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WO2009052805A2 - Élément buse, filtre et/ou pour le positionnement - Google Patents

Élément buse, filtre et/ou pour le positionnement Download PDF

Info

Publication number
WO2009052805A2
WO2009052805A2 PCT/DE2008/001732 DE2008001732W WO2009052805A2 WO 2009052805 A2 WO2009052805 A2 WO 2009052805A2 DE 2008001732 W DE2008001732 W DE 2008001732W WO 2009052805 A2 WO2009052805 A2 WO 2009052805A2
Authority
WO
WIPO (PCT)
Prior art keywords
opening
coating
nozzle
element according
base body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2008/001732
Other languages
German (de)
English (en)
Other versions
WO2009052805A3 (fr
Inventor
Lutz Weber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thinxxs Microtechnology GmbH
Original Assignee
Thinxxs Microtechnology GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thinxxs Microtechnology GmbH filed Critical Thinxxs Microtechnology GmbH
Publication of WO2009052805A2 publication Critical patent/WO2009052805A2/fr
Publication of WO2009052805A3 publication Critical patent/WO2009052805A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0638—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening

Definitions

  • the invention relates to an element having an opening or a plurality of such openings, which serves as a nozzle, as a filter or for positioning e.g. can serve in the openings of recorded biological cells.
  • the invention relates to such a nozzle, filter or / and positioning, whose opening or openings have a diameter between 1 and 100 microns and smaller.
  • a nozzle such elements are mainly used in dispensing and atomizing liquids, e.g. in the laboratory and pharmaceutical industry, or in the dosage of inhaled drugs, as well as in the generation of electrospray for the identification of molecules by mass spectrometry.
  • Known application examples are also nozzles of inkjet printers.
  • Applications as a positioning element are mainly found in electrophysiology (patch clamping). Especially for fine atomization of drugs nozzle diameter of a few micrometers are required.
  • the invention further relates to a method for producing such an element.
  • US 2006 0103051 A1 discloses the production of nozzle elements by injection molding in combination with laser processing. Nozzle diameters can be produced reproducibly down to about 10 ⁇ m. For smaller nozzle diameter requires complex lithography or plasma etching. Microholes having nozzle elements made of silicon can be produced only with great effort.
  • the invention is based on the object, the cost of producing
  • a nozzle, filter or / and positioning element which is characterized in that the inner wall of the opening formed by a deposited on a base body coating and the size of the opening cross section through the thickness of this coating is determined.
  • a base body having an opening preform corresponding to the opening is produced and the desired size of the opening cross section is set by depositing a coating on the inner wall of the opening preforming.
  • Such coatings formed by deposition can be with high Ge. produce accuracy in desired thicknesses.
  • the applied layer thickness is only of the order of the tolerance variations of the opening diameter of the preform and the layer thickness is e.g. may be only 5% of the final opening diameter
  • significantly greater layer thicknesses are applied, which even exceed the diameter of the opening formed.
  • the diameter of the preform can then be substantially larger than the final diameter of the opening and have a size such that it can be reproducibly produced with high accuracy. Then the much smaller end diameter can be adjusted accordingly.
  • the layer thickness of the coating can be adjusted by supplying the coating material in a specific amount or in a specific concentration over a specific time, the layer thickness can also be controlled by continuous measurement of the thickness of the deposited layer or of the respective opening diameter during the deposition and the deposition is terminated when the desired cross-sectional size is reached.
  • the deposition of the coating it is possible to use a mandrel which delimits the inner diameter of the opening and which has a surface to which the coating does not adhere. The coating does not stress the mandrel, which therefore may have a very small diameter. Irrespective of fluctuations in the diameter Do of the opening preform, constant opening diameters can be achieved.
  • the main body may be formed by a flat or curved plate and having a plurality of through-going through the plate or, in the case of a positioning element, within the plate ending openings.
  • the main body can be further formed by a film or membrane whose dimensions and mechanical properties can be adjusted so that when pressure is applied, a defined curvature occurs, so that droplets produced by such a perforated membrane emerge in a defined solid angle.
  • the coating may cover the surface of the body in whole or in part beyond the inner wall of the opening preforming. In the former case, during the deposition process of material on the base body, there is no need to cover the base body in certain areas.
