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WO2009041499A1 - プラズマ処理装置及びそのガス排気方法 - Google Patents

プラズマ処理装置及びそのガス排気方法 Download PDF

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Publication number
WO2009041499A1
WO2009041499A1 PCT/JP2008/067296 JP2008067296W WO2009041499A1 WO 2009041499 A1 WO2009041499 A1 WO 2009041499A1 JP 2008067296 W JP2008067296 W JP 2008067296W WO 2009041499 A1 WO2009041499 A1 WO 2009041499A1
Authority
WO
WIPO (PCT)
Prior art keywords
plasma processing
processing apparatus
processing
internal space
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/067296
Other languages
English (en)
French (fr)
Inventor
Jun Yamashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to KR1020107006566A priority Critical patent/KR101197992B1/ko
Priority to CN2008801090101A priority patent/CN101836284B/zh
Priority to US12/680,659 priority patent/US20100239756A1/en
Publication of WO2009041499A1 publication Critical patent/WO2009041499A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32834—Exhausting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

　被処理基板をプラズマ処理するプラズマ処理装置であって、内部空間１５を形成する処理容器２と、内部空間１５内に設けられた、被処理基板Ｗが載置される基板載置台３と、内部空間１５内に設けられ、この内部空間１５の内径ａ１５よりも小さい内径ａ１を有する、基板載置台３の上方にプラズマ処理を行う処理空間１を区画する処理空間形成部材１６と、処理空間形成部材１６の上端部１６ａと内部空間１５の内壁１５ａとの間に設けられた、処理空間１からガスを排気する排気口６と、を具備する。
PCT/JP2008/067296 2007-09-28 2008-09-25 プラズマ処理装置及びそのガス排気方法 Ceased WO2009041499A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020107006566A KR101197992B1 (ko) 2007-09-28 2008-09-25 플라즈마 처리 장치 및 그것의 가스 배기 방법
CN2008801090101A CN101836284B (zh) 2007-09-28 2008-09-25 等离子体处理装置及其气体排气方法
US12/680,659 US20100239756A1 (en) 2007-09-28 2008-09-25 Plasma processing apparatus and gas exhaust method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-255088 2007-09-28
JP2007255088A JP5249547B2 (ja) 2007-09-28 2007-09-28 プラズマ処理装置及びそのガス排気方法

Publications (1)

Publication Number Publication Date
WO2009041499A1 true WO2009041499A1 (ja) 2009-04-02

Family

ID=40511382

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/067296 Ceased WO2009041499A1 (ja) 2007-09-28 2008-09-25 プラズマ処理装置及びそのガス排気方法

Country Status (5)

Country Link
US (1) US20100239756A1 (ja)
JP (1) JP5249547B2 (ja)
KR (1) KR101197992B1 (ja)
CN (1) CN101836284B (ja)
WO (1) WO2009041499A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102870200A (zh) * 2010-04-30 2013-01-09 应用材料公司 用于将气体径向输送至腔室的装置及其使用方法

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5567392B2 (ja) * 2010-05-25 2014-08-06 東京エレクトロン株式会社 プラズマ処理装置
KR101279353B1 (ko) * 2011-03-10 2013-07-04 (주)제이하라 플라즈마 발생장치
KR20130086806A (ko) 2012-01-26 2013-08-05 삼성전자주식회사 박막 증착 장치
KR101445226B1 (ko) * 2013-04-23 2014-09-29 피에스케이 주식회사 배기 링 어셈블리 및 이를 포함하는 기판 처리 장치
KR101598465B1 (ko) 2014-09-30 2016-03-02 세메스 주식회사 기판 처리 장치 및 방법
KR102151631B1 (ko) * 2016-01-22 2020-09-03 세메스 주식회사 기판 처리 장치 및 방법
JP6792786B2 (ja) * 2016-06-20 2020-12-02 東京エレクトロン株式会社 ガス混合装置および基板処理装置
KR101987577B1 (ko) * 2018-01-24 2019-06-10 주식회사 기가레인 승강하는 유도부와 연동하는 배기조절부를 포함하는 기판 처리 장치
CN112309899B (zh) * 2019-07-30 2025-11-14 Asmip私人控股有限公司 基板处理设备
JP2022107873A (ja) * 2021-01-12 2022-07-25 東京エレクトロン株式会社 基板処理装置及びクリーニング方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05339734A (ja) * 1992-06-05 1993-12-21 Sumitomo Metal Ind Ltd 半導体製造装置
JPH0982493A (ja) * 1995-09-14 1997-03-28 Tokyo Electron Ltd プラズマ処理装置
JPH10321605A (ja) * 1997-05-20 1998-12-04 Tokyo Electron Ltd プラズマ処理装置
JP2002050615A (ja) * 2000-08-04 2002-02-15 Tokyo Electron Ltd ラジアルアンテナ及びそれを用いたプラズマ装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0821395A3 (en) * 1996-07-19 1998-03-25 Tokyo Electron Limited Plasma processing apparatus
JP3972970B2 (ja) * 1998-08-06 2007-09-05 株式会社エフオーアイ プラズマリアクタ
US6402847B1 (en) * 1998-11-27 2002-06-11 Kabushiki Kaisha Toshiba Dry processing apparatus and dry processing method
US6402848B1 (en) * 1999-04-23 2002-06-11 Tokyo Electron Limited Single-substrate-treating apparatus for semiconductor processing system
JP3723783B2 (ja) * 2002-06-06 2005-12-07 東京エレクトロン株式会社 プラズマ処理装置
JP3861036B2 (ja) * 2002-08-09 2006-12-20 三菱重工業株式会社 プラズマｃｖｄ装置
JP5082229B2 (ja) * 2005-11-29 2012-11-28 東京エレクトロン株式会社 プラズマ処理装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05339734A (ja) * 1992-06-05 1993-12-21 Sumitomo Metal Ind Ltd 半導体製造装置
JPH0982493A (ja) * 1995-09-14 1997-03-28 Tokyo Electron Ltd プラズマ処理装置
JPH10321605A (ja) * 1997-05-20 1998-12-04 Tokyo Electron Ltd プラズマ処理装置
JP2002050615A (ja) * 2000-08-04 2002-02-15 Tokyo Electron Ltd ラジアルアンテナ及びそれを用いたプラズマ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102870200A (zh) * 2010-04-30 2013-01-09 应用材料公司 用于将气体径向输送至腔室的装置及其使用方法
CN102870200B (zh) * 2010-04-30 2016-04-13 应用材料公司 用于将气体径向输送至腔室的装置及其使用方法

Also Published As

Publication number Publication date
JP5249547B2 (ja) 2013-07-31
US20100239756A1 (en) 2010-09-23
CN101836284A (zh) 2010-09-15
KR20100075862A (ko) 2010-07-05
KR101197992B1 (ko) 2012-11-05
JP2009088185A (ja) 2009-04-23
CN101836284B (zh) 2012-06-13

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