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WO2006128733A3 - Coordinate measuring unit and method for measuring an object with a coordinate measuring unit - Google Patents

Coordinate measuring unit and method for measuring an object with a coordinate measuring unit Download PDF

Info

Publication number
WO2006128733A3
WO2006128733A3 PCT/EP2006/005355 EP2006005355W WO2006128733A3 WO 2006128733 A3 WO2006128733 A3 WO 2006128733A3 EP 2006005355 W EP2006005355 W EP 2006005355W WO 2006128733 A3 WO2006128733 A3 WO 2006128733A3
Authority
WO
WIPO (PCT)
Prior art keywords
measuring unit
coordinate measuring
lengths
coordinate
optical sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2006/005355
Other languages
German (de)
French (fr)
Other versions
WO2006128733A2 (en
Inventor
Rainer Tutsch
Matthias Andraes
Wolfgang Rauh
Ralf Christoph
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Werth Messtechnik GmbH
Original Assignee
Werth Messtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Werth Messtechnik GmbH filed Critical Werth Messtechnik GmbH
Priority to DE112006001423.4T priority Critical patent/DE112006001423B4/en
Publication of WO2006128733A2 publication Critical patent/WO2006128733A2/en
Publication of WO2006128733A3 publication Critical patent/WO2006128733A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042—Calibration or calibration artifacts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37193—Multicoordinate measuring system, machine, cmm
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37287—Fiber optic interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The invention relates to a coordinate measuring unit (10) with at least one optical sensor (32) that contactlessly senses an object (16) to be measured. In order to be able to measure highly precise small dimensions and slopes of objects, the invention provides that the exit angle and/or angular position and/or length of the measuring beam path of the optical sensor (32) can be adapted for detecting desired structures of the object (16), and that the measurement results for the different exit angles and/or angular positions and/or lengths can be provided in a uniform coordinate system by successively calibrating the optical sensors with regard to the different exit angles and/or angular positions and/or lengths.
PCT/EP2006/005355 2005-06-03 2006-06-06 Coordinate measuring unit and method for measuring an object with a coordinate measuring unit Ceased WO2006128733A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE112006001423.4T DE112006001423B4 (en) 2005-06-03 2006-06-06 Coordinate measuring machine and method for measuring an object with a coordinate measuring machine

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005026022A DE102005026022A1 (en) 2005-06-03 2005-06-03 Coordinate measuring device and method for measuring an object with a coordinate measuring machine
DE102005026022.5 2005-06-03

Publications (2)

Publication Number Publication Date
WO2006128733A2 WO2006128733A2 (en) 2006-12-07
WO2006128733A3 true WO2006128733A3 (en) 2007-01-18

Family

ID=37198451

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2006/005355 Ceased WO2006128733A2 (en) 2005-06-03 2006-06-06 Coordinate measuring unit and method for measuring an object with a coordinate measuring unit

Country Status (2)

