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WO2008123352A1 - 半導体装置 - Google Patents

半導体装置 Download PDF

Info

Publication number
WO2008123352A1
WO2008123352A1 PCT/JP2008/055861 JP2008055861W WO2008123352A1 WO 2008123352 A1 WO2008123352 A1 WO 2008123352A1 JP 2008055861 W JP2008055861 W JP 2008055861W WO 2008123352 A1 WO2008123352 A1 WO 2008123352A1
Authority
WO
WIPO (PCT)
Prior art keywords
germanium layer
dielectric constant
type
insulating film
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/055861
Other languages
English (en)
French (fr)
Inventor
Akihito Tanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP2009509160A priority Critical patent/JP5396268B2/ja
Priority to US12/532,302 priority patent/US8809939B2/en
Publication of WO2008123352A1 publication Critical patent/WO2008123352A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/601—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/751—Insulated-gate field-effect transistors [IGFET] having composition variations in the channel regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/017—Manufacture or treatment using dummy gates in processes wherein at least parts of the final gates are self-aligned to the dummy gates, i.e. replacement gate processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/025—Manufacture or treatment forming recessed gates, e.g. by using local oxidation

Landscapes

  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Thin Film Transistor (AREA)

Abstract

【課題】　ゲルマニウムのような高移動度・高誘電率の材料がチャネルに使用されているＭＩＳＦＥＴを有する半導体装置において、短チャネル効果が抑制され、高駆動電流が得られる半導体装置を提供する。 【解決手段】　ｐ型のシリコン基板の表面にｐ型ウェルを形成する。その上に、ｐ型シリコン基板より誘電率が高いシリコンゲルマニウム層を膜厚が３０ｎｍ以下となるように形成する。更に、その上にシリコンゲルマニウム層より誘電率が高いゲルマニウム層をエピタキシャル成長により膜厚が３乃至４０ｎｍとなるように形成する。このゲルマニウム層をチャネル領域とし、ゲート絶縁膜、ゲート電極、側壁絶縁膜、ｎ型不純物拡散領域及びシリサイド層を形成する。
PCT/JP2008/055861 2007-03-28 2008-03-27 半導体装置 Ceased WO2008123352A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009509160A JP5396268B2 (ja) 2007-03-28 2008-03-27 半導体装置
US12/532,302 US8809939B2 (en) 2007-03-28 2008-03-27 Semiconductor device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007085992 2007-03-28
JP2007-085992 2007-03-28

Publications (1)

Publication Number Publication Date
WO2008123352A1 true WO2008123352A1 (ja) 2008-10-16

Family

ID=39830840

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/055861 Ceased WO2008123352A1 (ja) 2007-03-28 2008-03-27 半導体装置

Country Status (3)

Country Link
US (1) US8809939B2 (ja)
JP (1) JP5396268B2 (ja)
WO (1) WO2008123352A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140091362A1 (en) * 2009-07-28 2014-04-03 Taiwan Semiconductor Manufacturing Company, Ltd. INTEGRATED CIRCUIT TRANSISTOR STRUCTURE WITH HIGH GERMANIUM CONCENTRATION SiGe STRESSOR

