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WO2009008151A1 - Semiconductor device and method for adjusting characteristics of semiconductor device - Google Patents

Semiconductor device and method for adjusting characteristics of semiconductor device Download PDF

Info

Publication number
WO2009008151A1
WO2009008151A1 PCT/JP2008/001798 JP2008001798W WO2009008151A1 WO 2009008151 A1 WO2009008151 A1 WO 2009008151A1 JP 2008001798 W JP2008001798 W JP 2008001798W WO 2009008151 A1 WO2009008151 A1 WO 2009008151A1
Authority
WO
WIPO (PCT)
Prior art keywords
semiconductor device
recording
circuit
process fluctuation
information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/001798
Other languages
French (fr)
Japanese (ja)
Inventor
Masanori Ito
Hisataka Nakabayashi
Kuniyasu Asano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp filed Critical Panasonic Corp
Publication of WO2009008151A1 publication Critical patent/WO2009008151A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37224—Inspect wafer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

A first recording circuit (110) is arranged for recording process fluctuation information which indicates process fluctuation during manufacture. A second recording circuit (140) is arranged for recording fluctuation characteristic data of at least use conditions or external environment (substrate characteristics). A control circuit (130) controls output current performance of an external IF circuit (120) by using process fluctuation information and process fluctuation control information.
PCT/JP2008/001798 2007-07-09 2008-07-04 Semiconductor device and method for adjusting characteristics of semiconductor device Ceased WO2009008151A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007179934 2007-07-09
JP2007-179934 2007-07-09

Publications (1)

Publication Number Publication Date
WO2009008151A1 true WO2009008151A1 (en) 2009-01-15

Family

ID=40228344

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/001798 Ceased WO2009008151A1 (en) 2007-07-09 2008-07-04 Semiconductor device and method for adjusting characteristics of semiconductor device

Country Status (1)

Country Link
WO (1) WO2009008151A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009139101A1 (en) * 2008-05-13 2009-11-19 パナソニック株式会社 Electronic equipment system and semiconductor integrated circuit controller
JP2016025157A (en) * 2014-07-17 2016-02-08 ラピスセミコンダクタ株式会社 Semiconductor device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0697240A (en) * 1992-07-09 1994-04-08 Advanced Micro Devices Inc Device including integrated circuit on die characterized by die specific information
JP2003517193A (en) * 1999-11-18 2003-05-20 ピー・デイ・エフ ソリユーシヨンズ インコーポレイテツド Product Yield Prediction System and Method Using Device and Near-Process Characteristic Analysis Vehicle
JP2005032291A (en) * 2003-07-07 2005-02-03 Renesas Technology Corp Semiconductor memory device
JP2007134701A (en) * 2005-11-08 2007-05-31 Internatl Business Mach Corp <Ibm> Method and device for memorizing circuit calibration information

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0697240A (en) * 1992-07-09 1994-04-08 Advanced Micro Devices Inc Device including integrated circuit on die characterized by die specific information
JP2003517193A (en) * 1999-11-18 2003-05-20 ピー・デイ・エフ ソリユーシヨンズ インコーポレイテツド Product Yield Prediction System and Method Using Device and Near-Process Characteristic Analysis Vehicle
JP2005032291A (en) * 2003-07-07 2005-02-03 Renesas Technology Corp Semiconductor memory device
JP2007134701A (en) * 2005-11-08 2007-05-31 Internatl Business Mach Corp <Ibm> Method and device for memorizing circuit calibration information

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009139101A1 (en) * 2008-05-13 2009-11-19 パナソニック株式会社 Electronic equipment system and semiconductor integrated circuit controller
US8072832B2 (en) 2008-05-13 2011-12-06 Panasonic Corporation Electronic equipment system and semiconductor integrated circuit controller
JP2016025157A (en) * 2014-07-17 2016-02-08 ラピスセミコンダクタ株式会社 Semiconductor device

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