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WO2009060875A1 - Glass plate manufacturing method - Google Patents

Glass plate manufacturing method Download PDF

Info

Publication number
WO2009060875A1
WO2009060875A1 PCT/JP2008/070142 JP2008070142W WO2009060875A1 WO 2009060875 A1 WO2009060875 A1 WO 2009060875A1 JP 2008070142 W JP2008070142 W JP 2008070142W WO 2009060875 A1 WO2009060875 A1 WO 2009060875A1
Authority
WO
WIPO (PCT)
Prior art keywords
glass plate
glass
bubbles
manufacturing
plate manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/070142
Other languages
French (fr)
Japanese (ja)
Inventor
Motoichi Iga
Yutaka Kuroiwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to KR1020107010093A priority Critical patent/KR101271292B1/en
Priority to CN200880115288XA priority patent/CN101855182B/en
Priority to JP2009540069A priority patent/JP5347969B2/en
Publication of WO2009060875A1 publication Critical patent/WO2009060875A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C03B29/02—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a discontinuous way
    • C03B29/025—Glass sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C03B29/04—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way
    • C03B29/06—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way with horizontal displacement of the products
    • C03B29/08—Glass sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B32/00—Thermal after-treatment of glass products not provided for in groups C03B19/00, C03B25/00 - C03B31/00 or C03B37/00, e.g. crystallisation, eliminating gas inclusions or other impurities; Hot-pressing vitrified, non-porous, shaped glass products
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/007—Other surface treatment of glass not in the form of fibres or filaments by thermal treatment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/60—Substrates
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Thermal Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Optics & Photonics (AREA)
  • Sustainable Development (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Liquid Crystal (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laser Beam Processing (AREA)

Abstract

A glass plate manufacturing method for manufacturing a glass plate for display substrates, especially a glass plate for flat panel display substrates, or a glass plate for photomasks, free of bubbles which are a problem when the glass plate is used without causing any local bulge on the surface of the glass plate and any local residual stress and birefringence within the glass plate when a laser beam is projected to the glass plate. The method is characterized in that bubbles are reduced or extinguished by applying to the bubbles in a glass plate (or a glass ribbon at its glass plate manufacturing process) a laser beam with a wavelength to which the absorptance of the glass plate (or the glass ribbon) is 30% or more at a temperature at which the viscosity of the glass lies in the range from 107 to 1014.5 dPa s.
PCT/JP2008/070142 2007-11-08 2008-11-05 Glass plate manufacturing method Ceased WO2009060875A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020107010093A KR101271292B1 (en) 2007-11-08 2008-11-05 Glass plate manufacturing method
CN200880115288XA CN101855182B (en) 2007-11-08 2008-11-05 Glass plate manufacturing method
JP2009540069A JP5347969B2 (en) 2007-11-08 2008-11-05 Manufacturing method of glass plate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007290652 2007-11-08
JP2007-290652 2007-11-08

Publications (1)

Publication Number Publication Date
WO2009060875A1 true WO2009060875A1 (en) 2009-05-14

Family

ID=40625763

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/070142 Ceased WO2009060875A1 (en) 2007-11-08 2008-11-05 Glass plate manufacturing method

Country Status (5)

Country Link
JP (1) JP5347969B2 (en)
KR (1) KR101271292B1 (en)
CN (1) CN101855182B (en)
TW (1) TWI400202B (en)
WO (1) WO2009060875A1 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011065336A1 (en) * 2009-11-24 2011-06-03 旭硝子株式会社 Method for producing laminate body
JP2015061809A (en) * 2013-08-20 2015-04-02 日本電気硝子株式会社 Fibrous glass composition manufacturing method, fibrous glass composition manufacturing device, fibrous glass composition, and glass raw material
JP2016011219A (en) * 2014-06-27 2016-01-21 旭硝子株式会社 Method for cutting glass substrate
CN112279499A (en) * 2020-10-22 2021-01-29 科立视材料科技有限公司 Method and apparatus for controlling glass ribbon stress
WO2023096759A1 (en) * 2021-11-23 2023-06-01 Corning Incorporated Systems and methods for glass streak improvement via high resolution heating
WO2024129476A1 (en) * 2022-12-15 2024-06-20 Corning Incorporated Methods for manufacturing a glass ribbon
EP4534493A1 (en) * 2023-06-14 2025-04-09 Carl Zeiss SMT GmbH Method for producing a temperature-controlling hollow structure in a substrate using a processing light beam

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130124954A (en) * 2010-12-09 2013-11-15 아사히 가라스 가부시키가이샤 Glass substrate
JP6439723B2 (en) * 2016-03-09 2018-12-19 信越化学工業株式会社 Method for producing synthetic quartz glass substrate
CN110491993B (en) * 2019-07-24 2022-06-10 武汉华星光电半导体显示技术有限公司 Preparation method of PI substrate and display device thereof
CN115734947A (en) * 2020-06-19 2023-03-03 康宁公司 Method of making a glass ribbon

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0616440A (en) * 1992-06-30 1994-01-25 Sharp Corp Method for correcting defect on surface of transparent plate
JP2003012346A (en) * 2001-06-27 2003-01-15 Central Glass Co Ltd Sheet glass coloring method
JP2004035333A (en) * 2002-07-04 2004-02-05 National Institute Of Advanced Industrial & Technology Processing method of glass material
WO2006112415A1 (en) * 2005-04-15 2006-10-26 Asahi Glass Company, Limited Method for reducing diameter of bubble existing inside of glass plate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0616440A (en) * 1992-06-30 1994-01-25 Sharp Corp Method for correcting defect on surface of transparent plate
JP2003012346A (en) * 2001-06-27 2003-01-15 Central Glass Co Ltd Sheet glass coloring method
JP2004035333A (en) * 2002-07-04 2004-02-05 National Institute Of Advanced Industrial & Technology Processing method of glass material
WO2006112415A1 (en) * 2005-04-15 2006-10-26 Asahi Glass Company, Limited Method for reducing diameter of bubble existing inside of glass plate

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011065336A1 (en) * 2009-11-24 2011-06-03 旭硝子株式会社 Method for producing laminate body
CN102639327A (en) * 2009-11-24 2012-08-15 旭硝子株式会社 Method for producing laminate body
JP2015061809A (en) * 2013-08-20 2015-04-02 日本電気硝子株式会社 Fibrous glass composition manufacturing method, fibrous glass composition manufacturing device, fibrous glass composition, and glass raw material
JP2016011219A (en) * 2014-06-27 2016-01-21 旭硝子株式会社 Method for cutting glass substrate
CN112279499A (en) * 2020-10-22 2021-01-29 科立视材料科技有限公司 Method and apparatus for controlling glass ribbon stress
WO2023096759A1 (en) * 2021-11-23 2023-06-01 Corning Incorporated Systems and methods for glass streak improvement via high resolution heating
WO2024129476A1 (en) * 2022-12-15 2024-06-20 Corning Incorporated Methods for manufacturing a glass ribbon
EP4534493A1 (en) * 2023-06-14 2025-04-09 Carl Zeiss SMT GmbH Method for producing a temperature-controlling hollow structure in a substrate using a processing light beam

Also Published As

Publication number Publication date
JPWO2009060875A1 (en) 2011-03-24
CN101855182A (en) 2010-10-06
KR101271292B1 (en) 2013-06-04
KR20100086471A (en) 2010-07-30
TW200927682A (en) 2009-07-01
CN101855182B (en) 2012-12-05
JP5347969B2 (en) 2013-11-20
TWI400202B (en) 2013-07-01

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