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WO2006080846A1 - Mecanisme a cinq barres a moyen d'equilibrage dynamique et procede pour l'equilibrage dynamique d'un mecanisme a cinq barres - Google Patents

Mecanisme a cinq barres a moyen d'equilibrage dynamique et procede pour l'equilibrage dynamique d'un mecanisme a cinq barres Download PDF

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Publication number
WO2006080846A1
WO2006080846A1 PCT/NL2006/000048 NL2006000048W WO2006080846A1 WO 2006080846 A1 WO2006080846 A1 WO 2006080846A1 NL 2006000048 W NL2006000048 W NL 2006000048W WO 2006080846 A1 WO2006080846 A1 WO 2006080846A1
Authority
WO
WIPO (PCT)
Prior art keywords
rod
balancing mechanism
rods
balancing
actuators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/NL2006/000048
Other languages
English (en)
Inventor
Hugo Franklin Menschaar
Andreas Bernardus Gerardus Ariens
Justus Laurens Herder
Bernhard Michael Bakker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BE Semiconductor Industries NV
Original Assignee
BE Semiconductor Industries NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BE Semiconductor Industries NV filed Critical BE Semiconductor Industries NV
Priority to JP2007553060A priority Critical patent/JP2008528307A/ja
Publication of WO2006080846A1 publication Critical patent/WO2006080846A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0008—Balancing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1602—Programme controls characterised by the control system, structure, architecture

