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EP1200198B1 - Element d'actionneur destine a un microdiffuseur et son procede de realisation - Google Patents

Element d'actionneur destine a un microdiffuseur et son procede de realisation Download PDF

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Publication number
EP1200198B1
EP1200198B1 EP00949481A EP00949481A EP1200198B1 EP 1200198 B1 EP1200198 B1 EP 1200198B1 EP 00949481 A EP00949481 A EP 00949481A EP 00949481 A EP00949481 A EP 00949481A EP 1200198 B1 EP1200198 B1 EP 1200198B1
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EP
European Patent Office
Prior art keywords
diaphragm
passage means
microactor
liquid
atomized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP00949481A
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German (de)
English (en)
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EP1200198A1 (fr
Inventor
Ralf Schnupp
Jochen Thomas
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Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
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Publication of EP1200198A1 publication Critical patent/EP1200198A1/fr
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers

Definitions

  • the present invention relates to an actuator member for a micro atomizer and in particular on an actuator member for a piezoelectrically operated micro-atomizer, on methods of manufacturing such an actuator member as well as a micro-atomizer using one Aktorbauglieds.
  • Elements for atomizing liquid media the following abbreviated as atomizers used in many technical areas, for example the Cosmetics industry for atomizing hair sprays and perfumes, in medicine as drug sprays, with different Coating techniques for the atomization of Varnishes and adhesives, in chemistry for nebulizing liquid Reagents, as well as in the field of home automation Room humidifier.
  • Much of the atomizer currently in use works by means of mechanical atomization, in which the liquid by a mechanically generated overpressure by a Valve of suitable shape and size is pressed. Thereby the medium flows, i.e. the liquid to be atomized, in small droplets usually distributed statically and forms one Liquid mist.
  • the overpressure required is manual through a pumping process, for example in the case of perfume atomizers, or by using overpressure reservoirs, e.g. Propellant gas in hair sprays.
  • a piezoelectric atomizer is described at a thin silicon membrane thanks to a piezoelectric ZnO layer is vibrated, whereby from the thin silicon membrane liquids are atomized.
  • the atomizer described in this document works at a Vibration frequency from 80 to 86.5 kHz, the one disclosed there Atomizer droplets of widely differing diameters generated.
  • DE 19802368 C1 describes a microdosing device, in which a pressure chamber is delimited on one side by a membrane is, in the pressure chamber an inlet opening and an outlet opening are provided. With a suitable control the membrane is caused to dosing sucked in fluid through the inlet opening and through the Exhaust opening is ejected.
  • This microdosing device works on the basis of a displacement effect and not on the basis of capillary wave theory.
  • DE 69404004 T2 describes a piezoelectric nebulizer known in which liquid using a soft Organ with capillary or felt-like structure, such as an open cell foam, on an atomizing grid, which is set in vibration becomes.
  • WO-A-95/15822 describes an atomizing device based on atomization based on capillary wave theory based.
  • a membrane is in Vibrated to effect atomization.
  • a Liquid to be atomized is passed through openings in the membrane, which penetrate it completely, to the surface the membrane from which the liquid is atomized, fed.
  • the object of the present invention is a To create micro-atomizers, on the one hand, a mass production enables and secondly the atomization of droplets, which have a defined diameter, with a enables increased efficiency, and a method for manufacturing to create such a micro atomizer.
  • micro-atomizer 1 and a method of making a micro-atomizer solved according to claim 13.
  • the actuator member used in the atomizer according to the invention uses the piezoelectric principle. Doing so preferably manufactured in thin film technology piezoelectric Layer for deflecting one, preferably in silicon etched thin membrane used, which results in
  • Vibrations is set.
  • the silicon substrate in which the membrane is formed is also a channel device formed to supply the liquid to be atomized, to ensure an essentially uniform wetting of the piezoelectric actuator opposite surface of the Serves to effect membrane.
  • the actuator member of the atomizer according to the invention is preferred suitably adapted to at a frequency between 2 and 2.5 MHz to be operated, and such that by atomization droplets have a diameter between 1 and have 5 ⁇ m.
  • the geometric dimensions the membrane, the hydration and the used Vibration frequency suitably adapted as an atomization parameter, to set a desired droplet size.
  • the channel device can be designed such that same the liquid to be atomized from different Feeds directions to the membrane.
