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WO2008108335A1 - Semiconductor device - Google Patents

Semiconductor device Download PDF

Info

Publication number
WO2008108335A1
WO2008108335A1 PCT/JP2008/053769 JP2008053769W WO2008108335A1 WO 2008108335 A1 WO2008108335 A1 WO 2008108335A1 JP 2008053769 W JP2008053769 W JP 2008053769W WO 2008108335 A1 WO2008108335 A1 WO 2008108335A1
Authority
WO
WIPO (PCT)
Prior art keywords
dram
semiconductor device
logic lsi
gpu
bypassing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/053769
Other languages
French (fr)
Japanese (ja)
Inventor
Isao Sugaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2009502573A priority Critical patent/JP5521546B2/en
Priority to US12/530,093 priority patent/US8183686B2/en
Publication of WO2008108335A1 publication Critical patent/WO2008108335A1/en
Anticipated expiration legal-status Critical
Priority to US13/457,051 priority patent/US8878358B2/en
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/433—Auxiliary members in containers characterised by their shape, e.g. pistons
    • H01L23/4334—Auxiliary members in encapsulations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/427—Cooling by change of state, e.g. use of heat pipes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of semiconductor or other solid state devices
    • H01L25/03—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10D89/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of semiconductor or other solid state devices
    • H01L25/03—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/07—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10D, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group subclass H10D
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of semiconductor or other solid state devices
    • H01L25/18—Assemblies consisting of a plurality of semiconductor or other solid state devices the devices being of the types provided for in two or more different main groups of the same subclass of H10B, H10D, H10F, H10H, H10K or H10N
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes
    • H01L2225/04—All the devices being of a type provided for in the same main group of the same subclass of class H10, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L2225/065—All the devices being of a type provided for in the same main group of the same subclass of class H10
    • H01L2225/06503—Stacked arrangements of devices
    • H01L2225/06589—Thermal management, e.g. cooling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/153—Connection portion
    • H01L2924/1532—Connection portion the connection portion being formed on the die mounting surface of the substrate
    • H01L2924/15321—Connection portion the connection portion being formed on the die mounting surface of the substrate being a ball array, e.g. BGA

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

Between a logic LSI (4) arranged on one side of a DRAM (1) and jointed to the DRAM and a radiating member (6) arranged on the other side of the DRAM (1) for irradiating the heats of the DRAM (1) and the logic LSI (4), there is disposed a heat bypass passage (5), which extends inbetween while bypassing the DRAM (1). Thus, it is possible to provide a semiconductor device, which can irradiate the heat generated from the logic LSI such as CPU or GPU thereby to reduce the temperature rise and the temperature distribution.
PCT/JP2008/053769 2007-03-06 2008-03-03 Semiconductor device Ceased WO2008108335A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009502573A JP5521546B2 (en) 2007-03-06 2008-03-03 Semiconductor device
US12/530,093 US8183686B2 (en) 2007-03-06 2008-03-03 Semiconductor device
US13/457,051 US8878358B2 (en) 2007-03-06 2012-04-26 Semiconductor device

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007055354 2007-03-06
JP2007-055354 2007-03-06
JP2007091082 2007-03-30
JP2007-091082 2007-03-30

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US12/530,093 A-371-Of-International US8183686B2 (en) 2007-03-06 2008-03-03 Semiconductor device
US13/457,051 Continuation US8878358B2 (en) 2007-03-06 2012-04-26 Semiconductor device

Publications (1)

Publication Number Publication Date
WO2008108335A1 true WO2008108335A1 (en) 2008-09-12

Family

ID=39738212

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/053769 Ceased WO2008108335A1 (en) 2007-03-06 2008-03-03 Semiconductor device

Country Status (5)

Country Link
US (2) US8183686B2 (en)
JP (1) JP5521546B2 (en)
KR (1) KR101477309B1 (en)
TW (1) TWI456712B (en)
WO (1) WO2008108335A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010109333A (en) * 2008-11-03 2010-05-13 Headway Technologies Inc Layered chip package with heat sink
CN103988296A (en) * 2011-11-14 2014-08-13 美光科技公司 Stacked semiconductor die assemblies with multiple thermal paths and associated systems and methods

