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WO2008081729A1 - レーザ走査共焦点顕微鏡 - Google Patents

レーザ走査共焦点顕微鏡 Download PDF

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Publication number
WO2008081729A1
WO2008081729A1 PCT/JP2007/074511 JP2007074511W WO2008081729A1 WO 2008081729 A1 WO2008081729 A1 WO 2008081729A1 JP 2007074511 W JP2007074511 W JP 2007074511W WO 2008081729 A1 WO2008081729 A1 WO 2008081729A1
Authority
WO
WIPO (PCT)
Prior art keywords
fluorescence
objective lens
chromatic aberration
magnification chromatic
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/074511
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English (en)
French (fr)
Inventor
Yuki Yoshida
Naoshi Aikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to EP07850946A priority Critical patent/EP2093600A4/en
Priority to JP2008552091A priority patent/JP5287252B2/ja
Publication of WO2008081729A1 publication Critical patent/WO2008081729A1/ja
Priority to US12/453,825 priority patent/US7903329B2/en
Anticipated expiration legal-status Critical
Priority to US12/929,506 priority patent/US8400709B2/en
Priority to US13/766,405 priority patent/US8786945B2/en
Priority to US14/244,159 priority patent/US9645373B2/en
Priority to US15/483,275 priority patent/US20170242229A1/en
Priority to US16/400,295 priority patent/US20190258040A1/en
Ceased legal-status Critical Current

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036Scanning details, e.g. scanning stages
    • G02B21/0048Scanning details, e.g. scanning stages scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052Optical details of the image generation
    • G02B21/0076Optical details of the image generation arrangements using fluorescence or luminescence
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/16Microscopes adapted for ultraviolet illumination ; Fluorescence microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/105Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0081Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for altering, e.g. enlarging, the entrance or exit pupil

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

 照射された試料7の検査面の照射点からは蛍光が発生し、対物レンズ6により集光されるが、対物レンズ6の倍率色収差のために、対物レンズ6を出た蛍光は、照射光とはずれた光路をたどり、ガルバノスキャナ5によりほぼ非走査光に変えられる。蛍光は、ダイクロイックミラー4を透過し、フィルタ8により余分な波長の光を除去されて、2次元的偏向手段である偏向手段9に入射する。偏向手段9は、コンピュータ10によりガルバノスキャナ5に同期して駆動されており、対物レンズ6の倍率色収差に起因して発生した光軸のずれと傾きを補正する。光軸のずれと傾きを補正された蛍光は、集光レンズ11により、ピンホール板12のピンホール上に試料7の検査面の照射点の像を結像する。倍率色収差を有する対物レンズが使用される場合であっても、倍率色収差による周辺減光を光学系により補正可能なレーザ走査共焦点顕微鏡とすることができる。
PCT/JP2007/074511 2006-12-22 2007-12-20 レーザ走査共焦点顕微鏡 Ceased WO2008081729A1 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
EP07850946A EP2093600A4 (en) 2006-12-22 2007-12-20 CONFOCAL MICROSCOPE WITH LASER SCAN
JP2008552091A JP5287252B2 (ja) 2006-12-22 2007-12-20 レーザ走査共焦点顕微鏡
US12/453,825 US7903329B2 (en) 2006-12-22 2009-05-22 Laser scan confocal microscope
US12/929,506 US8400709B2 (en) 2006-12-22 2011-01-28 Laser scan confocal microscope
US13/766,405 US8786945B2 (en) 2006-12-22 2013-02-13 Laser scan confocal microscope
US14/244,159 US9645373B2 (en) 2006-12-22 2014-04-03 Laser scan confocal microscope
US15/483,275 US20170242229A1 (en) 2006-12-22 2017-04-10 Laser scan confocal microscope
US16/400,295 US20190258040A1 (en) 2006-12-22 2019-05-01 Laser scan confocal microscope

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006345662 2006-12-22
JP2006-345662 2006-12-22

