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WO2008010959A9 - Lithographie par ablation de faisceaux - Google Patents

Lithographie par ablation de faisceaux

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Publication number
WO2008010959A9
WO2008010959A9 PCT/US2007/016006 US2007016006W WO2008010959A9 WO 2008010959 A9 WO2008010959 A9 WO 2008010959A9 US 2007016006 W US2007016006 W US 2007016006W WO 2008010959 A9 WO2008010959 A9 WO 2008010959A9
Authority
WO
WIPO (PCT)
Prior art keywords
oxide
material layer
surface material
support membrane
iron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2007/016006
Other languages
English (en)
Other versions
WO2008010959A2 (fr
WO2008010959A3 (fr
Inventor
Marija Brndic
Michael D Fischbein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Pennsylvania Penn
Original Assignee
University of Pennsylvania Penn
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Pennsylvania Penn filed Critical University of Pennsylvania Penn
Priority to US12/373,607 priority Critical patent/US8173335B2/en
Publication of WO2008010959A2 publication Critical patent/WO2008010959A2/fr
Publication of WO2008010959A9 publication Critical patent/WO2008010959A9/fr
Publication of WO2008010959A3 publication Critical patent/WO2008010959A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
    • H01L21/32131—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by physical means only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
    • H10D30/47—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 2D charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
    • H10D30/471—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
    • H10D30/472—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having lower bandgap active layer formed on top of wider bandgap layer, e.g. inverted HEMT
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/117—Shapes of semiconductor bodies
    • H10D62/118—Nanostructure semiconductor bodies
    • H10D62/119—Nanowire, nanosheet or nanotube semiconductor bodies
    • H10D62/121—Nanowire, nanosheet or nanotube semiconductor bodies oriented parallel to substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/81—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation
    • H10D62/812—Single quantum well structures
    • H10D62/813—Quantum wire structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/881—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being a two-dimensional material
    • H10D62/882—Graphene
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q1/00—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
    • C12Q1/68—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions involving nucleic acids
    • C12Q1/6869—Methods for sequencing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/117—Shapes of semiconductor bodies
    • H10D62/118—Nanostructure semiconductor bodies
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/143—Electron beam
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]

