[go: up one dir, main page]

WO2009066555A1 - Scan probe microscope and probe unit for scan probe microscope - Google Patents

Scan probe microscope and probe unit for scan probe microscope Download PDF

Info

Publication number
WO2009066555A1
WO2009066555A1 PCT/JP2008/069879 JP2008069879W WO2009066555A1 WO 2009066555 A1 WO2009066555 A1 WO 2009066555A1 JP 2008069879 W JP2008069879 W JP 2008069879W WO 2009066555 A1 WO2009066555 A1 WO 2009066555A1
Authority
WO
WIPO (PCT)
Prior art keywords
probe
sample
cantilever
scan
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/069879
Other languages
French (fr)
Japanese (ja)
Inventor
Masahiro Watanabe
Shuichi Baba
Toshihiko Nakata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of WO2009066555A1 publication Critical patent/WO2009066555A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G01Q30/025—Optical microscopes coupled with SPM

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

While driving the probe of a scan probe microscope at a very high speed, the contact between the probe and a sample is optically detected, and quick probe detection adapted to samples, such as a large semiconductor wafer and a flat display substrate, which cannot be driven is enabled. A parallel light beam for optically detecting the contact between the probe and the sample and optically vibrating the probe is directed to a region below the objective for observing the sample and focused on a fixed point on a cantilever by means of a micro focusing lens so attached below the objective as to be driven with the cantilever, thus irradiating the sample with the light beam. Therefore, even when the cantilever is moved, the fixed point on the cantilever can be irradiated at all times. Further, since the focusing lens is very small, the sample can be scanned with the cantilever at high speed without influencing the dynamic characteristics of the cantilever drive unit so as to observe and measure the sample.
PCT/JP2008/069879 2007-11-22 2008-10-31 Scan probe microscope and probe unit for scan probe microscope Ceased WO2009066555A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007302474A JP2009128139A (en) 2007-11-22 2007-11-22 Scanning probe microscope and probe unit for scanning probe microscope
JP2007-302474 2007-11-22

Publications (1)

Publication Number Publication Date
WO2009066555A1 true WO2009066555A1 (en) 2009-05-28

Family

ID=40667380

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/069879 Ceased WO2009066555A1 (en) 2007-11-22 2008-10-31 Scan probe microscope and probe unit for scan probe microscope

Country Status (2)

Country Link
JP (1) JP2009128139A (en)
WO (1) WO2009066555A1 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014158290A1 (en) 2013-03-14 2014-10-02 Aleksander Labuda Optical beam positioning unit for atomic force microscope
EP2972065A4 (en) * 2013-03-14 2016-11-30 Aleksander Labuda OPTICAL BEAM POSITIONING UNIT FOR AN ATOMIC FORCE MICROSCOPE
WO2019002870A1 (en) * 2017-06-28 2019-01-03 Infinitesima Limited Scanning probe microscope
CN110361565A (en) * 2018-03-26 2019-10-22 日本株式会社日立高新技术科学 Scanning Probe Microscope and Its Scanning Method
EP2810082B1 (en) * 2012-01-31 2020-03-18 Infinitesima Limited Probe actuation
EP4560323A1 (en) * 2023-11-22 2025-05-28 Oxford Instruments Nanotechnology Tools Limited Accurate vector nano-electromechanics

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101975873B (en) * 2010-09-29 2012-09-26 华中科技大学 Microscopic white light interferometry-based nano probe device
JP6229914B2 (en) * 2013-08-06 2017-11-15 オックスフォード インストルメンツ アサイラム リサーチ，インコーポレイテッド Light beam positioning unit for atomic force microscope
EP2913681A1 (en) * 2014-02-28 2015-09-02 Infinitesima Limited Probe system with multiple actuation locations

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5763767A (en) * 1994-02-03 1998-06-09 Molecular Imaging Corp. Atomic force microscope employing beam-tracking
JPH10506457A (en) * 1994-07-28 1998-06-23 ジェネラル ナノテクノロジー エルエルシー Scanning probe microscope equipment
WO2005015570A1 (en) * 2003-08-11 2005-02-17 Japan Science And Technology Agency Probe for probe microscope using transparent substrate, method of producing the same, and probe microscope device
JP2006329973A (en) * 2005-04-28 2006-12-07 Hitachi Ltd Scanning probe microscope and sample observation method and device manufacturing method using the same
JP7074735B2 (en) * 2019-09-27 2022-05-24 矢崎エナジーシステム株式会社 Cables and cable manufacturing methods

