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WO2009052819A2 - Système optique adaptable - Google Patents

Système optique adaptable Download PDF

Info

Publication number
WO2009052819A2
WO2009052819A2 PCT/DE2008/001776 DE2008001776W WO2009052819A2 WO 2009052819 A2 WO2009052819 A2 WO 2009052819A2 DE 2008001776 W DE2008001776 W DE 2008001776W WO 2009052819 A2 WO2009052819 A2 WO 2009052819A2
Authority
WO
WIPO (PCT)
Prior art keywords
optical system
optical
temperature gradient
lenses
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2008/001776
Other languages
German (de)
English (en)
Other versions
WO2009052819A9 (fr
WO2009052819A3 (fr
Inventor
Stefan Franz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik Optical Systems GmbH
Original Assignee
Jenoptik Optical Systems GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Optical Systems GmbH filed Critical Jenoptik Optical Systems GmbH
Publication of WO2009052819A2 publication Critical patent/WO2009052819A2/fr
Publication of WO2009052819A3 publication Critical patent/WO2009052819A3/fr
Publication of WO2009052819A9 publication Critical patent/WO2009052819A9/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0081—Simple or compound lenses having one or more elements with analytic function to create variable power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B15/00—Optical objectives with means for varying the magnification
    • G02B15/02—Optical objectives with means for varying the magnification by changing, adding, or subtracting a part of the objective, e.g. convertible objective
    • G02B15/04—Optical objectives with means for varying the magnification by changing, adding, or subtracting a part of the objective, e.g. convertible objective by changing a part

