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WO2009006972A1 - Dispositif de production d'un jet de plasma - Google Patents

Dispositif de production d'un jet de plasma Download PDF

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Publication number
WO2009006972A1
WO2009006972A1 PCT/EP2008/004605 EP2008004605W WO2009006972A1 WO 2009006972 A1 WO2009006972 A1 WO 2009006972A1 EP 2008004605 W EP2008004605 W EP 2008004605W WO 2009006972 A1 WO2009006972 A1 WO 2009006972A1
Authority
WO
WIPO (PCT)
Prior art keywords
discharge tube
counter electrode
plasma jet
segmentation
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2008/004605
Other languages
German (de)
English (en)
Inventor
Eckart Theophile
Werner Krammel
Václav BADURA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maschinenfabrik Reinhausen GmbH
Scheubeck GmbH and Co
Original Assignee
Maschinenfabrik Reinhausen GmbH
Maschinenfabrik Reinhausen Gebrueder Scheubeck GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Maschinenfabrik Reinhausen GmbH, Maschinenfabrik Reinhausen Gebrueder Scheubeck GmbH and Co KG filed Critical Maschinenfabrik Reinhausen GmbH
Priority to EP08759132A priority Critical patent/EP2168409B1/fr
Publication of WO2009006972A1 publication Critical patent/WO2009006972A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/28—Cooling arrangements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube

Definitions

  • the invention relates to a device for generating a plasma jet.
  • Such a device is known from the not yet prepublished German priority application DE 10 2006 012 100.7-54. It has a discharge tube made of dielectric material, in the interior of which an inner, rod-shaped, solid electrode is arranged to extend in the longitudinal direction. A second electrode comprises the discharge tube. This can be done directly or at a radial distance. To generate the plasma jet, the inner rod-shaped electrode is set to high voltage while the outer electrode is grounded. Due to the conditions of the electric field, this leads to a dielectrically impeded discharge and preferably to an ignition of the plasma at the tip of the inner rod-shaped electrode.
  • a cap made of dielectric material is provided at the end of the discharge tube.
  • the plasma generated in this case is "cold plasma” under atmospheric pressure, which has a low gas temperature, up to a maximum of several hundred degrees Celsius.
  • a cooling system for plasma welding torch for reducing the temperature in which case serves as a coolant water and wherein a plurality of spatially and electrically separate units are provided as cooling circuits.
  • a disadvantage of this known cooling system is the enormous structural complexity that must be operated in order to prevent a potential carryover between the different potentials of the tungsten electrode and the plasma nozzle of the plasma torch. Also, it is not desirable in the course of reliability, in an electrical system in which very high electrical currents and voltages occur to use an electrically conductive fluid, here water, as a coolant.
  • the object of the invention is therefore to provide a device for generating a plasma jet of the type mentioned above with an additional cooling arrangement, in which there is no thermal overload despite high coupled power. Furthermore, it is an object of the invention to find a structurally simple and operationally safe solution for it.
  • the device according to the invention with a cooling arrangement has a counterelectrode which is designed in such a way that it forms a surface segmentation or enlargement, for example in the ignition region of the plasma.
  • a heat sink is arranged on the counterelectrode.
  • an electrical temperature sensor is provided on the cooling arrangement, which is part of a control loop and ensures that the thermal load of the system does not exceed a previously defined limit temperature.
  • the heat sink is designed so that it both as a holder of the device in automated manufacturing equipment serves, as well as the inclusion of the temperature sensor allows.
  • FIG. 1 shows a device according to the invention for generating a plasma jet with a cooling arrangement in a lateral sectional view
  • Fig. 2 shows a cooling arrangement according to the invention for such
  • FIG. 1 It shows a discharge tube 1 of dielectric material, inside which a central, rod-shaped center electrode 2 is arranged, which simultaneously embodies a vertical central axis.
  • a second electrode 3, which forms the counterelectrode to the central center electrode 2 is rotationally symmetrical, so that the dielectric discharge tube 1, the central center electrode 2 and the counterelectrode 3 form a coaxial structure with an open end face on which the plasma jet, ie the actual plasma beam is generated.
  • the central center electrode 2 is set to high voltage, while the outer counter electrode 3 is grounded.
  • the counterelectrode 3 On the side facing away from the central center electrode 2, the counterelectrode 3 has an encircling, radial segmentation 5 in the form of cooling fins in the region of the plasma coupling.
  • an electrical temperature sensor 9 is integrated, which is part of an electrical control circuit and ensures that the thermal load of the system does not exceed a previously defined limit temperature and if necessary, a forced shutdown of the system can be done as a safety measure.
  • a deflection unit 10 is arranged, which leads an incoming air volume flow 11 to the opening of the heat sink 6.
  • the air volume flow 11 is variably adjustable and freely definable for the respective cooling demand. For example, if a higher power coupled into the device to get a more intense plasma jet, this inevitably causes a higher thermal stress on the components, especially in the field of plasma coupling. To counteract this effect, the air volume flow 11 must be increased in order to ensure sufficient cooling of the components by means of the heat sink 6 according to the invention and the circumferential segmentation 5 of the counter electrode 3. Thus, it is possible to drive a temperature curve controlled and defined in cooperation with the temperature sensor 9 for the respective cooling requirement.
  • the heat sink 6 and the deflection unit 10 are designed such that they serve both as a machine holder of the device in automated manufacturing facilities, as well as allow the recording of the temperature sensor 9 at the same time. Furthermore, a dielectric end cap 4 is attached to the discharge tube 1 at the open end side, which is fastened by screwing to the counter electrode 3. The end cap 4 is z. Example of Teflon or other plastic with appropriate thermal and mechanical stability, but alternatively also of ceramic. By attaching the end cap 4, a flashover, ie a direct arc between the central center electrode 2 and the grounded counter electrode 3 is prevented, since the distance between these two electrodes is now electrically much larger. At the same time serves the end cap 4 in this embodiment as a thermal heat storage, which is forcibly cooled by the contact closure with the heat sink 6.
  • FIG. 2 shows a cooling arrangement according to the invention for a device for generating a plasma jet in a sectional view.
  • the center electrode 2 is visible, which is constructed concentrically with the discharge tube 1 and the counter electrode 3 and is operatively connected.
  • the air volume flow 11 flowing in via the air supply channel 12 and still bundled in this area is guided via the deflection unit 10 to the air inlet 7 of the heat sink 6 and split onto the existing segments of the cooling fins 5 of the counter electrode 3.
  • FIG. 2 the course of the air convection 13 for a segment of the cooling fins 5 is visible by way of example.
  • the incoming air at the air inlet 7 flows over the segment of the cooling fin 5 and the counter electrode 3, heats up by absorbing the thermal energy generated during the plasma coupling and then flows through a possible outlet of the openings of the air outlet 8.
  • the incoming air at the air inlet 7 flows over the segment of the cooling fin 5 and the counter electrode 3, heats up by absorbing the thermal energy generated during the plasma coupling and then flows through a possible outlet of the openings of the air outlet 8.
  • the invention also an opposite direction of the air flow possible.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Fluid Mechanics (AREA)
  • Plasma Technology (AREA)