Definitions

  • the present invention is generally related to the field of nanotechnology.
  • the present invention is also related to the field of semiconductor fabrication processes, in particular the fabrication of electrodes and devices integrating nanoscale electrodes.
  • the present invention also pertains to processes for preparing nanometer scale device features.
  • the present invention also pertains to a variety of electronic, photonic, semiconductor and quantum effect devices.
  • TEBs Transmission electron beams
  • the present invention provides beam lithography processes, comprising: providing a supported membrane characterized as being transparent to a beam, the membrane comprising at least two surfaces; forming a surface material layer onto one of the surfaces of the membrane; orienting the surface material layer side of the support membrane facing away from a beam source; imaging the surface material layer; increasing the magnification to bring the beam to crossover at a location spatially proximate to a desired ablation location of the surface material layer; and removing surface material layer from the desired ablation location.
  • the present invention also provides transforming processes, comprising: providing a supported membrane characterized as being transparent to a beam, the membrane comprising at least two surfaces; forming a surface material layer onto one of the surfaces of the membrane; orienting the surface material layer side of the support membrane facing away from a beam source; imaging the surface material layer; increasing the magnification to bring the beam to crossover at a location spatially proximate to a desired location of the surface material layer; and transforming the crystal structure of the surface material layer at the desired location.
  • the present invention also provides a variety of devices, nanogap field effect transistors, nano-wires, nano-crystals and artificial atoms made using the disclosed methods.
  • FIG. 1 is a schematic illustration of device holder used to load membrane window devices into a transmission electron microscope (TEM).
  • TEM transmission electron microscope
  • FIG. 2a is a schematic illustration of a basic principle of the present invention.
  • FIG. 2b shows a TEM image of metal on thin film.
  • FIG. 2c shows a TEM image of a nano-hole.
  • FIG. 2d shows a TEM image of a nano-cut.
  • FIG. 3 shows TEM images of an application of the present invention to remove a narrow segment of metal.
  • FIG. 4 shows TEM images of an embodiment of a device fabricated with the present invention in which a nano-hole is created in a nano-gap region.
  • FIG. 5 shows TEM images of an application of the present invention to create narrow channels through metal.
  • FIG. 6 shows TEM images of an application of the present invention to create particles by cutting out regions from a larger segment of material.
  • FIG. 7 shows TEM images of an application of the present invention to create nano-wires.
  • FIG. 8 shows TEM images of a variation of the application shown in FIG. 7.
  • FIG. 9 shows TEM images of an embodiment of a device fabricated with the present invention in which a nanometer-scale ring is created.
  • FIG. 10 shows TEM images of an embodiment of a device fabricated with the present invention in which three terminal devices based on "artificial atoms" are created.
  • FIG. H shows TEM images of an application of the present invention to create nano-crystals.
  • FIG. 12 shows TEM images of an application of the present invention to remove nano-particles from a surface.
  • FIG. 13 shows TEM images of an application of the present invention to move and weld materials.
  • Nanoscale refers generally to dimensions in the range of from about 0.1 nanometer (“nm”) up to about 100 nm.
  • Support membrane refers generally to a thin material that is physically supported by an adjacent stronger material; “support membrane” and “thin layer support membrane” are generally synonymous as used herein.
  • “Surface material layer” refers generally to an initial thin surface material that is to be nano-sculpted by the ablating beam and is physically supported by a support membrane.
  • the ablating beam can be electron beams, ion beams, atom beams, neutron beams and arbitrary particle beams.
  • the ablating beam is transmission electron beam and the ablating beam source is provided by a transmission electron microscopy which is able to achieve about 0.1 nm resolution images.
  • the initial ablating beam can be split into multiples beams using existing methods in the art to enable parallel ablation at multiple ablation locations on the surface material layer.
  • the initial surface material layer is prepared to be nano-sculpted by the ablating beam.
  • This initial surface material layer can be prepared on a thin support membrane that is by itself essentially transparent to the ablating beam.
  • Suitable support membranes include any of a variety of thin film materials that are typically used in the field of semiconductor and photonic devices.
  • Preferred thin film materials include silicon nitride, low-stress amorphous silicon nitride, silicon oxide, and gallium arsenide.
  • Window grids for use in transmission electron microscopy (TEM) can be suitably used as support membranes, such as those commercially available from SPI Supplies, Inc., West Chester, PA (http://www.2spi.com/catalog/instruments/silicon-nitride.shtml).