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2524574B2 (en) * 1985-03-27 1996-08-14 オリンパス光学工業株式会社 Scanning optical microscope
US5298975A (en) * 1991-09-27 1994-03-29 International Business Machines Corporation Combined scanning force microscope and optical metrology tool
JPH05173088A (en) * 1991-12-25 1993-07-13 Olympus Optical Co Ltd Optical waveguide driving device
JP3174465B2 (en) * 1994-11-28 2001-06-11 松下電器産業株式会社 Atomic force microscope

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5763767A (en) * 1994-02-03 1998-06-09 Molecular Imaging Corp. Atomic force microscope employing beam-tracking
JPH10506457A (en) * 1994-07-28 1998-06-23 ジェネラル ナノテクノロジー エルエルシー Scanning probe microscope equipment
WO2005015570A1 (en) * 2003-08-11 2005-02-17 Japan Science And Technology Agency Probe for probe microscope using transparent substrate, method of producing the same, and probe microscope device
JP2006329973A (en) * 2005-04-28 2006-12-07 Hitachi Ltd Scanning probe microscope and sample observation method and device manufacturing method using the same
JP7074735B2 (en) * 2019-09-27 2022-05-24 矢崎エナジーシステム株式会社 Cables and cable manufacturing methods

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2810082B1 (en) * 2012-01-31 2020-03-18 Infinitesima Limited Probe actuation
WO2014158290A1 (en) 2013-03-14 2014-10-02 Aleksander Labuda Optical beam positioning unit for atomic force microscope
EP2972065A4 (en) * 2013-03-14 2016-11-30 Aleksander Labuda OPTICAL BEAM POSITIONING UNIT FOR AN ATOMIC FORCE MICROSCOPE
WO2019002870A1 (en) * 2017-06-28 2019-01-03 Infinitesima Limited Scanning probe microscope
US10928418B2 (en) 2017-06-28 2021-02-23 Infinitesima Limited Scanning probe microscope
CN110361565A (en) * 2018-03-26 2019-10-22 日本株式会社日立高新技术科学 Scanning Probe Microscope and Its Scanning Method
CN110361565B (en) * 2018-03-26 2024-03-22 日本株式会社日立高新技术科学 Scanning probe microscope and scanning method thereof
EP4560323A1 (en) * 2023-11-22 2025-05-28 Oxford Instruments Nanotechnology Tools Limited Accurate vector nano-electromechanics
WO2025109304A1 (en) * 2023-11-22 2025-05-30 Oxford Instruments Nanotechnology Tools Limited Accurate vector nano-electromechanics

Also Published As

Publication number Publication date
JP2009128139A (en) 2009-06-11

Similar Documents

Publication Publication Date Title
WO2009066555A1 (en) Scan probe microscope and probe unit for scan probe microscope
CN102768015B (en) Fluorescence response follow-up pinhole microscopic confocal measuring device
CN106461553B (en) Measurement device and method for determining mass and/or mechanical properties of biological systems
EP3151053B1 (en) Focusing device, microscope device, focusing method, and control program
CN104111241B (en) Fluorescence co-focusing detection means based on linear scanning
JP2015161527A5 (en)
CN103837515A (en) A confocal automatic adjustment device
CA2639511A1 (en) Method and apparatus for analysing a dry-chemical test element
CN108508238A (en) Single molecule force spectroscopy device and method are tested based on double drive AFM system
JP6025074B2 (en) Thermal radiation measurement device for measurement object and thermal radiation measurement method for measurement object
JPH09318506A (en) Petri dish mounting equipment
JP2010038868A (en) Optical viscosity measuring system
CN118671956A (en) Single-molecule plasmon optical tweezers system integrating quantum tunneling sensing
US20170018399A1 (en) Device for correlative scanning transmission electron microscopy (stem) and light microscopy
JP2011174791A (en) Fluorescence inspection device and fluorescence inspection method
US9063335B2 (en) Apparatus and method for examining a specimen by means of probe microscopy
Tala et al. Label-free visualization of type IV pili dynamics by interferometric scattering microscopy
WO2006090593A1 (en) Displacement detection mechanism for scanning probe microscope and scanning probe microscope
JP4448534B2 (en) Scanning probe microscope
KR101241438B1 (en) Optical microscopy employing controllable driving micromirror
KR101101988B1 (en) Proximity Scanning Optoacoustic Measuring Device
JP2005157146A5 (en)
WO2010147296A1 (en) Afm measuring method and system thereof
CN111307268B (en) Laser confocal/differential confocal vibration parameter measuring method
JP2011008189A (en) Focus detecting device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08852171

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08852171

Country of ref document: EP

Kind code of ref document: A1