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WO2008133089A1 - 導電性接触子ユニット - Google Patents

導電性接触子ユニット Download PDF

Info

Publication number
WO2008133089A1
WO2008133089A1 PCT/JP2008/057290 JP2008057290W WO2008133089A1 WO 2008133089 A1 WO2008133089 A1 WO 2008133089A1 JP 2008057290 W JP2008057290 W JP 2008057290W WO 2008133089 A1 WO2008133089 A1 WO 2008133089A1
Authority
WO
WIPO (PCT)
Prior art keywords
conductive
conductive contact
conductive contacts
holding
contact unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/057290
Other languages
English (en)
French (fr)
Inventor
Koji Ishikawa
Kazuya Soma
Jun Tominaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NHK Spring Co Ltd
Original Assignee
NHK Spring Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NHK Spring Co Ltd filed Critical NHK Spring Co Ltd
Priority to JP2009511797A priority Critical patent/JPWO2008133089A1/ja
Priority to TW097114080A priority patent/TW200848743A/zh
Publication of WO2008133089A1 publication Critical patent/WO2008133089A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)

Abstract

　簡易な構成によって検査対象の電極または端子の配列間隔の狭小化にも適確に対応することができ、電極または端子との確実な接触を実現することができる導電性接触子ユニットを提供する。この目的のため、各々が板状をなし、異なる回路構造間を電気的に接続することによって各回路構造との間で電気信号の入出力を行う複数の導電性接触子と、複数の導電性接触子を収容保持する導電性接触子ホルダと、を備え、導電性接触子ホルダは、複数の導電性接触子の一部を、互いの板厚方向を揃えた状態で一列に並べて保持する保持部を複数有し、複数の保持部が導電性接触子を一列に並べて保持する方向は互いに平行であることとする。
PCT/JP2008/057290 2007-04-20 2008-04-14 導電性接触子ユニット Ceased WO2008133089A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009511797A JPWO2008133089A1 (ja) 2007-04-20 2008-04-14 導電性接触子ユニット
TW097114080A TW200848743A (en) 2007-04-20 2008-04-18 Electrically conductive contactor unit

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007112340 2007-04-20
JP2007-112340 2007-04-20

Publications (1)

Publication Number Publication Date
WO2008133089A1 true WO2008133089A1 (ja) 2008-11-06

Family

ID=39925547

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/057290 Ceased WO2008133089A1 (ja) 2007-04-20 2008-04-14 導電性接触子ユニット

Country Status (3)

Country Link
JP (1) JPWO2008133089A1 (ja)
TW (1) TW200848743A (ja)
WO (1) WO2008133089A1 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2384443A4 (en) * 2009-01-30 2013-06-19 Capital Formation Inc CHECKING PROBE WITH FLAT PISTON AND ROUND CYLINDER
JP2016125943A (ja) * 2015-01-06 2016-07-11 オムロン株式会社 ケルビンプローブ、および、これを備えたケルビン検査ユニット
JP2017009569A (ja) * 2015-06-23 2017-01-12 インクス株式会社 積層型コンタクトプローブ
WO2018216273A1 (ja) * 2017-05-24 2018-11-29 山一電機株式会社 Ｍｅｍｓ型プローブ、及び、これを使用した電気検査用装置
TWI677687B (zh) * 2017-04-21 2019-11-21 日商日本麥克隆尼股份有限公司 電性連接裝置
CN112955754A (zh) * 2018-11-08 2021-06-11 欧姆龙株式会社 探针和检查工具
JP2021128055A (ja) * 2020-02-13 2021-09-02 オムロン株式会社 検査ソケット

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11133060A (ja) * 1997-10-31 1999-05-21 Tani Denki Kogyo Kk テスト用端子
JP2000046870A (ja) * 1998-07-30 2000-02-18 Denso Corp 端子接続装置
JP2002365308A (ja) * 2001-06-08 2002-12-18 Japan Electronic Materials Corp 垂直ブレード型プローブ、垂直ブレード型プローブユニット及びそれを用いた垂直ブレード型プローブカード
JP2004138391A (ja) * 2002-10-15 2004-05-13 Renesas Technology Corp 半導体装置の製造方法
JP2004138405A (ja) * 2002-10-15 2004-05-13 Renesas Technology Corp 半導体装置測定用プローブ
JP2005201844A (ja) * 2004-01-16 2005-07-28 Micronics Japan Co Ltd 接触子及び電気的接続装置
JP2006226907A (ja) * 2005-02-18 2006-08-31 Nhk Spring Co Ltd 導電性接触子ユニットおよび導電性接触子
WO2007123150A1 (ja) * 2006-04-18 2007-11-01 Tokyo Electron Limited プローブカード及びガラス基板の穴あけ方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11133060A (ja) * 1997-10-31 1999-05-21 Tani Denki Kogyo Kk テスト用端子
JP2000046870A (ja) * 1998-07-30 2000-02-18 Denso Corp 端子接続装置
JP2002365308A (ja) * 2001-06-08 2002-12-18 Japan Electronic Materials Corp 垂直ブレード型プローブ、垂直ブレード型プローブユニット及びそれを用いた垂直ブレード型プローブカード
JP2004138391A (ja) * 2002-10-15 2004-05-13 Renesas Technology Corp 半導体装置の製造方法
JP2004138405A (ja) * 2002-10-15 2004-05-13 Renesas Technology Corp 半導体装置測定用プローブ
JP2005201844A (ja) * 2004-01-16 2005-07-28 Micronics Japan Co Ltd 接触子及び電気的接続装置
JP2006226907A (ja) * 2005-02-18 2006-08-31 Nhk Spring Co Ltd 導電性接触子ユニットおよび導電性接触子
WO2007123150A1 (ja) * 2006-04-18 2007-11-01 Tokyo Electron Limited プローブカード及びガラス基板の穴あけ方法

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2384443A4 (en) * 2009-01-30 2013-06-19 Capital Formation Inc CHECKING PROBE WITH FLAT PISTON AND ROUND CYLINDER
JP2016125943A (ja) * 2015-01-06 2016-07-11 オムロン株式会社 ケルビンプローブ、および、これを備えたケルビン検査ユニット
WO2016111293A1 (ja) * 2015-01-06 2016-07-14 オムロン株式会社 ケルビンプローブ、および、これを備えたケルビン検査ユニット
JP2017009569A (ja) * 2015-06-23 2017-01-12 インクス株式会社 積層型コンタクトプローブ
TWI677687B (zh) * 2017-04-21 2019-11-21 日商日本麥克隆尼股份有限公司 電性連接裝置
WO2018216273A1 (ja) * 2017-05-24 2018-11-29 山一電機株式会社 Ｍｅｍｓ型プローブ、及び、これを使用した電気検査用装置
CN112955754A (zh) * 2018-11-08 2021-06-11 欧姆龙株式会社 探针和检查工具
JP2021128055A (ja) * 2020-02-13 2021-09-02 オムロン株式会社 検査ソケット

Also Published As

Publication number Publication date
JPWO2008133089A1 (ja) 2010-07-22
TW200848743A (en) 2008-12-16

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