[go: up one dir, main page]

WO2008102848A1 - 陽極接合用ガラス - Google Patents

陽極接合用ガラス Download PDF

Info

Publication number
WO2008102848A1
WO2008102848A1 PCT/JP2008/052977 JP2008052977W WO2008102848A1 WO 2008102848 A1 WO2008102848 A1 WO 2008102848A1 JP 2008052977 W JP2008052977 W JP 2008052977W WO 2008102848 A1 WO2008102848 A1 WO 2008102848A1
Authority
WO
WIPO (PCT)
Prior art keywords
glass
anodic bonding
thermal expansion
expansion coefficient
mole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/052977
Other languages
English (en)
French (fr)
Inventor
Masanori Shojiya
Hirotaka Koyo
Koichi Sakaguchi
Satoshi Jibiki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to US12/527,308 priority Critical patent/US20100029460A1/en
Priority to JP2009500235A priority patent/JP5318748B2/ja
Publication of WO2008102848A1 publication Critical patent/WO2008102848A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/02—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing by fusing glass directly to metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
    • C03C3/085—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
    • C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
    • C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
    • C03C3/093—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium containing zinc or zirconium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/095—Glass compositions containing silica with 40% to 90% silica, by weight containing rare earths

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Glass Compositions (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

　本発明は、低い熱膨張係数を持ち、レーザ光による微細加工が可能な陽極接合用ガラスを提供する。本発明は、Ｌｉ2Ｏ＋Ｎａ2Ｏ＋Ｋ2Ｏ：１～６モル％を含む基本ガラス組成を有し、室温から４５０°Cにおける平均線膨張係数が、３２×１０-7～３９×１０-7Ｋ-1である陽極接合用ガラスであって、着色剤である金属酸化物を、前記基本ガラス組成に対して０．０１～５モル％含み、５３５ｎｍ以下の特定の波長における吸収係数が０．５～５０ｃｍ-1である陽極接合用ガラスである。
PCT/JP2008/052977 2007-02-22 2008-02-21 陽極接合用ガラス Ceased WO2008102848A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/527,308 US20100029460A1 (en) 2007-02-22 2008-02-21 Glass for anodic bonding
JP2009500235A JP5318748B2 (ja) 2007-02-22 2008-02-21 陽極接合用ガラス

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-042621 2007-02-22
JP2007042621 2007-02-22

Publications (1)

Publication Number Publication Date
WO2008102848A1 true WO2008102848A1 (ja) 2008-08-28

Family

ID=39710120

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/052977 Ceased WO2008102848A1 (ja) 2007-02-22 2008-02-21 陽極接合用ガラス

Country Status (3)

Country Link
US (1) US20100029460A1 (ja)
JP (1) JP5318748B2 (ja)
WO (1) WO2008102848A1 (ja)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130005560A1 (en) * 2009-10-28 2013-01-03 Abengoa Solar New Technologies, S.A. Novel glass compositions and method for producing a glass/metal join
WO2017217496A1 (ja) * 2016-06-17 2017-12-21 日本板硝子株式会社 レーザ加工用ガラス
US11062986B2 (en) 2017-05-25 2021-07-13 Corning Incorporated Articles having vias with geometry attributes and methods for fabricating the same
US11078112B2 (en) 2017-05-25 2021-08-03 Corning Incorporated Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same
US11114309B2 (en) 2016-06-01 2021-09-07 Corning Incorporated Articles and methods of forming vias in substrates
US11130701B2 (en) 2016-09-30 2021-09-28 Corning Incorporated Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots
US11148225B2 (en) 2013-12-17 2021-10-19 Corning Incorporated Method for rapid laser drilling of holes in glass and products made therefrom
US11345625B2 (en) 2013-01-15 2022-05-31 Corning Laser Technologies GmbH Method and device for the laser-based machining of sheet-like substrates
US11542190B2 (en) 2016-10-24 2023-01-03 Corning Incorporated Substrate processing station for laser-based machining of sheet-like glass substrates
US11556039B2 (en) 2013-12-17 2023-01-17 Corning Incorporated Electrochromic coated glass articles and methods for laser processing the same
US11554984B2 (en) 2018-02-22 2023-01-17 Corning Incorporated Alkali-free borosilicate glasses with low post-HF etch roughness
US11648623B2 (en) 2014-07-14 2023-05-16 Corning Incorporated Systems and methods for processing transparent materials using adjustable laser beam focal lines
US11697178B2 (en) 2014-07-08 2023-07-11 Corning Incorporated Methods and apparatuses for laser processing materials
US11713271B2 (en) 2013-03-21 2023-08-01 Corning Laser Technologies GmbH Device and method for cutting out contours from planar substrates by means of laser
US11774233B2 (en) 2016-06-29 2023-10-03 Corning Incorporated Method and system for measuring geometric parameters of through holes
US11773004B2 (en) 2015-03-24 2023-10-03 Corning Incorporated Laser cutting and processing of display glass compositions
US12180108B2 (en) 2017-12-19 2024-12-31 Corning Incorporated Methods for etching vias in glass-based articles employing positive charge organic molecules