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/453,825 Continuation US7903329B2 (en) 2006-12-22 2009-05-22 Laser scan confocal microscope

Publications (1)

Publication Number Publication Date
WO2008081729A1 true WO2008081729A1 (ja) 2008-07-10

Family

ID=39588414

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/074511 Ceased WO2008081729A1 (ja) 2006-12-22 2007-12-20 レーザ走査共焦点顕微鏡

Country Status (4)

Country Link
US (6) US7903329B2 (ja)
EP (4) EP2093600A4 (ja)
JP (1) JP5287252B2 (ja)
WO (1) WO2008081729A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013105177A (ja) * 2011-11-11 2013-05-30 Leica Microsystems Cms Gmbh 試料における点状対象の三次元位置決め用の顕微鏡装置および方法
JP2013174704A (ja) * 2012-02-24 2013-09-05 Olympus Corp レーザ走査型共焦点顕微鏡、及び、レーザ走査型共焦点顕微鏡の光学系のアライメント調整方法
JPWO2015163261A1 (ja) * 2014-04-24 2017-04-13 オリンパス株式会社 顕微鏡および顕微鏡観察方法
CN110596059A (zh) * 2019-09-05 2019-12-20 北京世纪桑尼科技有限公司 光学超分辨显微成像系统
JP2020512599A (ja) * 2017-03-03 2020-04-23 アプトン バイオシステムズ インコーポレイテッド 加速度追跡による高速走査システム

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5287252B2 (ja) 2006-12-22 2013-09-11 株式会社ニコン レーザ走査共焦点顕微鏡
US9304308B2 (en) 2009-12-09 2016-04-05 Advanced Micro Devices, Inc. Laser scanning module including an optical isolator
KR101151790B1 (ko) 2010-03-08 2012-05-31 경북대학교 산학협력단 혈구를 이용한 공초점 현미경 미세 입자영상유속계
US9946058B2 (en) * 2010-06-11 2018-04-17 Nikon Corporation Microscope apparatus and observation method
CN102768498A (zh) * 2011-05-05 2012-11-07 中国科学院生物物理研究所 一种快速同步扫描控制装置
JP5991850B2 (ja) * 2012-05-11 2016-09-14 オリンパス株式会社 顕微鏡装置
JP6088496B2 (ja) * 2012-05-17 2017-03-01 シチズン時計株式会社 収差補正デバイス及びレーザー顕微鏡
US9423600B2 (en) 2012-08-16 2016-08-23 Citizen Holdings Co., Ltd. Aberration correction optical unit and laser microscope
CN104603667B (zh) * 2012-08-24 2017-12-08 超威半导体公司 包括光学隔离器的激光扫描模块
CN104181089A (zh) * 2013-05-22 2014-12-03 中国石油化工股份有限公司 用于扫描岩石面孔率的设备及方法
US9927371B2 (en) * 2014-04-22 2018-03-27 Kla-Tencor Corporation Confocal line inspection optical system
EP3035104B1 (en) 2014-12-15 2019-02-20 Olympus Corporation Microscope system and setting value calculation method
US20180267284A1 (en) 2015-01-31 2018-09-20 Board Of Regents, The University Of Texas System High-speed laser scanning microscopy platform for high-throughput automated 3d imaging and functional volumetric imaging
JP2016158670A (ja) * 2015-02-26 2016-09-05 株式会社ニデック 眼科用レーザ手術装置および収差補償方法
JP6555811B2 (ja) 2015-07-16 2019-08-07 オリンパス株式会社 顕微鏡システム、特定方法、及び、プログラム
JP6552041B2 (ja) * 2015-07-16 2019-07-31 オリンパス株式会社 顕微鏡システム、屈折率算出方法、及び、プログラム
EP3538941B1 (en) 2016-11-10 2025-04-23 The Trustees of Columbia University in the City of New York Rapid high-resolution imaging methods for large samples

