d'un substrat de transfert, l'étape d'application de lumière à partir du côté matériau de base transparent à la lumière de la feuille donneuse pour chauffer la feuille donneuse, et l'étape de séparation d'une feuille donneuse à partir du substrat de transfert et de transfert de la forme concavo-convexe du film de matériau correspondant à la structure optique sur le substrat de transfert.
PCT/JP2008/061643 2008-06-26 2008-06-26 Panneau d'affichage électroluminescent organique et son procédé de fabrication Ceased WO2009157077A1 (fr)

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Cited By (1)

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JP2015521234A (ja) * 2012-05-02 2015-07-27 ネーデルランセ オルハニサチエ フォール トゥーヘパスト−ナツールウェーテンシャッペルック オンデルズク テーエヌオーＮｅｄｅｒｌａｎｄｓｅ Ｏｒｇａｎｉｓａｔｉｅ ｖｏｏｒ ｔｏｅｇｅｐａｓｔ−ｎａｔｕｕｒｗｅｔｅｎｓｃｈａｐｐｅｌｉｊｋ ｏｎｄｅｒｚｏｅｋ ＴＮＯ ドナーシート及び光誘起前方転写による製造方法

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JP2015521234A (ja) * 2012-05-02 2015-07-27 ネーデルランセ オルハニサチエ フォール トゥーヘパスト−ナツールウェーテンシャッペルック オンデルズク テーエヌオーＮｅｄｅｒｌａｎｄｓｅ Ｏｒｇａｎｉｓａｔｉｅ ｖｏｏｒ ｔｏｅｇｅｐａｓｔ−ｎａｔｕｕｒｗｅｔｅｎｓｃｈａｐｐｅｌｉｊｋ ｏｎｄｅｒｚｏｅｋ ＴＮＯ ドナーシート及び光誘起前方転写による製造方法

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