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WO2009060875A1 - Procédé de fabrication de panneaux de verre - Google Patents

Procédé de fabrication de panneaux de verre Download PDF

Info

Publication number
WO2009060875A1
WO2009060875A1 PCT/JP2008/070142 JP2008070142W WO2009060875A1 WO 2009060875 A1 WO2009060875 A1 WO 2009060875A1 JP 2008070142 W JP2008070142 W JP 2008070142W WO 2009060875 A1 WO2009060875 A1 WO 2009060875A1
Authority
WO
WIPO (PCT)
Prior art keywords
glass plate
glass
bubbles
manufacturing
plate manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/070142
Other languages
English (en)
Japanese (ja)
Inventor
Motoichi Iga
Yutaka Kuroiwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to CN200880115288XA priority Critical patent/CN101855182B/zh
Priority to KR1020107010093A priority patent/KR101271292B1/ko
Priority to JP2009540069A priority patent/JP5347969B2/ja
Publication of WO2009060875A1 publication Critical patent/WO2009060875A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C03B29/02Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a discontinuous way
    • C03B29/025Glass sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C03B29/04Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way
    • C03B29/06Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way with horizontal displacement of the products
    • C03B29/08Glass sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B32/00Thermal after-treatment of glass products not provided for in groups C03B19/00, C03B25/00 - C03B31/00 or C03B37/00, e.g. crystallisation, eliminating gas inclusions or other impurities; Hot-pressing vitrified, non-porous, shaped glass products
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/007Other surface treatment of glass not in the form of fibres or filaments by thermal treatment
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/60Substrates
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691Handling of masks or workpieces
    • G03F7/70791Large workpieces, e.g. glass substrates for flat panel displays or solar panels

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Thermal Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Optics & Photonics (AREA)
  • Sustainable Development (AREA)
  • Liquid Crystal (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laser Beam Processing (AREA)

Abstract

L'invention porte sur un procédé de fabrication de panneaux de verre pour substrat d'écran et en particulier pour panneaux plats pour substrat d'écran ou pour photomasques, exempts de bulles lesquelles posent un problème alors que le panneau de verre doit être utilisé sans présenter de boursouflures de surface, ni de contraintes résiduelles et ni de biréfringence lorsqu'il est frappé par un rayon laser. Le procédé se caractérise en ce que les bulles du panneau de verre (ou d'un ruban de verre) en cours de fabrication sont réduites ou résorbées lorsqu'on leur applique un faisceau laser d'une longueur d'onde pour laquelle l'absorptance du panneau (ou du ruban) est de 30% ou plus à la température où la viscosité du verre se situe entre 107 et 1014.5 dPa s.
PCT/JP2008/070142 2007-11-08 2008-11-05 Procédé de fabrication de panneaux de verre Ceased WO2009060875A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN200880115288XA CN101855182B (zh) 2007-11-08 2008-11-05 玻璃板制造方法
KR1020107010093A KR101271292B1 (ko) 2007-11-08 2008-11-05 유리판의 제조 방법
JP2009540069A JP5347969B2 (ja) 2007-11-08 2008-11-05 ガラス板の製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-290652 2007-11-08
JP2007290652 2007-11-08

Publications (1)

Publication Number Publication Date
WO2009060875A1 true WO2009060875A1 (fr) 2009-05-14

Family

ID=40625763

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/070142 Ceased WO2009060875A1 (fr) 2007-11-08 2008-11-05 Procédé de fabrication de panneaux de verre

Country Status (5)