Definitions

  • the invention relates to a device for manipulating objects, more particularly for manipulating electronic components.
  • the invention also relates to a method for manipulating objects, more particularly manipulating electronic components, using such a device.
  • manipulator For the manipulation of objects, such as more particularly gripping, displacing and setting down electronic components, use is made of various types of manipulator. Examples hereof are a carriage displaceable along right-angle guides, and a robot arm. Such manipulators can function with a high positional accuracy but have the drawback that the acceleration at which they can operate is limited. If functioning with great accuracy is required, they must furthermore be provided with a heavy frame to prevent undesired movement of the frame as a result of the reactive forces and reactive moments associated with the accelerations of the manipulator and machine parts assembled therewith. Because of the increasing production speeds in the industry where electronic components are manufactured and/or processed, the existing manipulators increasingly form a limitation to further optimization of such processes.
  • the object of the present invention is to provide a device and a method for manipulating objects, more particularly manipulating electronic components, with which operation can take place at high speeds without, or at least with fewer of, the drawbacks of the prior art.
  • the present invention provides for this purpose a device for manipulating objects, more particularly manipulating electronic components, comprising: a rod mechanism which is provided with at least two master rods with a slave rod pivotally engaging on each of the master rods, which slave rods are mutually connected at a distance from the master rods, two actuators engaging on each of the master rods, which actuators can be operated independently of each other, and a balancing mechanism for compensating dynamic forces during movement of the rod mechanism.
  • a rod mechanism is also referred to as a rod assembly.
  • a position defined by the slave rods is fully controlled by means of actuating at least a single degree of freedom of each of the master rods of the mechanism.
  • the actuators (which can also be referred to as drive mechanisms) can be embodied in simple manner because they only have to provide a single freedom of movement and can moreover be connected to the fixed world.
  • the dynamic mass of the device can thus be kept very limited; the actuators do not have to form part of the dynamic mass.
  • a small dynamic mass reduces the forces which can bring about vibrations in the frame.
  • the mass of the products for displacing is also extremely small, which makes it possible to adjust the balancing mechanism to the inertia of the rod mechanism. It is precisely in such an application, in which the load-bearing capacity of the manipulator can remain very low, that it therefore becomes possible to operate with (very) high accelerations.
  • the balancing mechanism for compensation of dynamic forces can be provided with a force balancing which comprises counter-bodies (counterweights) assembled with the rod mechanism.
  • a force balancing which comprises counter-bodies (counterweights) assembled with the rod mechanism.
  • Such a construction can be very simple and does not require complex control; the mechanical coupling of the manipulator and the associated counter-bodies (or optionally a single counter-body) provides for a good generation of the desired compensating balancing force(s).
  • the balancing mechanism for the force compensation to comprise at least one body which is displaceable separately of the rod mechanism and which is operated by means of a compensating drive.
  • the control of such a balancing mechanism will usually take place by means of an electronic control.
  • Such an electronically controlled balancing mechanism can be placed at a distance from the rod mechanism, which provides a greater freedom in construction.
  • the balancing mechanism it is furthermore no longer necessary for the balancing mechanism to form part of the dynamic mass, resulting in an extremely light construction of the rod assembly. It is noted that there are of course also possibilities for combining an electronically controlled balancing mechanism with force compensation provided with counter-bodies assembled with the rod mechanism. Finally, it is noted that the dynamic compensation of force can be carried out in all directions (with 3 degrees of freedom), but it is also possible to opt for compensation of force which can only be realized in a limited number of directions, i.e. with less than 3 degrees of freedom. Using such limited compensation of force the most disruptive reactive force(s) can be at least partly compensated, while another reactive force or other reactive forces is/are not compensated.
  • the slave rods will carry a processing element.
  • a processing element can for instance consist of a head with a gripper which can be controlled mechanically or pneumatically, a camera, various types of tool, a coupling part for co-action with diverse processing elements, and so forth.
  • the slave rods can be directly connected to each other, or connected via another element such as a coupling part.
  • the actuators engaging on the two master rods can generate rotating drive movements, for instance by means of two independently operating servomotors. For a compact assembly it therefore becomes possible to place the rotation axes of the rotating actuators coaxially, i.e. these rotation axes lie mutually in line. On the other hand it is also possible for the actuators engaging on the two master rods to generate linear drive movements such that the master rods can move reciprocally (such as for instance in oscillating or intermittent manner).
  • the linear actuators can for instance be disposed parallel to each other, for instance in the form of a parallel arrangement of for instance linear motors. Alternatively, it is also possible to envisage the master rods being engaged by a drive rod which is driven rotatingly on one side and which converts a rotating movement into a linear movement.
  • the device also comprises a balancing mechanism for moment compensation (torque compensation) of the reactive moment (torque) generated by displacement of the rod assembly.
  • a balancing mechanism for moment compensation of the reactive moment (torque) generated by displacement of the rod assembly.
  • the manipulator can be dynamically balanced to an even greater extent, which even provides the possibility of the complete absence (at least theoretically) of a resultant reactive force and a resultant reactive moment, whereby the manipulator will (at least theoretically) make no contact whatever with its vicinity.