Abstract

L'invention concerne un dispositif de production d'un jet de plasma avec un tube de décharge en matériau diélectrique afin d'atteindre une production de plasma diélectriquement entravée. Pour augmenter l'intensité de courant réglable, l'invention prévoit un dispositif réfrigérant qui possède une segmentation de la contre-électrode externe avec laquelle un corps réfrigérant posé de l'extérieur et pouvant de son côté être traversé par de l'air collabore.
PCT/EP2008/004605 2007-07-12 2008-06-10 Dispositif de production d'un jet de plasma Ceased WO2009006972A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP08759132A EP2168409B1 (fr) 2007-07-12 2008-06-10 Dispositif de production d'un jet de plasma

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007032496.2 2007-07-12
DE102007032496A DE102007032496B3 (de) 2007-07-12 2007-07-12 Vorrichtung zur Erzeugung eines Plasma-Jets

Publications (1)

Publication Number Publication Date
WO2009006972A1 true WO2009006972A1 (fr) 2009-01-15

Family

ID=39739298

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/004605 Ceased WO2009006972A1 (fr) 2007-07-12 2008-06-10 Dispositif de production d'un jet de plasma

Country Status (3)

Country Link
EP (1) EP2168409B1 (fr)
DE (1) DE102007032496B3 (fr)
WO (1) WO2009006972A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117460142A (zh) * 2023-09-22 2024-01-26 北京核力同创科技有限公司 一种多峰场负氢离子源引出结构

