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WO2009025362A1 - 気化器、気化器を含む原料ガス供給システム及びこれを用いた成膜装置 - Google Patents

気化器、気化器を含む原料ガス供給システム及びこれを用いた成膜装置 Download PDF

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Publication number
WO2009025362A1
WO2009025362A1 PCT/JP2008/065025 JP2008065025W WO2009025362A1 WO 2009025362 A1 WO2009025362 A1 WO 2009025362A1 JP 2008065025 W JP2008065025 W JP 2008065025W WO 2009025362 A1 WO2009025362 A1 WO 2009025362A1
Authority
WO
WIPO (PCT)
Prior art keywords
vaporizer
main body
vaporizing
material gas
paths
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/065025
Other languages
English (en)
French (fr)
Inventor
Sumi Tanaka
Tomohito Komatsu
Munehisa Futamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to KR1020107003980A priority Critical patent/KR101237138B1/ko
Priority to CN2008801040070A priority patent/CN101785089B/zh
Publication of WO2009025362A1 publication Critical patent/WO2009025362A1/ja
Priority to US12/710,890 priority patent/US20100186673A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/06—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of high energy impulses, e.g. magnetic energy
    • B23K20/08—Explosive welding
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4486—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by producing an aerosol and subsequent evaporation of the droplets or particles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Nozzles (AREA)

Abstract

　構造が簡単で熱効率を向上させることが可能な気化器を提供する。気化器８は、液体原料をミスト状に噴出するノズルユニット７２と、原料ミストを気化させて原料ガスを形成する複数の気化通路７４を有する気化ユニット７６と、原料ガスを後段へ送り出す排出ヘッド７８と、を有する。気化ユニットは、気化通路が形成された気化ユニット本体１０８と、気化ユニット本体１０８を収容する本体収容容器１１０と、気化通路を通過する原料ミストを加熱するヒータ１１２と、本体収容容器の両端部に設けられた連結部材１１４，１１６と、を有している。気化ユニット本体および本体収容容器は、連結部材の構成材料よりも熱伝導性が高い材料により構成されている。本体収容容器の端部と連結部材とは爆着により接合されている。
PCT/JP2008/065025 2007-08-23 2008-08-22 気化器、気化器を含む原料ガス供給システム及びこれを用いた成膜装置 Ceased WO2009025362A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020107003980A KR101237138B1 (ko) 2007-08-23 2008-08-22 기화기, 기화기를 포함하는 원료 가스 공급 시스템 및 이것을 이용한 성막 장치
CN2008801040070A CN101785089B (zh) 2007-08-23 2008-08-22 汽化器、包括汽化器的原料气体供给系统和使用它的成膜装置
US12/710,890 US20100186673A1 (en) 2007-08-23 2010-02-23 Vaporizer, material gas supply system including vaporizer and film forming apparatus using such system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007217640A JP5141141B2 (ja) 2007-08-23 2007-08-23 気化器、気化器を用いた原料ガス供給システム及びこれを用いた成膜装置
JP2007-217640 2007-08-23

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/710,890 Continuation US20100186673A1 (en) 2007-08-23 2010-02-23 Vaporizer, material gas supply system including vaporizer and film forming apparatus using such system

Publications (1)

Publication Number Publication Date
WO2009025362A1 true WO2009025362A1 (ja) 2009-02-26

Family

ID=40378262

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/065025 Ceased WO2009025362A1 (ja) 2007-08-23 2008-08-22 気化器、気化器を含む原料ガス供給システム及びこれを用いた成膜装置

Country Status (5)

Country Link
US (1) US20100186673A1 (ja)
JP (1) JP5141141B2 (ja)
KR (1) KR101237138B1 (ja)
CN (1) CN101785089B (ja)
WO (1) WO2009025362A1 (ja)

Families Citing this family (21)

