WO2009048012A1 - Process for producing substrate with concave and convex pattern, and substrate with concave and convex pattern - Google Patents
Process for producing substrate with concave and convex pattern, and substrate with concave and convex pattern Download PDFInfo
- Publication number
- WO2009048012A1 WO2009048012A1 PCT/JP2008/067921 JP2008067921W WO2009048012A1 WO 2009048012 A1 WO2009048012 A1 WO 2009048012A1 JP 2008067921 W JP2008067921 W JP 2008067921W WO 2009048012 A1 WO2009048012 A1 WO 2009048012A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- concave
- substrate
- convex pattern
- pattern structure
- mold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/3842—Manufacturing moulds, e.g. shaping the mould surface by machining
- B29C33/3857—Manufacturing moulds, e.g. shaping the mould surface by machining by making impressions of one or more parts of models, e.g. shaped articles and including possible subsequent assembly of the parts
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Moulding By Coating Moulds (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
Abstract
This invention provides a process for producing a substrate with a concave and convex pattern, comprising a concave and convex pattern structure in a substrate, which can realize good transfer and a good production efficiency. The production process comprises the step of superimposing a mold, which has an inverted concave and convex pattern structure of a concave and convex pattern structure in a substrate to be produced and is permeable to a solvent, onto the substrate while interposing a material solution of a material for constituting the concave and convex pattern structure dissolved in the solvent between the mold and the substrate, the step of evaporating the solvent from the mold on its side remote from the inverted concave and convex pattern structure, and the step of separating the mold and the substrate from each other.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007265279 | 2007-10-11 | ||
| JP2007-265279 | 2007-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2009048012A1 true WO2009048012A1 (en) | 2009-04-16 |
Family
ID=40549157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2008/067921 Ceased WO2009048012A1 (en) | 2007-10-11 | 2008-10-02 | Process for producing substrate with concave and convex pattern, and substrate with concave and convex pattern |
Country Status (1)
| Country | Link |
|---|---|
| WO (1) | WO2009048012A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010099863A (en) * | 2008-10-21 | 2010-05-06 | Mitsui Chemicals Inc | Method for manufacturing coating film and method for cleaning member |
| JP2013154637A (en) * | 2012-01-06 | 2013-08-15 | Nippon Shokubai Co Ltd | Method of manufacturing resin nano structure |
| JP2015141986A (en) * | 2014-01-28 | 2015-08-03 | 大日本印刷株式会社 | Method of manufacturing structure |
| JP2019021941A (en) * | 2018-10-30 | 2019-02-07 | 大日本印刷株式会社 | Method of manufacturing structure |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5340066A (en) * | 1976-09-24 | 1978-04-12 | Bfg Glassgroup | Method of forming layer from solution of layer forming material |
| JP2003100609A (en) * | 2001-09-26 | 2003-04-04 | Japan Science & Technology Corp | Room temperature nano-imprint-lithography using SOG |
| JP2007173806A (en) * | 2005-12-21 | 2007-07-05 | Asml Netherlands Bv | Imprint lithography |
-
2008
- 2008-10-02 WO PCT/JP2008/067921 patent/WO2009048012A1/en not_active Ceased
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5340066A (en) * | 1976-09-24 | 1978-04-12 | Bfg Glassgroup | Method of forming layer from solution of layer forming material |
| JP2003100609A (en) * | 2001-09-26 | 2003-04-04 | Japan Science & Technology Corp | Room temperature nano-imprint-lithography using SOG |
| JP2007173806A (en) * | 2005-12-21 | 2007-07-05 | Asml Netherlands Bv | Imprint lithography |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010099863A (en) * | 2008-10-21 | 2010-05-06 | Mitsui Chemicals Inc | Method for manufacturing coating film and method for cleaning member |
| JP2013154637A (en) * | 2012-01-06 | 2013-08-15 | Nippon Shokubai Co Ltd | Method of manufacturing resin nano structure |
| JP2015141986A (en) * | 2014-01-28 | 2015-08-03 | 大日本印刷株式会社 | Method of manufacturing structure |
| JP2019021941A (en) * | 2018-10-30 | 2019-02-07 | 大日本印刷株式会社 | Method of manufacturing structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application |
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| 122 | Ep: pct application non-entry in european phase |
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