  • Support membranes can be provided using CVD or any suitable thin film deposition processes known in the art. Accordingly, many different types of support membrane compositions and geometries are possible. For example, any of the below listed compounds and compositions, and combinations thereof, can be prepared into support membranes using methods know in the art: low stress amorphous silicon nitride, galium nitride, amorphous carbon, indium arsenide, aluminum oxide, Aeschynite (Rare Earth Yttrium Titanium Niobium Oxide Hydroxide), Anatase (Titanium Qx/Je ⁇ Bindheimite (Lead Antimony Oxide Hydroxide), Bixbyite (Manganese Iron Oxide), Brookite (Titanium Oxide), Chrysoberyl (Beryllium Aluminum Oxide), Columbite (Iron Manganese Niobium Tantalum Oxide), Corundum (Aluminum Oxide), Cuprite (Copper Oxide), Euxenite (Rare
  • the thin film materials that give rise to suitable support membranes are preferably supplied as thin films on one or both sides of a silicon support wafer.
  • the support membrane is highly polished, such that the surface roughness is less than about 10 nm per square micron.
  • Thin film deposited silicon support wafers are subsequently processed to remove portions of the silicon support to yield silicon-supported thin films. Thin film etching can also be carried out to control the thickness of the resulting thin film support membrane.
  • Suitable support membranes typically have a thickness in the range of from about 0.1 nm to about 1000 nm and can be unsupported, but are preferably supported on a substrate such as silicon. Suitable support membranes supported on a substrate form a free-standing support membrane window. Free-standing support membrane windows that can be suitably used in various embodiments of the present invention typically have an area in the range of from about 10 " ' square microns to about 10 5 square microns. There is nothing in principle that prevents the window from being arbitrarily small or large, so any size is possible, from about 100 square nanometers up to about 1 square millimeter.
  • the free-standing support membrane window can have almost any shape, such as a circle, square, rectangle, triangle, or other polygon having 4 or more sides.
  • the support membranes have a thickness of from about 20 to 60 nm. Further information about preparing support membranes can be found in Grant, A. W., et al., Nanotechnol. 2004, 15, 1175; Morkved, T.L., et al, Polymer Vol. 39 No. 16 pp. 3871-3875, 1998; and Pandey, R.K., et al., J. Opt. Mat. 2004, 27, 139. A plurality of support membranes can also be provided on wafers.
  • the initial surface material layer that will be nano-sculpted by the ablating beam can be any solid.
  • Preferred surface materials include: aluminum, chromium, nickel and silver. Any of the below listed can be prepared as surface material layer: aluminum, chromium, nickel, silver, iron, manganese, cobalt, titanium, copper, gold, silicon, carbon, carbon nanotubes, graphene, silicon nitride, low stress amorphous silicon nitride, gallium nitride, amorphous carbon, indium arsenide, aluminum oxide, Rare Earth Yttrium Titanium Niobium Oxide Hydroxide, Titanium Oxide, Lead Antimony Oxide Hydroxide, Manganese Iron Oxide, Titanium Oxide, Beryllium Aluminum Oxide, Iron Manganese Niobium Tantalum Oxide, Aluminum Oxide, Copper Oxide, Rare Earth Yttrium Niobium Tantalum Titanium Oxide, Rare Earth Iron Titanium Oxide, Manganese Oxide, Iron Oxide, Hydrogen Oxide
  • the initial surface material layer that will be nano-sculpted by the ablating beam can be formed onto one side of the support membrane surface by using existing methods such as electron beam and photo lithography.
  • a suitable surface material layer has a thickness in the range of from about 10 nm to about 50 nm. In preferred embodiments, surface material layers have a thickness in the range of from about 10 nm to about 50 nm and have a form in the shape of thin strips.
  • the surface material layer side of the support membrane faces away from and perpendicular to the source of the beam. As far as imaging, the membrane can be either face up or down.
  • the image collection system typically does not distinguish between the two orientations. It is sometimes beneficial to orient the surface material layer side of the support membrane face-down so that, upon being exposed to the intense ablating beam, removed portion of the surface material layer is "pushed off of the surface instead of being “mashed into” the surface, as could be the case if the support membrane were face-up.
  • the present invention can further comprise a step of identifying a desired location on the surface material layer to be ablated.
  • the identifying step can be conducted using the standard imaging modes of the microscope with magnifications typically below 100,000x, or below 80,000x, or below 60,00Ox, or even below about 4O 3 OOOx, and with reduced beam intensity, that is not sufficient to result in any ablation.
  • the magnification is increased, for example as high as 200,00Ox, or even 300,00Ox, or even 400,OO0x, or even 500,00Ox, or even 600,00Ox, or even 700,00Ox, or even as high as 800,00Ox.
  • the ablating beam can be brought to crossover several nanometers away from the metal for last minute sharpening of the caustic spot.
  • the distance between the beam and the surface material layer can be in a range of from about 1 nm to about 5000 nm, or between 2 and 2500 nm, or between 4 and 1000 nm, or even between 8 and 500 nm.
  • the beam can be aimed at the desired location on the surface material layer to be ablated to perform the actual ablation. If at any time it is desirable to end the ablation, the beam need only be broadened away from crossover and the ablation will stop almost immediately.