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Publication number Priority date Publication date Assignee Title
US7883745B2 (en) 2007-07-30 2011-02-08 Micron Technology, Inc. Chemical vaporizer for material deposition systems and associated methods
CN102395382A (zh) * 2009-05-11 2012-03-28 株式会社爱科因托特 蒸汽消毒装置
KR100962475B1 (ko) 2009-11-20 2010-06-10 주식회사 태한이엔씨 기화기
WO2012086728A1 (ja) * 2010-12-21 2012-06-28 株式会社渡辺商行 気化器
JP2012204791A (ja) * 2011-03-28 2012-10-22 Tokyo Electron Ltd 気化装置、ガス供給装置及びこれを用いた成膜装置
CN104064638B (zh) * 2014-06-26 2017-12-15 圆融光电科技有限公司 Led透明导电层的粗化方法及真空设备
JP6535210B2 (ja) * 2015-05-13 2019-06-26 公益財団法人鉄道総合技術研究所 超電導フライホイール蓄電システム用超電導磁気軸受
JP6054470B2 (ja) 2015-05-26 2016-12-27 株式会社日本製鋼所 原子層成長装置
JP6054471B2 (ja) 2015-05-26 2016-12-27 株式会社日本製鋼所 原子層成長装置および原子層成長装置排気部
JP5990626B1 (ja) * 2015-05-26 2016-09-14 株式会社日本製鋼所 原子層成長装置
CN108291292B (zh) * 2015-11-30 2020-06-26 株式会社爱发科 蒸汽释放装置及成膜装置
JP6675865B2 (ja) * 2015-12-11 2020-04-08 株式会社堀場エステック 液体材料気化装置
KR101721681B1 (ko) * 2016-03-24 2017-03-30 (주)티티에스 기화기
KR102065145B1 (ko) * 2016-05-27 2020-01-10 주식회사 뉴파워 프라즈마 증기를 이용한 대상물 처리 장치
US9928983B2 (en) * 2016-06-30 2018-03-27 Varian Semiconductor Equipment Associates, Inc. Vaporizer for ion source
CN108277477B (zh) * 2018-01-25 2020-08-28 沈阳拓荆科技有限公司 液体汽化装置及使用该液体汽化装置的半导体处理系统
JP7201372B2 (ja) * 2018-09-11 2023-01-10 株式会社アルバック アクリル気化器
JP7500584B2 (ja) * 2019-02-05 2024-06-17 アプライド マテリアルズ インコーポレイテッド マルチチャネルスプリッタスプール
CN113692641B (zh) * 2019-04-17 2024-12-03 株式会社威尔康 气化器和其制造方法
US12331401B2 (en) 2020-03-23 2025-06-17 Horiba Stec, Co., Ltd. Vaporization system
JP7605424B2 (ja) * 2020-05-29 2024-12-24 株式会社日本マイクロニクス 薄膜固体二次電池の製造方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169693U (ja) * 1984-10-12 1986-05-13
JPH038330A (ja) * 1989-06-06 1991-01-16 Hitachi Electron Eng Co Ltd 液状半導体形成材料気化供給装置
JPH0929463A (ja) * 1995-07-24 1997-02-04 Asahi Chem Ind Co Ltd 継 手
JP2002217181A (ja) * 2001-01-19 2002-08-02 Japan Steel Works Ltd:The 半導体原料供給用気化器
JP2004273766A (ja) * 2003-03-07 2004-09-30 Watanabe Shoko:Kk 気化装置及びそれを用いた成膜装置並びに気化方法及び成膜方法
JP2005539371A (ja) * 2002-07-19 2005-12-22 エーエスエム アメリカ インコーポレイテッド 基板処理用バブラー
JP2006100737A (ja) * 2004-09-30 2006-04-13 Tokyo Electron Ltd 気化器、成膜装置及び成膜方法

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US4924936A (en) * 1987-08-05 1990-05-15 M&T Chemicals Inc. Multiple, parallel packed column vaporizer
US6409839B1 (en) * 1997-06-02 2002-06-25 Msp Corporation Method and apparatus for vapor generation and film deposition
JPWO2002058141A1 (ja) * 2001-01-18 2004-05-27 株式会社渡邊商行 気化器及びそれを用いた各種装置並びに気化方法
JP3982402B2 (ja) * 2002-02-28 2007-09-26 東京エレクトロン株式会社 処理装置及び処理方法
JP4585852B2 (ja) * 2002-07-30 2010-11-24 エーエスエム アメリカ インコーポレイテッド 基板処理システム、基板処理方法及び昇華装置
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JP5019822B2 (ja) * 2005-08-19 2012-09-05 モーディーン・マニュファクチャリング・カンパニー 中間の蒸気過熱経路を備える水蒸発器

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169693U (ja) * 1984-10-12 1986-05-13
JPH038330A (ja) * 1989-06-06 1991-01-16 Hitachi Electron Eng Co Ltd 液状半導体形成材料気化供給装置
JPH0929463A (ja) * 1995-07-24 1997-02-04 Asahi Chem Ind Co Ltd 継 手
JP2002217181A (ja) * 2001-01-19 2002-08-02 Japan Steel Works Ltd:The 半導体原料供給用気化器
JP2005539371A (ja) * 2002-07-19 2005-12-22 エーエスエム アメリカ インコーポレイテッド 基板処理用バブラー
JP2004273766A (ja) * 2003-03-07 2004-09-30 Watanabe Shoko:Kk 気化装置及びそれを用いた成膜装置並びに気化方法及び成膜方法
JP2006100737A (ja) * 2004-09-30 2006-04-13 Tokyo Electron Ltd 気化器、成膜装置及び成膜方法

Also Published As

Publication number Publication date
CN101785089A (zh) 2010-07-21
CN101785089B (zh) 2012-06-13
JP5141141B2 (ja) 2013-02-13
JP2009054655A (ja) 2009-03-12
US20100186673A1 (en) 2010-07-29
KR101237138B1 (ko) 2013-02-25
KR20100065286A (ko) 2010-06-16

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