  • the moment compensation can be realized in all directions (with 3 degrees of freedom), although it is also possible to opt for realizing the moment compensation in only a limited number of directions, i.e. with fewer than 3 degrees of freedom. Using such limited moment compensation the most disruptive moment(s) can be at least partly compensated, while another moment or other moments is/are not compensated.
  • the balancing mechanism for moment compensation can be embodied such that it comprises at least one counter-rotating body assembled with the rod mechanism.
  • the balancing mechanism for moment compensation can comprise at least one body which is displaceable separately of the rod mechanism and which is operated by means of a compensating drive.
  • this second variant requires an electronic control, although this latter can also be placed at a distance from the rod mechanism.
  • the advantage of an electric control is once again that it results in a relatively light construction of the rod assembly and in a limitation of the total inertia.
  • the present invention also provides a method for manipulating objects, more particularly manipulating electronic components, using a device according to any of the foregoing claims and comprising the processing steps of: A) independently controlling two actuators engaging on the master rods of a rod mechanism, and B) at least partly compensating reactive forces (and/or reactive moments) generated as a result of the displacement of the rod mechanism by means of at least one balancing mechanism.
  • A) independently controlling two actuators engaging on the master rods of a rod mechanism and B) at least partly compensating reactive forces (and/or reactive moments) generated as a result of the displacement of the rod mechanism by means of at least one balancing mechanism.
  • the operation of the balancing mechanism prefferably coupled mechanically to the rod assembly, or for the operation of the balancing mechanism to be controlled electrically. Electric control is possible on the basis of controlling the actuators engaging on the rod mechanism and/or of sensors arranged for this purpose.
  • figure IA shows a schematic view of a rod assembly as component of the device according to the present invention
  • figure IB shows a schematic view of an alternative embodiment variant of a rod assembly as component of the device according to the present invention
  • figure 1C shows a schematic view of a second embodiment variant of a rod assembly as component of the device according to the present invention
  • figure 2 is a schematic view of a manipulation device according to the present invention provided with a balancing mechanism for force compensation
  • figure 3 is a schematic view of an alternative embodiment variant of a manipulation device according to the present invention provided with a balancing mechanism for force compensation and a balancing mechanism for moment compensation
  • figure 4 is a schematic view of a second alternative embodiment variant of a manipulation device according to the present invention provided with an electronically controlled balancing mechanism.
  • Figure IA shows a rod mechanism 1 with two master rods 2, 3 which can be rotated by means of servomotors 4, 5 (see arrows R 1 and R 2 ).
  • Servomotors 4, 5 are connected to the fixed world via motor supports 6, 7.
  • On each of the master rods 2, 3 engage the respective slave rods 8, 9.
  • Master rod 2 and slave rod 8 are mutually connected in freely pivotable manner via a hinge 10.
  • master rod 3 and slave rod 9 are mutually connected in freely pivotable manner via a hinge 11.
  • the position of a head 12 carried by slave rods 8, 9 can be fully controlled by means of controlled driving of servomotors 4, 5.
  • Figure IB shows a rod mechanism 20 with two master rods 21, 22 which are only displaceable in longitudinal direction (see arrows L 1 and L 2 ) by means of linear drives 23, 24.
  • These linear drives 23, 24 are connected to the fixed world via supports 25, 26.
  • Master rods 21, 22 are connected to slave rods 29, 30 via hinges 27, 28.
  • Slave rods 29, 30 carry a head 31, the position of which is determined as a result of operating linear drives 23, 24.
  • Figure 1C shows a rod mechanism 40 which greatly resembles rod mechanism 1 as shown in figure IA.
  • Master rods 41, 42 are driven by two separate motors, of which only one motor 43 can be seen. This is the result of the fact that the motors are placed mutually in line such that only the upper motor 43 is visible in the shown view.
  • this rod mechanism 40 reference is made to the description relating to figure IA.
  • FIG. 2 shows a schematically represented manipulation device 50 according to the present invention.
  • Device 50 is provided with two master rods 51, 52, which master rods 51, 52 are provided with weights 53, 54 which form a balancing mechanism for force compensation.
  • weights 53, 54 which form a balancing mechanism for force compensation.
  • FIGS IA- 1C for a further description of this manipulation device 50.
  • Figure 3 shows a schematically represented manipulation device 60 according to the present invention with master rods 61, 62 which are provided with weights 63, 64, which form a balancing mechanism for force compensation.
  • Manipulation device 60 is however also provided with a balancing mechanism for moment compensation.
  • This balancing mechanism for moment compensation is formed by two rotatable weights 65, 66 which, when rod mechanism 60 is rotated, rotate in an opposite direction as a result of two activating wheels 67, 68 which are connected to master rods 61, 62 and which engage on an inner side of a ring 69 in stationary position.
  • the rod mechanism can thus be compensated in fully dynamic manner such that no (or practically no) resultant forces are exerted by a support 70 on the fixed world as a result of movements of mechanism 60.
  • figure 4 shows a rod assembly 80 corresponding to the rod assembly shown in figure 1C.
  • the drives 81 are however now connected to a central control unit 84 via signal lines 82, 83.
  • Central control unit 84 calculates the desired compensation forces and moments and then controls a separate compensation unit 86 by means of an output signal line 85.
  • This compensation unit 86 is connected to the same fixed world 87 as that to which rod assembly 80 is connected. It is thus possible to achieve that the resultant of the forces exerted by rod assembly 80 and compensation unit 86 is zero (or very small).
  • Compensation unit 86 can be provided with complete compensation means (with mass which can be translated in three directions and rotated in three directions, i.e.

