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WO2009048012A1 - 凹凸パターン基板の製造方法及び凹凸パターン基板 - Google Patents

凹凸パターン基板の製造方法及び凹凸パターン基板 Download PDF

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Publication number
WO2009048012A1
WO2009048012A1 PCT/JP2008/067921 JP2008067921W WO2009048012A1 WO 2009048012 A1 WO2009048012 A1 WO 2009048012A1 JP 2008067921 W JP2008067921 W JP 2008067921W WO 2009048012 A1 WO2009048012 A1 WO 2009048012A1
Authority
WO
WIPO (PCT)
Prior art keywords
concave
substrate
convex pattern
pattern structure
mold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/067921
Other languages
English (en)
French (fr)
Inventor
Akira Sato
Takayuki Okano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Publication of WO2009048012A1 publication Critical patent/WO2009048012A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
    • B29C33/3857—Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Moulding By Coating Moulds (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)

Abstract

　本発明は、転写が良好で製造効率の良い凹凸パターン基板の製造方法を提供する。このため、基板に凹凸パターン構造を有する凹凸パターン基板の製造方法において、前記凹凸パターン構造を成す材料を溶媒に溶かした材料溶液を、前記凹凸パターン構造の反転凹凸パターン構造を有し、前記溶媒を透過する型と前記基板との間に介在させ、前記型と前記基板とを重ね合わせる工程と、前記型と前記基板とを重ね合わせた後、前記型の前記反転凹凸パターン構造を有する側の反対側から前記溶媒を蒸発させる工程と、前記溶媒を蒸発させた後、前記型と前記基板とを分離する工程と、を有する。
PCT/JP2008/067921 2007-10-11 2008-10-02 凹凸パターン基板の製造方法及び凹凸パターン基板 Ceased WO2009048012A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007265279 2007-10-11
JP2007-265279 2007-10-11

Publications (1)

Publication Number Publication Date
WO2009048012A1 true WO2009048012A1 (ja) 2009-04-16

Family

ID=40549157

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/067921 Ceased WO2009048012A1 (ja) 2007-10-11 2008-10-02 凹凸パターン基板の製造方法及び凹凸パターン基板

Country Status (1)

Country Link
WO (1) WO2009048012A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010099863A (ja) * 2008-10-21 2010-05-06 Mitsui Chemicals Inc 塗布膜の製造方法、および部材の洗浄方法
JP2013154637A (ja) * 2012-01-06 2013-08-15 Nippon Shokubai Co Ltd 樹脂製ナノ構造体の製造方法
JP2015141986A (ja) * 2014-01-28 2015-08-03 大日本印刷株式会社 構造体の製造方法
JP2019021941A (ja) * 2018-10-30 2019-02-07 大日本印刷株式会社 構造体の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5340066A (en) * 1976-09-24 1978-04-12 Bfg Glassgroup Method of forming layer from solution of layer forming material
JP2003100609A (ja) * 2001-09-26 2003-04-04 Japan Science & Technology Corp Ｓｏｇを用いた室温ナノ−インプリント−リソグラフィー
JP2007173806A (ja) * 2005-12-21 2007-07-05 Asml Netherlands Bv インプリントリソグラフィ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5340066A (en) * 1976-09-24 1978-04-12 Bfg Glassgroup Method of forming layer from solution of layer forming material
JP2003100609A (ja) * 2001-09-26 2003-04-04 Japan Science & Technology Corp Ｓｏｇを用いた室温ナノ−インプリント−リソグラフィー
JP2007173806A (ja) * 2005-12-21 2007-07-05 Asml Netherlands Bv インプリントリソグラフィ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010099863A (ja) * 2008-10-21 2010-05-06 Mitsui Chemicals Inc 塗布膜の製造方法、および部材の洗浄方法
JP2013154637A (ja) * 2012-01-06 2013-08-15 Nippon Shokubai Co Ltd 樹脂製ナノ構造体の製造方法
JP2015141986A (ja) * 2014-01-28 2015-08-03 大日本印刷株式会社 構造体の製造方法
JP2019021941A (ja) * 2018-10-30 2019-02-07 大日本印刷株式会社 構造体の製造方法

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