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3365884B2 (ja) 1995-04-04 2003-01-14 オリンパス光学工業株式会社 走査型光学顕微鏡
JP2005043892A (ja) * 2003-07-23 2005-02-17 Leica Microsystems Heidelberg Gmbh 共焦点ラスタ顕微鏡
JP2005275199A (ja) 2004-03-26 2005-10-06 Yokogawa Electric Corp 3次元共焦点顕微鏡システム

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US258122A (en) * 1882-05-16 nettleton
US4736110A (en) * 1984-09-28 1988-04-05 Nippon Jidoseigyo, Ltd. Image pick-up apparatus
JP2679195B2 (ja) * 1988-12-21 1997-11-19 株式会社ニコン 投影露光装置
WO1991015792A1 (en) * 1990-04-06 1991-10-17 Martin Russell Harris Confocal microscope
JPH04175713A (ja) * 1990-11-09 1992-06-23 Olympus Optical Co Ltd 走査型光学顕微鏡
JP3384072B2 (ja) * 1993-12-27 2003-03-10 株式会社ニコン コンフォーカル顕微鏡
JPH07128596A (ja) * 1993-09-08 1995-05-19 Nikon Corp コンフォーカル顕微鏡
US5612818A (en) 1993-09-08 1997-03-18 Nikon Corporation Confocal microscope
GB9603788D0 (en) * 1996-02-22 1996-04-24 Isis Innovation Confocal microscope
JP3917731B2 (ja) * 1996-11-21 2007-05-23 オリンパス株式会社 レーザ走査顕微鏡
US6167173A (en) * 1997-01-27 2000-12-26 Carl Zeiss Jena Gmbh Laser scanning microscope
US6108127A (en) * 1997-05-15 2000-08-22 3M Innovative Properties Company High resolution confocal microscope
JP3640059B2 (ja) * 1999-02-12 2005-04-20 パイオニア株式会社 収差補正装置及びこれを用いた光学装置
US6204955B1 (en) * 1999-07-09 2001-03-20 Advanced Optical Technologies, Inc. Apparatus for dynamic control of light direction in a broad field of view
DE19951482C2 (de) * 1999-10-26 2003-01-09 Zeiss Carl Jena Gmbh Fluoreszenzmikroskop
JP4576664B2 (ja) * 2000-03-08 2010-11-10 株式会社ニコン 光路ズレ検知装置、および共焦点顕微鏡
US6603607B2 (en) * 2000-04-07 2003-08-05 Nikon Corporation Minute particle optical manipulation method and apparatus
US7209287B2 (en) * 2000-09-18 2007-04-24 Vincent Lauer Confocal optical scanning device
JP4812179B2 (ja) * 2001-03-13 2011-11-09 オリンパス株式会社 レーザ顕微鏡
JP2004110017A (ja) * 2002-08-29 2004-04-08 Olympus Corp 走査型レーザ顕微鏡
US7223986B2 (en) * 2002-08-29 2007-05-29 Olympus Optical Co., Ltd. Laser scanning microscope
US6829132B2 (en) * 2003-04-30 2004-12-07 Hewlett-Packard Development Company, L.P. Charge control of micro-electromechanical device
JP2005172805A (ja) * 2003-11-21 2005-06-30 Olympus Corp 試料情報測定方法および走査型共焦点顕微鏡
JP4573524B2 (ja) * 2003-12-24 2010-11-04 オリンパス株式会社 走査型レーザー顕微鏡
DE102004011770B4 (de) * 2004-03-09 2005-12-15 Leica Microsystems Heidelberg Gmbh Mikroskop
TW200538758A (en) * 2004-04-28 2005-12-01 Olympus Corp Laser-light-concentrating optical system
US7355702B2 (en) * 2004-06-21 2008-04-08 Olympus Corporation Confocal observation system
JP4855394B2 (ja) * 2004-06-21 2012-01-18 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 分光分析するための収差補正
DE102004034960A1 (de) * 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Korrektur-Vorrichtung für eine optische Anordnung und konfokales Mikroskop mit einer solchen Vorrichtung
DE102004034970A1 (de) * 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Lichtrastermikroskop und Verwendung
US20070258122A1 (en) * 2004-10-06 2007-11-08 Bc Cancer Agency Computer-Tomography Microscope and Computer-Tomography Image Reconstruction Methods
DE102005020542A1 (de) * 2005-05-03 2006-11-09 Carl Zeiss Jena Gmbh Einrichtung und Verfahren zur reproduzierbaren Einstellung der Pinholeöffnung und Pinholelage in Laserscanmikroskopen
EP1744194B1 (en) * 2005-07-11 2017-05-10 Olympus Corporation Laser scanning microscope and image acquiring method of laser scanning microscope
JP5287252B2 (ja) * 2006-12-22 2013-09-11 株式会社ニコン レーザ走査共焦点顕微鏡
US8188412B2 (en) * 2007-12-27 2012-05-29 Olympus Corporation Confocal microscope which weights and combines signals output from a plurality of photodetectors and calculates omnifocal brightness information for the plurality of signals
JP6511041B2 (ja) * 2014-04-24 2019-05-08 オリンパス株式会社 顕微鏡および顕微鏡観察方法
JP6594437B2 (ja) * 2015-09-15 2019-10-23 オリンパス株式会社 顕微鏡および顕微鏡観察方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3365884B2 (ja) 1995-04-04 2003-01-14 オリンパス光学工業株式会社 走査型光学顕微鏡
JP2005043892A (ja) * 2003-07-23 2005-02-17 Leica Microsystems Heidelberg Gmbh 共焦点ラスタ顕微鏡
JP2005275199A (ja) 2004-03-26 2005-10-06 Yokogawa Electric Corp 3次元共焦点顕微鏡システム