  • the membrane can be rectangular, the channel device the liquid to be atomized over the four corners of the membrane supplies.
  • a micro-atomizer according to the invention using a such an actuator member may include a bracket which the actuator member is fixed so that the inlet end fluidly connected to a liquid supply line is that the channel device with the exception of a fluid one Connection of the same with a liquid supply line and the one opposite the piezoelectric actuator Surface of the membrane sealed by the bracket is, and that in the area opposite the piezoelectric actuator Surface of the membrane an opening of the Bracket provided to eject the atomized liquid is.
  • the bracket is designed such that the actuator member can be easily attached to the same, the Liquid supply line, the holder preferably in leaves in a direction opposite to the direction of ejection the atomized liquid.
  • the present invention further provides a method for Manufacture of a piezoelectrically operated micro-atomizer, in which first a piezoelectric actuator on a Main surface of a semiconductor substrate is applied, whereupon the one opposite the piezoelectric actuator Main surface of the semiconductor substrate is structured, around a membrane on which the piezoelectric actuator is arranged and a channel device extending from an inlet end extends to the membrane to fix in the same.
  • the actuator member is fixed to a bracket in such a way that the surface opposite the piezoelectric actuator facing the membrane of an opening in the holder is.
  • the present invention thus creates an actuator member for a piezoelectrically operated micro-atomizer, the through the use of micromechanics, and in particular the Silicon technology, a very small and inexpensive system enables that manufactured in very large numbers can be. Due to the properties of the The droplet distribution, the precision, become atomizers of the volume to be atomized and thus in the case of a medical Application, the medical effectiveness significantly improved.
  • the actuator member comes without the use of a Nozzle so that there are no signs of constipation can. So the system is also for a multiple Suitable use, for example, only one with liquid container connected to the liquid supply line needs to be replaced. Because of the low power requirement of the piezo drive is also the energy consumption reduced.
  • Fig. 1a) is a schematic perspective view an embodiment of an actuator member shown in one in a main surface of a silicon substrate 10 Membrane 12 is formed.
  • a schematic top view of the in Fig. 1a) illustrated embodiment is also in Fig. 2a) shown, with reference to the following description to Fig. 1a) and 2a) is continued.
  • the atomizing surface of the membrane 12 recognizable, so that on the opposite surface the piezoelectric actuator arranged in the membrane Figures cannot be seen.
  • the piezoelectric actuator is used to cause the membrane 12 to vibrate.
  • a channel device 14 formed which is a supply of a to be atomized Allows liquid to the atomizing surface of membrane 12. Also in this main surface is the silicon substrate 10 a recess 16 which serves as a media inlet, intended.
  • the channel device 14 provides a fluid connection between the media inlet 16 and the atomizing surface membrane 12 to provide substantially uniform wetting the atomizing surface with the one to be atomized To allow liquid.
  • the channel device 14 Channel sections 14a, 14b, 14c and 14d, which are the to be atomized Liquid from the direction of the four corners of the substantially rectangular membrane 12 to the atomizing surface feed them.
  • the membrane 12 by a Membrane recess is fixed using a KOH etching process was formed so that the side walls 18 of the Membrane recess with the slope to be recognized in Fig. 1a) have an angle of about 55 degrees.
  • sections 14a, 14b, 14c and 14d of FIG Channel device 14 in each case in the upper region of the inclined Side surfaces 18 that the supply of the atomized Medium takes place over the inclined side surfaces 18.
  • the media inlet recess 16 and the channel device 14 also by a KOH etching can be formed.
  • the actuator member formed in this way is now used to build a micro-atomizer into a holder, as shown for example in Fig. 1b) is introduced.
  • the bracket points 20 a receiving compartment 22 into which the actuator member is introduced and in the same in a suitable manner can be set.
  • the bracket points 20 preferably protrusions 24 and 26 on the actuator member hold.
  • the holder 20 is designed such that it is closed together with the actuator member Forms channels that match the atomizing surface of the Membrane 12 and the media inlet 16 fluidly connected are.
  • the holder 20 preferably also has a device 28 for connecting a liquid line 29, preferably a hose, such that the liquid line 29 fluidly connected to the media inlet 16 is.
  • the holder 20 also has an opening 30 which, if the actuator member is mounted in the bracket 20, arranged above the atomizing surface of the membrane 12 is to expel the atomized liquid to enable.
  • the liquid line 29 is relative to the Opening 30 is preferably arranged such that the opening 30 arranged, for example, in an inhalation channel of an inhaler be no. For this purpose leaves the liquid line 29 the bracket 20 preferably opposite the opening 30, as shown in Fig. 1b).