Definitions

  • JP 61 097 608 A describes a lens frame made of two materials with different coefficients of expansion. With a change in temperature, the lens is deformed in such a way that its refractive power change is compensated.
  • Active systems usually employ mechanical adjustment devices with motor drives or piezo actuators which can compensate for thermally induced changes, in particular the focus state, or make focal length changes. It is disadvantageous that mechanical adjusting devices are subject to wear, whereby the reliability can be impaired.
  • the task is to provide an active system that is less susceptible to faults and can compensate for temperature fluctuations over a wide temperature range by varying different thermally dependent imaging properties and at the same time being able to react flexibly to changes in temperature.
  • an adaptable optical system comprising in at least one socket at least one optical component consisting of a material having a thermally dependent refractive index and / or coefficients of expansion and means for introducing a temperature gradient into the optical system as a temperature difference between optical components or in at least one optical component, wherein refractive power or correction state of the optical system are variable by the temperature gradient to be introduced by a redistribution of the amount of heat directly in an opti see component and / or an exchange of the amount of heat between optical components.
  • the refractive power or the correction state of the optical system can be stabilized.
  • the optical system contains as optical components at least one pair of optical lenses with thermally influenceable refractive index and the temperature gradient to be introduced Temperature difference between the lenses is formed, with a homogeneous temperature distribution is to prevail within each lens.
  • the lens pair consisting of a positive power lens and a negative power lens mounted in separate sockets
  • only one Peltier element is provided as means for introducing the temperature gradient which is in thermal contact with both sockets around one of the lenses to cool over one of the sockets and heat the other of the lenses over the other of the sockets.
  • the waste heat from a lens can flow into an adjacent lens.
  • tempering elements which can heat and cool.
  • One possible choice may fall on a Peltier element. If these transport the amount of heat to be transported in the direction of the socket, the control loop will react approximately equally fast when heating the lens and during cooling.
  • the essential difference becomes clear, for example, in comparison with the prior art from FIG. 2 in DE19827607A1.
  • the amount of heat extracted from one lens is fed to another (adjacent) lens.
  • the advantage of this procedure becomes clear with an example: The refractive power of a doublet from a collecting and a dissipating lens is to be thermally changed by two units. According to the prior art,
  • a lens is heated with a Peltier element by two temperature units (eg the convergent lens) or cooled (eg the scattering lens). 2.) A lens is heated with one Peltier element around one temperature unit and the other is cooled with a second Peltier element around a temperature unit. In a first approximation, two units of loss line are always introduced from the Peltier element (s) into the system. In 1.) a lens is two temperature units apart from the ambient temperature. In order to be able to maintain this larger total temperature difference, additional power loss is necessary at the Peltier element. According to the inventive solution, the temperature differences from the environment are only at one temperature unit. In 2.) 2 Peltier element are necessary, which lead to higher equipment costs. According to the arrangement of Fig.
  • tempering elements are used according to the invention, which can heat and cool. Peltier elements have an advantage over an alternatively usable heater for heating one of the two lenses, since they produce a higher temperature difference in the system with the same energy input into the optical subsystem. If these transport the amount of heat to be transported in the direction of the socket, the control loop will react approximately equally fast when heating the lens and during cooling. But a Peltier element brings its own power loss in the
  • Another embodiment of the invention provides as an optical component in the optical system, a spherical or parabolic mirror of a mirror substrate with thermally dependent expansion coefficient, wherein the introduced into the mirror substrate temperature gradient is provided for mirror deformation.
  • the mirror On its rear surface, as a means for introducing the temperature gradient, the mirror has a heating and / or cooling element structure for locally differentiated temperature control, which in its geometrical arrangement and in the control is designed such that a desired temperature distribution can be introduced into the mirror substrate.
  • the introduction of heat can be done in different ways.
  • a heating element structure with resistance heating elements can be provided, which can cause a locally differentiated heating of the mirror substrate by heat conduction.
  • the optical components are designed to be transmissive, wherein the means for introducing the temperature gradient are in thermal contact with at least one optical component.
  • the transmitting optical components may be formed as optical lenses or as plane plates.
  • Suitable means for introducing the temperature gradient are both individual heating and / or cooling elements as well as structured heaters, which may be provided at the periphery, on the surface or in the volume of the optical component.
  • the invention may further be configured such that an optical component comprises a plane plate pair consisting of a first and a second plane plate, wherein the means for introducing the temperature gradient in the central region between the two plane plates are arranged, and the socket is formed as a heat sink, whereby in the two plane plates, a temperature gradient can be generated, which is directed from the center of the plane plates to the flat plate edge.
  • an optical component comprises a plane plate pair consisting of a first and a second plane plate, wherein the means for introducing the temperature gradient in the central region between the two plane plates are arranged, and the socket is formed as a heat sink, whereby in the two plane plates, a temperature gradient can be generated, which is directed from the center of the plane plates to the flat plate edge.
  • the invention is particularly suitable for systems of optical materials with a strong temperature-dependent refractive index, such.
  • a strong temperature-dependent refractive index such as germanium or silicon suitable, which are used in infrared systems.
  • germanium or silicon suitable which are used in infrared systems.
  • an integration of the tempering in the semiconductor material offers.
  • the application of the invention is not limited exclusively to infrared systems, but is also applicable to UV systems.
  • UV systems in which z.
  • the invention is suitable for minimizing higher-order errors (aperture errors), which occur especially in the case of lenses with a large opening width.
  • z. B. to apply a pair of lenses within the lens with a temperature difference.
  • Fig. 1 shows an optical component of a lens combination of spherical or aspherical lenses, which is designed for a focus corrector
  • FIG. 2 is a qualitative representation of the course of the refractive power f and / or the spherical aberration as a function of the temperature difference between the lenses of a lens combination according to FIG. 1
  • 3 shows an adaptive optical system equipped with means for controlling the temperature gradient
