[go: up one dir, main page]

WO2007121864A1 - Microscope à balayage laser avec séparateur de faisceaux principaux pour la séparation dans l'espace des rayonnements d'éclairage et de détection - Google Patents

Microscope à balayage laser avec séparateur de faisceaux principaux pour la séparation dans l'espace des rayonnements d'éclairage et de détection Download PDF

Info

Publication number
WO2007121864A1
WO2007121864A1 PCT/EP2007/003241 EP2007003241W WO2007121864A1 WO 2007121864 A1 WO2007121864 A1 WO 2007121864A1 EP 2007003241 W EP2007003241 W EP 2007003241W WO 2007121864 A1 WO2007121864 A1 WO 2007121864A1
Authority
WO
WIPO (PCT)
Prior art keywords
illumination
beam splitter
sample
radiation
points
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2007/003241
Other languages
German (de)
English (en)
Inventor
Ralf Wolleschensky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Microscopy GmbH
Original Assignee
Carl Zeiss MicroImaging GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss MicroImaging GmbH filed Critical Carl Zeiss MicroImaging GmbH
Publication of WO2007121864A1 publication Critical patent/WO2007121864A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G01N21/6458—Fluorescence microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0056—Optical details of the image generation based on optical coherence, e.g. phase-contrast arrangements, interference arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0076—Optical details of the image generation arrangements using fluorescence or luminescence