Country Link
DE (2) DE102005026022A1 (en)
WO (1) WO2006128733A2 (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007003059A1 (en) * 2007-01-15 2008-07-24 Technische Universität Ilmenau Objective focusing method for optical length measuring technology
DE102007024197B4 (en) 2007-05-24 2017-01-05 Robert Bosch Gmbh Device and method for measuring the shape of free-form surfaces
EP2037214A1 (en) * 2007-09-14 2009-03-18 Leica Geosystems AG Method and measuring device for measuring surfaces
WO2010108365A1 (en) * 2009-03-24 2010-09-30 Harbin Institute Of Technology Micro focal-length collimation based micro-cavity measuring method and detecting equipment thereof
US8227752B1 (en) 2011-02-17 2012-07-24 Carl Zeiss Nts Gmbh Method of operating a scanning electron microscope
US8487252B2 (en) 2010-09-29 2013-07-16 Carl Zeiss Nts Gmbh Particle beam microscope and method for operating the particle beam microscope
DE102010046902B4 (en) * 2010-09-29 2015-09-17 Carl Zeiss Microscopy Gmbh Particle beam microscope and method for operating this
GB2484197A (en) * 2010-09-29 2012-04-04 Zeiss Carl Nts Gmbh Particle beam microscope and method of operating the particle microscope
US8817240B2 (en) 2012-05-25 2014-08-26 Mitutoyo Corporation Interchangeable optics configuration for a chromatic range sensor optical pen
WO2014191016A1 (en) 2013-05-27 2014-12-04 Carl Zeiss Industrielle Messtechnik Gmbh Device and method for calibrating a coordinate-measuring device
US11159784B2 (en) 2014-10-23 2021-10-26 Cognex Corporation System and method for calibrating a vision system with respect to a touch probe
GB201702391D0 (en) 2017-02-14 2017-03-29 Renishaw Plc Surface sensing device
CN110057338B (en) * 2019-05-24 2021-04-20 福建工程学院 An adaptive setting method of workpiece origin based on compound measurement
CA3155008A1 (en) * 2019-09-18 2021-03-25 DWFritz Automation, Inc. Non-contact optical measurement devices and exchangeable optical probes
DE102020208835B4 (en) * 2020-07-15 2024-07-25 Carl Zeiss Industrielle Messtechnik Gmbh Probing operations on a coordinate measuring machine with distance determination
CN112848822B (en) * 2021-02-25 2022-12-09 清华大学 Wire drawing device for measuring included angle between trailer head and container and measuring method thereof
CN115568063B (en) * 2021-07-02 2025-11-28 北京天地融物联技术有限公司 Intelligent lamp control pairing system and method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0264223A2 (en) * 1986-10-08 1988-04-20 Renishaw plc Datuming of analogue measurement probes
DE20008721U1 (en) * 2000-05-16 2000-08-17 Werth Messtechnik GmbH, 35394 Gießen Optical coordinate measuring device
US6321137B1 (en) * 1997-09-04 2001-11-20 Dynalog, Inc. Method for calibration of a robot inspection system
WO2002027269A1 (en) * 2000-09-28 2002-04-04 Carl Zeiss Calibration of a measuring sensor on an appliance for measuring co-ordinates by means of a ball and two parameter fields
DE10240292A1 (en) * 2002-08-31 2004-03-18 Carl Mahr Holding Gmbh Combination feeler for metrology and surface coordinate measurement of workpieces, wherein a feeler carrier is positioned by a drive motor and supports a number of different mechanical or non-contact feeler elements

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3806686A1 (en) * 1988-03-02 1989-09-14 Wegu Messtechnik MULTICOORDINATE MEASURING AND TESTING DEVICE
EP1082581B1 (en) * 1998-05-29 2004-07-28 Werth Messtechnik GmbH System for measuring structures of an object
DE10131779B4 (en) * 2000-07-07 2006-05-11 Robert Bosch Gmbh Interferometric short coherent shape measuring device for valve seat surfaces has beam splitter to form object beam guided over optical path to object and reference beam guided to reference plane
DE10131780A1 (en) * 2000-07-07 2002-03-07 Bosch Gmbh Robert Interferometric measuring device
DE10260256B9 (en) * 2002-12-20 2007-03-01 Carl Zeiss Interferometer system and measuring / machining tool
DE10331966A1 (en) * 2003-07-15 2005-02-03 Robert Bosch Gmbh Optical measuring device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0264223A2 (en) * 1986-10-08 1988-04-20 Renishaw plc Datuming of analogue measurement probes
US6321137B1 (en) * 1997-09-04 2001-11-20 Dynalog, Inc. Method for calibration of a robot inspection system
DE20008721U1 (en) * 2000-05-16 2000-08-17 Werth Messtechnik GmbH, 35394 Gießen Optical coordinate measuring device
WO2002027269A1 (en) * 2000-09-28 2002-04-04 Carl Zeiss Calibration of a measuring sensor on an appliance for measuring co-ordinates by means of a ball and two parameter fields
DE10240292A1 (en) * 2002-08-31 2004-03-18 Carl Mahr Holding Gmbh Combination feeler for metrology and surface coordinate measurement of workpieces, wherein a feeler carrier is positioned by a drive motor and supports a number of different mechanical or non-contact feeler elements

Also Published As

Publication number Publication date
WO2006128733A2 (en) 2006-12-07
DE112006001423B4 (en) 2021-06-24
DE102005026022A1 (en) 2006-12-07
DE112006001423A5 (en) 2008-04-10

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