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WO2006001842A3 - Electro-optic sensor - Google Patents

Electro-optic sensor Download PDF

Info

Publication number
WO2006001842A3
WO2006001842A3 PCT/US2005/002844 US2005002844W WO2006001842A3 WO 2006001842 A3 WO2006001842 A3 WO 2006001842A3 US 2005002844 W US2005002844 W US 2005002844W WO 2006001842 A3 WO2006001842 A3 WO 2006001842A3
Authority
WO
WIPO (PCT)
Prior art keywords
electro
optic sensor
signal
modulation signal
acoustic signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2005/002844
Other languages
French (fr)
Other versions
WO2006001842A2 (en
Inventor
Araz Yacoubian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ler Technologies Inc
Original Assignee
Ler Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ler Technologies Inc filed Critical Ler Technologies Inc
Publication of WO2006001842A2 publication Critical patent/WO2006001842A2/en
Anticipated expiration legal-status Critical
Publication of WO2006001842A3 publication Critical patent/WO2006001842A3/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1706—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

A sensor comprises an optical modulator that generates a modulation signal, an interferometer that mixes an acoustic signal evoked by a pulsed laser with the modulation signal to down-convert the acoustic signal to lower frequencies, and a photodetector that detects the down-converted signal.
PCT/US2005/002844 2004-06-14 2005-02-01 Electro-optic sensor Ceased WO2006001842A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US57998604P 2004-06-14 2004-06-14
US60/579,986 2004-06-14

Publications (2)

Publication Number Publication Date
WO2006001842A2 WO2006001842A2 (en) 2006-01-05
WO2006001842A3 true WO2006001842A3 (en) 2007-02-08

Family

ID=35782207

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/002844 Ceased WO2006001842A2 (en) 2004-06-14 2005-02-01 Electro-optic sensor

Country Status (1)

Country Link
WO (1) WO2006001842A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009029002B3 (en) 2009-08-28 2011-01-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Photoacoustic sensor and method for its production and use
DE102009045724B3 (en) 2009-10-15 2011-01-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Photoacoustic gas sensor and method for its production and use
EP3349020A1 (en) * 2017-01-13 2018-07-18 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Method of and system for performing subsurface imaging using vibration sensing
NO20200190A1 (en) * 2020-02-14 2021-08-16 Optonor As System and method for analysing an object
JP7772723B2 (en) 2020-07-01 2025-11-18 ディープサイト テクノロジー インコーポレイテッド Acousto-optic harmonic imaging with optical sensors

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
GRAHN H.T. ET AL.: "Sound Velocity and Index of Refraction of AlAs Measured by Picosecond Electronics", APPL. PHYS. LETT., vol. 53, no. 21, 21 November 1988 (1988-11-21), pages 2023 - 2024, XP003006698 *
YACOUBIAN A. ET AL.: "EO Polymer Based Integrated-Optical Acoustic Spectrum Analyzer", IEEE J. SELECTED TOPICS IN QUANT. ELECTR., vol. 6, no. 5, September 2000 (2000-09-01) - October 2000 (2000-10-01), pages 810 - 816, XP000981005 *

Also Published As

Publication number Publication date
WO2006001842A2 (en) 2006-01-05

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