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2093600A4

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013105177A (ja) * 2011-11-11 2013-05-30 Leica Microsystems Cms Gmbh 試料における点状対象の三次元位置決め用の顕微鏡装置および方法
JP2013174704A (ja) * 2012-02-24 2013-09-05 Olympus Corp レーザ走査型共焦点顕微鏡、及び、レーザ走査型共焦点顕微鏡の光学系のアライメント調整方法
JPWO2015163261A1 (ja) * 2014-04-24 2017-04-13 オリンパス株式会社 顕微鏡および顕微鏡観察方法
JP2020512599A (ja) * 2017-03-03 2020-04-23 アプトン バイオシステムズ インコーポレイテッド 加速度追跡による高速走査システム
JP7144457B2 (ja) 2017-03-03 2022-09-29 アプトン バイオシステムズ インコーポレイテッド 加速度追跡による高速走査システム
CN110596059A (zh) * 2019-09-05 2019-12-20 北京世纪桑尼科技有限公司 光学超分辨显微成像系统
CN110596059B (zh) * 2019-09-05 2024-05-28 北京世纪桑尼科技有限公司 光学超分辨显微成像系统

Also Published As

Publication number Publication date
EP2434327A1 (en) 2012-03-28
US20110141557A1 (en) 2011-06-16
EP2093600A4 (en) 2011-06-08
US20170242229A1 (en) 2017-08-24
US8786945B2 (en) 2014-07-22
EP2434326A1 (en) 2012-03-28
US8400709B2 (en) 2013-03-19
JP5287252B2 (ja) 2013-09-11
US20190258040A1 (en) 2019-08-22
US9645373B2 (en) 2017-05-09
EP2093600A1 (en) 2009-08-26
US20090231692A1 (en) 2009-09-17
EP2434325A1 (en) 2012-03-28
US7903329B2 (en) 2011-03-08
JPWO2008081729A1 (ja) 2010-04-30
US20130155500A1 (en) 2013-06-20
US20140211307A1 (en) 2014-07-31

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