  • the opening 30 can provided with a grid in alternative embodiments be, for example, for a precisely defined Droplet size or overhead operation of the system allows.
  • the actuator member shown in Fig. 1a) is preferably made made of silicon, while that shown in Fig. 1b) Bracket made of plastic, what regarding the system price is advantageous, or any other suitable Material can be made.
  • the actuator member can, for example by means of anodic bonding on the holder be attached, moreover by such anodic Bonding process also a very firm, dense and stable Connection to another silicon chip is possible which in turn has suitable channels and liquid connections may contain.
  • the liquid line 29 with a liquid reservoir (not shown) connected, which is preferably a Pressure tank acts, the fluid via a valve can be connected to the liquid line 29.
  • the membrane 12 is vibrated by the piezoelectric actuator offset so that on the basis of capillary wave theory that on the atomizing surface of the membrane 12 Liquid is atomized. During the atomization process becomes atomizing liquid continuously supplied via the channel device 14.
  • the inventive An actuator atomization can be performed Resulting in droplets whose diameter is not in one vary in large area, but their diameter in one defined area, preferred for medical technology can be kept between 1 and 5 microns.
  • FIG. 2b is a schematic plan view of a channel device 34 shown as lower for a membrane 36 Size can be sufficient to ensure even wetting to effect the same with the liquid to be atomized.
  • the channel device 34 is in turn fluid with a Recess 16, which defines a media inlet, connected.
  • the arrangement shown in Fig. 2b) is suitable for Atomization of small volumes of fluid, while that shown in Fig. 2a) illustrated embodiment for the atomization of larger fluid volume is suitable.
  • the channels 14 and 34 act in addition to the liquid supply due to the narrowing of the cross-section also as a flow restriction. At a constant outlet pressure of the liquid and through the channels made with a precise cross-section thus there is a constant flow to the piezoelectric Membrane 12 or 36 a.
  • the channels according to the present invention using silicon technology can be precisely etched so that a defined supply of the liquid to the atomizing surface the membrane is possible. So can by different selected cross-sections target the microactuators desired flow rates can be set so that the atomization very precisely defined volumes is possible.
  • a protective layer which is preferably made of Titanium or titanium nitride.
  • FIGS. 3a) to 3e) Method for producing an actuator member according to the invention described.
  • a p-silicon is preferably used as the silicon substrate 10, while the layer 40 is an n-conductive layer.
  • Layer 40 later also serves as a lower electrode for driving the piezoelectric layer.
  • the substrate 10 on which the implantation layer 40 is arranged is subsequently subjected to an oxidation in order to produce SiO 2 layers 42 and 44. The resulting layer composite is shown in Fig. 3a).
  • An opening 48 is formed in the upper oxide layer 42 for later contacting of the implantation layer 40, see FIG. 3b).
  • the lower oxide layer 44 and the silicon nitride layer 46 are, for example by photolithographic processes, structured around an opening 50 for later free etching the membrane recess from the bottom of the silicon substrate 10 here to be defined. Above this opening 50 a piezoelectric material on top oxide layer 42 52 applied to the finished device as piezoelectric actuator acts.
  • the piezoelectric material can consist of AlN, PZT or ZnO, for example. Consequently the structure shown in Fig. 3c) results.
  • metallizations 54 and 56 for the electrical Control of the piezoelectric element 52 the top of the structure shown in Fig. 3c), see Fig. 3d), whereupon a passivation layer 58 is applied and patterned around openings 60 and 62 to define the contacting of the metallizations 54 and 56, see Fig. 3e).
  • a passivation layer 58 is applied and patterned around openings 60 and 62 to define the contacting of the metallizations 54 and 56, see Fig. 3e).
  • KOH etching limited KOH etching down to the implantation layer 40, which serves as an etch stop, performed that the membrane 12 formed in the implantation layer 40 is generated.
  • FIG. 3 a preferred embodiment of the inventive method for manufacturing of an actuator member, it is for Experts obviously have a different order the steps described above can be used to the structure of the actuator member according to the invention as it For example, shown in Fig. 1a) in a main surface a silicon substrate and also a piezoelectric Drive on the opposite main surface of the silicon substrate.
  • the recess which defines the membrane, as well as the supply channels, the even wetting of the atomizing surface ensure the membrane is in the same main surface of a silicon substrate are formed, so that the present Invention the mass production of actuator components less Size inexpensive and with low energy consumption allows.

