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WO2004089814A3 - Thermal actuator - Google Patents

Thermal actuator Download PDF

Info

Publication number
WO2004089814A3
WO2004089814A3 PCT/CA2004/000528 CA2004000528W WO2004089814A3 WO 2004089814 A3 WO2004089814 A3 WO 2004089814A3 CA 2004000528 W CA2004000528 W CA 2004000528W WO 2004089814 A3 WO2004089814 A3 WO 2004089814A3
Authority
WO
WIPO (PCT)
Prior art keywords
arm
actuator element
flexure
base portion
thermal actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CA2004/000528
Other languages
French (fr)
Other versions
WO2004089814A2 (en
Inventor
Ryan Murray Hickey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lumentum Technology UK Ltd
Original Assignee
Bookham Technology PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bookham Technology PLC filed Critical Bookham Technology PLC
Priority to JP2006504102A priority Critical patent/JP2006522946A/en
Priority to EP04726072A priority patent/EP1615850A2/en
Publication of WO2004089814A2 publication Critical patent/WO2004089814A2/en
Publication of WO2004089814A3 publication Critical patent/WO2004089814A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0024—Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0323—Grooves
    • B81B2203/033—Trenches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H01H2061/008—Micromechanical actuator with a cold and a hot arm, coupled together at one end

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

An asymmetric MEMS thermal actuator device includes a base portion, typically a pair of bond pads, and an actuator element connected to the base portion by a flexure portion. The actuator element has a first arm and a second arm alongside the first arm and spaced from the first arm. The second arm is wider than the first arm so that the actuator element deflects about the flexure element due to differential heating in the first and second arms when an electrical current is passed therethrough. A cut-out portion is provided in the second arm adjacent the first arm so as to increase the spacing therefrom over at least a portion of the second arm. Preferably, a heat sink is also provided laterally adjacent the second arm.
PCT/CA2004/000528 2003-04-08 2004-04-07 Thermal actuator Ceased WO2004089814A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006504102A JP2006522946A (en) 2003-04-08 2004-04-07 Thermal actuator
EP04726072A EP1615850A2 (en) 2003-04-08 2004-04-07 Thermal actuator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32009803P 2003-04-08 2003-04-08
US60/320,098 2003-04-08

Publications (2)

Publication Number Publication Date
WO2004089814A2 WO2004089814A2 (en) 2004-10-21
WO2004089814A3 true WO2004089814A3 (en) 2005-05-19

Family

ID=33158405

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CA2004/000528 Ceased WO2004089814A2 (en) 2003-04-08 2004-04-07 Thermal actuator

Country Status (5)

Country Link
US (1) US7043910B2 (en)
EP (1) EP1615850A2 (en)
JP (1) JP2006522946A (en)
CN (1) CN1768003A (en)
WO (1) WO2004089814A2 (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070096860A1 (en) * 2005-11-02 2007-05-03 Innovative Micro Technology Compact MEMS thermal device and method of manufacture
US7944113B2 (en) * 2006-01-19 2011-05-17 Innovative Micro Technology Hysteretic MEMS thermal device and method of manufacture
US7548145B2 (en) 2006-01-19 2009-06-16 Innovative Micro Technology Hysteretic MEMS thermal device and method of manufacture
GB0610392D0 (en) 2006-05-25 2006-07-05 Univ Durham Electro-mechanical actuator and apparatus incorporating such device
US8120133B2 (en) * 2006-09-11 2012-02-21 Alcatel Lucent Micro-actuator and locking switch
CN1923670B (en) * 2006-09-21 2011-01-05 上海交通大学 Modified SU8 electric heating micro-performer with multi-arc structure for straight line propulsion
US7567011B1 (en) 2007-02-01 2009-07-28 The United States Of America As Represented By The Secretary Of The Navy MEMS linear thermoelectric motor apparatus
US7622783B2 (en) 2007-02-14 2009-11-24 Innovative Micro Technology MEMS thermal actuator and method of manufacture
US20080197964A1 (en) * 2007-02-21 2008-08-21 Simpler Networks Inc. Mems actuators and switches
US7602266B2 (en) * 2007-03-16 2009-10-13 Réseaux MEMS, Société en commandite MEMS actuators and switches
US20100263999A1 (en) * 2007-12-13 2010-10-21 Dimitrios Peroulis Low-cost process-independent rf mems switch
US8531752B2 (en) 2008-01-15 2013-09-10 Jds Uniphase Corporation Pivotable MEMS device
US8230682B1 (en) * 2009-09-24 2012-07-31 The United States Of America As Represented By The Secretary Of The Navy Thermally activated initiator assembly
JP6588082B2 (en) * 2014-04-11 2019-10-09 プレジデント アンド フェローズ オブ ハーバード カレッジ Mass production method for soft machines
US9759263B1 (en) * 2014-11-13 2017-09-12 National Technology & Engineering Solutions Of Sandia, Llc Rotation flexure with temperature controlled modal frequency
US10196259B2 (en) * 2015-12-30 2019-02-05 Mems Drive, Inc. MEMS actuator structures resistant to shock
CN105591021B (en) * 2016-01-13 2018-10-09 福建师范大学 A kind of transparent electro-active material and its transparent electric actuator