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9302937B2 (en) 2010-05-14 2016-04-05 Corning Incorporated Damage-resistant glass articles and method
TWI572480B (zh) 2011-07-25 2017-03-01 康寧公司 經層壓及離子交換之強化玻璃疊層
KR102250735B1 (ko) * 2012-02-29 2021-05-12 코닝 인코포레이티드 낮은 cte, 이온-교환가능한 유리 조성물 및 이를 포함하는 유리 제품
US9359251B2 (en) 2012-02-29 2016-06-07 Corning Incorporated Ion exchanged glasses via non-error function compressive stress profiles
WO2014079478A1 (en) 2012-11-20 2014-05-30 Light In Light Srl High speed laser processing of transparent materials
US11079309B2 (en) 2013-07-26 2021-08-03 Corning Incorporated Strengthened glass articles having improved survivability
US9701563B2 (en) 2013-12-17 2017-07-11 Corning Incorporated Laser cut composite glass article and method of cutting
US10442719B2 (en) 2013-12-17 2019-10-15 Corning Incorporated Edge chamfering methods
US9815730B2 (en) 2013-12-17 2017-11-14 Corning Incorporated Processing 3D shaped transparent brittle substrate
US20150165560A1 (en) 2013-12-17 2015-06-18 Corning Incorporated Laser processing of slots and holes
US9850160B2 (en) 2013-12-17 2017-12-26 Corning Incorporated Laser cutting of display glass compositions
US9676167B2 (en) 2013-12-17 2017-06-13 Corning Incorporated Laser processing of sapphire substrate and related applications
US9517968B2 (en) 2014-02-24 2016-12-13 Corning Incorporated Strengthened glass with deep depth of compression
TWI697403B (zh) 2014-06-19 2020-07-01 美商康寧公司 無易碎應力分布曲線的玻璃
US10526234B2 (en) 2014-07-14 2020-01-07 Corning Incorporated Interface block; system for and method of cutting a substrate being transparent within a range of wavelengths using such interface block
WO2016010943A2 (en) 2014-07-14 2016-01-21 Corning Incorporated Method and system for arresting crack propagation
WO2016010949A1 (en) 2014-07-14 2016-01-21 Corning Incorporated Method and system for forming perforations
WO2016057590A1 (en) 2014-10-07 2016-04-14 Corning Incorporated Glass article with determined stress profile and method of producing the same
CN206580739U (zh) 2014-10-08 2017-10-24 康宁股份有限公司 玻璃基制品
US10150698B2 (en) 2014-10-31 2018-12-11 Corning Incorporated Strengthened glass with ultra deep depth of compression
DK3215471T3 (da) 2014-11-04 2022-01-17 Corning Inc Dybe, ubrydelige belastningsprofiler og fremgangsmåde til fremstilling
US10047001B2 (en) 2014-12-04 2018-08-14 Corning Incorporated Glass cutting systems and methods using non-diffracting laser beams
JP2018507154A (ja) 2015-01-12 2018-03-15 コーニング インコーポレイテッド マルチフォトン吸収方法を用いた熱強化基板のレーザー切断
US20170348903A1 (en) * 2015-02-10 2017-12-07 Optomec, Inc. Fabrication of Three-Dimensional Materials Gradient Structures by In-Flight Curing of Aerosols
WO2016130709A1 (en) * 2015-02-10 2016-08-18 Optomec, Inc. Fabrication of three-dimensional structures by in-flight curing of aerosols
CN107666983B (zh) 2015-03-27 2020-10-02 康宁股份有限公司 可透气窗及其制造方法
US11186060B2 (en) 2015-07-10 2021-11-30 Corning Incorporated Methods of continuous fabrication of holes in flexible substrate sheets and products relating to the same
US9701569B2 (en) 2015-07-21 2017-07-11 Corning Incorporated Glass articles exhibiting improved fracture performance
US11613103B2 (en) 2015-07-21 2023-03-28 Corning Incorporated Glass articles exhibiting improved fracture performance
EP3362417A1 (en) * 2015-10-14 2018-08-22 Corning Incorporated Laminated glass article with determined stress profile and method for forming the same
KR102393206B1 (ko) 2015-12-11 2022-05-03 코닝 인코포레이티드 금속 산화물 농도 구배를 포함하는 융합-형성가능한 유리계 제품
US10150140B2 (en) 2016-02-09 2018-12-11 King Fahd University Of Petroleum And Minerals Superhydrophobic and self-cleaning substrate and a method of coating
EP3397597B1 (en) 2016-04-08 2023-11-08 Corning Incorporated Glass-based articles including a stress profile comprising two regions, and methods of making
CN109071316B (zh) 2016-04-08 2020-03-27 康宁股份有限公司 包含金属氧化物浓度梯度的玻璃基制品
SG11201809797PA (en) 2016-05-06 2018-12-28 Corning Inc Laser cutting and removal of contoured shapes from transparent substrates
KR20190035805A (ko) 2016-07-29 2019-04-03 코닝 인코포레이티드 레이저 처리를 위한 장치 및 방법
US10522963B2 (en) 2016-08-30 2019-12-31 Corning Incorporated Laser cutting of materials with intensity mapping optical system
US10752534B2 (en) 2016-11-01 2020-08-25 Corning Incorporated Apparatuses and methods for laser processing laminate workpiece stacks
US10688599B2 (en) 2017-02-09 2020-06-23 Corning Incorporated Apparatus and methods for laser processing transparent workpieces using phase shifted focal lines
US10626040B2 (en) 2017-06-15 2020-04-21 Corning Incorporated Articles capable of individual singulation
WO2019226485A1 (en) * 2018-05-22 2019-11-28 Corning Incorporated Low temperature moldable sheet forming glass compositions