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  • Special Spraying Apparatus (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Micromachines (AREA)

Claims (15)

  1. Microdiffuseur à actionnement piézoélectrique fonctionnant selon la théorie des ondes capillaires, aux caractéristiques suivantes :
    une membrane (12 ; 36) formée dans un substrat à semi-conducteur (10) ;
    un actionneur piézoélectrique (52) disposé sur une surface de la membrane (12 ; 36), destiné à faire osciller la membrane (12 ; 36) ;
    un aménagement de canal (14; 34) formé dans le substrat à semi-conducteur (10), destiné à amener un liquide à pulvériser d'une extrémité d'entrée vers la surface de la membrane (12 ; 36) opposée à l'actionneur piézoélectrique (52), le fluide amené à la surface de la membrane étant, grâce aux oscillations de la membrane (12 ; 36), pulvérisé sur base de la théorie des ondes capillaires et expulsé à travers une sortie (30) disposée vis-à-vis de la membrane, l'aménagement de canal (14 ; 34) étant formé par au moins une structure en forme de gorges, ne traversant pas le substrat, prévue dans le substrat, dans la surface du substrat depuis laquelle est pulvérisé le liquide amené.
  2. Microdiffuseur selon la revendication 1, dans lequel la membrane (12 ; 36) et l'aménagement de canal (14; 34) sont formés par des évidements dans une première surface principale du substrat à semi-conducteur (10).
  3. Microdiffuseur selon la revendication 1 ou 2, dans lequel est formé, par ailleurs, dans la première surface principale du substrat à semi-conducteur (10), un évidement (16), définissant une entrée de liquide, communiquant en fluide avec l'extrémité d'entrée de l'aménagement de canal (14; 34).
  4. Microdiffuseur selon l'une des revendications 1 à 3, dans lequel l'aménagement de canal (14; 34) est réalisé de manière à obtenir une humidification uniforme de la surface de la membrane (12 ; 36) opposée à l'actionneur piézoélectrique (52).
  5. Microdiffuseur selon l'une des revendications 1 à 4, dans lequel l'aménagement de canal (14) est réalisé de manière à obtenir qu'un liquide à pulvériser soit amené vers la membrane (12) dans différentes directions.
  6. Microdiffuseur selon la revendication 5, dans lequel la membrane (12) présente une forme rectangulaire, l'aménagement de canal (14) présentant des segments de canal (14a, 14b, 14c, 14d), pour amener le liquide à pulvériser par les quatre coins de la membrane (12).
  7. Microdiffuseur selon l'une des revendications 1 à 6, dans lequel l'actionneur piézoélectrique (52) fait osciller la membrane (12 ; 36) à une fréquence comprise entre 2 et 2,5 MHz, de sorte que les gouttelettes générées par la pulvérisation possèdent un diamètre compris entre 1 et 5 µm.
  8. Microdiffuseur selon l'une des revendications 1 à 7, dans lequel l'aménagement de canal (14 ; 34) est réalisé sous forme d'étranglement de circulation défini.
  9. Microdiffuseur selon l'une des revendications 1 à 8, présentant un support (20) sur lequel est fixé le substrat à semi-conducteur de telle sorte que
       l'extrémité d'entrée soit en communication de fluide avec un conduit d'amenée de liquide (29);
