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WO2008149544A1 - 型、微細加工品およびそれらの製造方法 - Google Patents

型、微細加工品およびそれらの製造方法 Download PDF

Info

Publication number
WO2008149544A1
WO2008149544A1 PCT/JP2008/001399 JP2008001399W WO2008149544A1 WO 2008149544 A1 WO2008149544 A1 WO 2008149544A1 JP 2008001399 W JP2008001399 W JP 2008001399W WO 2008149544 A1 WO2008149544 A1 WO 2008149544A1
Authority
WO
WIPO (PCT)
Prior art keywords
resin
microprocessed
article
manufacturing methods
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/001399
Other languages
English (en)
French (fr)
Inventor
Takahisa Kusuura
Anupam Mitra
Yoshiaki Takaya
Takuro Satsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maruzen Petrochemical Co Ltd
Scivax Corp
Original Assignee
Maruzen Petrochemical Co Ltd
Scivax Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Maruzen Petrochemical Co Ltd, Scivax Corp filed Critical Maruzen Petrochemical Co Ltd
Priority to JP2009517722A priority Critical patent/JP5456465B2/ja
Priority to EP08763996A priority patent/EP2163367A4/en
Priority to US12/602,911 priority patent/US20100304087A1/en
Publication of WO2008149544A1 publication Critical patent/WO2008149544A1/ja
Anticipated expiration legal-status Critical
Priority to US14/028,681 priority patent/US20140015162A1/en
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
    • B29C33/424—Moulding surfaces provided with means for marking or patterning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B29C2059/023—Microembossing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/40—Plastics, e.g. foam or rubber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness

Landscapes

  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Decoration By Transfer Pictures (AREA)

Abstract

　被成型物に転写するための成型パターン（２Ａ）を有するインプリント用の型（100）であって、熱可塑性樹脂や熱硬化性樹脂、光硬化性樹脂等にインプリント法によって、所定の基礎パターン（１Ａ）を有する基層（１）を形成し、ＣＶＤやＰＶＤ、メッキ等の表面処理技術を用いることにより、当該基礎パターン（１Ａ）の表面に沿って成型パターン（２Ａ）を形づくるように成型層（２）を形成する。これにより、従来用いられているシリコン型や金属型と同等の機能を有しつつ、簡易に製造可能な型を提供する。
PCT/JP2008/001399 2007-06-04 2008-06-03 型、微細加工品およびそれらの製造方法 Ceased WO2008149544A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009517722A JP5456465B2 (ja) 2007-06-04 2008-06-03 微細加工品およびその製造方法
EP08763996A EP2163367A4 (en) 2007-06-04 2008-06-03 FORM, MICROPROCESSED ARTICLE AND THEIR MANUFACTURING PROCESS
US12/602,911 US20100304087A1 (en) 2007-06-04 2008-06-03 Mold, Fine Pattern Product, and Method of Manufacturing Those
US14/028,681 US20140015162A1 (en) 2007-06-04 2013-09-17 Mold, fine pattern product, and method of manufacturing those

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-148213 2007-06-04
JP2007148213 2007-06-04
JP2007-312424 2007-12-03
JP2007312424 2007-12-03

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US14/028,681 Division US20140015162A1 (en) 2007-06-04 2013-09-17 Mold, fine pattern product, and method of manufacturing those

Publications (1)

Publication Number Publication Date
WO2008149544A1 true WO2008149544A1 (ja) 2008-12-11

Family

ID=40093376

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/001399 Ceased WO2008149544A1 (ja) 2007-06-04 2008-06-03 型、微細加工品およびそれらの製造方法

Country Status (5)