  • the present invention can be conducted using computerized control which would allow for greater precision and more rapid fabrication.
  • the computerized control can be facilitated by using the current density that passes through surface material layer and support membrane as a feedback control.
  • the current density will be lower if the ablating beam is over an area of surface material layer plus support membrane than it is over support membrane only.
  • the computer which is able to read the current density and also control the spot that the ablating beam is over, is then able to know where the ablating beam is with respect to the edges of the surface material layer and can sense the ablation action in real time.
  • a robust geometrical control can be achieved to vary dimensions of a nano-wire.
  • a nano-wire with modulated diameter along its length would have modulated local regions of normal and superconducting behavior; for a nano-wire with modulated regions larger than some critical size, the modulated width will result in periodically modulated critical temperature along the wire length.
  • Different materials can be made as electrodes to create S-N and S-I modulated wires, and use normal and/or superconducting electrodes. Modulation of electrodes (whether one or both are normal or superconducting) will put these devices in different universality classes and would allow the study of quantum phase transitions.
  • a portion of the surface material layer that is exposed to the narrowly focused ablating beam can be moved by the beam on the support membrane.
  • a nano-island of a surface material can be moved by a narrowly focused electron beam between two electrodes on a support membrane.
  • the nano-island of surface material can also be welded to one of the two electrodes by the narrowly focused electron beam.
  • the present invention can be used to change the crystal structure of the surface material.
  • a submonolayer of amorphous metallic islands supported on a thin support membrane can be transformed into partially crystalline and ultimately single crystalline by a narrowly focused electron beam.
  • FIG. 1 is a schematic illustration of device holder used to load membrane window devices into a transmission electron microscope (TEM).
  • a device (1006) comprising a membrane window (1004) can be placed face down on a "blade" (1008) that can be itself held by a holder arm (1002).
  • the blade (1008) has a hole in it (not shown) that can be aligned to the location of the membrane window (1004) to allow the electron beam to pass completely through.
  • FIG. 2a is a schematic illustration of a basic principle of the invention. Metal (2002) sits on a thin film (2008) and can be exposed to an electron beam (2006) which removes metal from the exposed region. A possible structure (2004) is shown being formed by the electron beam (2006).
  • FlTG. 2b shows an actual TEM image of metal (2010) on thin film (2014).
  • FIG. 2c and 2d shows actual TEM images of a nano-hole (2012) and a nano-cut (2014) on the metal (2010) created by the present invention.
  • FIG. 3 shows TEM images of an application of the present invention to remove a narrow segment of metal connecting two large segments of metal.
  • a thin film 3002
  • two large segments of metal (3004 and 3006) are connected by a narrow segment of metal (3008).
  • the narrow segment (3008) can be removed, leaving a gap (30010).
  • FIG. 4 shows TEM images of an embodiment of a device fabricated with the present invention in which a hole is created in a nano-gap region.
  • the figure shows four examples of the same device design.
  • On a thin film (4002) three metallic segments are arranged to achieve a nanogap field effect transistor (NGFET).
  • the NGFETs consist of a source electrode (4004), a drain electrode (4006) and a gate electrode (4010).
  • a hole (4008) can be created directly in the nanogap region.
  • An application of this device is detailed electronic characterization of molecules.
  • the source (4004) and drain (4006) electrodes can, at any moment during the molecule's translocation, measure the conductivity of the segment of the molecule that is in the nano-gap at that moment.
  • high-speed DNA sequencing is enabled with this embodiment.
  • the conductivity of the bases of DNA (C, G, T, A) are predicted to be different enough that direct electrical measurements can resolve the base sequence of DNA as it is translocated through the gap.
  • FIG. 5 shows TEM images of an application of the present invention to create narrow channels through metal.
  • a narrow channel 5008 is created through a large segment of metal, thereby dividing the large metal segment into two smaller segments (5008 and 5006).
  • FIG. 6 shows TEM images of an application of the present invention to create particles by cutting out regions from a larger segment of material.
  • Metal (6002) is changed by using the present invention to initially cut partially (6004) and then completely (6006) through. Another complete cut through is made nearby (6008) thereby creating a nano-particle (6010) in between the two remaining segments of the initial material (6002 and 6012). All material is shown on a thin film (6014).
  • FIG. 7 shows TEM images of an application of the present invention to create nano-wires.
  • a thin film 7002
  • regions are removed from a large segment of material (7004).
  • Various stages of removing these regions to yield a nanb-wire are shown (7006).
  • Examples of completed nanowires are shown (7008).