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002017339A1 (en) * 2000-08-21 2002-02-28 Jds Uniphase Corporation Switches and switching arrays that use microelectromechanical devices having one or more beam members that are responsive to temperature
US6483419B1 (en) * 2000-09-12 2002-11-19 3M Innovative Properties Company Combination horizontal and vertical thermal actuator
US20030002133A1 (en) * 2001-06-28 2003-01-02 South West Research Institute Bi-directional, single material thermal actuator
US6531947B1 (en) * 2000-09-12 2003-03-11 3M Innovative Properties Company Direct acting vertical thermal actuator with controlled bending

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4688885A (en) * 1985-05-28 1987-08-25 American Telephone And Telegraph Company, At&T Bell Laboratories Lightwave component package
US5726480A (en) * 1995-01-27 1998-03-10 The Regents Of The University Of California Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same
US5962949A (en) * 1996-12-16 1999-10-05 Mcnc Microelectromechanical positioning apparatus
US6070656A (en) * 1998-12-09 2000-06-06 The Aerospace Corporation Microelectronic substrate active thermal cooling wick

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002017339A1 (en) * 2000-08-21 2002-02-28 Jds Uniphase Corporation Switches and switching arrays that use microelectromechanical devices having one or more beam members that are responsive to temperature
US6483419B1 (en) * 2000-09-12 2002-11-19 3M Innovative Properties Company Combination horizontal and vertical thermal actuator
US6531947B1 (en) * 2000-09-12 2003-03-11 3M Innovative Properties Company Direct acting vertical thermal actuator with controlled bending
US20030002133A1 (en) * 2001-06-28 2003-01-02 South West Research Institute Bi-directional, single material thermal actuator

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
FIELD L A ET AL: "Micromachined 1x2 Optical Fiber Switch", 8TH INTERNATIONAL CONFERENCE ON SOLID STATE SENSORS AND ACTUATORS, vol. 1, 25 June 1995 (1995-06-25), STOCKHOLM, pages 344 - 347, XP010304879 *
KOLESAR E S ET AL: "Single- and double-hot arm asymmetrical polysilicon surface micromachined electrothermal microactuators applied to realize a microengine", PREPARATION AND CHARACTERIZATION, ELSEVIER SEQUOIA, NL, vol. 420-421, 2 December 2002 (2002-12-02), pages 530 - 538, XP004397900, ISSN: 0040-6090 *
KO-MIN LIAO ET AL: "A novel electro-thermally driven Bi-directional microactuator", MICROMECHATRONICS AND HUMAN SCIENCE, 2002. MHS 2002. PROCEEDINGS OF 2002 INTERNATIONAL SYMPOSIUM ON OCT. 20-23, 2002, PISCATAWAY, NJ, USA,IEEE, 20 October 2002 (2002-10-20), pages 267 - 274, XP010616788, ISBN: 0-7803-7611-0 *

Also Published As

Publication number Publication date
JP2006522946A (en) 2006-10-05
CN1768003A (en) 2006-05-03
WO2004089814A2 (en) 2004-10-21
US7043910B2 (en) 2006-05-16
US20040261412A1 (en) 2004-12-30
EP1615850A2 (en) 2006-01-18

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