Definitions

  • the invention relates to a laser scanning microscope with an illumination beam source and a detection beam path, the radiation in a sample and / or backscattered radiation along an optical axis to a detector device and in which a beam splitter is provided on the output from the illumination beam source Illumination radiation is directed in an illumination beam path to the sample, wherein the beam splitter does not pass to the sample specularly reflected illumination radiation to the detector device and arranged for this purpose in a pupil of the illumination beam path and partially mirrored
  • the object of a laser scanning microscope is that the illumination radiation, which is excitation radiation in the mentioned case of fluorescence microscopy, must be separated from the radiation to be detected, since in most cases the illumination radiation and the detection radiation are guided via a common objective, ie the illumination radiation is incident on the objective, with which the detection radiation is also conducted to the detector. It is therefore customary to couple the illumination radiation via a beam splitter which ensures that back-reflected illumination radiation does not pass to the sample or to the smallest possible proportion to the detector.
  • fluorescence microscopy one makes use of the Stokes-induced wavelength shift between detection and excitation radiation and uses suitable dichroic elements for the beam splitter, which is why the term "color splitter" or main color splitter has become established for the beam splitter. Are different lighting and
  • Excitation radiation remains or that the detection radiation is unnecessarily attenuated when passing through the beam splitter.
  • DE 10257237A1 A spectrally independent approach is DE 10257237A1.
  • the laser scanning microscope of the type mentioned therein uses the fact that radiation coming from the sample is usually incoherent, i. is non-directionally emitted at the sample, whereas specularly reflected excitation or illumination radiation couples directionally into the detection beam path.
  • DE 10257237A1 therefore proposes to insert a beam splitter into a pupil of the illumination beam path, which is transparent at the point of penetration of the optical axis and otherwise mirrored. At the same time, the illumination radiation is focused precisely on this transparent spot.
  • laser scanning microscopy is particularly suitable for examining biological samples.
  • the amount of time it takes to take an image is naturally a significant factor in biological samples, especially when examining living samples or analyzing fast-paced processes. It is therefore constant efforts in laser scanning microscopy to increase the image acquisition speed.
  • Microscope systems have recently been described that sample a specimen not with a dot-like spot (ie, not with a confocal dot scanner), but use a cell-shaped illumination and scan (ie, a confocal slit).
  • DE 10257237A1 provides a suitable beam splitter ready, in which then a line-shaped area in the form of a narrow rectangle is mirrored on the beam splitter.
  • the invention is therefore the object of a laser scanning microscope of the type mentioned in such a way that a fast image recording is possible without the associated with a slit depth resolution restriction.
  • This object is achieved according to the invention with a laser scanning microscope with an illumination beam source and a detection beam path, the radiation in a sample and / or backscattered radiation along an optical axis to a detector device and in which a beam splitter is provided on the output from the illumination beam source Illumination radiation is directed in an illumination beam path to the sample, wherein the beam splitter on the sample does not allow mirroring reflected illumination radiation to pass to the detector device and arranged in a pupil of the illumination beam path and partially mirrored, dissolved, wherein the beam splitter has a lying in the detection beam path beam splitter surface, the is mirrored at three points which lie on the beam splitter surface on a circle around the piercing point of the optical axis, and in which the illumination beam source has a number a corresponding to the number of points a n generates partial beams and focuses them on the points of the beam splitter in such a way that an interference pattern in the form of illumination spots distributed periodically over the sample is formed in the sample.
  • the solution according to the invention can also be inverted by the beam splitter reflecting the detection radiation and allowing it to pass specularly reflected illumination radiation.
  • a laser scanning microscope is provided with an illumination beam source and a detection beam path which guides radiation excited and / or backscattered in a sample along an optical axis to a detector device and in which a beam splitter is provided via the illumination radiation emitted by the illumination beam source is directed to the sample in an illumination beam path, wherein the beam splitter on the sample does not pass mirroring reflected illumination radiation to the detector device and arranged in a pupil of the illumination beam path and partially mirrored, wherein the beam splitter has a lying in the detection beam path reflecting beam splitter surface which at least three Points for the Illumination radiation is not mirrored, which lie on the beam splitter surface on a circle around the piercing point of the optical axis, and the illumination beam source generates a number of points corresponding to the number of partial beams and these focused on the three points of the beam splitter such
  • the invention achieves highly efficient dot group generation by means of a simple construction.
  • the beam splitter is formed so that the sample is illuminated with a point group in the form of a pattern generated by interference.
  • This allows parallel illumination of multiple points and also parallel scanning of these simultaneously illuminated points when the detector device performs multi-point detection on the illuminated spots.
  • a sampling rate multiplied by the number of dots is obtained without affecting the depth resolution.
  • the illumination (in fluorescence microscopy, excitation) of the sample with the regular dot group pattern is made according to the present invention utilizing an interference effect, so that the number of illumination rays provided by the illumination source is much smaller than the numbers of illumination spots in the regular pattern.
  • the interference effect only requires at least three reflective dots / transmitting holes on the beam splitter, onto which the illumination radiation is focused, so that at least three illumination beams are coupled in at the beam splitter.
  • This number of illumination beams (in this specification the term "beam” is used synonymously for a corresponding beam) can be easily generated.
  • the illumination beam source comprises a laser emitting a laser beam and a divider which divides the laser beam into the at least three sub-beams and focuses on the points / holes by means of an optical device.
  • the number of reflective or transmissive points is not limited to three. It is also possible to use more points which should be distributed as equidistantly as possible or equidistant on the circle or along the circumference, but which must be disjoint. At four points, these may be e.g. lie at the corners of a square, in the center of which the puncture point is located.
  • the microscope according to the invention with the beam splitter which effects the illumination by utilizing the interference achieves, as already mentioned, a high scanning speed by parallelization of the illumination and possibly detection.
  • the requirements for the scanning mechanism required for scanning are drastically reduced, since it is only necessary to perform a shift within a period of the periodic dot group pattern for scanning the image area.
  • the scanning device if it is designed, for example, as an optical scanner acting in the beam path, then only has to achieve a comparatively small deflection angle. This matches the scanning speed as well as simplifications of apparatus.
  • the interference-related generation of the illumination point group pattern makes it possible to easily adjust the brightness of the light spots with respect to the dark areas surrounding the light spots, namely by varying the intensity of respectively diagonally opposite partial beams.