       l'aménagement de canal (14 ; 34) soit, à l'exception d'une communication en fluide de ce dernier avec le conduit d'amenée de liquide (29) et la surface de la membrane (12) opposée à l'actionneur piézoélectrique (52), obturé par le support (20) ; et
       à l'endroit de la surface de la membrane (12) opposée à l'actionneur piézoélectrique (52) soit prévue une ouverture (30) dans le support (20) pour l'expulsion du liquide à pulvériser.
  10. Microdiffuseur selon la revendication 9, dans lequel l'ouverture (30) est munie d'une grille.
  11. Microdiffuseur selon la revendication 9 ou 10, dans lequel le conduit d'amenée de liquide est disposé de telle sorte qu'il sorte du support (20) dans une direction opposée à la direction d'expulsion du liquide pulvérisé.
  12. Microdiffuseur selon l'une des revendications 9 à 11, dans lequel le support (20) présente un évidement servant d'entrée de fluide (32).
  13. Procédé de production d'un microdiffuseur à actionnement piézoélectrique fonctionnant selon la théorie des ondes capillaires et destiné à pulvériser, sur base de la théorie des ondes capillaires, un fluide amené à une surface d'une membrane, aux étapes suivantes consistant à :
    a) générer un élément actionneur par les étapes partielles suivantes consistant à :
    a1) appliquer un actionneur piézoélectrique (52) sur une surface principale d'un substrat à semi-conducteur (10, 40) ;
    a2) structurer la surface principale, opposée à l'actionneur piézoélectrique (52), du substrat à semi-conducteur, pour réaliser dans cette dernière la membrane (12), sur laquelle est disposé l'actionneur piézoélectrique (52), et au moins un aménagement de canal (14 ; 34) sous forme d'une structure en forme de gorges, ne traversant pas le substrat, s'étendant d'une extrémité d'entrée à la membrane (12;36);et
    b) fixer l'élément actionneur à un support (30), de sorte que la surface, opposée à l'actionneur piézoélectrique, de la membrane soit orientée vers une ouverture dans le support.
  14. Procédé selon la revendication 13, dans lequel est, à l'étape a2,} par ailleurs structurée dans la surface principale du substrat à semi-conducteur (10, 40) opposée à l'actionneur piézoélectrique (52), à l'extrémité d'entrée de l'aménagement de canal (14 ; 34), une entrée de liquide (16) en communication de fluide avec cette dernière.
  15. Procédé selon la revendication 13 ou 14, dans lequel la membrane (12) est formée par gravure à l'aide de KOH, l'aménagement de canal étant généré jusqu'aux parois latérales obliques (18), formées par gravure à l'aide de KOH, de l'évidement déterminant la membrane (12).
EP00949481A 1999-08-12 2000-08-10 Element d'actionneur destine a un microdiffuseur et son procede de realisation Expired - Lifetime EP1200198B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19938055A DE19938055A1 (de) 1999-08-12 1999-08-12 Aktorbauglied für einen Mikrozerstäuber und Verfahren zu seiner Herstellung
DE19938055 1999-08-12
PCT/EP2000/007798 WO2001012340A1 (fr) 1999-08-12 2000-08-10 Element d'actionneur destine a un microdiffuseur et son procede de realisation

