[go: up one dir, main page]

WO2006103287A3 - Dispositif micro-onde pour le traitement d'un flux par un rayonnement lumineux - Google Patents

Dispositif micro-onde pour le traitement d'un flux par un rayonnement lumineux Download PDF

Info

Publication number
WO2006103287A3
WO2006103287A3 PCT/EP2006/061222 EP2006061222W WO2006103287A3 WO 2006103287 A3 WO2006103287 A3 WO 2006103287A3 EP 2006061222 W EP2006061222 W EP 2006061222W WO 2006103287 A3 WO2006103287 A3 WO 2006103287A3
Authority
WO
WIPO (PCT)
Prior art keywords
microwave
flux
chamber
visible radiation
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2006/061222
Other languages
English (en)
Other versions
WO2006103287A2 (fr
Inventor
Pascal Sortais
Xavier Pellet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RC LUX
Original Assignee
RC LUX
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RC LUX filed Critical RC LUX
Priority to EP06743230A priority Critical patent/EP1869695A2/fr
Priority to BRPI0609775-8A priority patent/BRPI0609775A2/pt
Publication of WO2006103287A2 publication Critical patent/WO2006103287A2/fr
Publication of WO2006103287A3 publication Critical patent/WO2006103287A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/64Heating using microwaves
    • H05B6/80Apparatus for specific applications
    • H05B6/802Apparatus for specific applications for heating fluids
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61LMETHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/02Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
    • A61L2/08Radiation
    • A61L2/10Ultraviolet radiation
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61LMETHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/02Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
    • A61L2/14Plasma, i.e. ionised gases
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61LMETHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/24Apparatus using programmed or automatic operation
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61LMETHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00Disinfection, sterilisation or deodorisation of air
    • A61L9/16Disinfection, sterilisation or deodorisation of air using physical phenomena
    • A61L9/18Radiation
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61LMETHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00Disinfection, sterilisation or deodorisation of air
    • A61L9/16Disinfection, sterilisation or deodorisation of air using physical phenomena
    • A61L9/18Radiation
    • A61L9/20Ultraviolet radiation
    • A61L9/205Ultraviolet radiation using a photocatalyst or photosensitiser
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61LMETHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00Disinfection, sterilisation or deodorisation of air
    • A61L9/16Disinfection, sterilisation or deodorisation of air using physical phenomena
    • A61L9/22Ionisation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122Incoherent waves
    • B01J19/123Ultraviolet light
    • B01J19/124Ultraviolet light generated by microwave irradiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122Incoherent waves
    • B01J19/126Microwaves
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/30Treatment of water, waste water, or sewage by irradiation
    • C02F1/32Treatment of water, waste water, or sewage by irradiation with ultraviolet light
    • C02F1/325Irradiation devices or lamp constructions
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/64Heating using microwaves
    • H05B6/6402Aspects relating to the microwave cavity
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/64Heating using microwaves
    • H05B6/70Feed lines
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61LMETHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2202/00Aspects relating to methods or apparatus for disinfecting or sterilising materials or objects
    • A61L2202/10Apparatus features
    • A61L2202/11Apparatus for generating biocidal substances, e.g. vaporisers, UV lamps
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/085Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy creating magnetic fields
    • B01J2219/0852Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy creating magnetic fields employing permanent magnets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/085Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy creating magnetic fields
    • B01J2219/0862Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy creating magnetic fields employing multiple (electro)magnets
    • B01J2219/0867Six or more (electro)magnets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873Materials to be treated
    • B01J2219/0875Gas
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873Materials to be treated
    • B01J2219/0877Liquid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873Materials to be treated
    • B01J2219/0879Solid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873Materials to be treated
    • B01J2219/0892Materials to be treated involving catalytically active material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894Processes carried out in the presence of a plasma
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00Apparatus for treatment of water, waste water or sewage
    • C02F2201/32Details relating to UV-irradiation devices
    • C02F2201/322Lamp arrangement
    • C02F2201/3227Units with two or more lamps
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2307/00Location of water treatment or water treatment device
    • C02F2307/06Mounted on or being part of a faucet, shower handle or showerhead

Landscapes

  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • Physics & Mathematics (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Toxicology (AREA)
  • Electromagnetism (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Hydrology & Water Resources (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Physical Water Treatments (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)