  • suitable means for variation which are arranged upstream of the beam splitter in the illumination direction, and are formed for example in the form of adjustable attenuation elements.
  • the number of bright spots in the dot group pattern depends exclusively on the illuminated area on the sample, if in the illumination beam path substantially an image of the pupil, in which the beam splitter is arranged, is made on the sample.
  • the illuminated area of the sample and thus the number of sample points can then be effected simply by means for the focal length variation of the image between the beam splitter and the sample.
  • means for changing the image field size detected by the optical image automatically also vary the number of illumination spots that are formed on the sample by the interference.
  • Parallel detection of the simultaneously illuminated spots on the sample increases the image acquisition speed.
  • Such a parallel scan can be achieved in a particularly simple manner if the detection beam path ends in a matrix detector, which can optionally be preceded by a pinhole mask tuned to the illumination pattern.
  • the spatially resolving elements of the matrix detector can also assume the function of the pinhole mask.
  • the reflective elements of the beam splitter must only reflect for illumination radiation, not for detection radiation. The beam splitter can therefore also be formed dichroic.
  • the dot pitch in the dot group pattern can be adjusted via the distance of the foci to the beam splitter, ie over the circle radius.
  • FIG. 1 shows a schematic view of a laser scanning microscope
  • FIG. 2 shows an alternative embodiment of an illumination source for the microscope of FIG. 1,
  • FIG. 3 shows a plan view of a beam splitter of the microscope of FIG. 1 and FIG. 4 shows an illumination pattern on the sample caused by the microscope of FIG.
  • Figure 1 shows a laser scanning microscope 1 in a schematic representation.
  • the solid lines represent the illumination beam path B; the dashed lines represent the detection beam path 2.
  • the laser scanning microscope images a sample 3 onto a detector 4 in a scanning manner, the sample being illuminated by means of an illumination source 5.
  • the detection beam path 2 has from the sample 3 to the detector 4 along an optical axis OA an objective 6 and a tube lens 7, which is followed by a scanning objective 8a, after which a scanner 9 is provided.
  • a relay optics 8b, 10 and a Pinholeoptik 11 the radiation passes through a beam splitter 13 and passes to a detector 4, which is designed here as a matrix detector, and a filter 12 is arranged upstream for blocking last portions of the illumination.
  • the detection beam path 2 can also be configured differently, for example, one can do without the filter 12 as well as the intermediate image provided in the construction of FIG. 2 between the elements 8a and 7, which is symbolized by a dashed line.
  • the pupil planes in which the scanner 9 and the beam splitter 13 to be explained are located are conjugate to each other and to the rear focal plane of the objective 6, which is drawn between the elements 6 and 7 as a solid line.
  • the illumination source 5 has a laser 14, which generates four partial beams Sa, Sb, Sc, Sd by means of a divider device 16, which will be explained in more detail, wherein in FIG Center rays are drawn.
  • the divider 16 focuses these four sub-beams Sa-d, of which only two can be seen in the schematic representation of FIG. 1 (the other two are one above the other perpendicular to the plane of the drawing) onto the beam splitter 13.
  • the divider 16 has two dividers 17 and 18 and a deflecting mirror 19, which generate four parallel partial beams Sa, Sb and Sc and Sd from the one beam S emitted by the laser 14.
  • the partial beams Sa and Sb are superimposed, as are the partial beams Sc and Sd.
  • Lenses 20 and 21 in the divider 16 cause the focusing such that the partial beams Sa-c are focused on four points on the surface of the beam splitter 13.
  • the generation of the four partial beams Sa-c can, of course, also be carried out by a differently designed divider device 16 or, in principle, differently, for example in which four lasers 14 are used.
  • a possible further embodiment for the divider device 16 is shown in FIG. 2, in which the divider 18 and the mirror 19 are interchanged with the divider 17.
  • FIG. 3 shows the beam splitter 13 in plan view of its beam splitter surface 22.
  • Arranged on the beam splitter surface 22 are four reflecting mirror surface elements 23a, 23b, 23c and 23d which lie at the vertices of an imaginary square 24 whose center forms the piercing point 25 of the optical axis OA , Only there is the beam splitter surface 25 reflective, in the remaining region it is transmissive at least for detection radiation.
  • the illumination source 5 focuses the four partial beams Sa-d onto the four mirror surface elements 23a-d.
  • the partial beams focused and reflected in the pupil reach the interference, whereby the multispot pattern shown in FIG
  • the multi-spot pattern 28 arises in the sample.
  • the multi-spot pattern 28 is a regular array of
  • Light spots 26 which are surrounded by a dark area 27.
  • the intensity difference between the light spots 26 and the dark area 27, that is to say the depth of the zeros, can be determined by changing the intensities of the respectively opposite partial beams Sa, Sd and Sb.
  • the spatial extent of the pattern 28 can be adjusted by varying the magnification scale of the microscope (eg, variation of the focal length at 10 and 8b) by using the Image field in the sample that covers the pattern 28 is changed.
  • the focal length of the lenses 10, 21 can be adjusted.
  • the effect of the beam splitter 13 is as follows:
  • the dot pattern 28 with regularly arranged light spots 26 is formed on the sample 3.
  • fluorescence is thus excited at the light spots 26.
  • This arises spatially incoherent and thus fills homogeneously the rear focal plane of the microscope 6 (drawn between the elements 6 and 7 as a solid line).
  • diffuse reflection which can also be used for image acquisition.
  • the incoherent radiation to be detected also fills the entire pupil, in which the beam splitter 13 is arranged, and thus illuminates the entire beam splitter surface 22.
  • specularly reflected illumination radiation is focused onto the mirror surface elements 23a-d and thus reflected back to the illumination source 5.
  • the beam splitter 13 passes only the radiation to be detected, the spatially incoherent, d. H. undirected in sample 3.
  • the beam splitter 13 thus causes a separation of detection radiation and specularly reflected illumination radiation without a chromatic adjustment would have to be made.
  • This has the advantage that not only a higher yield is achieved, also the beam splitter 13 can be used for a variety of illumination wavelengths and detection wavelengths. The usually provided with color dividers exchange mechanisms or change gears are not necessary.
  • the detection takes place, for example, with the detector 4, which is designed as a matrix detector and may optionally be preceded by a pinhole mask.
  • the illuminated spots are displayed confocally.
  • This mask can lie in an intermediate image plane of the observation beam path in front of the detector or alternatively in the relay optics (between 10 and 8b). The latter also improves the beam profile on the lighting side.
  • the scanning of the sample 3 is effected by the action of the scanner 9.
  • a much smaller displacement of the illuminating light spots on the sample 3 is required than is required for a single-point scanner.
  • the individual light spots 26 are shifted by the scanner 9 simultaneously, as they are caused by interference in the sample. It is sufficient therefore one Movement by means of the scanner 9, which scans the dark area 27 between adjacent light spots 26.
  • the scanning displacement of the light spots therefore preferably takes place within only one period length of the periodic regular pattern 28.
  • the construction shown in FIG. 1 can also be inverted to interchange the detection beam path from the beam splitter 13 and the illumination source 5.
  • the beam splitter 13 is then negative with respect to the mirroring to the construction shown in Figure 3, i. the mirror surface elements 23a-d are holes in a mirror surface.