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI432228B (zh) * 2010-09-07 2014-04-01 Univ Nat Cheng Kung 微電漿產生裝置及其滅菌系統
DE102013017109A1 (de) * 2013-10-15 2015-04-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur Herstellung von Partikeln in einem Atmosphärendruckplasma
DE102015204753A1 (de) 2015-03-17 2016-10-20 Tesa Se Niedertemperatur-Plasma-Behandlung
DE102016203413A1 (de) 2016-03-02 2017-09-07 Tesa Se Erhöhung der Abzugskraft durch selektive Plasmavorbehandlung
DE102022124117A1 (de) * 2022-09-20 2024-03-21 Caphenia Gmbh Plasma-Reaktor

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2651185A1 (de) * 1976-11-10 1978-05-11 Nuc Weld Gmbh Kuehleinrichtung bei einem plasmabrenner
US4902871A (en) * 1987-01-30 1990-02-20 Hypertherm, Inc. Apparatus and process for cooling a plasma arc electrode
US4912361A (en) * 1988-07-18 1990-03-27 Electro-Plasma, Inc. Plasma gun having improved anode cooling system
WO2001076328A2 (fr) * 2000-03-31 2001-10-11 Thermal Dynamics Corporation Chalumeau a arc de plasma et procede permettant d'ameliorer la duree de vie des parties de ce chalumeau a arc de plasma
US6800336B1 (en) * 1999-10-30 2004-10-05 Foernsel Peter Method and device for plasma coating surfaces
US20070122562A1 (en) * 2005-11-30 2007-05-31 Honeywell International, Inc. Solid-free-form fabrication process and apparatus including in-process workpiece cooling

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BE566144A (fr) * 1957-03-27
FR1322260A (fr) * 1962-02-14 1963-03-29 Saint Gobain Chalumeau à flamme de plasma
US4659899A (en) * 1984-10-24 1987-04-21 The Perkin-Elmer Corporation Vacuum-compatible air-cooled plasma device
US5008511C1 (en) * 1990-06-26 2001-03-20 Univ British Columbia Plasma torch with axial reactant feed
TW315340B (fr) * 1995-02-13 1997-09-11 Komatsu Mfg Co Ltd
DE19828633B4 (de) * 1998-06-26 2004-07-29 Wirth, Aloisia Lichtbogenschweiß- oder -schneidbrenner sowie Kühlsystem, Plasmadüsen bzw. WIG-Elektrodenspannzangen, Spannsystem für Plasmaelektrodennadeln u. verfahrensübergreifendes Konstruktionsprinzip hierfür
DE102005042955A1 (de) * 2005-09-01 2007-03-15 Tbi Industries Gmbh Plasmaschweiß- und Schneidbrenner mit einem Kühlsystem

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2651185A1 (de) * 1976-11-10 1978-05-11 Nuc Weld Gmbh Kuehleinrichtung bei einem plasmabrenner
US4902871A (en) * 1987-01-30 1990-02-20 Hypertherm, Inc. Apparatus and process for cooling a plasma arc electrode
US4912361A (en) * 1988-07-18 1990-03-27 Electro-Plasma, Inc. Plasma gun having improved anode cooling system
US6800336B1 (en) * 1999-10-30 2004-10-05 Foernsel Peter Method and device for plasma coating surfaces
WO2001076328A2 (fr) * 2000-03-31 2001-10-11 Thermal Dynamics Corporation Chalumeau a arc de plasma et procede permettant d'ameliorer la duree de vie des parties de ce chalumeau a arc de plasma
US20070122562A1 (en) * 2005-11-30 2007-05-31 Honeywell International, Inc. Solid-free-form fabrication process and apparatus including in-process workpiece cooling

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
TOSHIFUJI J ET AL: "Cold arc-plasma jet under atmospheric pressure for surface modification", SURFACE & COATINGS TECHNOLOGY ELSEVIER SWITZERLAND, vol. 171, no. 1-3, 1 July 2003 (2003-07-01), pages 302 - 306, XP002496307, ISSN: 0257-8972 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117460142A (zh) * 2023-09-22 2024-01-26 北京核力同创科技有限公司 一种多峰场负氢离子源引出结构
CN117460142B (zh) * 2023-09-22 2024-04-26 国电投核力同创(北京)科技有限公司 一种多峰场负氢离子源引出结构

Also Published As

Publication number Publication date
EP2168409A1 (fr) 2010-03-31
DE102007032496B3 (de) 2009-01-29
EP2168409B1 (fr) 2012-12-26

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