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0753235A (ja) * 1993-06-08 1995-02-28 Iwaki Glass Kk 低膨張ガラス
JP2005067908A (ja) * 2003-08-22 2005-03-17 Nippon Sheet Glass Co Ltd レーザ加工用ガラス
JP2006184184A (ja) * 2004-12-28 2006-07-13 Alps Electric Co Ltd ガラス基板及びその製造方法
JP2006216882A (ja) * 2005-02-07 2006-08-17 Seiko Instruments Inc 力学量センサ及び電子機器並びに力学量センサの製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4379851A (en) * 1982-06-28 1983-04-12 Corning Glass Works Tinted borosilicate glasses
US5374291A (en) * 1991-12-10 1994-12-20 Director-General Of Agency Of Industrial Science And Technology Method of processing photosensitive glass
DE4338128C1 (de) * 1993-11-08 1995-05-18 Jenaer Glaswerk Gmbh Borosilikatglas mit hoher Transmission im UV-Bereich, niedriger Wärmeausdehnung und hoher chemischer Beständigkeit, Verfahren zu seiner Herstellung und seine Verwendung
US6392683B1 (en) * 1997-09-26 2002-05-21 Sumitomo Heavy Industries, Ltd. Method for making marks in a transparent material by using a laser
US6677260B2 (en) * 1998-11-02 2004-01-13 Corning Incorporated Ultraviolet absorbing and yellow light filtering glass article
JP3762157B2 (ja) * 1999-09-02 2006-04-05 旭テクノグラス株式会社 陽極接合用ガラス
DE10392962T5 (de) * 2002-07-24 2005-08-18 Nippon Sheet Glass Co., Ltd. Glas zur Laser-Behandlung
JP4540361B2 (ja) * 2004-02-18 2010-09-08 日本板硝子株式会社 凹凸のある表面を有するガラス基材の製造方法
US20090013724A1 (en) * 2006-02-22 2009-01-15 Nippon Sheet Glass Company, Limited Glass Processing Method Using Laser and Processing Device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0753235A (ja) * 1993-06-08 1995-02-28 Iwaki Glass Kk 低膨張ガラス
JP2005067908A (ja) * 2003-08-22 2005-03-17 Nippon Sheet Glass Co Ltd レーザ加工用ガラス
JP2006184184A (ja) * 2004-12-28 2006-07-13 Alps Electric Co Ltd ガラス基板及びその製造方法
JP2006216882A (ja) * 2005-02-07 2006-08-17 Seiko Instruments Inc 力学量センサ及び電子機器並びに力学量センサの製造方法

