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WO2009048012A1 - Process for producing substrate with concave and convex pattern, and substrate with concave and convex pattern - Google Patents

Process for producing substrate with concave and convex pattern, and substrate with concave and convex pattern Download PDF

Info

Publication number
WO2009048012A1
WO2009048012A1 PCT/JP2008/067921 JP2008067921W WO2009048012A1 WO 2009048012 A1 WO2009048012 A1 WO 2009048012A1 JP 2008067921 W JP2008067921 W JP 2008067921W WO 2009048012 A1 WO2009048012 A1 WO 2009048012A1
Authority
WO
WIPO (PCT)
Prior art keywords
concave
substrate
convex pattern
pattern structure
mold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/067921
Other languages
French (fr)
Japanese (ja)
Inventor
Akira Sato
Takayuki Okano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Publication of WO2009048012A1 publication Critical patent/WO2009048012A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/38Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/3842Manufacturing moulds, e.g. shaping the mould surface by machining
    • B29C33/3857Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Moulding By Coating Moulds (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)

Abstract

This invention provides a process for producing a substrate with a concave and convex pattern, comprising a concave and convex pattern structure in a substrate, which can realize good transfer and a good production efficiency. The production process comprises the step of superimposing a mold, which has an inverted concave and convex pattern structure of a concave and convex pattern structure in a substrate to be produced and is permeable to a solvent, onto the substrate while interposing a material solution of a material for constituting the concave and convex pattern structure dissolved in the solvent between the mold and the substrate, the step of evaporating the solvent from the mold on its side remote from the inverted concave and convex pattern structure, and the step of separating the mold and the substrate from each other.
PCT/JP2008/067921 2007-10-11 2008-10-02 Process for producing substrate with concave and convex pattern, and substrate with concave and convex pattern Ceased WO2009048012A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007265279 2007-10-11
JP2007-265279 2007-10-11

Publications (1)

Publication Number Publication Date
WO2009048012A1 true WO2009048012A1 (en) 2009-04-16

Family

ID=40549157

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/067921 Ceased WO2009048012A1 (en) 2007-10-11 2008-10-02 Process for producing substrate with concave and convex pattern, and substrate with concave and convex pattern

Country Status (1)

Country Link
WO (1) WO2009048012A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010099863A (en) * 2008-10-21 2010-05-06 Mitsui Chemicals Inc Method for manufacturing coating film and method for cleaning member
JP2013154637A (en) * 2012-01-06 2013-08-15 Nippon Shokubai Co Ltd Method of manufacturing resin nano structure
JP2015141986A (en) * 2014-01-28 2015-08-03 大日本印刷株式会社 Method of manufacturing structure
JP2019021941A (en) * 2018-10-30 2019-02-07 大日本印刷株式会社 Method of manufacturing structure

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5340066A (en) * 1976-09-24 1978-04-12 Bfg Glassgroup Method of forming layer from solution of layer forming material
JP2003100609A (en) * 2001-09-26 2003-04-04 Japan Science & Technology Corp Room temperature nano-imprint-lithography using SOG
JP2007173806A (en) * 2005-12-21 2007-07-05 Asml Netherlands Bv Imprint lithography

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5340066A (en) * 1976-09-24 1978-04-12 Bfg Glassgroup Method of forming layer from solution of layer forming material
JP2003100609A (en) * 2001-09-26 2003-04-04 Japan Science & Technology Corp Room temperature nano-imprint-lithography using SOG
JP2007173806A (en) * 2005-12-21 2007-07-05 Asml Netherlands Bv Imprint lithography

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010099863A (en) * 2008-10-21 2010-05-06 Mitsui Chemicals Inc Method for manufacturing coating film and method for cleaning member
JP2013154637A (en) * 2012-01-06 2013-08-15 Nippon Shokubai Co Ltd Method of manufacturing resin nano structure
JP2015141986A (en) * 2014-01-28 2015-08-03 大日本印刷株式会社 Method of manufacturing structure
JP2019021941A (en) * 2018-10-30 2019-02-07 大日本印刷株式会社 Method of manufacturing structure

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