Country Link
US (2) US20100304087A1 (ja)
EP (1) EP2163367A4 (ja)
JP (1) JP5456465B2 (ja)
KR (1) KR20100031522A (ja)
WO (1) WO2008149544A1 (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009148138A1 (ja) * 2008-06-05 2009-12-10 旭硝子株式会社 ナノインプリント用モールド、その製造方法および表面に微細凹凸構造を有する樹脂成形体ならびにワイヤグリッド型偏光子の製造方法
WO2011013630A1 (ja) * 2009-07-29 2011-02-03 日産化学工業株式会社 ナノインプリント用レジスト下層膜形成組成物
US20120133077A1 (en) * 2009-08-07 2012-05-31 Soken Chemical & Engineering Co., Ltd. Resin Mold for Imprinting and Method for Producing the Same
JP2013091307A (ja) * 2011-10-27 2013-05-16 Sumitomo Bakelite Co Ltd 成形体の製造方法
JPWO2012161185A1 (ja) * 2011-05-25 2014-07-31 三菱レイヨン株式会社 シロキサンオリゴマーの製造方法
WO2015019923A1 (ja) * 2013-08-09 2015-02-12 綜研化学株式会社 マイクロコンタクトプリント用スタンパ、及びこれを用いた構造体の製造方法
KR20190008888A (ko) 2016-05-18 2019-01-25 소켄 케미칼 앤드 엔지니어링 캄파니, 리미티드 광경화성 수지 조성물, 그 수지층 및 임프린트용 몰드
WO2024203485A1 (ja) * 2023-03-29 2024-10-03 日本ゼオン株式会社 光インプリントモールド用樹脂組成物、及び光インプリントモールド

Families Citing this family (7)

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Publication number Priority date Publication date Assignee Title
DK2602089T3 (da) 2010-08-06 2018-01-29 Soken Kagaku Kk Resinform til nanotryk og fremgangsmåde til fremstilling deraf
US9249015B2 (en) 2013-02-27 2016-02-02 International Business Machines Corporation Mold for forming complex 3D MEMS components
JP2014168868A (ja) * 2013-03-01 2014-09-18 Sony Corp 転写型および構造体の製造方法
US20150175467A1 (en) * 2013-12-23 2015-06-25 Infineon Technologies Austria Ag Mold, method for producing a mold, and method for forming a mold article
KR102453211B1 (ko) * 2015-07-30 2022-10-07 가부시끼가이샤 다나자와 핫꼬오샤 수지 성형용 금형
US10913874B2 (en) * 2016-12-09 2021-02-09 Lg Chem, Ltd. Encapsulating composition
US12136564B2 (en) 2020-03-30 2024-11-05 Canon Kabushiki Kaisha Superstrate and method of making it

Citations (2)

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Publication number Priority date Publication date Assignee Title
JP2002283354A (ja) * 2001-03-27 2002-10-03 Daikin Ind Ltd インプリント加工用金型およびその製造方法
JP2007116163A (ja) * 2005-10-18 2007-05-10 Korea Inst Of Machinery & Materials 微細インプリントリソグラフィ用スタンプ及びその製造方法

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JPH04157637A (ja) * 1990-10-19 1992-05-29 Nikon Corp プラスチック・スタンパーの製造方法
JP3367518B2 (ja) * 1999-12-09 2003-01-14 日本電気株式会社 成形型とこれを用いたディスプレイパネルの隔壁形成方法
EP1257878B1 (en) * 2000-01-21 2006-07-05 Obducat Aktiebolag A mold for nano imprinting
EP1193056A1 (en) * 2000-09-29 2002-04-03 International Business Machines Corporation Silicone elastomer stamp with hydrophilic surfaces and method of making same
EP1513688B1 (en) * 2002-06-20 2006-11-29 Obducat AB Mold tool method of manufacturing a mold tool and storage medium formed by use of the mold tool
JP4326190B2 (ja) * 2002-07-10 2009-09-02 スリーエム イノベイティブ プロパティズ カンパニー 可とう性成形型及びその製造方法
JP3986386B2 (ja) * 2002-07-17 2007-10-03 スリーエム イノベイティブ プロパティズ カンパニー 微細構造体の製造方法
US20060266734A1 (en) * 2003-01-15 2006-11-30 Mitsuru Fujii Device, method, and system for pattern forming
JP2008500914A (ja) * 2004-05-28 2008-01-17 オブデュキャット、アクチボラグ インプリント方法に使用する変性された金属製成形型
JP4584754B2 (ja) * 2005-04-06 2010-11-24 株式会社日立産機システム ナノプリント金型、その製造方法及びこの金型を用いたナノプリント装置並びにナノプリント方法
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002283354A (ja) * 2001-03-27 2002-10-03 Daikin Ind Ltd インプリント加工用金型およびその製造方法
JP2007116163A (ja) * 2005-10-18 2007-05-10 Korea Inst Of Machinery & Materials 微細インプリントリソグラフィ用スタンプ及びその製造方法