  • the surface of the base body is partially or completely wet-chemically or otherwise physically conditioned before coating in order to improve adhesion between the base body and the layer.
  • the main body can be made of a plastic, a possibly piezoelectric ceramic or a metal, while the coating, e.g. made of a plastic, a metal or glass.
  • the base body is made of a plastic by injection molding and the coating consists of parylene.
  • Parylene is a trade name of a polymer resulting from the deposition of para-xylylene from the gas phase to polymerize this compound.
  • the element according to the invention may have further structures whose function goes beyond the nozzle, filter and / or positioning function of the element.
  • the element may be part of a vibration system, for example a bending transducer, wherein, for example, nozzle openings may be formed in a piezoelectric disk of a piezoactuator itself.
  • the opening may be cylindrical or / and conical or deviating therefrom.
  • an edge elevation is formed on the opening, e.g. to produce a possible output beam.
  • the opening can form a channel in a microfluidic, single-part or multi-part flow cell.
  • Fig. 1 is a nozzle and / or filter element according to the invention with cylindrical through holes
  • Fig. 2 is a nozzle and / or filter element according to the invention with conical
  • FIG. 3 shows a nozzle and / or filter element according to the invention with conical through holes, on which a ridge elevation is formed
  • FIG. 4 shows a nozzle and / or filter element according to the invention with a coating extending over only a part of the surface of a base body
  • FIG. 5 shows a disk-shaped nozzle and / or filter element according to the invention
  • FIG. 6 shows an arc-shaped nozzle and / or filter element according to the invention
  • FIGS. 7-10 show nozzle elements according to the invention, which have structures which fulfill functions exceeding nozzle functions
  • FIG. 11 further exemplary embodiments of elements according to the invention
  • Fig. 12 is an illustrative of the preparation of elements according to the invention.
  • a nozzle and / or filter element in the form of a plate shown in FIGS. 1 and 5 has a base body 1 made of plastic produced by injection molding and a coating 2 of parylene applied by deposition onto the base body.
  • the coating 2 is formed continuously on the entire surface of the base body 1.
  • the element further points through the entire Pl ⁇ ttendicke continuous, arranged in a Arr ⁇ y 6 of rows and columns openings 3.
  • the cylindrical openings 3 correspond to cylindrical preforms in the base body 1 with a diameter Do.
  • D Do - 2d, where d is the thickness of the parylene layer.
  • d the thickness of the parylene layer.
  • the layer thickness d in the relevant embodiment is almost as large as the diameter D of the opening 3.
  • the openings 3 of the element are not cylindrical but approximately conical. As FIG. 3 shows, the opening 3 can have a raised edge 4, which serves for the better alignment of an outlet jet.
  • FIG. 4 shows an exemplary embodiment in which the coating 2 covers only one side of the main body beyond the insides of the preforms in the main body 1.
  • the elements according to FIGS. 2 to 4 may also have the basic shape shown in FIG. 5.
  • a nozzle element shown in FIG. 6 is not like the element of FIG. 5 plate-shaped but made as a curved plate, wherein the axes 5 of the openings 3 are spread like a fan. In appropriate geometry, a spray with a wide defined opening angle can be generated.
  • Fig. 7 shows a nozzle plate with a central array 6 of through holes 3 and with other structures whose function goes beyond the nozzle function of the plate. Notches 7 and 8 allow vibrations of the plate area having the openings. Edge graduations 9 and 10 serve to hold the element.
  • FIG. 8 shows a nozzle plate which has recesses 11 in regions of hole arrays.
  • the otherwise thicker plate has a high mechanical stability, in particular pressure stability.
  • the opening passages which are short compared to the plate thickness can be produced with particularly small opening diameters.
  • Fig. 9 shows a nozzle plate of piezoelectric ceramic with a hole array 6 in combination with an annular counter bearing made of plastic or metal.
  • the a bending transformer forming arrangement is suitable as a drive for a nebulizer / dispenser.
  • a nozzle plate of plastic or metal for an atomizer / dispenser shown in FIG. 10 is connected to an annular piezoelectric ceramic disk 13.
  • Fig. 1 1 a shows in plan view an element with an opening 3, wherein the
  • Layer thickness d is significantly smaller than the opening diameter D.
  • the layer thickness d is in the order of magnitude of the maximum tolerance fluctuation of the diameter D of the hole preforming in the main body 1.
  • the layer thickness d is significantly greater than the opening diameter D.
  • the much larger diameter Do of the preforming in the base body 1 can be produced with high accuracy by injection molding and / or laser processing.
  • the diameter D of the opening 3 can be produced by depositing the layer 2.
  • an opening diameter limiting mandrel 14 with a coating 2 repellent surface can be used.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Nozzles (AREA)
  • Filtering Materials (AREA)