  • Fig. 4 is a mirror with correction function 5 shows a qualitative representation of a phase function of the wavefront controlled by the mirror configuration according to FIG. 4
  • FIG. 7 is a qualitative representation of a phase function controlled by a phase correction element according to FIG. 6
  • FIG. 8 shows a first Peltier element arrangement for generating a temperature distribution in the optical lens
  • Fig. 1 a second tempering for UV optics
  • Fig. 1 shows an optical component consisting of two, in versions 1, 2 content Erten lenses 3, 4, of identical or different material, whose
  • Refractive index changes with temperature.
  • the two lenses 3, 4 have similar but oppositely acting refractive powers, so that the same temperature results in a refractive power of zero, whereby the optical component has optical properties that are similar to a plane plate.
  • a Peltier element 5 is introduced in the frame stack, which extends over the entire frame end face. Electrical connections 6, 7 serve to provide a controllable power supply to the Peltier element 5, which is provided to adjust via the sockets 1, 2 mutually differing temperatures in the two lenses 3, 4.
  • the temperature distribution in this embodiment should be substantially constant, that is, it should not have a significant temperature gradient in any direction. Obtained by the generated temperature difference between the two lenses 3, 4 the optical component has a refractive power different from zero, which may be positive or negative depending on the voltage applied to the Peltier element 5.
  • the Peltier element 5 as a means for temperature control due to its simultaneous cooling and heating properties significant advantages over an alternative usable heating. Since a temperature difference is to be generated between the two lenses 3, 4, these properties of the Peltier element 5 are effectively utilized, so that the thermal power to be introduced into the optical component can be reduced. Thermal coupling and insulation are suitable to perform dissipated power dissipation through a thermal contact to the outside.
  • an adaptive optical system AOS for stabilizing the refractive power or the correction state is equipped with means for controlling the rules of the temperature difference gradient, comprising a control device 8 and the lenses 3, 4, the adaptive optical system and a Area outside the adaptive optical system distributed temperature sensor 9 include.
  • the spherically or parabolically formed mirror 1 1 shown in FIG. 4 and applied to a heat sink 10 has a structure of heating and / or cooling elements 12 on its rear side.
  • the heating and / or cooling elements 12 are individually controllable to produce a desired temperature distribution on the mirror 11, about the z. B. the phase function ⁇ over the radius R corresponding to Fig. 5 can be changed.
  • the mirror 1 1 should be designed to be correspondingly thin as an adaptive component, since in this embodiment the temperature-dependent expansion coefficient of the mirror substrate is utilized.
  • adaptive components can also be transparent. This can z. Example, by the fact that transparent chromium is used as a material for a strip-shaped heating element structure for the optical infrared radiation, wherein trenches between the strips are filled with suitable optical material, for. B. similar to a usual in semiconductor processes structuring.
  • phase correction element shown in Fig. 6 are two silicon plates 13, 14, the z. B. silicon or another semiconductor to be held in a common version 15. Between the two plates 13, 14 a preferably formed as an electrical resistance heating element 16 is embedded.
  • the heating element 16 can be advantageously produced by doping the semiconductor silicon, whereby a local height structure can be avoided.
  • Transparent electrodes 17, 18 ensure the transparency of the phase correction element, in which the heating element 16 is located in the middle of the element between the plates 13, 14 joined together.
  • the version 15, which simultaneously functions as a heat sink, is held at a cooler temperature than the silicon plates 13, 14, so that a temperature gradient directed from the center of the phase correction element to the holder 15 is formed.
  • the associated phase function is shown in FIG. 7. With this phase correction element according to FIG. 6, it is possible to specifically correct opening errors.
  • heating / cooling elements as z. B. for display devices (pixels) or electrostatically deformable mirror (rings or ring sectors) are used, structure (pixels, ring sectors, o. ⁇ .) Can also be a freely programmable mapping function can be realized.
  • the Peltier element arrangements shown in FIGS. 8 and 9 are provided for producing different temperature distributions in a lens 19, 20, so that an astigmatic wavefront deformation can be brought about by a change in the refractive index gradient.
  • the Peltier elements 21, 22 are distributed in both embodiments around the lens circumference 23, 24 of the lenses 19, 22 arranged to selectively heat or cool, which is to be illustrated by a dotted outlined heat distribution. Astigmatism is adjustable within certain limits in strength and orientation.
  • the Peltier elements 21 in FIG. 8 are in thermal contact with the lens periphery 23 with both thermally effective sides
  • the Peltier elements 22 in FIG. 9 are thermally short-circuited on one side via a mounting ring 25 and only on the respective other thermally effective side with the lens periphery 24 connected to set the required nominal temperature in the lens can.
  • the redistribution of heat directly in a component is shown in FIG. 8 according to the invention.
  • Peltier elements 21, 22 and the lens periphery 23, 24 are heat contact elements 26, 27, which are applied by soldering on superficial metallizations of the lens periphery 23, 24 or by means of putty or thermal paste on the lens circumference 23, 24. It is advantageous that Peltier elements (21, 22) are provided, which are in thermal contact with the lens periphery (23, 24) of the optical lens (19, 20) at both ends and have no significant mechanical three-contact with mounting parts or the housing.
  • UV optics are usually held in low-voltage versions, which essentially have only a punctiform contact with the optical elements, whereby a temperature over the socket is unfavorable. Therefore, in lens combination according to FIG. 10 and 1 1, the grasping of lenses 28 - 32 and the tempering functionally separated. In the embodiment according to FIG. 10, it is provided to heat only one of the lenses 30 with heating wire 33 wound around the lens in a circumferential manner. By attaching a temperature sensor 34, 35 to the lens 30 to be tempered and at least one further point on the lens 36, a control circuit can be constructed, as already described with reference to the embodiment of FIG. 3.
  • FIG. 11 shows a temperature control by means of Peltier elements 37, in which a temperature difference between the optical lenses 31, 32 held in sockets 38, 39 is shown is introduced via thermal contact elements 40, which are in thermal contact with the Linsenumgang of the lenses 31, 32 and carry the Peltier elements 37.
  • the contact elements may be formed as soft cuffs. With a soft cuff, the Peltier element 37 can be supported directly by the two lenses 31, 32, which are to be thermally influenced. There are no problems fitting the elements into the lens housing because there is no contact there. This results in a clear separation of functions between the elements for tempering and holding the lens.
  • Temperature sensors 41, 42 on the lenses 31, 32 provide the prerequisite for regulating the temperature difference or the heat exchange between the two lenses 31, 32.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