Abstract

La présente invention concerne un dispositif pour le traitement d'un flux par un rayonnement lumineux, le dispositif comprenant des moyens de génération de micro-ondes (10a, 10b, 10c), au moins une cavité micro¬ ondes (20) comprenant des parois étanches aux micro-ondes pour confiner les micro-ondes, au moins un canal d'irradiation (30) dans lequel circule le flux à traiter, au moins une enceinte (40) contenant un plasma, située à l'intérieure de la cavité micro-ondes, des moyens de génération d'un champ magnétique (50), enceinte(s), cavité(s), et moyens de génération du champ magnétique et des micro-ondes étant agencés de manière à générer une résonance cyclotronique d'électrons à l'intérieur de(s) l'enceinte(s) pour émettre un rayonnement lumineux permettant l'irradiation du fluide à traiter, remarquable en ce que les moyens de génération du champs magnétique sont constitués par au moins un aimant permanent et en ce que chaque enceinte est disposée à proximité immédiate d'au moins un aimant.
PCT/EP2006/061222 2005-04-01 2006-03-31 Dispositif micro-onde pour le traitement d'un flux par un rayonnement lumineux Ceased WO2006103287A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP06743230A EP1869695A2 (fr) 2005-04-01 2006-03-31 Dispositif micro-onde pour le traitement d'un flux par un rayonnement lumineux
BRPI0609775-8A BRPI0609775A2 (pt) 2005-04-01 2006-03-31 dispositivo e processo para o tratamento de um fluxo por uma radiação luminosa

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0503209A FR2884043A1 (fr) 2005-04-01 2005-04-01 Source lumineuse alimentee par radiofrequence pour traitements de substances et procede d'utilisation d'une telle source
FR05/03209 2005-04-01

Publications (2)

Publication Number Publication Date
WO2006103287A2 WO2006103287A2 (fr) 2006-10-05
WO2006103287A3 true WO2006103287A3 (fr) 2006-12-14

Family

ID=35445751

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2006/061222 Ceased WO2006103287A2 (fr) 2005-04-01 2006-03-31 Dispositif micro-onde pour le traitement d'un flux par un rayonnement lumineux

Country Status (4)

Country Link
EP (1) EP1869695A2 (fr)
BR (1) BRPI0609775A2 (fr)
FR (1) FR2884043A1 (fr)
WO (1) WO2006103287A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7863590B2 (en) 2007-08-15 2011-01-04 Jenact Limited UV irradiator

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2937494B1 (fr) 2008-10-17 2012-12-07 Centre Nat Rech Scient Source de plasma gazeux basse puissance
FR2946490B1 (fr) * 2009-06-05 2011-07-15 Commissariat Energie Atomique Dispositif de generation de plasmas a la resonance cyclotron electronique
TWI572389B (zh) 2009-11-10 2017-03-01 伊穆諾萊特公司 用於產生介質中之改變之儀器組及系統、用於產生光或固化之系統、輻射固化或可固化物品、微波或rf接受器及用於治療或診斷之系統
CN102468030B (zh) * 2010-10-29 2014-09-17 国立成功大学 磁场产生模块、磁场产生模块的制造方法及磁力提升的方法
CN102451514B (zh) * 2010-10-29 2013-07-31 国立成功大学 磁导引控制装置
WO2013156875A2 (fr) * 2012-03-27 2013-10-24 Goji Ltd. Élément chauffant en ligne à commande de phase
WO2015166515A2 (fr) * 2014-04-28 2015-11-05 SARTONI, Stefano Contenant pour plasma induit et rayonnement ionisant
ITUB20152344A1 (it) * 2015-07-21 2017-01-21 Levi Dancona Pier Lorenzo Purificatore d’acqua curativo
NO345369B1 (en) * 2017-03-27 2021-01-04 Scanship As Microwave pyrolysis reactor I

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3911318A (en) * 1972-03-29 1975-10-07 Fusion Systems Corp Method and apparatus for generating electromagnetic radiation
JPS61208743A (ja) * 1985-03-13 1986-09-17 Toshiba Corp 紫外線処理装置
DE4202734A1 (de) * 1992-01-31 1993-08-05 Leybold Ag Strahlungsquelle, insbesondere fuer strahlungs-induzierte aetz- und cvd-anlagen
US5451259A (en) * 1994-02-17 1995-09-19 Krogh; Ole D. ECR plasma source for remote processing
JPH07263160A (ja) * 1994-03-25 1995-10-13 Daihen Corp マイクロ波励起光源装置
US5931557A (en) * 1996-04-02 1999-08-03 Danilychev; Vladimir A. Energy efficient ultraviolet visible light source
JP2001155882A (ja) * 1999-11-24 2001-06-08 Victor Co Of Japan Ltd マイクロ波放電光源装置及びこのマイクロ波放電光源装置を用いた画像表示装置
US6559460B1 (en) * 2000-10-31 2003-05-06 Nordson Corporation Ultraviolet lamp system and methods
WO2005117069A1 (fr) * 2004-04-29 2005-12-08 Pascal Sortais Source lumineuse a resonance cyclotronique d'electrons

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5323442A (en) 1992-02-28 1994-06-21 Ruxam, Inc. Microwave X-ray source and methods of use
US6327338B1 (en) 1992-08-25 2001-12-04 Ruxan Inc. Replaceable carbridge for an ECR x-ray source
WO1996005600A1 (fr) 1994-08-11 1996-02-22 Ruxam, Inc. Source de rayons x portative et procede de radiographie