  • the nanowires are connected smoothly to large segments (7004) which can be used as source and drain electrodes to perform measurements or manipulate the state of the nano-wire electronically.
  • This application can be used to generate local electric and magnetic fields which may be used to manipulate the position or physical state of a targeted object or collection of objects.
  • FIG. 8 shows TEM images of a non-straight geometry nano-wire, a variation of the application shown in FIG. 7. From the large segment of material (8004) the serpentine wire (8008) is shown in the process of being created (8006). The background is a thin film (8002). This device can be used to generate local electric and magnetic fields which may be used to manipulate the position or physical state of a targeted object or collection of objects.
  • FIG. 9 shows TEM images of an embodiment of a device fabricated with the present invention in which a nanometer-scale ring is created. From a large segment of material (9004), the present invention was used to remove material until the ring (9006) is formed.
  • the ring is connected to the initial material (9004) by nanowires (9008).
  • This device can be used to generate local electric and magnetic fields which may be used to manipulate the position or physical state of a targeted object or collection of objects.
  • a nano-ring of the type shown in 9000 may be used to trap atoms and cool them.
  • the ring sits on a thin film (9002) and it is possible to remove this thin film by chemical or mechanical treatments to yield a free standing ring held by nanowires (9008) connected to the initial metal (9004).
  • FIG. 10 shows TEM images of an embodiment of a device fabricated with the present invention in which three terminal devices based on "artificial atoms" are created.
  • a thin film (10002) source (10004), drain (10006) and gate (10008) electrodes are made with the present invention in close proximity to an "island" (10010) that is also made with the present invention, but could have been prepared otherwise.
  • Small islands made of metal and/or semiconducting material behave as "artificial atoms” and the presence of the three electrodes allows for the detection of the physical state of the island as well as the controlled manipulation of its physical state.
  • This device may be used as a sensor if the island is designed to be (or discovered to be) sensitive to some agent material. Quantum information processing may be achieved with this type of device.
  • FIG. U shows TEM images of an application of the present invention to create nano-crystals.
  • a sub-monolayer of amorphous metallic islands was prepared by evaporation of a thin film of gold onto a thin film (11002). Slowly ( ⁇ 0.5 nm/sec) evaporating a thin film ( ⁇ 10nm) of metal yields a sub-monolayer of amorphous islands (11004). Exposing an initially amorphous island (11006) to the electron beam (not shown) transforms the island into partially crystalline (1 1008) and ultimately single crystalline (11010).
  • FIG. 12 shows TEM images of an application of the present invention to remove nano-particles from a surface.
  • Nano-crystals (12004) are shown on a thin film (12002). Exposure of one nano-crystal to the narrowly focused electron beam served to remove it from the surface (12006).
  • FIG. 13 shows TEM images of an application of the present invention to move and weld materials.
  • An island of material (13006) is on a thin film (13002) situated between two electrodes (13004). The island is moved by the narrowly focused electron beam and welded to one of the electrodes (13008). Additional exposure of the region marked as 13008 leads to enhanced fusion of the island to the electrode (13010).
  • ablating lithography was performed on thin low-stress amorphous silicon nitride support membrane.
  • the thickness of thin support membrane was about 40 ran.
  • the ablating beam was provided by a JEOL 2010F Transmission Electron Microscopy (TEM).
  • TEM Transmission Electron Microscopy
  • the smallest attainable beam diameter on this instrument was about 0.5 nm.
  • Production of wafers with well defined square regions of free-standing insulator-only material is straightforward to achieve and easy to make in large numbers. They are also available commercially from Structure Probe, Inc. (SPI), West Chester, PA, http://www.2spi.com/.
  • An initial metal that was to be nano-sculpted was patterned onto the support membrane in the form of thin strips using existing methods such as electron beam and photo lithography.
  • the thickness of the metal thin strips are in the range of from about 10 nm to 50 nm.
  • the membrane was then loaded into the TEM chamber with the metallized side facing away from and perpendicular to the source of the electron beam (i.e. face-down).
  • a desired location on the metal was identified while imaging at magnifications below 10O 5 OOOx and with reduced beam intensity, where no ablation was observed. After the ablation location was identified, the magnification was then increased to about 800,00Ox and the electron beam was brought to crossover (i.e.
  • the minimum beam diameter several nanometers away from the metal for last minute sharpening of the caustic spot. Without computerized assistance, it took less than 10 seconds to achieve the smallest caustic spot. Then the electron beam was aimed at the caustic spot and the actual ablation occurred. During the actual ablation, the diameter of the beam was about 0.5 nm and the intensity of the beam was about 50 x 10 "12 A/cm 2 -s. When the electron beam was broadened away from crossover, the ablation stopped almost immediately.