L'invention concerne un système optique adaptable et a pour but d'obtenir un système actif, peu sensible aux perturbations, au moyen duquel il est possible de faire varier différemment des propriétés de reproduction thermiquement dépendantes, afin de pouvoir compenser des oscillations de température dans un large éventail de température. Le système optique adaptable renferme, dans au moins une forme d'exécution, au moins un composant optique constitué par un matériau à indice de réfraction et/ou à coefficient de dilatation thermiquement dépendant, et des moyens d'introduire un gradient de température dans le système optique, sous forme de différence de température entre des composants optiques ou dans au moins un composant optique. L'invention est caractérisée en ce que, du fait des gradients de température introduits, on peut faire varier la réfringence ou l'état de correction du système optique, en effectuant une redistribution de la quantité de chaleur, directement dans un composant optique et/ou un échange de la quantité de chaleur entre des composants optiques. Une variante particulièrement avantageuse sur le plan énergétique consiste à combiner des éléments de refroidissement et des éléments chauffants.
PCT/DE2008/001776 2007-10-24 2008-10-24 Système optique adaptable Ceased WO2009052819A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007051291.2 2007-10-24
DE200710051291 DE102007051291B4 (de) 2007-10-24 2007-10-24 Adaptierbares optisches System

Publications (3)

Publication Number Publication Date
WO2009052819A2 true WO2009052819A2 (fr) 2009-04-30
WO2009052819A3 WO2009052819A3 (fr) 2009-07-09
WO2009052819A9 WO2009052819A9 (fr) 2009-09-24

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2008/001776 Ceased WO2009052819A2 (fr) 2007-10-24 2008-10-24 Système optique adaptable

Country Status (2)

Country Link
DE (1) DE102007051291B4 (fr)
WO (1) WO2009052819A2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107272188A (zh) * 2017-07-31 2017-10-20 信利光电股份有限公司 一种变焦镜头及电子设备
CN107948513A (zh) * 2017-11-30 2018-04-20 信利光电股份有限公司 一种变焦摄像模组及其变焦方法
US20210389547A1 (en) * 2018-10-09 2021-12-16 Lg Innotek Co., Ltd Liquid lens

