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WO2009013985A1 - 多自由度ステージ制御装置 - Google Patents

多自由度ステージ制御装置 Download PDF

Info

Publication number
WO2009013985A1
WO2009013985A1 PCT/JP2008/062101 JP2008062101W WO2009013985A1 WO 2009013985 A1 WO2009013985 A1 WO 2009013985A1 JP 2008062101 W JP2008062101 W JP 2008062101W WO 2009013985 A1 WO2009013985 A1 WO 2009013985A1
Authority
WO
WIPO (PCT)
Prior art keywords
degree
control apparatus
stage control
freedom stage
freedom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/062101
Other languages
English (en)
French (fr)
Inventor
Takashi Mamba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Yaskawa Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp, Yaskawa Electric Manufacturing Co Ltd filed Critical Yaskawa Electric Corp
Priority to JP2009524435A priority Critical patent/JP5168281B2/ja
Publication of WO2009013985A1 publication Critical patent/WO2009013985A1/ja
Priority to US12/686,386 priority patent/US8148931B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/21—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device
    • G05B19/23—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control
    • G05B19/231—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control the positional error is used to control continuously the servomotor according to its magnitude
    • G05B19/232—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control the positional error is used to control continuously the servomotor according to its magnitude with speed feedback only
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37309—Selecting a desired sensor structure
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49257—Six or more linear drives to position x y z table
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49288—Three linear actuators to position x y table

Landscapes

  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Position Or Direction (AREA)
  • Preparation Of Compounds By Using Micro-Organisms (AREA)

Abstract

　多自由度ステージ制御装置において、複数のセンサ構成の中から所望のセンサ構成を選択し、選択されたセンサ構成に対応する位置演算式を使用して制御を行う。
PCT/JP2008/062101 2007-07-25 2008-07-03 多自由度ステージ制御装置 Ceased WO2009013985A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009524435A JP5168281B2 (ja) 2007-07-25 2008-07-03 多自由度ステージ制御装置
US12/686,386 US8148931B2 (en) 2007-07-25 2010-01-13 Multi-degree-of-freedom stage control system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007193720 2007-07-25
JP2007-193720 2007-07-25

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/686,386 Continuation US8148931B2 (en) 2007-07-25 2010-01-13 Multi-degree-of-freedom stage control system

Publications (1)

Publication Number Publication Date
WO2009013985A1 true WO2009013985A1 (ja) 2009-01-29

Family

ID=40281243

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/062101 Ceased WO2009013985A1 (ja) 2007-07-25 2008-07-03 多自由度ステージ制御装置

Country Status (4)

Country Link
US (1) US8148931B2 (ja)
JP (1) JP5168281B2 (ja)
TW (1) TWI444798B (ja)
WO (1) WO2009013985A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011177010A (ja) * 2010-02-02 2011-09-08 Gm Global Technology Operations Inc 直列弾性アクチュエータの力およびインピーダンスのロバスト制御のための構成

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201409194A (zh) * 2012-08-22 2014-03-01 Chiuan Yan Technology Co Ltd 對位機構的回歸控制器
TWI566063B (zh) * 2015-02-17 2017-01-11 明基能源技術股份有限公司 系統之控制方法
US10135470B2 (en) * 2017-03-16 2018-11-20 Honeywell International Inc. System and method to auto-configure a transmitter for a sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0553622A (ja) * 1991-08-29 1993-03-05 Honda Motor Co Ltd サーボモータの多軸制御コントローラ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11110044A (ja) * 1997-09-29 1999-04-23 Canon Inc 微動位置決め制御装置
JP2001159901A (ja) 1999-12-03 2001-06-12 Yaskawa Electric Corp 発振検出方法
JP4166157B2 (ja) * 2004-01-07 2008-10-15 三菱電機株式会社 電動機制御装置
JP4427736B2 (ja) 2004-08-31 2010-03-10 株式会社安川電機 多自由度制御装置の逆変換方法
JP5387570B2 (ja) * 2008-04-18 2014-01-15 株式会社安川電機 多自由度アクチュエータおよびステージ装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0553622A (ja) * 1991-08-29 1993-03-05 Honda Motor Co Ltd サーボモータの多軸制御コントローラ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011177010A (ja) * 2010-02-02 2011-09-08 Gm Global Technology Operations Inc 直列弾性アクチュエータの力およびインピーダンスのロバスト制御のための構成
JP2014140300A (ja) * 2010-02-02 2014-07-31 Gm Global Technology Operations Inc 直列弾性アクチュエータの力およびインピーダンスのロバスト制御のための構成

Also Published As

Publication number Publication date
JPWO2009013985A1 (ja) 2010-09-30
TWI444798B (zh) 2014-07-11
JP5168281B2 (ja) 2013-03-21
US8148931B2 (en) 2012-04-03
US20100109593A1 (en) 2010-05-06
TW200921316A (en) 2009-05-16

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