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8937026B2 (en) * 2009-10-28 2015-01-20 Abengoa Solar New Technologies, S.A. Glass compositions and method for producing a glass/metal join
US20130005560A1 (en) * 2009-10-28 2013-01-03 Abengoa Solar New Technologies, S.A. Novel glass compositions and method for producing a glass/metal join
US11345625B2 (en) 2013-01-15 2022-05-31 Corning Laser Technologies GmbH Method and device for the laser-based machining of sheet-like substrates
US11713271B2 (en) 2013-03-21 2023-08-01 Corning Laser Technologies GmbH Device and method for cutting out contours from planar substrates by means of laser
US11148225B2 (en) 2013-12-17 2021-10-19 Corning Incorporated Method for rapid laser drilling of holes in glass and products made therefrom
US11556039B2 (en) 2013-12-17 2023-01-17 Corning Incorporated Electrochromic coated glass articles and methods for laser processing the same
US11697178B2 (en) 2014-07-08 2023-07-11 Corning Incorporated Methods and apparatuses for laser processing materials
US11648623B2 (en) 2014-07-14 2023-05-16 Corning Incorporated Systems and methods for processing transparent materials using adjustable laser beam focal lines
US11773004B2 (en) 2015-03-24 2023-10-03 Corning Incorporated Laser cutting and processing of display glass compositions
US11114309B2 (en) 2016-06-01 2021-09-07 Corning Incorporated Articles and methods of forming vias in substrates
WO2017217496A1 (ja) * 2016-06-17 2017-12-21 日本板硝子株式会社 レーザ加工用ガラス
US11774233B2 (en) 2016-06-29 2023-10-03 Corning Incorporated Method and system for measuring geometric parameters of through holes
US11130701B2 (en) 2016-09-30 2021-09-28 Corning Incorporated Apparatuses and methods for laser processing transparent workpieces using non-axisymmetric beam spots
US11542190B2 (en) 2016-10-24 2023-01-03 Corning Incorporated Substrate processing station for laser-based machining of sheet-like glass substrates
US11078112B2 (en) 2017-05-25 2021-08-03 Corning Incorporated Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same
US11062986B2 (en) 2017-05-25 2021-07-13 Corning Incorporated Articles having vias with geometry attributes and methods for fabricating the same
US11972993B2 (en) 2017-05-25 2024-04-30 Corning Incorporated Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same
US12180108B2 (en) 2017-12-19 2024-12-31 Corning Incorporated Methods for etching vias in glass-based articles employing positive charge organic molecules
US11554984B2 (en) 2018-02-22 2023-01-17 Corning Incorporated Alkali-free borosilicate glasses with low post-HF etch roughness

Also Published As

Publication number Publication date
US20100029460A1 (en) 2010-02-04
JP5318748B2 (ja) 2013-10-16
JPWO2008102848A1 (ja) 2010-05-27

Similar Documents

Publication Publication Date Title
WO2008102848A1 (ja) 陽極接合用ガラス
ES2311794T3 (es) Composicion de vidrio silico-sodico-calcico destinado a la fabricacion de acristalamientos.
JP5842318B2 (ja) 低日射透過率ガラス
EP1074519A3 (en) WDM optical filter and glass substrate for use in a WDM optical filter
WO2010138698A3 (en) Fusion formable sodium containing glass
JP2009517319A5 (ja)
DE602006021471D1 (de) Kristallisationsbeständige glaszusammensetzungen, die zur herstellung von glasfritten für mikroreaktoren geeignet sind
DE602007001237D1 (de) Effektpigmente mit einem Substrat aus Glasplättchen
BR0109387A (pt) Ferramentas abrasivas com liga vitrificada
MY171124A (en) Glass for use as substrate for information recording medium,substrate for information recording medium and information recording medium, and their production methods
WO2008099687A1 (ja) 太陽電池用ガラス基板
WO2008149888A1 (ja) 無アルカリガラスおよび無アルカリガラス基板
WO2007050529A3 (en) Glass compositions
WO2009060871A1 (ja) 基板用ガラス板
TW200730463A (en) Glass paste for overcoat and thick-film resistance element
WO2008117758A1 (ja) データ記憶媒体用基板ガラスおよびガラス基板
MY157935A (en) Glass for information recording media substrate
JP2008056554A5 (ja)
WO2007143069A3 (en) Reduced striae low expansion glass and elements, and a method for making same
WO2007140012A3 (en) Immersion fluids for lithography
TW200722287A (en) Base with film and glass for film formation
TW200602425A (en) Lens for glasses
WO2008096876A1 (ja) 太陽電池モジュール、結晶シリコン系太陽電池用カバーガラスおよび薄膜系太陽電池用ガラス基板
WO2007106274A3 (en) Method of making glass including use of boron oxide for reducing glass refiting time
ES2595629T3 (es) Composición de vidrio gris destinada a la fabricación de acristalamiento

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08711760

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2009500235

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 12527308

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08711760

Country of ref document: EP

Kind code of ref document: A1