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ATE440205T1 (de) 2004-04-23 2009-09-15 Shell Int Research Zur erwärmung von unterirdischen formationen verwendete temperaturbegrenzte heizvorrichtungen
WO2007149622A2 (en) 2006-04-21 2007-12-27 Shell Oil Company Sulfur barrier for use with in situ processes for treating formations
BRPI0810026A2 (pt) 2007-04-20 2017-06-06 Shell Int Res Maartschappij B V sistema de aquecimento para uma formação de subsuperfície, e, método para aquecer uma formação de subsuperfície
US8220539B2 (en) 2008-10-13 2012-07-17 Shell Oil Company Controlling hydrogen pressure in self-regulating nuclear reactors used to treat a subsurface formation
CA2758192A1 (en) 2009-04-10 2010-10-14 Shell Internationale Research Maatschappij B.V. Treatment methodologies for subsurface hydrocarbon containing formations
US9466896B2 (en) 2009-10-09 2016-10-11 Shell Oil Company Parallelogram coupling joint for coupling insulated conductors
US8257112B2 (en) 2009-10-09 2012-09-04 Shell Oil Company Press-fit coupling joint for joining insulated conductors
JP2013524056A (ja) * 2010-04-09 2013-06-17 シエル・インターナシヨナル・リサーチ・マートスハツペイ・ベー・ヴエー 半導体層を有する絶縁導体ヒータ
US8939207B2 (en) 2010-04-09 2015-01-27 Shell Oil Company Insulated conductor heaters with semiconductor layers
US8485256B2 (en) 2010-04-09 2013-07-16 Shell Oil Company Variable thickness insulated conductors
US8943686B2 (en) 2010-10-08 2015-02-03 Shell Oil Company Compaction of electrical insulation for joining insulated conductors
US8586866B2 (en) 2010-10-08 2013-11-19 Shell Oil Company Hydroformed splice for insulated conductors
US8857051B2 (en) 2010-10-08 2014-10-14 Shell Oil Company System and method for coupling lead-in conductor to insulated conductor
WO2012138883A1 (en) 2011-04-08 2012-10-11 Shell Oil Company Systems for joining insulated conductors
JO3139B1 (ar) 2011-10-07 2017-09-20 Shell Int Research تشكيل موصلات معزولة باستخدام خطوة اختزال أخيرة بعد المعالجة الحرارية.
JO3141B1 (ar) 2011-10-07 2017-09-20 Shell Int Research الوصلات المتكاملة للموصلات المعزولة
WO2013052566A1 (en) 2011-10-07 2013-04-11 Shell Oil Company Using dielectric properties of an insulated conductor in a subsurface formation to assess properties of the insulated conductor
US8791502B2 (en) * 2011-10-09 2014-07-29 The Institute of Microelectronics Chinese Academy of Science Semiconductor device and method of manufacturing the same
US10103226B2 (en) 2012-04-30 2018-10-16 International Business Machines Corporation Method of fabricating tunnel transistors with abrupt junctions
CN103456633B (zh) * 2012-05-30 2016-07-06 中芯国际集成电路制造(上海)有限公司 Mos管及其形成方法
CN103456632B (zh) * 2012-05-30 2016-04-20 中芯国际集成电路制造(上海)有限公司 Mos管及其形成方法
US9647094B2 (en) * 2013-08-02 2017-05-09 University Of Kentucky Research Foundation Method of manufacturing a semiconductor heteroepitaxy structure

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04280682A (ja) * 1991-03-08 1992-10-06 Toshiba Corp 半導体装置及びその製造方法
JP2002237590A (ja) * 2001-02-09 2002-08-23 Univ Tohoku Ｍｏｓ型電界効果トランジスタ
US20030052334A1 (en) * 2001-06-18 2003-03-20 Lee Minjoo L. Structure and method for a high-speed semiconductor device
WO2005064686A1 (de) * 2003-12-23 2005-07-14 Infineon Technologies Ag Feldeffekttransistor mit heteroschichtstruktur sowie zugehöriges herstellungsverfahren
JP2006165335A (ja) * 2004-12-08 2006-06-22 Toshiba Corp 半導体装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07321213A (ja) * 1994-05-27 1995-12-08 Hitachi Ltd 半導体集積回路装置およびその製造方法
JP2000077658A (ja) 1998-08-28 2000-03-14 Toshiba Corp 半導体装置の製造方法
US6607948B1 (en) * 1998-12-24 2003-08-19 Kabushiki Kaisha Toshiba Method of manufacturing a substrate using an SiGe layer
US6844227B2 (en) * 2000-12-26 2005-01-18 Matsushita Electric Industrial Co., Ltd. Semiconductor devices and method for manufacturing the same
US7166897B2 (en) * 2004-08-24 2007-01-23 Freescale Semiconductor, Inc. Method and apparatus for performance enhancement in an asymmetrical semiconductor device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04280682A (ja) * 1991-03-08 1992-10-06 Toshiba Corp 半導体装置及びその製造方法
JP2002237590A (ja) * 2001-02-09 2002-08-23 Univ Tohoku Ｍｏｓ型電界効果トランジスタ
US20030052334A1 (en) * 2001-06-18 2003-03-20 Lee Minjoo L. Structure and method for a high-speed semiconductor device
WO2005064686A1 (de) * 2003-12-23 2005-07-14 Infineon Technologies Ag Feldeffekttransistor mit heteroschichtstruktur sowie zugehöriges herstellungsverfahren
JP2006165335A (ja) * 2004-12-08 2006-06-22 Toshiba Corp 半導体装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140091362A1 (en) * 2009-07-28 2014-04-03 Taiwan Semiconductor Manufacturing Company, Ltd. INTEGRATED CIRCUIT TRANSISTOR STRUCTURE WITH HIGH GERMANIUM CONCENTRATION SiGe STRESSOR
US9660082B2 (en) * 2009-07-28 2017-05-23 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated circuit transistor structure with high germanium concentration SiGe stressor

Also Published As

Publication number Publication date
US20100044781A1 (en) 2010-02-25
JPWO2008123352A1 (ja) 2010-07-15
JP5396268B2 (ja) 2014-01-22
US8809939B2 (en) 2014-08-19

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