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

L'invention concerne un microscope à balayage laser avec une source de rayons d'éclairage (5) et une trajectoire de rayons de détection (2) qui guide vers un dispositif détecteur (4) le long d'un axe optique (OA) le rayonnement excité (3) et/ou rétrodiffusé dans un échantillon et dans lequel un séparateur de faisceaux (13) est prévu par lequel le rayonnement d'éclairage émis par la source de rayons d'éclairage (5) dans une trajectoire de rayons d'éclairage (B) est orienté sur l'échantillon (3), le séparateur de faisceaux (13) ne laissant pas passer vers le dispositif détecteur (4) le rayonnement d'éclairage se réfléchissant sur l'échantillon (3) et est de plus disposé dans une pupille de la trajectoire de rayons d'éclairage (B) et est en partie réfléchi, le séparateur de faisceaux (13) présentant une surface de séparateur de faisceaux (22) située dans une trajectoire de rayons de détection (2), laquelle surface est réfléchie au moins au niveau de trois points (23a-d) pour le rayonnement d'éclairage qui sont situés sur la surface du séparateur de faisceaux (22) dans un cercle autour du point de percée (25) de l'axe optique (OA), et la source de rayons d'éclairage (5) génère un nombre de rayons partiels (Sa-d) correspondant au nombre de points et concentre ces rayons sur les trois points (23a-d) du séparateur de faisceaux (13) de sorte à produire dans l'échantillon (3) un motif d'interférences (28) sous forme de taches d'éclairage (26) réparties périodiquement sur l'échantillon (13).
PCT/EP2007/003241 2006-04-18 2007-04-12 Microscope à balayage laser avec séparateur de faisceaux principaux pour la séparation dans l'espace des rayonnements d'éclairage et de détection Ceased WO2007121864A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200610017841 DE102006017841A1 (de) 2006-04-18 2006-04-18 Laser-Scanning-Mikroskop mit Hauptstrahlteiler zur räumlichen Trennung von Beleuchtungs- und Detektionsstrahlung
DE102006017841.6 2006-04-18

Publications (1)

Publication Number Publication Date
WO2007121864A1 true WO2007121864A1 (fr) 2007-11-01

Family

ID=38196620

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2007/003241 Ceased WO2007121864A1 (fr) 2006-04-18 2007-04-12 Microscope à balayage laser avec séparateur de faisceaux principaux pour la séparation dans l'espace des rayonnements d'éclairage et de détection

Country Status (2)

Country Link
DE (1) DE102006017841A1 (fr)
WO (1) WO2007121864A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2730377C2 (ru) * 2015-07-21 2020-08-21 Флюидсенс Интернешнал Инк. Система и способ обнаружения частиц в жидкости или воздухе
US11327007B2 (en) 2019-09-26 2022-05-10 Fluidsens International Inc. Compact and secure system and method for detecting particles in fluid