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3911318A (en) * 1972-03-29 1975-10-07 Fusion Systems Corp Method and apparatus for generating electromagnetic radiation
JPS61208743A (ja) * 1985-03-13 1986-09-17 Toshiba Corp 紫外線処理装置
DE4202734A1 (de) * 1992-01-31 1993-08-05 Leybold Ag Strahlungsquelle, insbesondere fuer strahlungs-induzierte aetz- und cvd-anlagen
US5451259A (en) * 1994-02-17 1995-09-19 Krogh; Ole D. ECR plasma source for remote processing
JPH07263160A (ja) * 1994-03-25 1995-10-13 Daihen Corp マイクロ波励起光源装置
US5931557A (en) * 1996-04-02 1999-08-03 Danilychev; Vladimir A. Energy efficient ultraviolet visible light source
JP2001155882A (ja) * 1999-11-24 2001-06-08 Victor Co Of Japan Ltd マイクロ波放電光源装置及びこのマイクロ波放電光源装置を用いた画像表示装置
US6559460B1 (en) * 2000-10-31 2003-05-06 Nordson Corporation Ultraviolet lamp system and methods
WO2005117069A1 (fr) * 2004-04-29 2005-12-08 Pascal Sortais Source lumineuse a resonance cyclotronique d'electrons

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 011, no. 041 (E - 478) 6 February 1987 (1987-02-06) *
PATENT ABSTRACTS OF JAPAN vol. 1996, no. 02 29 February 1996 (1996-02-29) *
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 23 10 February 2001 (2001-02-10) *
See also references of EP1869695A2 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7863590B2 (en) 2007-08-15 2011-01-04 Jenact Limited UV irradiator

Also Published As

Publication number Publication date
EP1869695A2 (fr) 2007-12-26
FR2884043A1 (fr) 2006-10-06
WO2006103287A2 (fr) 2006-10-05
BRPI0609775A2 (pt) 2011-10-18

Similar Documents

Publication Publication Date Title
WO2008106448A3 (fr) Sources ioniques et procédés d'utilisation d'un électroaimant d'une source ionique
WO2010058930A3 (fr) Appareil à source ionique par résonance électronique cyclotronique et son procédé de fabrication
MXPA05009982A (es) Generador de empuje de nave espacial.
EP3905300A3 (fr) Appareil de source de faisceau de particules ecr
WO2006103287A3 (fr) Dispositif micro-onde pour le traitement d'un flux par un rayonnement lumineux
KR890003266A (ko) 플라즈마 처리방법 및 그 장치
TW200511902A (en) Magnetic enhancement for mechanical confinement of plasma
CN104770069B (zh) 用于产生等离子体的同轴微波施加器
CN107195527B (zh) 一种提高ecr离子源中氢分子离子比例系统及其方法
WO2011068350A3 (fr) Appareil et procédé pour générer des rayons x à l'aide d'une source d'ions à résonance cyclotronique électronique
KR101654084B1 (ko) Ecr 플라즈마 발생장치
WO2005117069A8 (fr) Source lumineuse a resonance cyclotronique d'electrons
JP2009545101A (ja) プラズマ源
MY201589A (en) Device for generating plasma having a high range along an axis by electron cyclotron resonance (ecr) from a gaseous medium
KR101311467B1 (ko) 전자 맴돌이 공명 이온원 장치 및 이의 인출 전류를 증가시키는 방법
TW200620372A (en) Electron injection in ion implanter magnets
KR900014639A (ko) 마이크로파 플라스마 에칭방법 및 장치
WO2013030804A2 (fr) Source compacte auto-résonnante de rayons x
WO2006017119A3 (fr) Source de lumière plasma alimentée par induction
Rácz et al. ECR plasma photographs as a plasma diagnostic
Gupta et al. Space-charge field assisted electron acceleration by plasma wave in magnetic plasma channel
WO2001062053A3 (fr) Commande active de la temperature des electrons d'une source de plasma a radiofrequence electrostatiquement blinde
WO2010001036A3 (fr) Dispositif générateur d'ions à résonance cyclotronique électronique
JP4580698B2 (ja) ジャイラック加速電子型ecrイオン源及び多価イオン生成方法
Wang et al. Effect of RF on RF nitrogen discharge with induced argon plasma at high pressure

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 7502/DELNP/2007

Country of ref document: IN

NENP Non-entry into the national phase

Ref country code: DE

WWW Wipo information: withdrawn in national office

Ref document number: DE

WWE Wipo information: entry into national phase

Ref document number: 2006743230

Country of ref document: EP

NENP Non-entry into the national phase

Ref country code: RU

WWW Wipo information: withdrawn in national office

Ref document number: RU

WWP Wipo information: published in national office

Ref document number: 2006743230

Country of ref document: EP

ENP Entry into the national phase

Ref document number: PI0609775

Country of ref document: BR

Kind code of ref document: A2

Effective date: 20070928