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  • Thin Film Transistor (AREA)

Abstract

L'invention concerne des procédés lithographiques par ablation de faisceaux capables d'éliminer et de manipuler un matériau à l'échelle nanométrique. L'invention concerne également des dispositifs à l'échelle nanométrique, des transistors à effet de champ à nanoespace, des nano-fils, des nano-cristaux et des atomes artificiels fabriqués à partir desdits procédés.
PCT/US2007/016006 2006-07-14 2007-07-13 Lithographie par ablation de faisceaux Ceased WO2008010959A2 (fr)

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US12/373,607 US8173335B2 (en) 2006-07-14 2007-07-13 Beam ablation lithography

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US83090406P 2006-07-14 2006-07-14
US60/830,904 2006-07-14

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WO2008010959A9 true WO2008010959A9 (fr) 2008-04-03
WO2008010959A3 WO2008010959A3 (fr) 2008-05-15

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US10761043B2 (en) 2011-07-22 2020-09-01 The Trustees Of The University Of Pennsylvania Graphene-based nanopore and nanostructure devices and methods for macromolecular analysis
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US10876157B2 (en) 2012-09-27 2020-12-29 The Trustees Of The University Of Pennsylvania Insulated nanoelectrode-nanopore devices and related methods
US9046511B2 (en) 2013-04-18 2015-06-02 International Business Machines Corporation Fabrication of tunneling junction for nanopore DNA sequencing
FR3006499B1 (fr) * 2013-05-31 2016-11-25 Commissariat Energie Atomique Lentille electrostatique a membrane isolante ou semiconductrice
US9188578B2 (en) 2013-06-19 2015-11-17 Globalfoundries Inc. Nanogap device with capped nanowire structures
US9182369B2 (en) * 2013-06-19 2015-11-10 Globalfoundries Inc. Manufacturable sub-3 nanometer palladium gap devices for fixed electrode tunneling recognition
WO2016044536A1 (fr) * 2014-09-18 2016-03-24 Marija Drndic Procédé de perçage à base de tige de nanopores ultra-minces de nitrure de silicium et de réseaux de nanopores
EP3769767A1 (fr) 2019-07-25 2021-01-27 Lexicon Pharmaceuticals, Inc. Utilisation de sotagliflozine pour le traitement de patients atteints de diabète sucré de type 2 et d'insuffisance rénale modérée
US12222346B2 (en) 2020-04-01 2025-02-11 The Trustees Of The University Of Pennsylvania Stable nanopores and nanopore arrays for ionic and other measurements

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JP3392885B2 (ja) 1992-01-20 2003-03-31 株式会社リコー 電子ビーム加熱装置およびその方法
US6261726B1 (en) * 1999-12-06 2001-07-17 International Business Machines Corporation Projection electron-beam lithography masks using advanced materials and membrane size
DE10234288A1 (de) 2002-07-26 2004-02-05 Bayer Ag Metallkomplexe als lichtabsorbierende Verbindungen in der Informationsschicht von optischen Datenträgern
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US7768050B2 (en) * 2006-07-07 2010-08-03 The Trustees Of The University Of Pennsylvania Ferroelectric thin films

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US8173335B2 (en) 2012-05-08
WO2008010959A3 (fr) 2008-05-15
US20100009134A1 (en) 2010-01-14

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