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WO2006035744A8 - 絶縁体被膜層担持電極を有する気体励起装置、及び気体励起方法 - Google Patents

絶縁体被膜層担持電極を有する気体励起装置、及び気体励起方法 Download PDF

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Publication number
WO2006035744A8
WO2006035744A8 PCT/JP2005/017698 JP2005017698W WO2006035744A8 WO 2006035744 A8 WO2006035744 A8 WO 2006035744A8 JP 2005017698 W JP2005017698 W JP 2005017698W WO 2006035744 A8 WO2006035744 A8 WO 2006035744A8
Authority
WO
WIPO (PCT)
Prior art keywords
gas excitation
film layer
insulation film
electrode
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2005/017698
Other languages
English (en)
French (fr)
Other versions
WO2006035744A1 (ja
Inventor
Hitoshi Otaka
Takayuki Kawakita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nittetsu Mining Co Ltd
Original Assignee
Nittetsu Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nittetsu Mining Co Ltd filed Critical Nittetsu Mining Co Ltd
Priority to US11/576,202 priority Critical patent/US20090178915A1/en
Priority to EP05787941A priority patent/EP1809082A1/en
Publication of WO2006035744A1 publication Critical patent/WO2006035744A1/ja
Anticipated expiration legal-status Critical
Publication of WO2006035744A8 publication Critical patent/WO2006035744A8/ja
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2431—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes using cylindrical electrodes, e.g. rotary drums

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Lasers (AREA)

Abstract

　被処理気体の流入用開口部と処理済み気体の排出用開口部とを有するハウジング内に、交流電源と接続する少なくとも一対の電極を備え、前記の一対の電極が保護電極と保護電極との組合せであるか又は保護電極と露出電極との組合せである気体励起装置であって、少なくとも１つの保護電極が、芯電極と、その芯電極の表面上に全表面を覆って担持された絶縁体被膜層とからなることを特徴とする、前記の気体励起装置を開示する。
PCT/JP2005/017698 2004-09-28 2005-09-27 絶縁体被膜層担持電極を有する気体励起装置、及び気体励起方法 Ceased WO2006035744A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US11/576,202 US20090178915A1 (en) 2004-09-28 2005-09-27 Gas-exciting apparatus having electrode containing insulating coating layer and gas-exciting process
EP05787941A EP1809082A1 (en) 2004-09-28 2005-09-27 Gas excitation device having insulation film layer carrying electrode and gas excitation method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004-282186 2004-09-28
JP2004282186A JP2006100031A (ja) 2004-09-28 2004-09-28 絶縁体被膜層担持電極を有する気体励起装置、及び気体励起方法

Publications (2)

Publication Number Publication Date
WO2006035744A1 WO2006035744A1 (ja) 2006-04-06
WO2006035744A8 true WO2006035744A8 (ja) 2007-08-23

Family

ID=36118889

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2005/017698 Ceased WO2006035744A1 (ja) 2004-09-28 2005-09-27 絶縁体被膜層担持電極を有する気体励起装置、及び気体励起方法

Country Status (6)

Country Link
US (1) US20090178915A1 (ja)
EP (1) EP1809082A1 (ja)
JP (1) JP2006100031A (ja)
KR (1) KR20070083762A (ja)
CN (1) CN101032190A (ja)
WO (1) WO2006035744A1 (ja)

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CN101627514B (zh) * 2007-03-05 2012-12-05 奥奈特有限公司 低温等离子体发生器
JP4688850B2 (ja) * 2007-07-27 2011-05-25 京セラ株式会社 構造体およびこれを用いた装置
JP2009042317A (ja) * 2007-08-06 2009-02-26 Sharp Corp イオン発生素子、イオン発生素子の製造方法、帯電装置、および画像形成装置
JP2009184862A (ja) * 2008-02-05 2009-08-20 Ngk Insulators Ltd プラズマリアクタ
EP2506689A1 (en) * 2009-11-27 2012-10-03 NGK Insulators, Ltd. Plasma processing device
ITCE20100007A1 (it) * 2010-06-09 2011-12-10 Aldo Mango Modulo generatore di plasma freddo per trattamenti chimico-fisici su aria, gas e fumi comunque canalizzati
DE102010060966B3 (de) * 2010-12-02 2012-04-19 Reinhausen Plasma Gmbh Plasmaerzeuger
RO127836B1 (ro) * 2012-03-12 2013-12-30 Aurel Enache Instalaţie pentru tratarea unui combustibil în vederea creşterii puterii calorice
JP2013239397A (ja) * 2012-05-17 2013-11-28 Toshiba Corp 放熱器及び放熱装置
JP6336439B2 (ja) 2012-05-18 2018-06-06 レイヴ エヌ．ピー． インコーポレイテッド 汚染物除去装置及び方法
JP6097499B2 (ja) * 2012-07-20 2017-03-15 東京エレクトロン株式会社 プラズマ処理装置用部品及びプラズマ処理装置
JP2014183175A (ja) * 2013-03-19 2014-09-29 Toshiba Corp 放熱器
US9138504B2 (en) * 2013-08-19 2015-09-22 Nano And Advanced Materials Institute Limited Plasma driven catalyst system for disinfection and purification of gases
JP6223841B2 (ja) 2014-01-24 2017-11-01 日本碍子株式会社 オゾン発生器
JP2015137215A (ja) * 2014-01-24 2015-07-30 日本碍子株式会社 オゾン発生器
JP5683032B1 (ja) 2014-02-17 2015-03-11 錦隆 後藤 空間電位発生装置を利用した鮮度保持装置
JP2015189649A (ja) * 2014-03-28 2015-11-02 日本碍子株式会社 オゾン発生器
JP6259346B2 (ja) * 2014-03-31 2018-01-10 日本碍子株式会社 オゾン発生器
RU2619591C1 (ru) * 2015-11-19 2017-05-17 Федеральное государственное бюджетное учреждение науки Институт электрофизики Уральского отделения Российской академии наук (ИЭФ УрО РАН) Способ изготовления самонакаливаемого полого катода из нитрида титана для систем генерации плазмы
CN107360658A (zh) * 2016-05-09 2017-11-17 王连岐 一种超薄体放电极低温等离子体发生器
KR101732531B1 (ko) * 2016-12-29 2017-05-08 주식회사 삼도환경 공진형 전력구동기를 이용한 농축산용 플라즈마 발생장치
CN107148139A (zh) * 2017-05-22 2017-09-08 苏州屹润食品科技有限公司 一种高压电场低温等离子体冷杀菌激发装置
CN111295033A (zh) * 2020-04-14 2020-06-16 昆山索坤莱机电科技有限公司 一种新型宽幅等离子表面处理装置
ES3014813T3 (en) 2020-11-24 2025-04-25 Agc Glass Europe Device for electrical discharge processing of non-conducting liquids and associated method
CN114345263B (zh) * 2022-01-25 2024-04-23 内蒙古金科发新材料科技有限公司 一种热等离子体反应器保护装置

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Also Published As

Publication number Publication date
US20090178915A1 (en) 2009-07-16
JP2006100031A (ja) 2006-04-13
KR20070083762A (ko) 2007-08-24
CN101032190A (zh) 2007-09-05
WO2006035744A1 (ja) 2006-04-06
EP1809082A1 (en) 2007-07-18

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