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DE102011084117A1 (de) 2011-10-07 2013-04-11 Carl Zeiss Smt Gmbh Reflektives optisches Element für den EUV-Wellenlängenbereich, Verfahren zur Erzeugung und zur Korrektur eines solchen Elements, Projektionsobjektiv für die Mikrolithographie mit einem solchen Element und Projektionsbelichtungsanlage für die Mikrolithographie mit einem solchen Projektionsobjektiv
US9606419B2 (en) 2014-03-21 2017-03-28 Fundació Institut De Ciències Fotòniques Adaptive photothermal lens
US10274648B2 (en) * 2014-05-28 2019-04-30 Fundació Institut De Ciències Fotòniques Adaptive thermal micro lens
DE102015116962A1 (de) * 2015-10-06 2017-04-06 Connaught Electronics Ltd. Kamera mit einer Linse und einer Heizeinheit zum Heizen der Linse, und Kraftfahrzeug
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DE102017217121A1 (de) * 2017-09-26 2019-03-28 Robert Bosch Gmbh Anordnung eines optischen Systems und Temperierungsverfahren
DE102018211596A1 (de) 2018-07-12 2020-01-16 Carl Zeiss Smt Gmbh Verfahren zur Herstellung eines reflektierenden optischen Elementes einer Projektionsbelichtungsanlage und reflektierendes optisches Element für eine Projektionsbelichtungsanlage, Projektionsobjektiv und Projektionsbelichtungsanlage
DE102019132003A1 (de) * 2019-04-12 2020-10-15 Jenoptik Optical Systems Gmbh Optische Einheit und Verfahren zum Betreiben einer optischen Einheit
DE102020203753A1 (de) 2020-03-24 2021-09-30 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die Halbleiterlithographie
DE102020203750A1 (de) 2020-03-24 2021-09-30 Carl Zeiss Smt Gmbh Vorrichtung zur Erfassung einer Temperatur, Anlage zur Herstellung eines optischen Elementes und Verfahren zur Herstellung eines optischen Elementes
DE102022200976A1 (de) 2022-01-31 2023-01-05 Carl Zeiss Smt Gmbh Kalibrierkörper und Verfahren zur Kalibrierung
DE102022210037A1 (de) 2022-09-23 2024-03-28 Carl Zeiss Smt Gmbh Anordnung zum Tempern mindestens eines Teilbereichs eines optischen Elementes
GB202309720D0 (en) * 2023-06-28 2023-08-09 Univ College Dublin National Univ Of Ireland Adjustable optical element
DE102023208563A1 (de) 2023-09-06 2025-03-06 Carl Zeiss Smt Gmbh Bearbeitung eines optischen Elements für eine Projektionsbelichtungsanlage
DE102024109474A1 (de) * 2024-04-04 2025-10-09 TRUMPF Laser SE Verfahren und Laserbearbeitungsanlage zur Beeinflussung eines Astigmatismus in einem Laserstrahl

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Publication number Priority date Publication date Assignee Title
CN107272188A (zh) * 2017-07-31 2017-10-20 信利光电股份有限公司 一种变焦镜头及电子设备
CN107272188B (zh) * 2017-07-31 2020-03-10 信利光电股份有限公司 一种变焦镜头及电子设备
CN107948513A (zh) * 2017-11-30 2018-04-20 信利光电股份有限公司 一种变焦摄像模组及其变焦方法
US20210389547A1 (en) * 2018-10-09 2021-12-16 Lg Innotek Co., Ltd Liquid lens
US12124103B2 (en) * 2018-10-09 2024-10-22 Corning Incorporated Liquid lens

Also Published As

Publication number Publication date
DE102007051291B4 (de) 2010-02-11
WO2009052819A9 (fr) 2009-09-24
DE102007051291A1 (de) 2009-04-30
WO2009052819A3 (fr) 2009-07-09

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