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008009216A1 (de) 2008-02-13 2009-08-20 Carl Zeiss Microimaging Gmbh Vorrichtung und Verfahren zum räumlich hochauflösenden Abbilden einer Struktur einer Probe
DE102017205623B4 (de) * 2017-04-03 2025-03-13 Robert Bosch Gmbh LIDAR-Vorrichtung und Verfahrens zum Abtasten eines Abtastwinkels

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4127318A (en) * 1975-09-20 1978-11-28 Ernst Leitz Wetzlar Gmbh Direct illumination apparatus for light and dark field illumination
DE10257237A1 (de) * 2001-12-10 2003-06-18 Zeiss Carl Jena Gmbh Anordnung zur optischen Erfassung von in einer Probe angeregter und/oder rückgestreuter Lichtstrahlung
DE10239548A1 (de) * 2002-08-23 2004-03-04 Leica Microsystems Semiconductor Gmbh Vorrichtung und Verfahren zur Inspektion eines Objekts

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4127318A (en) * 1975-09-20 1978-11-28 Ernst Leitz Wetzlar Gmbh Direct illumination apparatus for light and dark field illumination
DE10257237A1 (de) * 2001-12-10 2003-06-18 Zeiss Carl Jena Gmbh Anordnung zur optischen Erfassung von in einer Probe angeregter und/oder rückgestreuter Lichtstrahlung
DE10239548A1 (de) * 2002-08-23 2004-03-04 Leica Microsystems Semiconductor Gmbh Vorrichtung und Verfahren zur Inspektion eines Objekts

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2730377C2 (ru) * 2015-07-21 2020-08-21 Флюидсенс Интернешнал Инк. Система и способ обнаружения частиц в жидкости или воздухе
US11119049B2 (en) 2015-07-21 2021-09-14 Fluidsens International Inc. Particles in liquid detection method and particles in liquid detection system and method to detect particles in the air
US11327007B2 (en) 2019-09-26 2022-05-10 Fluidsens International Inc. Compact and secure system and method for detecting particles in fluid

Also Published As

Publication number Publication date
DE102006017841A1 (de) 2007-10-25

Similar Documents

Publication Publication Date Title
EP1944600B1 (fr) Microscope à balayage laser
DE10004191B4 (de) Fluoreszenz-Scanmikroskop
EP2948810B1 (fr) Microscope optique et procédé de microscopie
EP0961945A1 (fr) Dispositif de balayage lumineux
DE19835072A1 (de) Anordnung zur Beleuchtung und/oder Detektion in einem Mikroskop
EP2860566A2 (fr) Microscopie à balayage haute résolution
WO2013007591A1 (fr) Microscope à balayage à éclairage incident à foyer commun
DE20216583U1 (de) Mikroskop und Durchflusszytometer
EP1664888A1 (fr) Microscope a balayage avec eclairage evanescent
EP1882970A1 (fr) Microscope à balayage par laser pour le contrôle de la fluorescence
DE10155002A1 (de) Verfahren und Anordnung zur tiefenaufgelösten optischen Erfassung einer Probe
WO2017060506A1 (fr) Procédé et dispositif pour examiner un échantillon par un éclairage structuré à lame lumineuse
DE10118463A1 (de) Verfahren und Anordnung zur tiefenaufgelösten optischen Erfassung einer Probe
DE10120424B4 (de) Scanmikroskop und Auskoppelelement
EP3832370B1 (fr) Procédé de microscopie et microscope pour imager un echantillon au moyen d'un faisceau d'excitation manipulé
EP3084502B1 (fr) Microscope à balayage polychrome
WO2007121864A1 (fr) Microscope à balayage laser avec séparateur de faisceaux principaux pour la séparation dans l'espace des rayonnements d'éclairage et de détection
DE10024135B4 (de) Mikroskop
WO2008012056A1 (fr) Microscope à balayage laser
DE10206004A1 (de) Vorrichtung zur konfokalen optischen Mikroanalyse
WO2008043459A2 (fr) Dispositif de division de lumière de détection
DE112015002931T5 (de) Abbildendes optisches System, Beleuchtungsvorrichtung, Beobachtungsvorrichtung und Vorrichtung zur Wellenfrontwiederherstellung
WO2024153476A1 (fr) Microscope
EP4555271A1 (fr) Appareil de mesure confocale chromatique de distances
DE102006011277A1 (de) Laser-Scanning-Mikroskop und Laser-Scanning-Mikroskopierverfahren

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07724182

Country of ref document: EP

Kind code of ref document: A1

122 Ep: pct application non-entry in european phase

Ref document number: 07724182

Country of ref document: EP

Kind code of ref document: A1