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Manipulator (AREA)
  • Transmission Devices (AREA)
  • Control Of Metal Rolling (AREA)

Abstract

La présente invention a trait à un dispositif pour la manipulation d'objets, plus particulièrement pour la manipulation de composants électroniques, avec un mécanisme à tiges (1, 20, 40, 50, 60, 80), deux actionneurs indépendants (4, 86) et un mécanisme d'équilibrage (53, 54, 63-66, 86) pour la compensation de forces de réaction et/ou des moments de réaction dynamiques. L'invention a également trait à un procédé pour la manipulation d'objets, plus particulièrement pour la manipulation de composants électroniques, mettant en oeuvre un tel dispositif.
PCT/NL2006/000048 2005-01-27 2006-01-26 Mecanisme a cinq barres a moyen d'equilibrage dynamique et procede pour l'equilibrage dynamique d'un mecanisme a cinq barres Ceased WO2006080846A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007553060A JP2008528307A (ja) 2005-01-27 2006-01-26 動的平衡手段を持つ５バー機構と、５バー機構を動的に均衡させるための方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1028138 2005-01-27
NL1028138A NL1028138C2 (nl) 2005-01-27 2005-01-27 Inrichting en werkwijze voor het manipuleren van een object.

Publications (1)

Publication Number Publication Date
WO2006080846A1 true WO2006080846A1 (fr) 2006-08-03

Family

ID=34974959

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/NL2006/000048 Ceased WO2006080846A1 (fr) 2005-01-27 2006-01-26 Mecanisme a cinq barres a moyen d'equilibrage dynamique et procede pour l'equilibrage dynamique d'un mecanisme a cinq barres

Country Status (6)

Country Link
JP (1) JP2008528307A (fr)
KR (1) KR20070102564A (fr)
CN (1) CN101137468A (fr)
NL (1) NL1028138C2 (fr)
TW (1) TW200631883A (fr)
WO (1) WO2006080846A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009030755A1 (de) 2009-06-27 2011-01-05 Fritz Kraft Handhabungsvorrichtung
CN105805252A (zh) * 2016-05-06 2016-07-27 广州市兴世机械制造有限公司 一种双驱动五连杆机构

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100056789A (ko) * 2008-11-20 2010-05-28 주식회사 탑 엔지니어링 반력 상쇄 장치, 그것의 질량체 설정 방법, 그것을 이용한 반력 상쇄 방법 및 그것을 구비한 디스펜서
CN105697703B (zh) * 2016-03-15 2018-04-10 西安电子科技大学 一种全柔顺五杆机构的三稳态实现方法
CN111664233A (zh) * 2019-03-08 2020-09-15 中国科学院长春光学精密机械与物理研究所 自由度可变五连杆-辐条机构

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4712971A (en) * 1985-02-13 1987-12-15 The Charles Stark Draper Laboratory, Inc. Control arm assembly
US20020182036A1 (en) * 2001-06-04 2002-12-05 Applied Materials, Inc. Semiconductor wafer handling robot for linear transfer chamber

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4712971A (en) * 1985-02-13 1987-12-15 The Charles Stark Draper Laboratory, Inc. Control arm assembly
US20020182036A1 (en) * 2001-06-04 2002-12-05 Applied Materials, Inc. Semiconductor wafer handling robot for linear transfer chamber

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
G. ALICI; B. SHIRINZADEH: "Optimum dynamic balancing of planar parallel manipulators", ROBOTICS AND AUTOMATION, 2004. PROCEEDINGS. ICRA '04. 2004 IEEE INTERNATIONAL CONFERENCE ON NEW ORLEANS, LA, USA APRIL 26-MAY 1, 2004, PISCATAWAY, NJ, USA,IEEE, US, vol. 5, 26 April 2004 (2004-04-26), pages 4527 - 4532, XP010768108, ISBN: 0-7803-8232-3 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009030755A1 (de) 2009-06-27 2011-01-05 Fritz Kraft Handhabungsvorrichtung
DE102009030755B4 (de) * 2009-06-27 2013-10-10 Fritz Kraft Handhabungsvorrichtung mit Scherenarm
CN105805252A (zh) * 2016-05-06 2016-07-27 广州市兴世机械制造有限公司 一种双驱动五连杆机构

Also Published As

Publication number Publication date
JP2008528307A (ja) 2008-07-31
NL1028138C2 (nl) 2006-07-31
CN101137468A (zh) 2008-03-05
KR20070102564A (ko) 2007-10-18
TW200631883A (en) 2006-09-16

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