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WO2009041563A1 - 圧電変換素子、アクチュエータ、センサー、光走査装置、及び、光走査型表示装置 - Google Patents

圧電変換素子、アクチュエータ、センサー、光走査装置、及び、光走査型表示装置 Download PDF

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Publication number
WO2009041563A1
WO2009041563A1 PCT/JP2008/067402 JP2008067402W WO2009041563A1 WO 2009041563 A1 WO2009041563 A1 WO 2009041563A1 JP 2008067402 W JP2008067402 W JP 2008067402W WO 2009041563 A1 WO2009041563 A1 WO 2009041563A1
Authority
WO
WIPO (PCT)
Prior art keywords
optical scanning
transducer element
piezoelectric transducer
section
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/067402
Other languages
English (en)
French (fr)
Inventor
Masahiro Sakakibara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brother Industries Ltd
Original Assignee
Brother Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brother Industries Ltd filed Critical Brother Industries Ltd
Publication of WO2009041563A1 publication Critical patent/WO2009041563A1/ja
Priority to US12/659,745 priority Critical patent/US8274723B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Micromachines (AREA)

Abstract

　固定部７と可動部３が連結する基体の上に、下部電極６と上部電極４に挟まれた圧電体５が固定部７と可動部３に跨って載置され、下部電極６と上部電極４間の電位変化を固定部７に対する可動部３の機械的変化に変換する、又は前記機械的変化を前記電位変化に変換する圧電変換素子２０において、固定部７の領域に形成される静電容量を低減して、消費電力を低減し、応答特性の改善を図る。 　上部電極４は、固定部７の上方に形成された接続用のパッド電極８を含み、下部電極６は、固定部７の上方であって接続用のパッド電極８の下方の領域に形成されていない構造とする。
PCT/JP2008/067402 2007-09-26 2008-09-26 圧電変換素子、アクチュエータ、センサー、光走査装置、及び、光走査型表示装置 Ceased WO2009041563A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/659,745 US8274723B2 (en) 2007-09-26 2010-03-19 Piezoelectric transducer element, actuator, sensor, optical scanning device, and optical scanning display device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-250078 2007-09-26
JP2007250078A JP5040558B2 (ja) 2007-09-26 2007-09-26 圧電変換素子、アクチュエータ、センサー、光走査装置、及び、光走査型表示装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/659,745 Continuation-In-Part US8274723B2 (en) 2007-09-26 2010-03-19 Piezoelectric transducer element, actuator, sensor, optical scanning device, and optical scanning display device

Publications (1)

Publication Number Publication Date
WO2009041563A1 true WO2009041563A1 (ja) 2009-04-02

Family

ID=40511443

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/067402 Ceased WO2009041563A1 (ja) 2007-09-26 2008-09-26 圧電変換素子、アクチュエータ、センサー、光走査装置、及び、光走査型表示装置

Country Status (3)

Country Link
US (1) US8274723B2 (ja)
JP (1) JP5040558B2 (ja)
WO (1) WO2009041563A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011107675A (ja) * 2009-10-20 2011-06-02 Seiko Epson Corp 光偏向素子、光偏向器、及び画像形成装置
KR101445683B1 (ko) * 2014-04-29 2014-10-02 오세빈 초점 가변 렌즈
WO2017171855A1 (en) * 2016-04-01 2017-10-05 Intel Corporation Strain sensitive piezoelectric system with optical indicator
US10712550B2 (en) * 2018-03-22 2020-07-14 Microsoft Technology Licensing, Llc Colocating signal processing device with micromechanical scanning silicon mirror

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005191047A (ja) * 2003-12-24 2005-07-14 Kyocera Corp 積層型圧電素子および噴射装置
JP2006320089A (ja) * 2005-05-11 2006-11-24 Brother Ind Ltd アクチュエータ、アクチュエータの製造方法、焦点可変装置、光走査装置及び画像表示装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6624549B2 (en) * 2001-03-02 2003-09-23 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and method of fabricating the same
US7492241B2 (en) * 2005-06-02 2009-02-17 The Regents Of The University Of California Contour-mode piezoelectric micromechanical resonators
US7605966B2 (en) * 2008-01-21 2009-10-20 Stanley Electric Co., Ltd. Optical deflector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005191047A (ja) * 2003-12-24 2005-07-14 Kyocera Corp 積層型圧電素子および噴射装置
JP2006320089A (ja) * 2005-05-11 2006-11-24 Brother Ind Ltd アクチュエータ、アクチュエータの製造方法、焦点可変装置、光走査装置及び画像表示装置

Also Published As

Publication number Publication date
US8274723B2 (en) 2012-09-25
JP2009081961A (ja) 2009-04-16
JP5040558B2 (ja) 2012-10-03
US20100177370A1 (en) 2010-07-15

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