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9136202B2 (en) * 2012-04-17 2015-09-15 Qualcomm Incorporated Enhanced package thermal management using external and internal capacitive thermal material
CN104053337A (en) * 2013-03-15 2014-09-17 君瞻科技股份有限公司 Electronic device with heat radiation function and heat radiation module thereof
US10541229B2 (en) 2015-02-19 2020-01-21 Micron Technology, Inc. Apparatuses and methods for semiconductor die heat dissipation
US10008395B2 (en) * 2016-10-19 2018-06-26 Micron Technology, Inc. Stacked semiconductor die assemblies with high efficiency thermal paths and molded underfill
US12317407B2 (en) 2021-11-12 2025-05-27 Samsung Electronics Co., Ltd. Electronic device including printed circuit board structure including thermal interface material
WO2023085672A1 (en) * 2021-11-12 2023-05-19 삼성전자주식회사 Electronic device comprising printed circuit board structure which accommodates thermal interface material

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336052U (en) * 1986-08-27 1988-03-08
JPH0878616A (en) * 1994-09-02 1996-03-22 Fujitsu Ltd Multi-chip module
JPH0878618A (en) * 1994-09-08 1996-03-22 Fujitsu Ltd Multi-chip module and manufacturing method thereof
JP2002110869A (en) * 2000-09-26 2002-04-12 Toshiba Corp Semiconductor device
JP2005005529A (en) * 2003-06-12 2005-01-06 Toshiba Corp 3D mounting semiconductor module and 3D mounting semiconductor system
JP2005166752A (en) * 2003-11-28 2005-06-23 Ngk Spark Plug Co Ltd Cooling device for semiconductor part and semiconductor part with cooling device
JP2006210892A (en) * 2004-12-27 2006-08-10 Nec Corp Semiconductor device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336052A (en) 1986-07-30 1988-02-16 Aisin Seiki Co Ltd High temperature heat exchanger of stirling engine
JPH07235633A (en) * 1994-02-25 1995-09-05 Fujitsu Ltd Multi-chip module
TW367436B (en) * 1997-11-19 1999-08-21 Sun Tai Lin Heat pipes radiator
US7271479B2 (en) * 2004-11-03 2007-09-18 Broadcom Corporation Flip chip package including a non-planar heat spreader and method of making the same

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336052U (en) * 1986-08-27 1988-03-08
JPH0878616A (en) * 1994-09-02 1996-03-22 Fujitsu Ltd Multi-chip module
JPH0878618A (en) * 1994-09-08 1996-03-22 Fujitsu Ltd Multi-chip module and manufacturing method thereof
JP2002110869A (en) * 2000-09-26 2002-04-12 Toshiba Corp Semiconductor device
JP2005005529A (en) * 2003-06-12 2005-01-06 Toshiba Corp 3D mounting semiconductor module and 3D mounting semiconductor system
JP2005166752A (en) * 2003-11-28 2005-06-23 Ngk Spark Plug Co Ltd Cooling device for semiconductor part and semiconductor part with cooling device
JP2006210892A (en) * 2004-12-27 2006-08-10 Nec Corp Semiconductor device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010109333A (en) * 2008-11-03 2010-05-13 Headway Technologies Inc Layered chip package with heat sink
CN103988296A (en) * 2011-11-14 2014-08-13 美光科技公司 Stacked semiconductor die assemblies with multiple thermal paths and associated systems and methods
JP2014533440A (en) * 2011-11-14 2014-12-11 マイクロン テクノロジー， インク． Thermally controlled semiconductor die assembly, semiconductor device including the same, and related methods
JP2014533439A (en) * 2011-11-14 2014-12-11 マイクロン テクノロジー， インク． Stacked semiconductor die assemblies with multiple thermal paths, and related systems and methods
US9269646B2 (en) 2011-11-14 2016-02-23 Micron Technology, Inc. Semiconductor die assemblies with enhanced thermal management and semiconductor devices including same
US10170389B2 (en) 2011-11-14 2019-01-01 Micron Technology, Inc. Stacked semiconductor die assemblies with multiple thermal paths and associated systems and methods
US10741468B2 (en) 2011-11-14 2020-08-11 Micron Technology, Inc. Stacked semiconductor die assemblies with multiple thermal paths and associated systems and methods
US11594462B2 (en) 2011-11-14 2023-02-28 Micron Technology, Inc. Stacked semiconductor die assemblies with multiple thermal paths and associated systems and methods

Also Published As

Publication number Publication date
JP5521546B2 (en) 2014-06-18
US20100102441A1 (en) 2010-04-29
KR101477309B1 (en) 2014-12-29
TWI456712B (en) 2014-10-11
US8878358B2 (en) 2014-11-04
JPWO2008108335A1 (en) 2010-06-17
US20120205792A1 (en) 2012-08-16
US8183686B2 (en) 2012-05-22
KR20090119772A (en) 2009-11-19
TW200839978A (en) 2008-10-01

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