Abstract

L'invention concerne un élément buse, filtre et/ou pour le positionnement, comprenant au moins une ouverture (3) servant d'ouverture de buse, de filtre et/ou de positionnement. L'invention concerne également un procédé pour produire un tel élément. Selon l'invention, la paroi intérieure de l'ouverture (3) est formée par un revêtement (2) sur un corps de base (1) et la taille de la section d'ouverture est déterminée par l'épaisseur (d) de ce revêtement.
PCT/DE2008/001732 2007-10-27 2008-10-21 Élément buse, filtre et/ou pour le positionnement Ceased WO2009052805A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007051487.7 2007-10-27
DE102007051487A DE102007051487A1 (de) 2007-10-27 2007-10-27 Düsen-, Filter- oder/und Positionierelement

Publications (2)

Publication Number Publication Date
WO2009052805A2 true WO2009052805A2 (fr) 2009-04-30
WO2009052805A3 WO2009052805A3 (fr) 2010-01-21

Family

ID=40490258

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2008/001732 Ceased WO2009052805A2 (fr) 2007-10-27 2008-10-21 Élément buse, filtre et/ou pour le positionnement

Country Status (2)

Country Link
DE (1) DE102007051487A1 (fr)
WO (1) WO2009052805A2 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9610579B2 (en) 2014-01-07 2017-04-04 Daktari Diagnostics, Inc. Fluid delivery devices, systems, and methods
US9662650B2 (en) 2013-07-29 2017-05-30 Atlas Genetics Limited Fluidic cartridge and method for processing a liquid sample
US9816135B2 (en) 2013-07-29 2017-11-14 Atlas Genetics Limited Fluidic cartridge for nucleic acid amplification and detection
US9908114B2 (en) 2013-07-29 2018-03-06 Atlas Genetics Limited Cartridge, cartridge reader and method for preventing reuse of the cartridge
US9993818B2 (en) 2013-07-29 2018-06-12 Atlas Genetics Limited Valve which depressurises, and a valve system
US9999883B2 (en) 2013-07-29 2018-06-19 Atlas Genetics Limited System and method for processing fluid in a fluidic cartridge
CN114904961A (zh) * 2016-12-02 2022-08-16 阿普塔尔法国简易股份公司 分配壁的制造方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013202532A1 (de) 2013-02-16 2014-08-21 Aptar Radolfzell Gmbh Verfahren zur Herstellung eines Spenders, Spender sowie Werkzeug hierfür
WO2019106315A1 (fr) * 2017-12-01 2019-06-06 Aptar France Sas Procédé de fabrication d'une paroi de distribution
EP4088822A1 (fr) * 2021-05-12 2022-11-16 PARI Pharma GmbH Dispositif nébuliseur pour un inhalateur

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3169037B2 (ja) * 1993-10-29 2001-05-21 セイコーエプソン株式会社 インクジェット記録ヘッドのノズルプレートの製造方法
US6622872B1 (en) * 1997-11-07 2003-09-23 California Institute Of Technology Micromachined membrane particle filter using parylene reinforcement
NL1016030C1 (nl) * 2000-08-28 2002-03-01 Aquamarijn Holding B V Sproei inrichting met een nozzleplaat, een nozzleplaat, alsmede werkwijzen ter vervaardiging en voor toepassing van een dergelijke nozzleplaat.
WO2002038280A2 (fr) * 2000-11-10 2002-05-16 Therics, Inc. Procede et appareil pour distribuer de petits volumes de liquide, notamment au moyen d'une buse resistante au mouillage
US6800849B2 (en) 2001-12-19 2004-10-05 Sau Lan Tang Staats Microfluidic array devices and methods of manufacture and uses thereof
US7618576B2 (en) 2004-11-12 2009-11-17 Phoenix S&T, Inc. Microfluidic array devices and methods of manufacture thereof

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9662650B2 (en) 2013-07-29 2017-05-30 Atlas Genetics Limited Fluidic cartridge and method for processing a liquid sample
US9816135B2 (en) 2013-07-29 2017-11-14 Atlas Genetics Limited Fluidic cartridge for nucleic acid amplification and detection
US9908114B2 (en) 2013-07-29 2018-03-06 Atlas Genetics Limited Cartridge, cartridge reader and method for preventing reuse of the cartridge
US9993818B2 (en) 2013-07-29 2018-06-12 Atlas Genetics Limited Valve which depressurises, and a valve system
US9999883B2 (en) 2013-07-29 2018-06-19 Atlas Genetics Limited System and method for processing fluid in a fluidic cartridge
US9610579B2 (en) 2014-01-07 2017-04-04 Daktari Diagnostics, Inc. Fluid delivery devices, systems, and methods
CN114904961A (zh) * 2016-12-02 2022-08-16 阿普塔尔法国简易股份公司 分配壁的制造方法

Also Published As

Publication number Publication date
DE102007051487A1 (de) 2009-04-30
WO2009052805A3 (fr) 2010-01-21

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