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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8709317B2 (en) 2008-06-05 2014-04-29 Asahi Glass Company, Limited Mold for nanoimprinting, its production process, and processes for producing molded resin having fine concavo-convex structure on its surface and wire-grid polarizer
JPWO2009148138A1 (ja) * 2008-06-05 2011-11-04 旭硝子株式会社 ナノインプリント用モールド、その製造方法および表面に微細凹凸構造を有する樹脂成形体ならびにワイヤグリッド型偏光子の製造方法
WO2009148138A1 (ja) * 2008-06-05 2009-12-10 旭硝子株式会社 ナノインプリント用モールド、その製造方法および表面に微細凹凸構造を有する樹脂成形体ならびにワイヤグリッド型偏光子の製造方法
WO2011013630A1 (ja) * 2009-07-29 2011-02-03 日産化学工業株式会社 ナノインプリント用レジスト下層膜形成組成物
US9946158B2 (en) 2009-07-29 2018-04-17 Nissan Chemical Industries, Ltd. Composition for forming resist underlayer film for nanoimprint
JP5534246B2 (ja) * 2009-07-29 2014-06-25 日産化学工業株式会社 ナノインプリント用レジスト下層膜形成組成物
US20120133077A1 (en) * 2009-08-07 2012-05-31 Soken Chemical & Engineering Co., Ltd. Resin Mold for Imprinting and Method for Producing the Same
JP2015201652A (ja) * 2009-08-07 2015-11-12 綜研化学株式会社 インプリント用樹脂製モールドおよびその製造方法
US9354512B2 (en) 2009-08-07 2016-05-31 Soken Chemical & Engineering Co., Ltd. Resin mold for imprinting and method for producing the same
JPWO2011016549A1 (ja) * 2009-08-07 2013-01-17 綜研化学株式会社 インプリント用樹脂製モールドおよびその製造方法
JPWO2012161185A1 (ja) * 2011-05-25 2014-07-31 三菱レイヨン株式会社 シロキサンオリゴマーの製造方法
JP2013091307A (ja) * 2011-10-27 2013-05-16 Sumitomo Bakelite Co Ltd 成形体の製造方法
WO2015019923A1 (ja) * 2013-08-09 2015-02-12 綜研化学株式会社 マイクロコンタクトプリント用スタンパ、及びこれを用いた構造体の製造方法
KR20190008888A (ko) 2016-05-18 2019-01-25 소켄 케미칼 앤드 엔지니어링 캄파니, 리미티드 광경화성 수지 조성물, 그 수지층 및 임프린트용 몰드
WO2024203485A1 (ja) * 2023-03-29 2024-10-03 日本ゼオン株式会社 光インプリントモールド用樹脂組成物、及び光インプリントモールド

Also Published As

Publication number Publication date
US20100304087A1 (en) 2010-12-02
EP2163367A4 (en) 2011-03-23
JP5456465B2 (ja) 2014-03-26
EP2163367A1 (en) 2010-03-17
JPWO2008149544A1 (ja) 2010-08-19
KR20100031522A (ko) 2010-03-22
US20140015162A1 (en) 2014-01-16

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