Publications (2)

Publication Number Publication Date
EP1200198A1 EP1200198A1 (fr) 2002-05-02
EP1200198B1 true EP1200198B1 (fr) 2003-01-22

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EP00949481A Expired - Lifetime EP1200198B1 (fr) 1999-08-12 2000-08-10 Element d'actionneur destine a un microdiffuseur et son procede de realisation

Country Status (5)

Country Link
US (1) US6536682B1 (fr)
EP (1) EP1200198B1 (fr)
JP (1) JP3598095B2 (fr)
DE (2) DE19938055A1 (fr)
WO (1) WO2001012340A1 (fr)

Families Citing this family (7)

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TW538823U (en) * 2002-09-18 2003-06-21 Kae Jyh Corp Improved structure for percussion board of water mist
TWI294789B (en) * 2005-11-29 2008-03-21 Ind Tech Res Inst Droplet ejecting head
EP1792662A1 (fr) 2005-11-30 2007-06-06 Microflow Engineering SA Appareil de distribution de gouttelettes
EP1952896B1 (fr) * 2007-02-01 2012-11-07 EP Systems SA Appareil de distribution de gouttelettes
ATE486661T1 (de) * 2008-06-03 2010-11-15 Microflow Eng Sa Spendervorrichtung für flüchtige flüssige tröpfchen
WO2012099532A1 (fr) * 2011-01-17 2012-07-26 Agency For Science, Technology And Research Générateur microfluidique de gouttelettes
CN117582588A (zh) * 2023-11-30 2024-02-23 青岛未来移动医疗科技有限公司 一种微网雾化单元组件、雾化器系统及控制方法

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CA1206996A (fr) * 1982-01-18 1986-07-02 Naoyoshi Maehara Ejecteur ultrasonique de liquide
US5152456A (en) * 1989-12-12 1992-10-06 Bespak, Plc Dispensing apparatus having a perforate outlet member and a vibrating device
DE69106240T2 (de) 1990-07-02 1995-05-11 Seiko Epson Corp Mikropumpe und Verfahren zur Herstellung einer Mikropumpe.
NZ241034A (en) * 1990-12-17 1995-03-28 Minnesota Mining & Mfg Inhaler device with a dosage control that deactivates an aerosol generator after predetermined time or dosage
ATE131421T1 (de) * 1991-12-04 1995-12-15 The Technology Partnership Plc Vorrichtung und verfahren zur erzeugung von fluessigkeitstroepfchen
FR2705911B1 (fr) * 1993-06-02 1995-08-11 Oreal Appareil de nébulisation piézoélectrique.
KR100326679B1 (ko) 1993-12-09 2002-07-03 지. 애비슨 액체스프레이장치및방법
GB9412669D0 (en) * 1994-06-23 1994-08-10 The Technology Partnership Plc Liquid spray apparatus
US5685491A (en) * 1995-01-11 1997-11-11 Amtx, Inc. Electroformed multilayer spray director and a process for the preparation thereof
DE19802368C1 (de) * 1998-01-22 1999-08-05 Hahn Schickard Ges Mikrodosiervorrichtung

Also Published As

Publication number Publication date
JP2003507168A (ja) 2003-02-25
JP3598095B2 (ja) 2004-12-08
US6536682B1 (en) 2003-03-25
DE19938055A1 (de) 2001-03-15
EP1200198A1 (fr) 2002-05-02
DE50001149D1 (de) 2003-02-27
WO2001012340A1 (fr) 2001-02-22

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