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WO2008143011A1 - 薄膜センサ、薄膜センサモジュールおよび薄膜センサの製造方法 - Google Patents

薄膜センサ、薄膜センサモジュールおよび薄膜センサの製造方法 Download PDF

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Publication number
WO2008143011A1
WO2008143011A1 PCT/JP2008/058561 JP2008058561W WO2008143011A1 WO 2008143011 A1 WO2008143011 A1 WO 2008143011A1 JP 2008058561 W JP2008058561 W JP 2008058561W WO 2008143011 A1 WO2008143011 A1 WO 2008143011A1
Authority
WO
WIPO (PCT)
Prior art keywords
thin film
film sensor
manufacturing
substrate
module
Prior art date
Application number
PCT/JP2008/058561
Other languages
English (en)
French (fr)
Inventor
Tomoyuki Maeda
Makoto Ikeda
Mitsuhiro Wada
Shinichi Inoue
Original Assignee
Mitsui Mining & Smelting Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Mining & Smelting Co., Ltd. filed Critical Mitsui Mining & Smelting Co., Ltd.
Priority to JP2008524885A priority Critical patent/JPWO2008143011A1/ja
Publication of WO2008143011A1 publication Critical patent/WO2008143011A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • G01K7/183—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer characterised by the use of the resistive element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/06—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material including means to minimise changes in resistance with changes in temperature

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Thermistors And Varistors (AREA)

Abstract

［課題］複雑な製造工程を経ることなく、基板と白金製感温抵抗体との密着性に優れ、該感温抵抗体の抵抗温度係数が大きい薄膜センサを提供すること。 ［解決手段］酸化アルミニウム類の単結晶からなる基板と、該基板に積層された、白金結晶からなる感温抵抗体とを有することを特徴とする薄膜センサ。
PCT/JP2008/058561 2007-05-11 2008-05-08 薄膜センサ、薄膜センサモジュールおよび薄膜センサの製造方法 WO2008143011A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008524885A JPWO2008143011A1 (ja) 2007-05-11 2008-05-08 薄膜センサ、薄膜センサモジュールおよび薄膜センサの製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007126774 2007-05-11
JP2007-126774 2007-05-11

Publications (1)

Publication Number Publication Date
WO2008143011A1 true WO2008143011A1 (ja) 2008-11-27

Family

ID=40031723

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/058561 WO2008143011A1 (ja) 2007-05-11 2008-05-08 薄膜センサ、薄膜センサモジュールおよび薄膜センサの製造方法

Country Status (2)

Country Link
JP (1) JPWO2008143011A1 (ja)
WO (1) WO2008143011A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106323493A (zh) * 2016-08-10 2017-01-11 清华大学 一种温度场、热流密度场测量一体化装置及其制备方法
WO2020162237A1 (ja) * 2019-02-06 2020-08-13 日東電工株式会社 導電フィルム、導電フィルム巻回体およびその製造方法、ならびに温度センサフィルム
CN116926471A (zh) * 2022-04-02 2023-10-24 中国科学院苏州纳米技术与纳米仿生研究所 一种铂薄膜及其制作方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7592461B2 (ja) * 2020-10-30 2024-12-02 日東電工株式会社 歪センサ、機能性フィルムおよびその製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63276562A (ja) * 1987-03-06 1988-11-14 Hitachi Ltd 厚膜感熱ヘツドの製造方法
JPH09102590A (ja) * 1995-10-05 1997-04-15 Ricoh Co Ltd 薄膜キャパシタ
JPH11260609A (ja) * 1998-02-12 1999-09-24 Guanglei Science Technol Co Ltd 白金抵抗温度計の検出素子の製造方法及びその方法で製造された検出素子
JP2001291607A (ja) * 2000-04-04 2001-10-19 Mitsui Mining & Smelting Co Ltd 白金薄膜抵抗体の製造方法
JP2003104794A (ja) * 2001-09-28 2003-04-09 Murata Mfg Co Ltd ＺｎＯ膜及びその製造方法並びに発光素子

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63276562A (ja) * 1987-03-06 1988-11-14 Hitachi Ltd 厚膜感熱ヘツドの製造方法
JPH09102590A (ja) * 1995-10-05 1997-04-15 Ricoh Co Ltd 薄膜キャパシタ
JPH11260609A (ja) * 1998-02-12 1999-09-24 Guanglei Science Technol Co Ltd 白金抵抗温度計の検出素子の製造方法及びその方法で製造された検出素子
JP2001291607A (ja) * 2000-04-04 2001-10-19 Mitsui Mining & Smelting Co Ltd 白金薄膜抵抗体の製造方法
JP2003104794A (ja) * 2001-09-28 2003-04-09 Murata Mfg Co Ltd ＺｎＯ膜及びその製造方法並びに発光素子

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106323493A (zh) * 2016-08-10 2017-01-11 清华大学 一种温度场、热流密度场测量一体化装置及其制备方法
CN106323493B (zh) * 2016-08-10 2020-05-22 清华大学 一种温度场、热流密度场测量一体化装置及其制备方法
WO2020162237A1 (ja) * 2019-02-06 2020-08-13 日東電工株式会社 導電フィルム、導電フィルム巻回体およびその製造方法、ならびに温度センサフィルム
JP2020126033A (ja) * 2019-02-06 2020-08-20 日東電工株式会社 導電フィルム、導電フィルム巻回体およびその製造方法、ならびに温度センサフィルム
JP7373284B2 (ja) 2019-02-06 2023-11-02 日東電工株式会社 導電フィルム、導電フィルム巻回体およびその製造方法、ならびに温度センサフィルム
TWI859188B (zh) * 2019-02-06 2024-10-21 日商日東電工股份有限公司 導電膜、導電膜捲繞體及其製造方法、以及溫度感測膜
CN116926471A (zh) * 2022-04-02 2023-10-24 中国科学院苏州纳米技术与纳米仿生研究所 一种铂薄膜及其制作方法

Also Published As

Publication number Publication date
JPWO2008143011A1 (ja) 2010-08-05

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