Country Link
JP (1) JP5347969B2 (fr)
KR (1) KR101271292B1 (fr)
CN (1) CN101855182B (fr)
TW (1) TWI400202B (fr)
WO (1) WO2009060875A1 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011065336A1 (fr) * 2009-11-24 2011-06-03 旭硝子株式会社 Procédé de production d'un corps stratifié
JP2015061809A (ja) * 2013-08-20 2015-04-02 日本電気硝子株式会社 繊維状ガラス組成物の製造方法、繊維状ガラス組成物の製造装置、繊維状ガラス組成物、およびガラス素材
JP2016011219A (ja) * 2014-06-27 2016-01-21 旭硝子株式会社 ガラス基板の切断方法
CN112279499A (zh) * 2020-10-22 2021-01-29 科立视材料科技有限公司 一种用于控制玻璃带应力的方法和装置
WO2023096759A1 (fr) * 2021-11-23 2023-06-01 Corning Incorporated Systèmes et procédés d'amélioration de stries de verre par chauffage haute résolution
WO2024129476A1 (fr) * 2022-12-15 2024-06-20 Corning Incorporated Procédés de fabrication d'un ruban de verre
EP4534493A1 (fr) * 2023-06-14 2025-04-09 Carl Zeiss SMT GmbH Procédé de fabrication d'une structure creuse thermorégulée dans un substrat au moyen d'un faisceau lumineux de traitement

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012077542A1 (fr) * 2010-12-09 2012-06-14 旭硝子株式会社 Substrat en verre
JP6439723B2 (ja) * 2016-03-09 2018-12-19 信越化学工業株式会社 合成石英ガラス基板の製造方法
CN110491993B (zh) * 2019-07-24 2022-06-10 武汉华星光电半导体显示技术有限公司 一种pi基板的制备方法及其显示装置
JP2023531448A (ja) * 2020-06-19 2023-07-24 コーニング インコーポレイテッド ガラスリボンの製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0616440A (ja) * 1992-06-30 1994-01-25 Sharp Corp 透明板表面の欠陥修正方法
JP2003012346A (ja) * 2001-06-27 2003-01-15 Central Glass Co Ltd 板ガラスの着色方法
JP2004035333A (ja) * 2002-07-04 2004-02-05 National Institute Of Advanced Industrial & Technology ガラス材料の加工方法
WO2006112415A1 (fr) * 2005-04-15 2006-10-26 Asahi Glass Company, Limited Procede de reduction du diametre de bulles presentes a l’interieur d’une plaque de verre

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0616440A (ja) * 1992-06-30 1994-01-25 Sharp Corp 透明板表面の欠陥修正方法
JP2003012346A (ja) * 2001-06-27 2003-01-15 Central Glass Co Ltd 板ガラスの着色方法
JP2004035333A (ja) * 2002-07-04 2004-02-05 National Institute Of Advanced Industrial & Technology ガラス材料の加工方法
WO2006112415A1 (fr) * 2005-04-15 2006-10-26 Asahi Glass Company, Limited Procede de reduction du diametre de bulles presentes a l’interieur d’une plaque de verre

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011065336A1 (fr) * 2009-11-24 2011-06-03 旭硝子株式会社 Procédé de production d'un corps stratifié
CN102639327A (zh) * 2009-11-24 2012-08-15 旭硝子株式会社 层叠体的制造方法
JP2015061809A (ja) * 2013-08-20 2015-04-02 日本電気硝子株式会社 繊維状ガラス組成物の製造方法、繊維状ガラス組成物の製造装置、繊維状ガラス組成物、およびガラス素材
JP2016011219A (ja) * 2014-06-27 2016-01-21 旭硝子株式会社 ガラス基板の切断方法
CN112279499A (zh) * 2020-10-22 2021-01-29 科立视材料科技有限公司 一种用于控制玻璃带应力的方法和装置
WO2023096759A1 (fr) * 2021-11-23 2023-06-01 Corning Incorporated Systèmes et procédés d'amélioration de stries de verre par chauffage haute résolution
WO2024129476A1 (fr) * 2022-12-15 2024-06-20 Corning Incorporated Procédés de fabrication d'un ruban de verre
EP4534493A1 (fr) * 2023-06-14 2025-04-09 Carl Zeiss SMT GmbH Procédé de fabrication d'une structure creuse thermorégulée dans un substrat au moyen d'un faisceau lumineux de traitement

Also Published As

Publication number Publication date
CN101855182A (zh) 2010-10-06
KR101271292B1 (ko) 2013-06-04
CN101855182B (zh) 2012-12-05
JPWO2009060875A1 (ja) 2011-03-24
TW200927682A (en) 2009-07-01
TWI400202B (zh) 2013-07-01
JP5347969B2 (ja) 2013-11-20
KR20100086471A (ko) 2010-07-30

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